MECH 466. Micro Electromechanical Systems. Laboratory #1: Testing of Electrostatic Microactuators
|
|
- Theodora Reed
- 5 years ago
- Views:
Transcription
1 MECH 466 Micro Electromechanical Systems Laboratory #1: Testing of Electrostatic Microactuators Department of Mechanical Engineering, University of Victoria N. Dechev, 2016, University of Victoria Page 1 of 8
2 Report: The laboratory report must be in the following format: (i) (ii) (iii) (iv) (v) Title Page A. Include your name, student number, date of lab, etc Objective Data A. Include data and images you collected. B. Comment on any Sources of Error that may have influenced the data, or the collection of the data. Discussion A. Compare and contrast the experimental results in comparison to the theoretical/analytical results. B. Include answers to the questions that pertain to the experiments, as listed in the Lab Write-up section. Conclusion Please organize the laboratory report into the five divisions indicated above (Title Page, Objective, Data/Images, Discussion (with questions answered), and Conclusion). The report should be a maximum of 8 pages (double spaced text), including figures, and data. Appendices may be added as extra pages. N. Dechev, 2016, University of Victoria Page 2 of 8
3 Laboratory #1: Testing of Electrostatic Microactuators Purpose: This lab will investigate the operation of MEMS-based micro-scale electrostatic actuators. Additionally, the lab will familiarize the student with the testing of MEMS devices using a motorized micromanipulator system and a digital microscope system, as shown in Appendix B. Introduction: There are numerous MEMS sensors and actuators that are based on the electrostatic comb device. These are devices that operate on the principle of electrostatic charge, and the forces that arise from this charge. They can alternatively sense motion or produce motion. For example, an accelerometer senor can sense motion when a proof mass supported by flexible beams, experiences an acceleration that causes a change in the spacing between a set of interdigitated fingers. Alternatively, an electrostatic comb-drive can force a proof mass to move toward or away from a set of interdigitated fingers that are attracted or repulsed by each other, respectively. The driving voltage applied to electrostatic actuators is generally large (50V to 200V), as compared to conventional electronic parts/circuits. In this laboratory, we will apply various voltages to the device, and examine the response and behavior of the device. Procedure: Setup: (1) The TA/technician will mount a MEMS chip (attached to an aluminum disc) onto the rotational worktable (alpha-stage) of the micromanipulator. (2) The TA/technician will mount a 5 pin-probe system (shown in Appendix C-1) to the manual x, y, z probe-stage (shown in Appendix B-1). (3) Using the micromanipulator system (microscope, robot and control software) the student will locate the electrostatic actuator that is to be tested. (4) Locate the central tip of the 5 pin-probe using the manual x, y, z microscope-stage. (5) Carefully place the central probe tip (pin with the green wire coming out) onto the central pad of the electrostatic actuator. Ensure that the other probe tips are touching the ground pad of the electrostatic actuator. (6) The electrostatic actuator is to be driven using various voltages, from a variable voltage DC power supply (VVDCPS, shown in Appendix C-2). Simply dial in the desired voltage, and press the momentary switch. Check the actual voltage using a multimeter, since the dial only shows approximate voltage. The VVDCPS will on deliver the voltage while the momentary switch is held down. The TA/technician will instruct you in the safe use of the VVDCPS. (7) Connect the appropriate wires from the 5 pin-probe (center pin and left or right pin) to the VVDCPS, and conduct the experiment as explained next. Experiment: Electrostatic Actuator Characterization Two different geometries of electrostatic actuators can be tested. The first electrostatic actuator uses 250um long beams, and the second uses 275 um long beams. Attempt the experiment with the 275 um long device first. (1) Test the electrostatic actuator using VDC, to ensure that the device appears to operate properly, and is not stuck down due to stiction effects. (2) With the power off, measure the electrical resistance of the electrostatic actuator. You may N. Dechev, 2016, University of Victoria Page 3 of 8
