Mater. Res. Soc. Symp. Proc. Vol. 831 005 Materials Research Society E3.38.1 Discrete Steps in the Capacitance-Voltage Characteristics of GaInN/GaN Light Emitting Diode Structures Y. Xia 1,, E. Williams 1,, Y. Park,3, I. Yilmaz 1,, J.M. Shah,3, E.F. Schubert 1,,3, C. Wetzel 1, 1 Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 1180, U.S.A. Future Chips Constellation, Rensselaer Polytechnic Institute, Troy, NY 1180, U.S.A. 3 Department of Electrical, Computer, and Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY 1180, U.S.A. ABSTRACT A detailed modeling of the electronic bandstructure of GaInN alloys and GaInN/GaN heterostructures typically used for high efficiency light emitting diodes is of high relevance for future improvements. Here we are exploring opportunities to accurately quantify the carrier dynamics under forward and reverse voltage bias. In GaInN/GaN LED-type heterostructures we observe distinct steps in the junction capacitance as a function of bias voltage within the depletion regime. Up to three individual steps can be identified that correspond to alternating ranges of capacitive and resistive impedances. Our analysis suggests that we are quantitatively monitoring the electron concentration in each individual quantum well. The pronounced clarity of the data reveals a high level of epitaxial perfection and spatial homogeneity across the entire area of the junction. INTRODUCTION III-nitride Quantum Well (QW) structure semiconductors have attracted much interest in recent years because they are known as promising materials for green, blue, and UV light emitting diodes (LED) [1-]. It is known that huge piezoelectric fields exist in GaN-based heterostructures with wurtzite crystal structure [3-5]. In GaInN layers biaxially compressed to GaN in typical Ga-face growth along the c-axis, the piezoelectric field is opposite to the growth direction [3, 4]. As a result the electron and hole wavefunctions in the QW are subjected to the quantum confined Stark effect (QCSE) even without an external electric field. When we apply an additional reverse bias voltage, the transition energy shows a blue-shift since piezoelectric field is compensated [3]. Thus the application of an external electric field perpendicular to the layers of QWs significantly changes the photoluminescence (PL) properties [6, 7]. On the other hand, capacitance-voltage (C-V) measurements are widely used to determine the carrier concentration in a p-n diode. Here we combine both methods in an attempt to quantify the net charges present at the individual heterointerfaces and to analyze the carrier depletion dynamics. This report presents C-V measurements of the GaInN/GaN QWs embedded in the depletion region of a specially designed p + -n junction LED. We correlate this data with both PL and photocurrent (PC) data as a function of the bias voltage from deep depletion up to forward injection.
E3.38. EXPERIMENTAL For the experiments, we used GaInN/GaN multiple quantum well (MQW) structure consisting of five wells embedded in a p-n diode. The acceptor dopant concentration is about 10 19 cm -3 Mg in the p + layer. The donor concentration is about 10 18 cm -3 Si in the n-layer. The active region is nominally undoped. Similar to 55 nm green LEDs [8] the thickness of each well layer amounts to 3 nm. For enhanced clarity, wells have been separated by barriers of the order of 30 nm thickness. The C-V data was measured at room temperature by using an HP4191A impedance/gain-phase analyzer. PL was performed at room temperature using the 457-nm-line of an Argon ion laser for excitation. At this wavelength, photocarriers can only be excited in the wells. The photons are not absorbed by the GaN barriers. The PL signal was analyzed by a Spex 1 m spectrometer and detected by a photo multiplier tube (PMT). The photocurrent was measured by an HP34401a multimeter. RESULTS AND DISCUSSION Fig. 1 shows the PL intensity and photocurrent as a function of the applied bias voltage of the GaInN/GaN MQW green LED-type structure. The spectrally integrated PL intensity was measured at wavelength intervals of 10 nm from 510 to 550 nm and then averaged. In this way, the signal is not affected by a shift of the emission peak. Electroluminescence (EL) intensity was suppressed by a chopper and lock-in amplifier system. In both experiments photocarriers were generated directly in the QWs by 457 nm (.71 ev) blue laser light. As the voltage decreases from 1.3 to -4 V, a stepwise decrease of the PL intensity is observed. This is not a result of a 4 Photocurrent I PC (µa) 0.8 0.4 PC Bias illumination λ = 457 nm P ~ 60 mw T = 300 K PL PL Intensity (arb. units) 0 d I PC / dv (arb. units) 0.0-4 - 0 Voltage (V) Figure 1 PL intensity (averaged from 510 nm to 550 nm) and photocurrent as a function of an external voltage in a green LED-type structure with laser excitation energy of.71 ev. As a dashed line the second derivative of the photocurrent is shown to identify characteristic points of the data (indicated by vertical ticks).
