GCr M cm.

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1 29 4 Vol. 29 No Tribology July, , 1, 2 (1., ; 2., ) : (CNTs), CNTs, (AFM ) ( SEM ), X (XPS), UMT - 2MT : 3 - (MPTS),., ,, : ; ; ; : TH : A : (2009) (MEMS), [ 1 ]. MEMS,, MEMS [ 2-4 ].,, 1991 NEC Iijima [ 5 ] (CNTs), CNTs, [ 6-7 ]., [ 8-9 ]., CNTs, CNTs, CNTs, CNTs, ( rare earth, RE) ( - 4f 0-14 ) [ 10 ],, CNTs [ 11 ], [ ]. CNTs,, GCr : (CVD) ( ) ; AR, ;, M cm.., cm 1. 0 cm, : : ; : ; :, e - mail: xhcheng@ sjtu. edu. cn : ( , ). : ( ),,,,

2 [V ( ) V ( ) = 3 1 ] h, 2 mol/ L h, ; 1 2, 0. 3 wt% 20 m in, 120, N, N - (DMF) (100 W ) 12 h, ; 2m in, ; Pirahan (H 2 SO 4 H 2 O 2 = 70 30, V /V ) 30 m in, N 2 ;, 0. 5 mmol/l. /,,, h, MPTS (MPTS - SAM s) ; 30% m in,, N 2, MPTS - SAM s ;, 24 h,, N 2, OCA - 20 PH I X (XPS), Mg - K, ev, ev. Nanoscope - III (AFM ), MPTS - UMT - 2MT, 3 mm GCr15, 5 mm, 500 mn 180 mm /m in , 1, 31, ,,, MPTS - SAM s/cnt 66,, 1 Table 1 W a ter con tact angles on the surfaces of gla ss and m od if ied gla ss Surface Si 1 MPTS - SAM s 31 Oxidized MPTS - SAM s 70 MPTS - SAM s/cnt 66 Contac angle / ( ) 1 MPTS - SAM s MPTS - SAM s MPTS - SAM s/cnt XPS. XPS, eV [ 1 ( a) ], MPTS S ( - SH ) [ 14 ], SAM s, 1 ( b) ev Fig. 1 XPS spectra of ( a) S2p ofmpts SAM coated on silicon substrate, ( b) S2p of oxidized MPTS SAM coated on silicon substrate ( c) La3d in Lanthanum - based thin film 1 ( a) S2p ( b) S2p ( c) La3d XPS

3 4, : 321 S2p, - SO 3 H. 1 ( c), ev, ev, ev ev La3d [ 15 ],. LaCl ev ev La3d ( 2),MPTS - SAM s/cnt La3d, - SO 3 H [ 16 ]. Fig. 2 XPS spectrum of La3d in LaCl 3 2 XPS AFM, 3. MPTS - SAM s [ 3 ( a) ], nm.,, 0. 2 nm, - SO 3 H - SH, [ 16 ]. SEM ( 4 ),,,,, 2. 2 UMT - 2MT - MPTS - SAM MPTS - SAM, :,, 80, ,, MPTS - SAM 0. 19, 280 MPTS - SAM, 300,,. MPTS - SAM , , 4 800, 0. 85,,

4 , MPTs, MPTs,. 5 ( c) SEM,,, MPTS,, MPTS - SAM s. ( - 4 f 0-14 ) 4f, [ 17 ]. MPTS - SAM s, Fig. 5 SEM m icrographs ofmpts ( a), CNT composite film at a low magnification ( b), and CNT composite film at a high magnification ( c) sliding against steel ball after 500 passes 5 ( a) ( b) ( c) SEM,,,,, ; 3 a. AFM SEM, MTPS - SAM s b., : [ 1 ],. [ J ]., 2004, 161 (1) : Shang - guan Q Q, Cheng X H. Studies of tribological p roperties of m icro - electro - mechanical system s and its surface lubrication[ J ]. Lubrication Engineering, 2004, 161 ( 1) : [ 2 ],,,. - [ J ]., 2000, 20 (4) : Hu Y Z, W ang H, Zhou K, et al. Superlubricity, interfacial friction and dissipation - some aspects on fundamental study of friction[ J ]. Tribology, 2000, 20 (4) : [ 3 ],,,. / [ J ]., 2005, 25 (3) :

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