HIGH ACCURACY MEASUREMENTS OF RINGS, PLUGS, STEP-GAUGES AND BALL-BARS USING A CMM COUPLED WITH AN INTERFEROMETRIC LASER

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1 HIGH ACCURACY MEASUREMENTS OF RINGS, PLUGS, STEP-GAUGES AND BALL-BARS USING A CMM COUPLED WITH AN INTERFEROMETRIC LASER JOÃO ANTÔNIO PIRES ALVES, MSC Instituto Nacional de Metrologia, Normalização e Qualidade Industrial - Inmetro Duque de Caxias, RJ, , Brazil jaalves@inmetro.gov.br JOSELAINE ROSSIGNOLI ZANETTI Instituto Nacional de Metrologia, Normalização e Qualidade Industrial - Inmetro Duque de Caxias, RJ, , Brazil jrzanetti@inmetro.gov.br

2 Campus of Inmetro Materials Mechanic Operacional Thermal Electrical Chemistry Acustic And Vibration Optics

3 STUCTURE INMETRO DIMCI DIMEC LAMED LAMED-DIMENSIONAL METROLOGY LABORATORY

4 INMETRO/LAMED - SERVICES Gage blocks, bars; Roughness and depth set standards; Angular blocks, polygons; Roundness standards; Laser Systems for linear measurements; Step-gages, ball-bars, 2D artefacts; Rings, plugs and spheres; Scales; TOTAL : 26 SERVICES Industries and accredited labs

CMM FACILITIES AT LAMED Room 1 Room 2 LEGEX -9106 MITUTOYO # 2D ARTEFACTS # STEP-GAGES BY COMPARISON

5 CMM FACILITIES AT LAMED Room 1 Room 2 LEGEX MITUTOYO # 2D ARTEFACTS # STEP-GAGES BY COMPARISON #GENERAL MEASUREMENTS UMM 500 ZEISS # RINGS, PLUGS, SPHERES # STEP-GAGES, BALL-BARS #GENERAL MEASUREMENTS

6 STEP-GAGES CALIBRATION Gage-blocks y Step-gage x Gages positioning

7 Set-up Position of the sensors on the gage-blocks Eixo x x Position of the sensors on the stepgage 20mm, 50mm, 100m, 150mm, mm Eixo y y

8 Calibration strategy 1 Probing error determination 2 Masurements of blocks. Smaller >>> Larger 5 cycles 3 Step-gage measurement

9 Incerteza ( m) NACMA 3 Measurement uncertainty Melhor capacidade de medição U = 7E-07L 2 + 0, Valores Nominais (mm) Incerteza (Legex) Polinómica (Incerteza (Legex))

10 BALL - PLATE CALIBRATION y x Gage-blocks

11 HOLE - PLATE CALIBRATION Y Colocar figura 1 fonte 2 X Gage-blocks

Measurement uncertainty - Ball-plate x i u(x i ) i c i = l/ x i u i (l) / nm Plate measurements Short Term 0,173205081 Infinite 1000 173,2 Reproducibility (Plate) Thermometer 0,002 Infinite 11,5 0,02

12 Measurement uncertainty - Ball-plate x i u(x i ) i c i = l/ x i u i (l) / nm Plate measurements Short Term 0, Infinite ,2 Reproducibility (Plate) Thermometer 0,002 Infinite 11,5 0,02 calibration Thermal Expantion 1,1547E-06 Infinite ,1 Coeficient (Plate) Gradients and 0, Infinite 11,5 0,3 Instability (Plate) Comparison Short Term 0, infinite ,7 Reproducibility (Plate) Reproducibility 0, ,4 Gage-blocks calibration 0,03 Infinite ,0 Repeatibility - Blocks 0, ,3 Repeatibility - Plate 0, ,0 Thermal Expantion 1,1547E-06 Infinite ,1 Coeficient (Plate and Gage-blocks) Gradients and 0, Infinite 11,5 0,8 Instability (gage-blocks) Gradientes and Instability (Plate) 0, Infinite 11,5 0,8 Combined standard uncertainty: uc( l) (318,397) 2 +(1,15671) 2 l 2 nm; l, in mm.