4 use the multi-meter to do this. The measurement should be infinite, to indicate that there is no short circuit between the fingers of each comb. (3) The VVDCPS can provide voltages from 0 VDC to 200 VDC. (4) Begin the experiment with the 30 VDC value. (5) Apply the voltage to the electrostatic device, by dialing in the desired voltage on the VVDCPS and pressing the momentary switch. Use a multi-meter to verify the voltage (prior to application), and record the value applied. (6) Using the video capture software, capture an image of the resulting displacement of the electrostatic actuator, while the voltage is applied. (7) Increment the voltage by 10 VDC. (8) Repeat step (5 to 7) for a range of voltage values from 30 VDC up to 150 Volts VDC. Record all data and images. (9) Locate an electrostatic actuator with 250 um long beams, and repeat Steps (1 to 8). Laboratory Write-up: Please answer the following questions, and include them in the Discussion Section of your laboratory report. You may use the supplementary notes in the next section, to help you answer these questions. (Q1) Prepare a graph of the experimental values for applied voltage vs. displacement for the electrostatic actuators. (Q2) The diagrams of the electrostatic actuators are provided in Appendix A. Determine the mechanical stiffness, km(total), for each of the two devices. (Q3) Using the experimental data of deflection vs. applied voltage, estimate the fringe capacitance that causes the electrostatic actuator to deflect (for each device). (Q4) Using the diagram of Appendix A, determine the normal capacitance of each device. (Q5) Based on your results for (Q3-Q4), estimate the total capacitance of each device. (Q6) Discuss any other observations you made during the experiment, and suggest possible causes. (Q7) Discuss any sources of error. Supplementary Notes: Estimation of fringe capacitance: - Define a relationship between d (displacement) and V (voltage). - We know: F = kδ, where: k = k!(!"!#$) from (Q2). - Recall from Lecture 6, F = U x = 1 2 CV! x Therefore, since voltage does not vary with x, we can write: N. Dechev, 2016, University of Victoria Page 4 of 8
5 F = 1 2 C x V! This is solved in the lecture notes as: F = εav! 2d! = CV! 2d We can see that the force must be entirely balanced by the mechanical force due to the structure. Also, the longitudinal force must only be due to the fringe capacitance (as the normal capacitance will not contribute to longitudinal force), therefore: F =!!!!,!! and hence: C! =!!"!!! We have a plot of displacement vs. applied voltage, therefore we know the corresponding value of d, for any given V. Also, we know the value of k, since we can compute this from the geometry. Therefore, C f, can be determined for any value of d. References: [1] D. Koester, A. Cowen, R. Mahadevan, M. Stonefield, and B. Hardy, PolyMUMPs Design Handbook Revision 9.0, MEMSCAP, MEMS Business Unit (CRONOS), Research Triangle Park, N.C., USA, Appendix A: Correct as of Summer 2016: Figure A-0: Overall Imageof Electrostatic Actuator. L beam = 250 um or 275 um. N. Dechev, 2016, University of Victoria Page 5 of 8
6 Figure A-1: Flexible beams (close-up). The beams are 2 um wide, by 2 um thick (out of page). Figure A-2: Scale diagram of interdigitated fingers (close-up). N. Dechev, 2016, University of Victoria Page 6 of 8
7 Appendix B: Figure B-1: Image of micromanipulator system, with main components labeled. N. Dechev, 2016, University of Victoria Page 7 of 8
8 MECH 466 Microelectromechanical Systems Appendix C: Figure C-1: Image of PicoProbe (GBB Industries, Naples, FL, Model MCW ). 5-pin probe with pins separated by 200 microns center to center. Pin Position Far Left Left Center Right Far Right Cable Color Brown White-Green Green White-Orange Orange Pin # Figure C-2: Image of Variable Voltage DC Power Supply (0 to 200VDC, 100 ua max). N. Dechev, 2016, University of Victoria Page 8 of 8
MECH 466. Micro Electromechanical Systems. Laboratory Manual Laboratory #3: Stiction of MEMS and Strength of MEMS Materials
MECH 466 Micro Electromechanical Systems Laboratory Manual Laboratory #: Stiction of MEMS and Strength of MEMS Materials Department of Mechanical Engineering, University of Victoria N. Dechev, 2011, University
More informationENSC387: Introduction to Electromechanical Sensors and Actuators LAB 3: USING STRAIN GAUGES TO FIND POISSON S RATIO AND YOUNG S MODULUS
ENSC387: Introduction to Electromechanical Sensors and Actuators LAB 3: USING STRAIN GAUGES TO FIND POISSON S RATIO AND YOUNG S MODULUS 1 Introduction... 3 2 Objective... 3 3 Supplies... 3 4 Theory...
