Calibration and Measurement of Micro Liquid Flow APMP 2011 TCFF Workshop Chun-Min Su, Ph.D. CMS/ITRI Dec. 03, Kobe, Japan 1 Content Introductio

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1 77 3 Dec. 2011, Kobe, Japan

2 Calibration and Measurement of Micro Liquid Flow APMP 2011 TCFF Workshop Chun-Min Su, Ph.D. CMS/ITRI Dec. 03, Kobe, Japan 1 Content Introduction Micro Flow Measurements Micro Liquid Flow Calibration Dec. 2011, Kobe, Japan

3 Micro Liquid Flows Ranges of flow required for various areas and their applications nl/min l/min ml/min Bio-Chip Systems Microarrays Lab-on-a-Chip Nano-Jet Tech Chemistry Micro Reactors Synthesis Chip Fabs Evaporators Coating Systems Medical Drug Dosing (Disposable & Non-Disposable) Medical Compliance Monitoring Dialysis Anesthesia Industrial Process Technology Mixture Processes Cooling Systems Gluing& Sealing Automation Analytical Instruments (Bio/Med Tech) Pipetting / Dispensing Liquid Chromatography & Mass Spectrometry 3 Microfluidics Applications Lab-on-chip (Bio) Micro-array bio-chip (Bio) Portable Insulin Injector (Medical) Micronozzle (Aerospace) Micro-pump (MEMS) Inkjet printers (Computer) 79 3 Dec. 2011, Kobe, Japan

4 Microfluidics The science and engineering of systems in which fluid behavior differs from conventional flow theory primarily due to the small length scale of the system. A collective noun, that is defined as the control and movement of microscopic quantities of fluids. Quantity ~ nl - pl Characteristic length ~ several μm Low Re laminar/creeping flows C.-M. Ho, 2001 Length Scales and Applications of Microfluidics Dec. 2011, Kobe, Japan

5 Size Effect Length Scale--Most physical quantities are scaled differently with dimension L Basic Others Length L Surface Tension L (F=L ) Area L 2 Skin Friction Force L 2 Volume L 3 Heat Transfer L 2 Bone Strength L 2 Mass L 3 (Heat Flux) (Contact Area) (Cross-section) Example: Weight Lifting (The pressure on muscle is the same for different body size) D arm L body (Arm size is proportional to individual body size) Scaling Law Surface tension force (Line force) is dominate in nano scale and important in micro scale!! 81 3 Dec. 2011, Kobe, Japan

6 Reynolds number (Re) Dimensionless Parameters Convention 1200 ~ L Knudsen number (Kn) Laminar Transition Turbulence (Zeighami et al., 2000) Slip or Non-Slip? Boundary Conditions Hydrophilic Non-slip Kn Hydrophobic Kn slip (Meinhart et al., 2001) 82 3 Dec. 2011, Kobe, Japan

7 Content Introduction Micro Flow Measurements Micro Liquid Flow Calibration 11 Micro Flow Measurements Microflow sensors MEMS technology driven Low energy consumption Capable of measuring ultra-low flowrates L/min nl/min Two major types Thermal Converts flow energy into electrical signals through heat transfer Majority: thermoresistive Non-thermal Transforms mechanical variables into electrical signals Majority: differential pressure Wu et al., 2000 Oosterbroek et al., Dec. 2011, Kobe, Japan

8 Hot-film Flow Sensors R(T) -T 0 ) R(T 0 ) 0 20x2 m Tai, Y.C. et al., Caltech, USA, Hot-Wire Flow Sensors Convention P=(T-T 0 )(A+B 1/3 ) U =U Re Const. Temp. mode P=V 2 /R Const Current mode P=IV Novelty Jiang, F. et al., Caltech, USA, Dec. 2011, Kobe, Japan

9 Thermal Dilution Flow Sensors Similar to Supersonic Anememotry 1 heater + 2 thermal sensor Measurement principle: Heater H and thermal detector T2: t 2 =X m /(c+v) Heater H and thermal detector T1: t 1 =X m /(c-v) V=(L/t 1 -L/t 2 )/2; c=(l/t 1 +L/t 2 )/2 15 Time-of-Flight Flow Sensors Transit-time method: V=L/ t heat generator + thermal sensor ion generator + ion detector 1 or 2 sensor/detector (a) Flow H + Channel H + H+ H + H + H + (b) Generator signal Ion generator ph sensor t Time Dec. 2011, Kobe, Japan

10 Differential Pressure Flow Sensors Capacitance C = Q / (Ed) Piezoelectric/Piezoresistive Oosterbroek et al., 1999 Back Front 17 Shear Stress (Drag Force) Flow Sensors u w 2 u u Re Tai and Ho et al., Dec. 2011, Kobe, Japan

11 Resonant (Coriolis Force) Flow Sensors Enoksson, P. et al., Royal Institute of Technology, Sweden, maximum flow of 2.3 ml/min. Coriolis-Principle F = M 2 t 19 Micro Electromagnetic Flow Sensors Yoon, H.J., et al., Ajou Univ., Korea, Based on Faradays law The dimension of the flow sensor is 9 mm x 9 mm x 1 mm Advantages: a simple structure, no heat generation, a rapid response and no pressure loss Dec. 2011, Kobe, Japan

