Chemical Vapour Deposition

Transcription

1 A Global Initiative of Academic Networks (GIAN) A Short Term Course on Chemical Vapour Deposition Sponsored by Ministry of Human Resource Development (MHRD), Govt. of India Under the Scheme 'GIAN' (13 th to 20 th Department of Technology, University College of Technology, Osmania University, Hyderabad, Telangana Overview This course presents a detailed understanding about science and technology of chemical vapor deposition and related methods and reactors used for making thin films, single crystals, powders. This process is popular for semiconductor materials manufacturing and manufacturing of materials for addressing global challenges associated with energy/environment nexus, energy demand, generation and storage. Focus on practical applications of CVD reactors, processes, electronic & amorphous materials The course educates and trains graduates with the academic and practical background necessary to function as chemical engineering professionals in several modern, state of the art industrial enterprises such as electronics manufacturing, advanced materials, energy, nanotechnology and bio-medical engineering. The course provides our graduates with the foundation for a successful career and enables life-long learning. Applications of chemical kinetics & transport processes to vapor phase materials synthesis Textbooks: The following book is suggested as the text book but class notes, chapters from several books and handouts will also be used. Chemically Reacting Flow Theory and Practice by R.J. Kee, M.E. Coltrin and P. Glarborg, Published by John Wiley and Sons, NJ, USA COURSE OBJECTIVES Following this course students will: i. Understand the concepts involved in the deposition of thin and thick films using various Chemical Vapor Deposition (CVD) methods. ii. Apply chemical kinetics (gas phase, gas-solid and plasma), thermodynamics and transport concepts to understand and design the chemical vapor deposition process. iii. Understand the nucleation and growth aspects of the vapor grown films, thin and thick films science.

2 Day 1 14 th Day 2 15 th 16 th Day 3 17 th Day 4 18 th Day 5 19 th Day 6 20 th Day 7 21 st 1 h Registration and Inauguration VVBR 2 h Participants Introduction and Course description +VVBR 2 h Overall review of various CVD systems & Vacuum Science and Technology An introduction of CVD systems and industrial applications will be discussed. Also importance of Vacuum Science and Technology for future research will be addressed. Thermodynamic principles involved with gas phase and gassolid systems in CVD reactors 2 h Computer Modeling Exercise 1: Equilibrium analysis of gas phase reactions and gas-solid reactions Sun Day (Holiday) 2 h Chemical kinetics of gas phase and gas-solid reactions 2 h Computer Modeling Exercise 2: Sensitivity and steady state analysis using CHEMKIN III 2 h Plasma Physics & Chemistry and Applications of Plasmas 2 h Computer Modeling Exercise 3: Plasma chemistry Transport considerations in CVD reactors Computer Modeling Exercise 4: Modeling of a CVD reactor for concentration and deposition profiles Deposition Science and Technology Single crystal surfaces and Epitaxy Nucleation and Growth Texturing of polycrystalline films Role of defects during growth and on the film properties Thin Films Science, Nanowires & Research Opportunities Computer Modeling Exercise 5: Monte-Carlo Simulation of Crystal Growth Who Should Attend 1h Valedictory, student feedback and wrap up Practicing Engineers, Researchers from Industries, government organizations including R&D laboratories. Students at all levels (UG/ PG/ PhD) or Faculty from reputed academic institutions and technical institutions.

3 Fees How To Register The participation fees for taking the course is as follows: Participants from Abroad : US $500 Industry/ Research Organizations: Rs. 6,000 /- Faculty from Academic Institutions: Rs. 3,000 /- Student Participants: Rs. 1,000/- The above fee includes all instructional materials, tutorials, assignments and internet facility. On request, accommodation will be provided for few participants (on first come first basis) in the campus on payment. Stage1: Web (Portal) Registration: Visit GIAN Website at the link: and create login user ID and Password. Fill up blank registration form and do web registration by paying Rs. 500/- on line through Net Banking/ Debit/ Credit Card. This provides the user with life time registration to enroll in any no. of GIAN courses offered. Stage2: Course Registration (Through GIAN Portal): Log in to the GIAN portal with the user ID and Password created. Click on Course Registration option given at the top of the registration form. Select the Course title Chemical Vapour Deposition from the list and click on Save option. Confirm your registration by Clicking on Confirm Course. Only Selected Candidates will be intimated through by the Course Coordinator. They have to remit the necessary course fee in the form of DD drawn in favor of PRINCIPAL UCT OU payable at SBI, University College of Technology, Osmania University, Hyderabad OR through NEFT/RTGS: Name of the Beneficiary: Principal, University College of Technology, OU Account Name: Principal, College of Technology, OU Name of The Bank: State Bank of India, Osmania University, Hyderabad Beneficiary A/C No: IFSC Code: SBIN Course Faculty () Mahendra Sunkara: Dr. Sunkara, is the Director of the Conn Center, where he directs the Center s research themes, growth, and operations. He received his doctorate in Chemical Engineering in 1993 from Case Western Reserve University in Cleveland, OH, where he focused on Monte-Carlo simulation of diamond nucleation and growth. He holds an in Chemical Engineering from Clarkson University in Potsdam, NY (1988) and a B.Tech in Chemical Engineering from Andhra University in Waltair, India (1986). He served as Project Engineer at Faraday Technology Inc. in Dayton OH ( ), focusing on applied