More informationExercise 1: Capacitors
Capacitance AC 1 Fundamentals Exercise 1: Capacitors EXERCISE OBJECTIVE When you have completed this exercise, you will be able to describe the effect a capacitor has on dc and ac circuits by using measured
More informationLecture 13: Magnetic Sensors & Actuators
MECH 466 Microelectromechanical Systems University of Victoria Dept. of Mechanical Engineering Lecture 13: Magnetic Sensors & Actuators 1 Magnetic Fields Magnetic Dipoles Magnetization Hysteresis Curve
More informationPHY222 Lab 2 - Electric Fields Mapping the Potential Curves and Field Lines of an Electric Dipole
Print Your Name PHY222 Lab 2 - Electric Fields Mapping the Potential Curves and Field Lines of an Electric Dipole Print Your Partners' Names Instructions January 23, 2015 Before lab, read the Introduction,
More informationPHYSICS 221 LAB #3: ELECTROSTATICS
Name: Partners: PHYSICS 221 LAB #3: ELECTROSTATICS The picture above shows several lines that each have a constant electric potential (equipotential lines) due to a person s beating heart. At the instant
More informationMapping the Electric Field and Equipotential Lines. Multimeter Pushpins Connecting wires
Circle Your Lab Day: M T W Th F Name: Lab Partner: Lab Partner: Mapping the Electric Field and Equipotential Lines. Equipment: Cork board Conductive paper DC Power supply Multimeter Pushpins Connecting
More informationDemonstration 1: Faraday Ice Pail and Charge Production
Osservazioni e Misure Lezioni I e II Laboratorio di Elettromagnetismo Demonstration 1: Faraday Ice Pail and Charge Production Equipment Required: Electrometer (ES-9078) Charge Producers (ES-9057B) Earth
More informationPrepare for this experiment!
Notes on Experiment #8 Theorems of Linear Networks Prepare for this experiment! If you prepare, you can finish in 90 minutes. If you do not prepare, you will not finish even half of this experiment. So,
More informationLab 4: The Classical Hall Effect
Lab 4: The Classical Hall Effect Background A particle with charge q moving with a velocity v in a uniform magnetic field B will experience a force F, F = q( v B ) (1) 1 Introduction Understanding the
More informationDESIGN AND SIMULATION OF ACCELEROMETER SPRINGS
DESIGN AND SIMULATION OF ACCELEROMETER SPRINGS Marin Hristov Hristov 1, Kiril Toshkov Toshev 1, Krasimir Hristov Denishev 1, Vladimir Emilov Grozdanov 2, Dobromir Georgiev Gaydazhiev 2 1 Department of
More informationEquipotential and Electric Field Mapping
Experiment 2 Equipotential and Electric Field Mapping 2.1 Objectives 1. Determine the lines of constant electric potential for two simple configurations of oppositely charged conductors. 2. Determine the
More informationCHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS
61 CHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS 4.1 INTRODUCTION The analysis of cantilever beams of small dimensions taking into the effect of fringing fields is studied and
More informationHerefordshire College of Technology Center Number Student:
Herefordshire College of Technology Center Number 024150 Course: : BTEC Level 3 Subsidiary Diploma in Engineering / Diploma in Electrical/Electronic Engineering Student: Unit/s: 6 Electrical & Electronic
More informationDesigning Information Devices and Systems I Spring 2017 Babak Ayazifar, Vladimir Stojanovic Midterm 2. Exam location: 145 Dwinelle, last SID# 2
EECS 16A Designing Information Devices and Systems I Spring 2017 Babak Ayazifar, Vladimir Stojanovic Midterm 2 Exam location: 145 Dwinelle, last SID# 2 PRINT your student ID: PRINT AND SIGN your name:,
More informationElectric Fields and Potentials
Electric Fields and Potentials Please do not write on the conducting sheet, and do not use more than 5 volts from the power supply. Introduction The force between electric charges is intriguing. Why are
More informationOptimizing micromechanical force detectors for measuring. magnetization at high magnetic fields
Abstract Optimizing micromechanical force detectors for measuring magnetization at high magnetic fields Jeremy Paster University of Florida July 30, 2008 MEMS devices prove to be advantageous in magnetometry.