E3.38.3 4 Capacitance (pf) 60 45 30 Step Ι Step ΙΙ Step ΙΙΙ PL intensity (arb. unit) Avg from 510nm to 550nm 3-4 - 0 Voltage(V) Figure Room temperature capacitance-voltage characteristics in a green LED-type structure (left hand axis). Three distinct steps I, II, and III are labeled. The associated PL spectrum as a function of external voltage is also shown (right hand axis). wavelength shift of the emission peak. In parallel we observe an increase in the simultaneously measured photocurrent. The photocurrent shows changes in slopes near the steps in the PL. As a dashed line we include the smoothened second derivative of the photocurrent as a function of voltage. Overall we get three inflexions (indicated with vertical lines, which divide the voltage range into four regions. Each region shows a different slope of the photocurrent and a corresponding step in the PL signal. These results show that there is a strong correlation between PC and PL. We suspect that an increase in photocurrent induces a decrease of the PL intensity. Fig. shows the capacitance-voltage measurement of the same structure together with the PL intensity from Fig. 1. Over the bias range from -4 to +.3 V under a modulation frequency of 1 MHz, we obtained a C-V curve which shows three distinct Steps I, II, and III. When applying this voltage range to the LED-type structure, we sweep from deep depletion at -4 V to forward injection at +.3 V. The turn-on voltage for electroluminescence was determined to be +.6 V. Using the full-depletion approximation, we know the capacitance of a p + -n junction is inversely proportional to the total depletion layer width x d. Because the sample is a p + -n structure diode, we neglect depletion on the p + -side and x d is approximately equal to x n, which is the depletion layer width across the nominally intrinsic MQW region and the n-type region. So the capacitance C can be formulated by A C = ε 0 ε, (1) r x where the junction area is A 55,000µ m n, ε r is the relative static dielectric constant, and 0 the vacuum dielectric constant. From Fig. we can see that the capacitance increases slowly from -4 to -1.6 V (Step I) due to a slowly decreasing depletion region width. Then it changes ε is
E3.38.4 Net fixed charge concentration (cm -3 ).0x10 18 1.5x10 18 1.0x10 18 5.0x10 17 0.0 Photoluminescence Photocurrent Charge Conc. 60 80 100 10 140 160 Depletion width(nm) 4 PL intensity (arb. units) 0 PC intensity (arb. units) Figure 3 Net fixed charge concentration versus depletion width (left axis), PL spectrum (right axis), and PC as a function of depletion width deduced from the measured capacitance. rapidly from -1.6 to -0.7 V indicating a strong variation in x n. The second step (Step II) follows from -0.7 to +0.6 V again with weak variation of C and x n. Then another strong variation occurs from +0.6 to +1.5 V. In all we can see three steps, while the capacitance changes from 7 to 66 pf. The PL intensity follows these steps very closely: First PL increases from -4 to -1.6 V. Then it increases more rapidly from -1.6 to -0.7 V, which roughly corresponds to the behavior in the C-V curve. Another step up occurs near +1 V, both, for the PL and the capacitance. The overall decrease of the PL for increasing reverse bias must be attributed to carrier drift in the electric field across the depleted part of the active layer after thermal excitation of the carriers from the wells. When the external voltage drops from +1.3 to -4 V, the PL intensity decreases to about 50%. We now shall find an interpretation for the steps in the C-V curve. The variable slope means that the net fixed charge concentration in the depletion region is not uniform. In some parts the net fixed charge concentration is high leading to a weak variation of C with V, while in other parts it is low. The higher the net fixed charge concentration is, the more DC bias voltage increment we need to apply to get the same increment of depletion layer width. Therefore, the capacitance changes slowly in the highly charged areas of the n-type region, while in the lowly charged areas it changes quickly. For an interpretation we can use the model of donor and acceptor doping with concentrations N D on the n-side and N A on the p + -side, respectively. Considering 1 1 N D = d dv, if N A N D, () ε 0ε rea C we can calculate the fixed charge concentration. Using Eq. 1 we can interpret the voltage axis in terms of the depletion width. The results are shown in Fig. 3 together with the PL intensity and