4 electrochemical engineering technology, before joining the faculty at the Univ. of Louisville s Speed School of Engineering Department of Chemical Engineering. He was granted tenure in 2002, promoted to full professorship in 2006, and appointed as University Scholar in 2010 and as Distinguished University Scholar in He was the Founding Director of the Institute of Advanced Materials and Renewable Energy, and was appointed as the Director of the Conn Center in Mahendra is the author/co-author of over 100 original research papers and four book chapters and holds 10 patents in the areas of nanowires and other nanoscale materials toward energy conversion and storage applications. With M. Meyyappan of NASA Ames, he co-wrote the book, Inorganic Nanowires: Applications, Properties, and Characterization. Among his awards are a NSF CAREER Award, the IIChE United Phosphorus CHEMCON Award, the 2009 University of Louisville President s Distinguished Faculty Award in Research and Scholarship, the University Scholar appointment, a Ralph E. Powe Junior Faculty Award in Engineering in 1999, and Louisville Magazine s Top 25 Young Guns distinction. He serves as a regular reviewer for numerous journals including Journal of the American Society, Advanced Materials, Nanotechnology, and Applied Physics Letters and for federal funding agencies including NSF, DOE, and the EPA. He serves on the editorial boards of Nanotechnology and Nanoenergy journals. He also serves on boards of Karuturi Global Ltd (India/Ethiopia/Kenya) and Chemener Batteries Ltd (India). He founded a startup, Advanced Energy Materials, LLC (USA) in Mahendra s primary research is in the development of such renewable energy and energy efficiency technologies as solar cells, lithium ion batteries, electrochromics, production of hydrogen from water, and process development for growing large crystals of diamond, gallium nitride, and bulk quantities of nanowires. Dr. VV Basava Rao (VVBR): Course Coordinator Dr. V.Venkata Basava Rao obtained M.Tech (1988) and Ph D (1991) in Chemical Engineering from IIT-Kharagpur & B.Tech (1986) in Chemical Engineering from Andhra University, Visakhapatnam. He worked in M/S. Bharat Dynamics Limited, Bhanur ( ) for 4 years and joined JNTU College of Engineering, Anatapur as Assistant Professor. After working two and half years in JNTU, he moved to University College of Technology, Osmania University (in 1997) as Associate Professor and subsequently he got promoted as Professor in Till then he has been serving in teaching and research in the college and university level. He has been working in various capacities like Dean, Faculty of Technology, OU, Head, Department of Technology, Vice Principal, UCT, OU, Chairman, BOS Technology, Officer incharge of Examinations etc. He is also Coordinator, TEQIP and

5 Principal Investigator for CoE under TEQIP. He is presently Dean, Faculty of Pharmacy and Head, Department of Pharmacy, OU. He has published 25 Papers in national and 28 Papers in international very reputed Journals and attended 33 seminars and 08 international conferences to present his Research Work. To his contributions he was honored with Young Scientist Award by Andhra Pradesh Council for Science and Technology (APCOST) during He was awarded 5th position out the TEN as The Best Professors by student community in the Survey conducted by M/s. 24/7 Customer in Education for the year In CHEMCON 2009, he received The Hindustan Lever s The Outstanding Chemical Engineer of the Year 2009 (under 45 years) Biennial Award. He visited United States of America, Canada, Germany and Singapore for collaborative research work. Process Intensification, Circulating Fluidized Bed Technology, Reactive Separations and Waste Water Treatment are his interesting research areas. He completed two AICTE projects and one DST-PURSE project. At Present, he is actively working as Principal Investigator to establish Centre of Excellence Laboratory in Process Intensification under TEQIP. He supervised 10 Ph Ds and guided 45 M. Tech theses. For further details, contact Course Coordinator Dr. V Venkata Basava Rao Professor, Chemical Engineering Head, Department of Technology University College of Technology (Autonomous) Osmania University, Hyderabad , Telangana, India. Contact profbasavarao_1964@yahoo.com Phone: (M)