More informationresistance in the circuit. When voltage and current values are known, apply Ohm s law to determine circuit resistance. R = E/I ( )
DC Fundamentals Ohm s Law Exercise 1: Ohm s Law Circuit Resistance EXERCISE OBJECTIVE When you have completed this exercise, you will be able to determine resistance by using Ohm s law. You will verify
More informationIn this experiment, the concept of electric field will be developed by
Physics Equipotential Lines and Electric Fields Plotting the Electric Field PURPOSE MATERIALS 5 alligator clip leads 2 batteries, 9 V 2 binder clips, large computer In this experiment, the concept of electric
More informationEquipotential Lines and Electric Fields
Physics Equipotential Lines and Electric Fields Plotting the Electric Field MATERIALS AND RESOURCES EACH GROUP 5 alligator clip leads 2 batteries, 9 V 2 binder clips, large computer LabQuest multimeter,
More informationGeneral Physics II Lab EM2 Capacitance and Electrostatic Energy
Purpose General Physics II Lab General Physics II Lab EM2 Capacitance and Electrostatic Energy In this experiment, you will examine the relationship between charge, voltage and capacitance of a parallel
More informationAP Physics Study Guide Chapter 17 Electric Potential and Energy Name. Circle the vector quantities below and underline the scalar quantities below
AP Physics Study Guide Chapter 17 Electric Potential and Energy Name Circle the vector quantities below and underline the scalar quantities below electric potential electric field electric potential energy
More informationScience Olympiad Circuit Lab
Science Olympiad Circuit Lab Key Concepts Circuit Lab Overview Circuit Elements & Tools Basic Relationships (I, V, R, P) Resistor Network Configurations (Series & Parallel) Kirchhoff s Laws Examples Glossary
More informationIntroduction to Actuators PK
Introduction to Actuators Primary Knowledge Participant Guide Description and Estimated Time to Complete This learning module is one of three SCME modules that discuss the types of components found in
More information7.Piezoelectric, Accelerometer and Laser Sensors
7.Piezoelectric, Accelerometer and Laser Sensors 7.1 Piezoelectric sensors: (Silva p.253) Piezoelectric materials such as lead-zirconate-titanate (PZT) can generate electrical charge and potential difference
More informationPHY 112L Activity 1 Electric Charges, Potentials, and Fields
PHY 112L Activity 1 Electric Charges, Potentials, and Fields Name: Section: ID #: Date: Lab Partners: TA initials: Objectives 1. Understand the basic properties, such as the magnitude and force, of electric
More informationObjectives. Fundamentals of Dynamics: Module 9 : Robot Dynamics & controls. Lecture 31 : Robot dynamics equation (LE & NE methods) and examples
\ Module 9 : Robot Dynamics & controls Lecture 31 : Robot dynamics equation (LE & NE methods) and examples Objectives In this course you will learn the following Fundamentals of Dynamics Coriolis component
More informationCHARGED PARTICLES IN FIELDS
The electron beam used to study motion of charged particles in electric and/or magnetic fields. CHARGED PARTICLES IN FIELDS Physics 41/61 Fall 01 1 Introduction The precise control of charged particles
More informationElectric Field Around a Conductor
66 Electric Field Around a Conductor Equipment List Qty Items Part Numbers 1 Voltage Sensor CI-6503 1 Equipotential and Field Mapper Kit PK-9023 1 Power Supply, 15 VDC SE-9720 1 Silver (nonconductive)
More informationDESIGN AND EXPERIMENTAL EVALUATION OF AN ELECTROSTATIC MICRO-GRIPPING SYSTEM
DESIGN AND EXPERIMENTAL EVALUATION OF AN ELECTROSTATIC MICRO-GRIPPING SYSTEM Defeng Lang, Marcel Tichem 3mE, dep. PME, section PMA, Delfi Universiv of Technology Abstract: Key words: The paper describes
More informationCircular Motion and Centripetal Force
[For International Campus Lab ONLY] Objective Measure the centripetal force with the radius, mass, and speed of a particle in uniform circular motion. Theory ----------------------------- Reference --------------------------
More informationEE C245 - ME C218 Introduction to MEMS Design Fall Today s Lecture
EE C45 - ME C18 Introduction to MEMS Design Fall 003 Roger Howe and Thara Srinivasan Lecture 11 Electrostatic Actuators II Today s Lecture Linear (vs. displacement) electrostatic actuation: vary overlap
More informationMAPPING ELECTRIC FIELD LINES FOR VARIOUS CHARGED OBJECTS
MAPPING ELECTRIC FIELD LINES FOR VARIOUS CHARGED OBJECTS Apparatus: DC Power Supply (~20V), Voltmeter w/probes, shallow plastic container with grid on bottom, electrical wires, two alligator clips, two
More informationPrepare for this experiment!
Notes on Experiment #8 Theorems of Linear Networks Prepare for this experiment! If you prepare, you can finish in 90 minutes. If you do not prepare, you will not finish even half of this experiment. So,
More informationElectric Fields and Potentials
Electric Fields and Potentials INTRODUCTION Physicists use the concept of a field to explain the interaction of particles or bodies through space, i.e., the action-at-a-distance force between two bodies
More informationTechnical Report PZT-Silicon Cantilever Benders
Radiant Technologies, Inc. 2021 Girard SE Albuquerque, NM 876 Tel: 505-842-8007 Fax: 505-842-0366 Technical Report PZT-Silicon Cantilever Benders Subject: Displacement Measurements of Silicon Cantilevers
More informationEXPERIMENT 9 Superconductivity & Ohm s Law
Name: Date: Course number: MAKE SURE YOUR TA OR TI STAMPS EVERY PAGE BEFORE YOU START! Lab section: Partner's name(s): Grade: EXPERIMENT 9 Superconductivity & Ohm s Law 0. Pre-Laboratory Work [2 pts] 1.