E3.38.5 the photocurrent on the same depletion width axis. Here we can see three well pronounced peaks which show clearly that the fixed charge concentration is not uniform. The maximum fixed 17 charge concentration we derive is about N D = 8 10 cm -3, while the minimum value is about 16 7 10 cm -3. From the relative width of both regions we assign the high concentration areas to the wells and the low concentration areas to the barriers in between. The weak modulation of PC and PL now reveals clear step-like functions. It is important to recognize that any featureless curve will convert into a step-like function, when its voltage-axis is reinterpreted in terms of depletion width based on our C-V measurement. We therefore emphasize that while such an interpretation of the voltage axis is perfectly legitimate, we have good correspondence of steps in PL, PC, and capacitance already when plotted on the voltage axis in Figs. 1 and. Following our interpretation, PC and PL signals clearly correspond to the multitude of wells within the depletion zone. Per our assumption to neglect depletion of the p + layer, the depletion width should be zero at the physical interface of the last barrier and the p + layer. For increasing depletion width we eventually deplete the QW that lies closest to the p-side. In our case of a stretched QW sample this is most likely the well at 70 nm depletion width that closely corresponds to Step III in the PL, PC and capacitance data. Depletion of every additional well again strongly affects the other data. When the depletion region, starting from the p + side, reaches the position of the QWs, the PL intensity changes abruptly, while at the positions of the barriers, the PL intensity changes slowly. PC has the same behavior. These results show that PL and PC complement each other to a high degree. This indicates that both processes are not controlled by a voltage dependence of the absorption itself. In such a situation, PL and PC should vary in parallel. The results rather suggest that the excited state and/or the recombination path are voltage controlled by the field across the depleted region. A most likely process for this is thermoelectric field ionization and carrier drift of photo excited carriers within the depletion zone. Such an ionization would increase the current with increasing field strength and decrease the luminescence at the same time. Another interpretation has been given in AlGaAs/GaAs QW heterostructures with 0 nm barriers [9]. In this case carrier tunneling was suggested as the controlling mechanism. Steps in the capacitance-voltage behavior of MQW samples have previously studied in theory in Ref [10]. The resulting carrier concentrations have been attributed to the accumulated localized but otherwise mobile carriers within each QW. The value of N D therefore refers to the density of electrons that are trapped within the individual QW until they are ionized from the well due to field depletion. In GaAs/AlGaAs heterostructures the method has been used to characterize the homogeneity of such superlattices [11]. In that case, carrier density peaks of 5. nm FWHM have been identified. In our case, peak widths as narrow as 6 nm FWHM have been found at a total depletion width of 110 nm. This implies a very high uniformity of barrier and well widths across the entire are of the junction mesa. Lateral variations of the growth rate and layer thickness variations beyond a fraction of 6 nm / 110 nm = 5 % would have been expected to result in additional broadening of the charge concentration peak. The consistently pronounced clarity of three well-resolved well layers suggests a very high quality of the QW layer thicknesses and interfaces.
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