Measurement uncertainty - Hole-plate x i u(x i ) i c i = l/ x i u i (l) / nm Plate measurements --- --- --- --- Short Term Reproducibility (Plate) 0,53982 Infinite 1000 539,82 Thermometer calibration

Reproducibility (Blocks) 0,173205 infinite 1000 173,20 Reproducibility 0,339664 4 1000 339,66 Gage-blocks calibration 0,065 Infinite 1000 65 Repeatibility - Blocks 0,230478 4 1000 230,47

13 Measurement uncertainty - Hole-plate x i u(x i ) i c i = l/ x i u i (l) / nm Plate measurements Short Term Reproducibility (Plate) 0,53982 Infinite ,82 Thermometer calibration 0,00200 Infinite 0,50 0,00 Thermal Expantion Coeficient (Plate) 0,00000 Infinite ,67 0,07 Gradientes and Instability (Plate) 0,11172 Infinite 0,50 0,05 Comparison Short Term Reproducibility (Blocks) 0, infinite ,20 Reproducibility 0, ,66 Gage-blocks calibration 0,065 Infinite Repeatibility - Blocks 0, ,47 Repeatibility - Plate 0, ,81 Thermal Expantion Coeficient (Plate and Gage-blocks) 1,15E-06 Infinite ,33 0,17 Gradientes and Instability (gage-blocks) 0, Infinite 11,5 1,27 Gradientes and Instability (Plate) 0, Infinite 11,5 1,40 Combined standard uncertainty: uc( l) (749,416) 2 +( 1,89671) 2 l 2 nm; l, in mm.

14 Comparison with pilot results- Ball plate Esfera INMETRO NMIJ INMETRO No. DX [mm] DY [mm] U_x [um] U_y [um] U_x [um] U_y [um] Emx Emy 1 0,0000 0,0000 0,12 0,12 0,75 0,75 0,00 0,00 2 0,0002-0,0001 0,15 0,12 0,76 0,75 0,26-0,08 3 0,0001 0,0000 0,20 0,12 0,77 0,75 0,10-0,03 4 0,0002-0,0001 0,27 0,12 0,80 0,75 0,29-0,07 5 0,0002 0,0000 0,34 0,12 0,84 0,75 0,17 0,00 6-0,0001 0,0001 0,12 0,15 0,89 0,75-0,09 0,14 7 0,0002 0,0002 0,15 0,15 0,94 0,75 0,18 0,32 8 0,0001 0,0001 0,20 0,15 1,00 0,75 0,09 0,13 9 0,0001 0,0001 0,27 0,15 1,07 0,75 0,10 0, ,0001 0,0001 0,34 0,15 1,14 0,75 0,07 0, ,0000 0,0002 0,12 0,20 1,21 0,75-0,04 0, ,0001 0,0002 0,15 0,20 1,28 0,75 0,10 0, ,0001 0,0001 0,20 0,20 0,75 0,76 0,08 0, ,0002 0,0001 0,27 0,20 1,28 0,76 0,12 0, ,0001 0,0001 0,34 0,20 0,75 0,77 0,12 0, ,0001 0,0000 0,12 0,27 1,28 0,77-0,07-0, ,0002 0,0001 0,15 0,27 0,75 0,80 0,21 0, ,0001-0,0001 0,20 0,27 1,28 0,80 0,06-0, ,0002 0,0000 0,27 0,27 0,75 0,84 0,26 0, ,0002 0,0000 0,34 0,27 1,28 0,84 0,14-0, ,0002 0,0001 0,12 0,34 0,75 0,89-0,21 0, ,0001 0,0002 0,15 0,34 1,28 0,89 0,07 0, ,0000 0,0002 0,20 0,34 0,75 0,94 0,00 0, ,0002 0,0001 0,27 0,34 1,28 0,94 0,12 0, ,0001 0,0001 0,34 0,34 0,75 1,00 0,14 0,09 Enx, y Dx, y / ( U ^2 Ur^2) Maximum value 0,32

15 CMM LASER SYSTEM UMM 500 ZEISS

16 Tempereture ºC NACMA 3 Environmental conditions- Room 2 long period 21.5 Thermical Laboratóriy Profile h00min Time (hours) Room Câmara

17 Tempereture ºC NACMA 3 Environment condition - Room 2 short period 20 Laboratory thermal profile Time (hours) 2 12h00min Chamber Gage

18 LENGTH MEASUREMENT SYSTEM T gage T air Z 20,00 Ll Lm X P air h ar

19 Error sources Environment Laser CMM Set up Gage

20 Refraction index of the air air < vac vac= ar vac air Refraction index of the air wave-lenght in vacuun; wave-lenght in air;

21 Refraction index of the air - Edlén : p 8 ( s 1) 1 10 ( 2 3T ) p 1 10 f (1 T ) 1 4 where : p Air pressure - Pa; f Parcial pressure for moist air - Pa; T Air temperatue - C; K i are constants 2 1