More informationUpdated: Page 1 of 6
MASTER SYLLABUS 2018-2019 A. Academic Division: Business, Industry, and Technology B. Discipline: Electronic Engineering Technology C. Course Number and Title: ELET1510 DC Electricity D. Course Coordinator:
More informationLab 8: Magnetic Fields
Lab 8: Magnetic Fields Name: Group Members: Date: TA s Name: Objectives: To measure and understand the magnetic field of a bar magnet. To measure and understand the magnetic field of an electromagnet,
More informationExperiment A4 Sensor Calibration Procedure
Experiment A4 Sensor Calibration Procedure Deliverables: Checked lab notebook, Brief technical memo Safety Note: Heat gloves and lab coats must be worn when dealing with boiling water. Open-toed shoes
More informationStudy of Resistance Components
Study of Resistance Components Purpose: The purpose of this exercise is to apply fundamental electrical circuit concepts to determine the response of electrical components subjected to a mechanical input
More informationNotebook Circuits With Metering. 22 February July 2009
Title: Original: Revision: Authors: Appropriate Level: Abstract: Time Required: NY Standards Met: 22 February 2007 14 July 2009 Notebook Circuits With Metering Jim Overhiser, Monica Plisch, and Julie Nucci
More informationb. The displacement of the mass due to a constant acceleration a is x=
EE147/247A Final, Fall 2013 Page 1 /35 2 /55 NO CALCULATORS, CELL PHONES, or other electronics allowed. Show your work, and put final answers in the boxes provided. Use proper units in all answers. 1.
More informationEE 241 Experiment #5: TERMINAL CHARACTERISTICS OF LINEAR & NONLINEAR RESISTORS 1
EE 241 Experiment #5: TERMINA CHARACTERISTICS OF INEAR & NONINEAR RESISTORS 1 PURPOSE: To experimentally determine some of the important characteristics of common linear and non-linear resistors. To study
More informationPhysicsAndMathsTutor.com
Electricity May 02 1. The graphs show the variation with potential difference V of the current I for three circuit elements. PhysicsAndMathsTutor.com When the four lamps are connected as shown in diagram
More informationThese notes will be your guide for this investigation. These notes cover the lessons, key concepts, and reference material.
Overview These notes will be your guide for this investigation. These notes cover the lessons, key concepts, and reference material. Glossary Force Power Work Current Voltage Resistance Direct Current
More informationElectric Deflection of Electrons
Electric Deflection of Electrons Objective The purpose of this experiment is to observe that the spacial deflection of an electron in a cathode ray tube is directly proportional to the deflection potential.
More informationEE C245 / ME C218 INTRODUCTION TO MEMS DESIGN FALL 2011 C. Nguyen PROBLEM SET #7. Table 1: Gyroscope Modeling Parameters
Issued: Wednesday, Nov. 23, 2011. PROBLEM SET #7 Due (at 7 p.m.): Thursday, Dec. 8, 2011, in the EE C245 HW box in 240 Cory. 1. Gyroscopes are inertial sensors that measure rotation rate, which is an extremely
More informationTransducers. Today: Electrostatic Capacitive. EEL5225: Principles of MEMS Transducers (Fall 2003) Instructor: Dr. Hui-Kai Xie
EEL55: Principles of MEMS Transducers (Fall 3) Instructor: Dr. Hui-Kai Xie Last lecture Piezoresistive Pressure sensor Transducers Today: Electrostatic Capacitive Reading: Senturia, Chapter 6, pp. 15-138
More informationEquipotential and Electric Field Mapping
Experiment 1 Equipotential and Electric Field Mapping 1.1 Objectives 1. Determine the lines of constant electric potential for two simple configurations of oppositely charged conductors. 2. Determine the
More informationExperiment A11 Chaotic Double Pendulum Procedure
AME 21216: Lab I Fall 2017 Experiment A11 Chaotic Double Pendulum Procedure Deliverables: Checked lab notebook, plots with captions Background Measuring and controlling the angular position and velocity
More informationPHY132 Practicals Week 6 Student Guide
PHY132 Practicals Week 6 Student Guide Concepts of this Module Electric Potential Electric Field Background A field is a function, f (x,y,z), that assigns a value to every point in space (or some region
More information( ) ( ) = q o. T 12 = τ ln 2. RC Circuits. 1 e t τ. q t
Objectives: To explore the charging and discharging cycles of RC circuits with differing amounts of resistance and/or capacitance.. Reading: Resnick, Halliday & Walker, 8th Ed. Section. 27-9 Apparatus:
More informationDesign of a MEMS Capacitive Comb-drive Accelerometer
Design of a MEMS Capacitive Comb-drive Accelerometer Tolga Kaya* 1, Behrouz Shiari 2, Kevin Petsch 1 and David Yates 2 1 Central Michigan University, 2 University of Michigan * kaya2t@cmich.edu Abstract:
More informationInstitute for Electron Microscopy and Nanoanalysis Graz Centre for Electron Microscopy
Institute for Electron Microscopy and Nanoanalysis Graz Centre for Electron Microscopy Micromechanics Ass.Prof. Priv.-Doz. DI Dr. Harald Plank a,b a Institute of Electron Microscopy and Nanoanalysis, Graz
More informationCoulomb Law. Purpose In this lab you will use the Coulomb Torsion Balance to show the inverse squared law for electrostatic force between charges.
