Summary of EUV Optics Contamination Modeling Meeting

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Ted Madey, Rutgers University Iwao Nishiyama, Selete Advaned Materials Researh Center, AMRC, International SEMATECH Manufaturing

1 Summary of EUV Otis Contamination Modeling Meeting IEUVI Otis Contamination/Lifetime TWG San Jose, CA, USA February 28, 2008 Andrea Wüest, SEMATECH Shannon Hill, NIST Lennie Klebanoff, Sandia Nat. Lab. Ted Madey, Rutgers University Iwao Nishiyama, Selete Advaned Materials Researh Center, AMRC, International SEMATECH Manufaturing Initiative, and ISMI are serviemarks of SEMATECH, In. SEMATECH, and the SEMATECH logo are registered serviemarks of SEMATECH, In. All other serviemarks and trademarks are the roerty of their resetive owners.

2 Motivation Understanding of ontamination mehanisms What haens in re-rodution and HVM tools? Modeling robably required to redit ontamination rates under those onditions. What is required to ahieve reditive quality? Very hallenging Meeting on modeling of ontamination of EUV otis Presentations on ublished models and relevant exeriments Disussion on imortant issues 03/10/2008 2

3 Rate equation for adsorbed moleule d dt = 1 4 nv av S τ des σ PD I σ PR I σ ED γi σ ER γi moleular flux 1 4 nv av Stiking oeffiient S thermal desortion σ τ des hotodesortion PD I hotoreation σ PR I Ele.-indued desortion σ ED γi Ele.-indued reation σ ER γi Courtesy of I.Nishiyama, Selete 03/10/2008 3

4 Summary Model for Ru fae oxidization is started. Ste 1; ative oxygen formation on fae Ste 2: diffusion of ative oxygen in bulk and reation at interfae (Rate Equation of Ste 1 is solved.) n Water rese deendene is linear in atual ondition for aelerated testing, so it is a good arameter for lifetime saling. Non linearity observed in exeriment is robably aused by quenhing effet of hydroarbon on oxygen atom. n EUV ower deendene is also linear from the simle rate equation. However, substrate heating should be taken are in EUV ower deendene. n Differene in ulse and ontinuous soures is exlainable. The reason is the water onentration derease aused when hotodesortion/reation exeeds thermal desortion. (These results will be modified by Ste 2) Courtesy of I.Nishiyama, Selete 03/10/2008 4

Hydroarbon Moleular Weight K - Boltzmann s Constant EUV/e- based Dissoiation N AD [ σ h I o + σ SE N SE (D)] σ h - Photon dissoiation ross setion ( hotoabsortion ross setion CXRO website) σ SE

5 Contamination Model Inuts and Model Overview Courtesy of L. Klebanoff, Sandia Nat. Lab. Adsortion Refletion sγ=s 1 4 P kt 8kT πm sγ N AD max N AD Γ - Imingement Rate (kineti theory) s - Condensation Coeffiient T - System Temerature P - System Prese N AD - Number of Adsorbed Moleules M - Hydroarbon Moleular Weight K - Boltzmann s Constant EUV/e- based Dissoiation N AD [ σ h I o + σ SE N SE (D)] σ h - Photon dissoiation ross setion ( hotoabsortion ross setion CXRO website) σ SE -Seondary e - dissoiation ross setion, n-hexane thin film ( Leler, Cui and Sanhe 1987) assume hoton dissoiation ross setion = hoton absortion ross setion Desortion N AD τ 03/10/ N AD = τ o ex[ E A ] RT τ -Surfae residene time Ε Α - Desortion energy, hydroarbon on Au (Wetterer et al 1998) 5 Surfae Diffusion 1 r r D r N AD sd r D sd - Surfae Diffusion Coeffiient, hydroarbon on Ru ( Brand et al. 1990)

6 Summary and Conlusions A mathematial model has been develoed and used to evaluate the relative imortane of roesses that ontribute to the growth of arbonaeous layers on EUV exosed otis Contamination was redited as a funtion of HC rese, EUV ower It is onluded that the ontribution of seondary eletrons to ontamination is muh less than that aused by diret EUV absortion Surfae diffusion lays a negligible role Warming the oti redues ontamination Light moleules don t ontaminate, heavier ones ( > C7 ) do Standing Wave Effets are seen, and affet ontamination rates Courtesy of L. Klebanoff, Sandia Nat. Lab. 03/10/

7 Simle ulsed model summary G SS N Z τ I = C P M avg tot 1 τ Max + Iavgσ totτ M + Z Pτ M θ ν S >> 1/ M σ Indeendent of time struture for all relevant ases: deends only on I avg Predits observed gas-flux-limited and intensity-limited behaviors Non-linearity in I avg must be onsidered when saling damage rates Short-residene-time limit may be aliable to low-re-rate exoes Courtesy of S. Hill, NIST 03/10/

8 Summary of MMA, benzene Cross Setions on C-overed TiO 2 7x10-17 Cross Setion [m 2 ] 6x x x x x x Eletrons Energy [ev] MMA/C benzene/c Courtesy of T. Madey, Rutgers U. 03/10/2008 8

9 Heats of adsortion of gases vs. overage CO on Pd(111) Coverage-deendent adsortion energies very ommon in gas-fae fae interations! Courtesy of T. Madey, Rutgers U. 03/10/2008 9

10 Disussion Tois and Conlusions Disussion tois Can the different roesses be modeled searately? Whih fators govern the fae overage of the ambient gas seies? What is the hoton- and eletron-indued fae hemistry? (Detailed ab initio modeling nearly imossible.) What exerimental inuts are needed? What are the most imortant assumtions? Conlusions It is imerative to know what the bakground gas omosition is. Reation ross setions have to be known (hotodissoiation, eletron-indued dissoiation, et.) Coverage deends on tye of fae and adsorbed moleule Coverage is a funtion of rese (for first monolayer on lean fae) Dearture from Langmuir kinetis 03/10/

11 Disussion Tois and Conlusions Imroving models likely required to ahieve reditive quality Identify ritial assumtions Inlude Temkin (instead of Langmuir) kinetis: Surfae overage is a funtion of rese Inlude ometition between oxidation and arbonization Model ontamination due to several ontaminants simultaneously Identify and erform exeriments to obtain neessary values of inut arameters (ross setions, et.) Calibrate model with existing data 03/10/

12 Aknowledgements Iwao Nishiyama, Selete Lennie Klebanoff, Sandia National Lab. Shannon Hill, NIST Ted Madey, Rutgers University 03/10/

SOLVED QUESTIONS 1 / 2. in a closed container at equilibrium. What would be the effect of addition of CaCO 3 on the equilibrium concentration of CO 2?

SOLVED QUESTIONS 1 / 2. in a closed container at equilibrium. What would be the effect of addition of CaCO 3 on the equilibrium concentration of CO 2? SOLVED QUESTIONS Multile Choie Questions. and are the veloity onstants of forward and bakward reations. The equilibrium onstant k of the reation is (A) (B) (C) (D). Whih of the following reations will