22 Dead-path Beam splitter ponto inicial laser L 1 L 2 L1 - Dead path L2 - Measured lenght DP L1* *( T )

23 Cossine error L = Laser displacement M = Table displacement Retro-reflector plane L Laser beam Table movement axis A M B M M L 1 cos 2 2

24 Cossine error 2 S 8L 2 S=0,25mm

25 Gage temperature L L e /(1 *( T 20 e 20) = Thermal expansion coeficient; L e = Lenght at environmental temperature; L 20 = Lengh at 20 0 C; T e = Calibration temperature;

26 Ideal model Gage lenght Laser beam x Laser display Difference = diameter of the probe Abbè principle Only if in laser direction

27 Set up - Alignment and fixation of the gage Plate for alingnment Ajusting bolts Calibration based in KOBA geometry

28 Horizontal positionning 25mm Begining of the scale 25mm Calibration based in KOBA geometry

29 Alignment error z XZ= Z/25mm 25mm Block y XY= Y/5mm ErroY= Y/5mm 5mm x Table Error Z~ 5 m ErrorDZ ~ 1 m

30 Actual model l g l l d p E la E ga E dl E sys l g l l n0 * * n (1 1 *( T g T r )) (1 d p *( T g T r )) E la E ga E dl E sys

31 Gage-block measurement 20mm 50mm 100mm 200mm 300mm 400mm 5mm Determinação do erro de apalpação Determinação do erro de posicionamento

32 Correções ( m) NACMA 3 Systematic errors Correções MMC UMM Blocos-padrão 0,2 m Média dez/06 mai/06 abr/09 Valores nominais (mm)

33 Using the calibrated system Step gage calibration 0mm 420mm (0,4 2 +(1,2*10-3 *(L)) 2 ) 0,5 420mm 880mm 0,7+(0,4 2 +(1,2*10-3 *(L-420)) 2 ) 0,5 880mm 1060mm 1,4 +(0,4 2 +(1,2*10-3 *(L-880)) 2 ) 0,5 L in mm

34 Using Calibração the calibrated de escalonados system One single client Ball bar of Tree-spheres Ball-bar 0mm 420mm (0,4+1,2*10^-6*(L) Sphere - 1 to 2 = 221mm Sphere 2 to 3 = 311mm 0mm 420mm (0,2 2 +(1,2*10-3 *(L)) 2 ) 0,5

35 Step gages Nominal Lenght up to 420mm Range = 500mm 0 ~25mm ~55mmm ~420mm

36 420mm < Nominal Lenght < 620mm Range First position 0 21 ~420mm Secound position Superposition 0 21 Displacement ~25mm ~420mm

37 620mm < Nominal Lenght < 1060mm Range First position Esc 0 ~25mm ~420mm Second position Superposition Deslocamento Esc 0 ~25mm ~420mm

38 Differences ( m) NACMA 3 Errors in overlapping 0,05 0,04 0,03 0,02 0,01 0,00 0,0 100,0 200,0 300,0 400,0 500,0 600,0 700,0 800,0 900,0 1000,0-0,01-0,02-0,03-0,04-0,05 Nominal value

39 DATA-SHEET CONSTANT PART 3 - Planilha de incerteza Grandezas de Estimativa Distribuição Divisor Incert. Padrão Ci Contrib. ui^2 i Influência [ m] ui [ m]) [ m] 2 Contribuições independentes do comprimento Resolução m] 0,0100 Retangular 3,4641 0, ,0029 0, Instabilidade m] 0,0100 Retangular 1, , , , Alinhamento [ m] Laser 0,0313 Retangular 1, , , , Padrão 0,0100 Retangular 1, , , , Comprimento morto [ m] 0,0230 Retangular 1, , , , Apalpador [ m] 0,2 Normal 2 0, , , Total 1 = 0,