Coulomb Law Purpose In this lab you will use the Coulomb Torsion Balance to show the inverse squared law for electrostatic force between charges. Equipment Coulomb Balance and accessories, kilovolt power
More informationDecember 1999 FINAL TECHNICAL REPORT 1 Mar Mar 98
REPORT DOCUMENTATION PAGE AFRL-SR- BL_TR " Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instruct the collection
More informationMidterm 2 PROBLEM POINTS MAX
Midterm 2 PROBLEM POINTS MAX 1 30 2 24 3 15 4 45 5 36 1 Personally, I liked the University; they gave us money and facilities, we didn't have to produce anything. You've never been out of college. You
More informationLab E3: The Wheatstone Bridge
E3.1 Lab E3: The Wheatstone Bridge Introduction The Wheatstone bridge is a circuit used to compare an unknown resistance with a known resistance. The bridge is commonly used in control circuits. For instance,
More informationLab 1: Electric Field Measurements
My Name Lab Partner Name Phys 40 Lab Section Lab 1: Electric Field Measurements Objective: In this lab we measured the electric potential and electric field produced by applying a positive voltage to the
More informationFig. 1. Two common types of van der Pauw samples: clover leaf and square. Each sample has four symmetrical electrical contacts.
15 2. Basic Electrical Parameters of Semiconductors: Sheet Resistivity, Resistivity and Conduction Type 2.1 Objectives 1. Familiarizing with experimental techniques used for the measurements of electrical
More informationTransduction Based on Changes in the Energy Stored in an Electrical Field
Lecture 6- Transduction Based on Changes in the Energy Stored in an Electrical Field Actuator Examples Microgrippers Normal force driving In-plane force driving» Comb-drive device F = εav d 1 ε oε F rwv
More informationEE301 RESISTANCE AND OHM S LAW
Learning Objectives a. Describe the concept of resistance b. Use Ohm s law to calculate current, voltage, and resistance values in a circuit c. Discuss the difference between an open circuit and a short
More informationEquipotentials and Electric Fields
Equipotentials and Electric Fields PURPOSE In this lab, we will investigate the relationship between the equipotential surfaces and electric field lines in the region around several different electrode
More informationDesign and Simulation of Comb Drive Capacitive Accelerometer by Using MEMS Intellisuite Design Tool
Design and Simulation of Comb Drive Capacitive Accelerometer by Using MEMS Intellisuite Design Tool Gireesh K C 1, Harisha M 2, Karthick Raj M 3, Karthikkumar M 4, Thenmoli M 5 UG Students, Department
More informationLab 3: Electric Field Mapping Lab
Lab 3: Electric Field Mapping Lab Last updated 9/14/06 Lab Type: Cookbook/Quantitative Concepts Electrostatic Fields Equi-potentials Objectives Our goal in this exercise is to map the electrostatic equi-potential
More informationReview of Ohm's Law: The potential drop across a resistor is given by Ohm's Law: V= IR where I is the current and R is the resistance.
DC Circuits Objectives The objectives of this lab are: 1) to construct an Ohmmeter (a device that measures resistance) using our knowledge of Ohm's Law. 2) to determine an unknown resistance using our
More information7/06 Electric Fields and Energy
Part ASome standard electric field and potential configurations About this lab: Electric fields are created by electric charges and exert force on charges. Electric potential gives an alternative description.