12 (MEMS) Ultrasonic Flow Sensors Takamoto M. et al. 2001, Flow Meas. and Inst. Jagannathan H. et al. 2001, IEEE Symp. Ultrasonics 21 Carbon Nanotube Flow Sensors Phonon quasi-momentum Acoustic phonon in nanotube Liquid molecules J Momentum transfer crystal vibration phonon transfer potential difference 6 order of magnitude metering range! Dec. 2011, Kobe, Japan

13 Non-Invasive Micro Flow Measurements 1D Micro Laser Doppler Velocimetry ( LDV) Optical Doppler Tomography (ODT) Scalar Image Velocimetry (SIV) 2D Molecular Tagging Velocimetry (MTV) Micro Particle Image Velocimetry ( PIV) 3D Micro-Particle Tracking Velocimetry 3D Stereoscopic Micro Particle Image Velocimetry Holographic Micro Particle Image Velocimetry 23 Content Introduction Micro Flow Measurements Micro Liquid Flow Calibration Dec. 2011, Kobe, Japan

14 Calibration Methods Gravimetric/Weighing method Volumetric method Time-of-flight Velocity*cross-section Comparison method Precision fluid delivery pump Reference standard flowmeter U/Uc P1 P2 P3 CFD_P1 CFD_P2 CFD_P r/r Marinozzi et al., 2005 Pan et al., Capability Micro Flow Calibration System in Taiwan (CMS/ITRI) 0.1 L/min to 10 ml/min U 95 = 0.5 % to 3.0 % Fluid: water Flow generation pressurized tank (with automatic pressure controller) metering pump (e.g. syringe pump) Dec. 2011, Kobe, Japan

15 Micro Flow Calibration System in Taiwan (CMS/ITRI) Gravimetric calibration Method: flying-start-and-finish with dynamic weighing Twin balance design System schematic Twin-beaker covered with low volatility oil 27 Novel Water Flow Facility in France (LNE) Range extension to low flow rates (10 L/h down to 1 ml/h) Overview 1 Water production, 2 Supervision and flow generation, 3 Measuring instruments Line 1 : 1 ml h -1 to 10 ml h -1 Line 2 : 10 ml h -1 to 100 ml h -1 Line 3 : 100 ml h -1 to ml h -1 Line 4 : ml h -1 to ml h -1 Flow is generated using a pressurized tank (0.1 to10 bar) and is controlled tightly by a constant upstream pressure and the selection of a well designed capillary A clean room with controlled ambient conditions T = 20 C +/- 2 C, RH = 55 % +/- 5 %, P = P atm + 20 Pa The temperature around the weighting cell better than 0,3 C during 30 minutes Dec. 2011, Kobe, Japan

16 Novel Water Flow Facility in France (LNE) Water preparation equipment 1 Nitrogen bubbling tank, 2 Heating and degassing tank, 3 Stock tank Particles filtered Avoid formation of bubbles by degassing Temperature of the fluid regulated Flow generation water flow controlled by two devices 10 liter tank (with compressed N 2 ) Pressure stability better than 0,05% Situated in a thermostatic chamber 10 capillaries located after the flowmeter Inner diameter: 100 m to 325 Length: 1 m to 4 m immerged in a thermostatic bath 29 Novel Water Flow Facility in France (LNE) Flow measurement The equipment is separated in four individual lines 1 Heat exchangers 2 Capillaries in a thermostatic bath and associated valves 3 Mass measurement: line n 2 (10 ml h -1 to 100 ml h -1 ) Dec. 2011, Kobe, Japan

17 Flow range (goal) 0.1 m 3 /h to m 3 /h (1.67 L/min to 0.83 ml/min) Fluid (goal) New Calibration Facility for Small Flow of Hydrocarbon Liquid in Japan (NMIJ/AIST) Light oil, kerosene Examples of needs Fuel blender Centralized fuel supply system Evaluation of fuel efficiency 31 New Calibration Facility for Small Flow of Hydrocarbon Liquid in Japan (NMIJ/AIST) Gravimetric calibration Method: standing-start-and-finish with static weighing Storage tank Header T P T Flow control valve P Pump DUT T P T P Check standard Bypass to storage tank Heat exchanger Flow generation section Test section Weighing section Dec. 2011, Kobe, Japan

18 Volumetric method (1) Time-of-flight (Caltec.) Visual detection; 50 nl/min to 1500 nl/min Wu et al., MEMS flow sensors for nano-fluidic applications, Sensors and Actuators A: Physical, Vol. 89(1-2), Volumetric method (2) Time-of-flight (Applied Biosystems) Optical detection (refractive index); 1 nl/min to 1000 nl/min Dec. 2011, Kobe, Japan

19 Volumetric method (3) Air-piston calibrator of CMS/ITRI gas-liquid interface detection 10 nl/min to 1 ml/min time-of-flight Voltage (V) t V Q t Node 1 Node Flow Outlet time (sec) Flow Inlet Multiplexer + R1 - Rx Imped./Volt. Converter Out 2 Out 1 AC Cx R2 Vout Equivalent circuit Dec. 2011, Kobe, Japan