40 DATA-SHEET LENGTH DEPENDENT PART 3 - Planilha de incerteza Grandezas de Estimativa Distribuição Divisor Incert. Padrão Ci Contrib. ui^2 i Influência [ m] ui [ m]) [ m] 2 Temperatura do Ar [ o C] Incerteza Certificado 0, Normal 2 0,010-9,36E-07-9,357E-09 8,756E-17 Oscilação no tempo 0, Retangular 1, ,016-9,36E-07-1,513E-08 2,288E-16 Pressão Atmosférica [Pa] Incerteza Certificado 52, Normal 2 26,298 2,69E-09 7,065E-08 4,991E-15 Oscilação no tempo 8, Retangular 1, ,771 2,69E-09 1,282E-08 1,642E-16 Umidade do ar [Pa] Incerteza Certificado 22, Normal 2 11,453-3,70616E-10-4,245E-09 1,802E-17 Oscilação no tempo 8, Retangular 1, ,761-3,70616E-10-1,764E-09 3,113E-18 Comprimento de onda [ m] 0, Normal 2 0,000-2,19557E-06-7,684E-14 5,905E-27 Total 2 = 5,493E-15 Temperatura do Padrão [ o C] Incerteza Certificado 0, Normal 2 0,010 1,15E-05 1,150E-07 1,323E-14 Oscilação no tempo 0, Retangular 1, ,002 1,15E-05 2,656E-08 7,053E-16 Coef. de dilatação [1 / o C] 0, Retangular 1, ,000-0,349-2,015E-07 4,060E-14 Total 3 = 5,453E-14

41 Uncertainties ( m) NACMA 3 Comparison with BMC 2,0 1,8 1,6 1,4 BMC Calculated Uncertainty Not good!! 1,2 1,0 0,8 0,6 0,4 Sum of two part 0,2 0,0 0,0 100,0 200,0 300,0 400,0 500,0 600,0 700,0 800,0 900,0 1000,0 Nominal values (mm)

42 BALL - BARS Probing the spheres Beginning of the calibrated range

43 BALL - BARS Probing the spheres Beginning of the calibrated range BMC (0,2 2 +(1,2*10-3 *L)^2) 1/2, L in mm

44 Rings, Calibração plugs and de sphperes escalonados calibration >Results of calibrated system not used >Evaluation of the probing erros each calibration >Differences between internal and external probing >Measurements in the centre of the machine table (Range : 200mm) BMC Same as ball-bars

45 Trouble Trouble : Only 4 gages >11mm and 52mm rings >One single 30mm sphere >One single 50mm plug Solution: Gage blocks

46 The right measurement strategy Strategy Gage-block 1 - Strategy 1 Ring - gage - Strategy 2 Strategy Ring-gage 3 - Strategy 3 Ring-gage - Strategy - Strategy 4 4 Strategies 1 and 3 lead to same results

47 Calibração Some text de escalonados results Gage-blocks Probing error (mm) Date Result for gage length (mm) Difference from the certificate (mm) 4, /09/ , ,02 4, /09/ , ,00

48 Two spheres Probing error (mm) Date Result for gage length (mm) Difference from the certificated (mm) 4, /08/ , ,00 4, /08/ , ,07 4, /08/ , ,04 4, /08/ , ,02 4, /08/ , ,13 4, /08/ , ,03

49 Gage-block and ring-gage Probing error (mm) Date Result for gage length (mm) Difference from the certificated (mm) 4, /09/ , ,10 4, /09/ , ,00 4, /09/ , ,13 4, /09/ , ,04 4, /09/ , ,01

50 Gage-block and plug Probing error (mm) Date Result for gage length (mm) Difference from the certificate (mm) 4, /08/ , ,07 4, /08/ , ,35 4, /08/ , ,21 4, /08/ , ,22

51 Some clients results Ball-bar Ball-bar - RC 1794 Certificate 221mm U 221 ( m) 311mm U 311 ( m) 1343/ ,0047 0,5 311,0050 0,6 1959/ ,0048 0,5 311,0050 0,6

52 Ring-gage

53 Step-gage

54 Conclusions System demonstrated good performance Comparisons: EUROMET.L-K Step Gauge (420mm), EUROMET.L-K Diameter Standards, APMP.L-K Step Gauge (620mm). But Now under a re-evaluation. Calibration with more points - 0mm to 200mm. Ball-bar calibrations client asks for better uncertainties.

55 Thank you! Muchas gracias! Questions and suggestions are welcome! Questions and suggestions are welcome!

SIM Regional Comparison on. The Calibration of Internal and External Diameter Standards SIM.L-K FINAL REPORT July 2012

SIM Regional Comparison on. The Calibration of Internal and External Diameter Standards SIM.L-K FINAL REPORT July 2012 SIM Regional Comparison on The Calibration of Internal and External Diameter Standards SIM.L-K4.2009 FINAL REPORT July 2012 Theodore Doiron (NIST), J. A. Pires Alves (INMETRO), Bruno R. Gastaldi (INTI),