More informationName Date Time to Complete
Name Date Time to Complete h m Partner Course/ Section / Grade Capacitance Equipment Doing some simple experiments, including making and measuring the capacitance of your own capacitor, will help you better
More informationLab 10: DC RC circuits
Name: Lab 10: DC RC circuits Group Members: Date: TA s Name: Objectives: 1. To understand current and voltage characteristics of a DC RC circuit 2. To understand the effect of the RC time constant Apparatus:
More informationExperiment 4: Resistances in Circuits
Name: Partners: Date: Experiment 4: Resistances in Circuits EQUIPMENT NEEDED: Circuits Experiment Board Multimeter Resistors Purpose The purpose of this lab is to begin experimenting with the variables
More informationEE C245 ME C218 Introduction to MEMS Design
EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 22: Capacitive
More informationCalendar Update Energy of Charges Intro to Circuits Ohm s Law Analog Discovery MATLAB What s next?
Calendar Update Energy of Charges Intro to Circuits Ohm s Law Analog Discovery MATLAB What s next? Calendar Update http://www.ece.utep.edu/courses/web1305/ee1305/reso urces.html P2 FOLLOW YOUR PROBLEM
More informationExperiment FT1: Measurement of Dielectric Constant
Experiment FT1: Measurement of Dielectric Constant Name: ID: 1. Objective: (i) To measure the dielectric constant of paper and plastic film. (ii) To examine the energy storage capacity of a practical capacitor.
More informationResistance, Ohm s Law and Kirchoff s Laws
Universiti Teknologi MR Fakulti Sains Gunaan Resistance, Ohm s Law and Kirchoff s Laws PHY631: Physical Science ctivity Name: HP: Lab#: Intro Objectives The goal of today s activity is to physically investigate
More informationSC125MS. Data Sheet and Instruction Manual. ! Warning! Salem Controls Inc. Stepper Motor Driver. Last Updated 12/14/2004
SC125MS Stepper Motor Driver Salem Controls Inc. Last Updated 12/14/2004! Warning! Stepper motors and drivers use high current and voltages capable of causing severe injury. Do not operate this product
More information1. Narrative Overview Questions
Homework 4 Due Nov. 16, 010 Required Reading: Text and Lecture Slides on Downloadable from Course WEB site: http://courses.washington.edu/overney/nme498.html 1. Narrative Overview Questions Question 1
More informationCapacitive Sensor Interfaces
Capacitive Sensor Interfaces Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley Capacitive Sensor Interfaces 1996
More informationCircuit Analysis and Ohm s Law
Study Unit Circuit Analysis and Ohm s Law By Robert Cecci Circuit analysis is one of the fundamental jobs of an electrician or electronics technician With the knowledge of how voltage, current, and resistance
More informationAERO 214. Lab II. Measurement of elastic moduli using bending of beams and torsion of bars
AERO 214 Lab II. Measurement of elastic moduli using bending of beams and torsion of bars BENDING EXPERIMENT Introduction Flexural properties of materials are of interest to engineers in many different
More informationMechatronics II Laboratory EXPERIMENT #1: FORCE AND TORQUE SENSORS DC Motor Characteristics Dynamometer, Part I
Mechatronics II Laboratory EXPEIMENT #1: FOCE AND TOQUE SENSOS DC Motor Characteristics Dynamometer, Part I Force Sensors Force and torque are not measured directly. Typically, the deformation or strain
More informationPHY222 - Lab 7 RC Circuits: Charge Changing in Time Observing the way capacitors in RC circuits charge and discharge.
PHY222 Lab 7 RC Circuits: Charge Changing in Time Observing the way capacitors in RC circuits charge and discharge. Print Your Name Print Your Partners' Names You will return this handout to the instructor
More informationExperiment 8: Capacitance and the Oscilloscope
Experiment 8: Capacitance and the Oscilloscope Nate Saffold nas2173@columbia.edu Office Hour: Mondays, 5:30PM-6:30PM @ Pupin 1216 INTRO TO EXPERIMENTAL PHYS-LAB 1493/1494/2699 Outline Capacitance: Capacitor
More informationLab 10 Circular Motion and Centripetal Acceleration
Lab 10 Circular Motion and Centripetal Equipment Calculator, Computer, PASCO 850 Universal Interface Partially-assembled Centripetal Force Apparatus Photogate Cable Pair of Banana Wires Objective Verify
More informationStructures - Experiment 3B Sophomore Design - Fall 2006
Structures - Experiment 3B 1.101 Sophomore Design - Fall 2006 Linear elastic behavior of a beam. The objectives of this experiment are to experimentally study the linear elastic behavior of beams under
More informationUNIVERSITY OF SASKATCHEWAN Department of Physics and Engineering Physics
UNIVERSITY OF SASKATCHEWAN Department of Physics and Engineering Physics Physics 115.3 Physics and the Universe FINAL EXAMINATION December 19, 2015 NAME: (Last) Please Print (Given) Time: 3 hours STUDENT
More informationElectric Field and Electric Potential
1 Electric Field and Electric Potential 2 Prelab Write experiment title, your name and student number at top of the page. Prelab 1: Write the objective of this experiment. Prelab 2: Write the relevant
More informationElectric Fields and Equipotentials
Electric Fields and Equipotentials Note: There is a lot to do in this lab. If you waste time doing the first parts, you will not have time to do later ones. Please read this handout before you come to
More informationPractical 1 RC Circuits
Objectives Practical 1 Circuits 1) Observe and qualitatively describe the charging and discharging (decay) of the voltage on a capacitor. 2) Graphically determine the time constant for the decay, τ =.
