Appendix. Vacuum Technique:
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1 Appni acuu Tcniqu: Ti or oraion o a onolayr in pnnc on abin prssur Paricl nsiy n, ipingn ra, an r pa [, p. ] Pysik un Tcnologi Dünnr Scicn A
2 Appni aporaion Tcniqu: aporaion lociy in ig acuu in pnnc on sourc praur [, p. ] Pysik un Tcnologi Dünnr Scicn B
3 Appni Spuring: Spur yil Y o irn arials as a uncion o nrgy i o ipinging Ar-Ions, rsol nrgy rs an subliaion nrgy O [, p. 98] Pysik un Tcnologi Dünnr Scicn C
4 Appni Analyical Mos: [, p. 4] Pysik un Tcnologi Dünnr Scicn D
5 Appni Calculaion o conuciiy o in ils: T saring poin o all ollowing consiraions is currn nsiy, n N n N n Sinc an ar known, lcron nsiy n as o b calcula: n... Oas spac olu / kbt... Fri-isribuion p... insionlss, nubr o sas in a pas spac ln o siz p Fro quanu cnaics nubr o possibl sas wiin a pas spac ln wi q p gnraliz co orinas q,p: is known: in a pas spac ln o siz r can b only on sa a Conuciiy wiou lcric il R, n R R, b Conuciiy wi lcric il in an inini iu: O's law Applicaion o Bolzann's ranspor ory: Gnral orulaion o Bolzann's quaion: r,, coll i.. cangs in isribuion uncion ar only u o collisions rly sor inracions o coponns o sys. Pysik un Tcnologi Dünnr Scicn
6 Pysik un Tcnologi Dünnr Scicn F Toal irnial: coll F / a r r Spcial sap o Bolzann's quaion or lcric il: coll r Ansaz or collision r rins ail soluion o Bolzann's quaion: / C coll Bounary coniions: -il in -ircion, oognuous il srng. Ansaz: A, A=A...isorion r, inpnn o A A A r, a r A A T currn nsiy is again calcula by: R, n n n Calculaion o on coponn o, : A C R R R
7 Pysik un Tcnologi Dünnr Scicn G In abo quaion only riaion is unknown. I can b calcula by known Fri isribuion an yils a Dla uncion s skc: 4 C 4 C 4 C * ] [ 8 ] [ 4 * : Soluion o ingral: sol analogous quaions in y an z an rins + y + z : / / 4 z y ] [ * z y 8 Arbirary co orina sys: 8 n 8, wil R, 8 n n
8 c Conuciiy o in ils: Fucs-Sonir-quaion Ansaz: A, A=A, z...isorion r, inpnn o, bu now pnn on posiion wiin il Possibl bounary coniions: * Spcular rlcion a il inracs: no irnc o bulk * Dius rlcion a il inracs: Ansaz or,.z: A,z Bounary coniion or ius rlcion: z== z K K A z z zulösn ür z zd I For soling I arag ro z = o z=d as o b calcula, n scrip z Pysik un Tcnologi Dünnr Scicn H
9 Appni Rrncs an Furr Raing: []. "OBRFLÄCHN- UND DÜNNSCHICHT-TCHNOLOGI; Til I: Bscicungn on Obrläcn" R. A. Har Springr rlag 987 []. "DPOSITION TCHNOLOGIS FOR FILMS AND COATINGS; Dlopns an Applicaions" R. F.Bunsa Noys Publicaions 98 []. "DÜNNSCHICHTTCHNOLOGI" H. Fry, G. Kinl DI-rlag 987 [4]. "COATINGS ON GLASS" H. K. Pulkr lsir 984 [5]. "HANDBOOK OF THIN FILM TCHNOLOGY" L. I. Maissl, R. Glang McGraw-Hill 97 [6]. NUCLATION AND GROWTH IF THIN FILMS J. A. nabls, G. D. T. Spillr, M. Hanbückn Rp. Prog. Pys [7]. GROWTH DYNAMICS OF SPUTTR DPOSITION G. S. Bals, A. Zangwill Pys. R. Lrs [8]. MACROSCOPIC MODL FOR COLUMNAR GROWTH OF AMORPHOUS FILM BY SPUTTR DPOSITION G. S. Bals, A. Zangwill J. ac. Sci. Tcnol. A [9]. "ROUGH SURFACS" T. R. Toas Iprial Collg Prss 999 []. "LCTRICAL CONDUCTION IN THIN MTAL FILMS" T. J. Cous lsir 974 Pysik un Tcnologi Dünnr Scicn I
10 []. "DÜNN SCHICHTN FÜR DI OPTIK" H. Anrs Wissnscalic rlagsgsllsca bh, Sugar 965 []. "THIN FILM OPTICAL FILTRS" H. A. McLo Aa Hilgr LTD 969 []. ACUUM TCHNOLOGY A. Ro Nor Hollan 98 Pysik un Tcnologi Dünnr Scicn J
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