Marcel Thomas Prof. Jung-Hoon Chun Prof. Martin Culpepper. Characterization of taper effects in TFGs

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1 Marcel Thomas Prof. Jung-Hoon Chun Prof. Martin Culpepper Characterization of taper effects in TFGs

2 2 MIT s Laboratory for Mfg. & Productivity An interdepartmental laboratory within SoE Manufacturing-centric research Founded more than 30 years ago Over $7M research volume per year PROCESSES AND EQUIPMENT GREEN SYSTEMS

3 Research Purpose: Sensitivity analysis for meso- scale solid- state gyroscope 1mm Redacted mechanism elements Due to sponsor and IP restrictions, only a portion of the mechanism may be shown Import: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 3, JUNE 2006 ( ) High performance solid- state gyroscope for inertial guidance and positioning Impact: Impact only if sensitivity to geometric errors is acceptable Obtaining physical prototype requires 5 axis machine All rights reserved MIT Precision Compliant Systems Laboratory 3

5 Fundamental problem Mass and stiffness of components need to be closely matched Sub-micron taper and thickness variations in beams ruin performance

5 5 Fundamental problem Mass and stiffness of components need to be closely matched Sub-micron taper and thickness variations in beams ruin performance Masses with opposing motions (yellow and red arrows) required JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 3, JUNE 2006 ( ) ~a C =2 ~ ~v a C v Ω

6 Solution New design is inherently better at providing correct motions than prior art Need to determine sensitivity to taper/thickness variations in beams 5 axis need for prototyping A B Redacted mechanism elements B All rights reserved MIT Precision Compliant Systems Laboratory A 6

7 7 Drive Axis Flexure Concept Y X 4

8 8 Introduce Taper 1 degree taper simulates error from laser trimmer 1

9 9 FEA simulation of defects 1 of taper à ~2% out-of-plane motion μm 1.5mm Input μm ~150mm

10 10 Experimental Design Detail Capacitance Probes Z Y X Kinematic Coupling Flexure Micrometer Heads Optical Table

Prototype and Experimental Setup Mori Seiki NMV1500DCG All

12 12 Measured Displacements

13 Summary ~4x reduction of out-of-plane motion from state-of-the-art Applied precision machine design principles Kinematic Coupling Flexure Hands-on learning with 5-axis mill All rights reserved MIT Precision Compliant Systems Laboratory 13

14 14 Education Design & Manufacturing 2.72 (MIT student education) Elements of Mechanical Design 2.75s (Professional education) Advanced Design & Mfg q HTM modeling q HTM modeling q Design example q Design example q Stiffness q Stiffness q Accuracy q Accuracy q Repeatability q Repeatability

15 Precision Lathe Design/Mfg.

16 16 Education Design & Manufacturing Design and Manufacturing II q Emphasis on Physics Stochastic nature of mfg. Quality Rate Cost Flexibility

17 17 Questions and Acknowledgements Many thanks to our sponsors

18 18 Backup Slides

20 20 Experimental Setup

2.72 Elements of Mechanical Design

MIT OpenCourseWare http://ocw.mit.edu 2.72 Elements of Mechanical Design Spring 2009 For information about citing these materials or our Terms of Use, visit: http://ocw.mit.edu/terms. 2.72 Elements of