More informationSCINTILLATION DETECTORS & GAMMA SPECTROSCOPY: AN INTRODUCTION
SCINTILLATION DETECTORS & GAMMA SPECTROSCOPY: AN INTRODUCTION OBJECTIVE The primary objective of this experiment is to use an NaI(Tl) detector, photomultiplier tube and multichannel analyzer software system
More informationExperimental analysis of spring hardening and softening nonlinearities in. microelectromechanical oscillators. Sarah Johnson
Experimental analysis of spring hardening and softening nonlinearities in microelectromechanical oscillators. Sarah Johnson Department of Physics, University of Florida Mentored by Dr. Yoonseok Lee Abstract
More informationOptimizing the Performance of MEMS Electrostatic Comb Drive Actuator with Different Flexure Springs
Optimizing the Performance of MEMS Electrostatic Comb Drive Actuator with Different Flexure Springs Shefali Gupta 1, Tanu Pahwa 1, Rakesh Narwal 1, B.Prasad 1, Dinesh Kumar 1 1 Electronic Science Department,
More informationControl Engineering BDA30703
Control Engineering BDA30703 Lecture 4: Transducers Prepared by: Ramhuzaini bin Abd. Rahman Expected Outcomes At the end of this lecture, students should be able to; 1) Explain a basic measurement system.
More informationFig. 1-1 Current Flow in a Resistive load
1 Electric Circuits: Current flow in a resistive load flows either from (-) to () which is labeled below as Electron flow or the Conventional flow from () to (-). We will use conventional flow in this
More informationWELCOME TO PERIOD 14. Homework Exercise #13 is due today. Watch video 3 Edison s Miracle of Light for class discussion next Tuesday or Wednesday.
WELCOME TO PERIOD 14 Homework Exercise #13 is due today. Watch video 3 Edison s Miracle of Light for class discussion next Tuesday or Wednesday. PHYSICS 1103 PERIOD 14 What is an electric circuit? How
More informationCapacitors GOAL. EQUIPMENT. CapacitorDecay.cmbl 1. Building a Capacitor
PHYSICS EXPERIMENTS 133 Capacitor 1 Capacitors GOAL. To measure capacitance with a digital multimeter. To make a simple capacitor. To determine and/or apply the rules for finding the equivalent capacitance
More informationMEAM 550 Modeling and Design of MEMS Spring Solution to homework #4
Solution to homework #4 Problem 1 We know from the previous homework that the spring constant of the suspension is 14.66 N/m. Let us now compute the electrostatic force. l g b p * 1 1 ε wl Co-energy =
More informationFigure 1: Capacitor circuit
Capacitors INTRODUCTION The basic function of a capacitor 1 is to store charge and thereby electrical energy. This energy can be retrieved at a later time for a variety of uses. Often, multiple capacitors
More informationExperiment P43: RC Circuit (Power Amplifier, Voltage Sensor)
PASCO scientific Vol. 2 Physics Lab Manual: P43-1 Experiment P43: (Power Amplifier, Voltage Sensor) Concept Time SW Interface Macintosh file Windows file circuits 30 m 700 P43 P43_RCCI.SWS EQUIPMENT NEEDED
More informationINF5490 RF MEMS. LN03: Modeling, design and analysis. Spring 2008, Oddvar Søråsen Department of Informatics, UoO
INF5490 RF MEMS LN03: Modeling, design and analysis Spring 2008, Oddvar Søråsen Department of Informatics, UoO 1 Today s lecture MEMS functional operation Transducer principles Sensor principles Methods
More information