Inves&ga&on of atomic processes in laser produced plasmas for the short wavelength light sources
|
|
- Frank Piers Randall
- 5 years ago
- Views:
Transcription
1 Inves&ga&on of atomic processes in laser produced plasmas for the short wavelength light sources Akira Sasaki Quantum Beam Science Directorate Japan Atomic Energy Agency
2 Introduc&on EUV source at λ=6.5nm is interested for future lithographic applica&ons. Mul&ple charged ions of atomic elements with 50 Z 80 show strong emission in EUV wavelength region. Emission spectrum and CE from Gd and Tb LPP sources are es&mated by applying the theore&cal model used to inves&gate Sn plasmas. Subjects for theore&cal inves&ga&on of short wavelength light sources are discussed.
3 Proper&es of XUV emission. Gd and Tb ions have emission through 4d 4f transi&ons around λ=6.5nm. At higher temperature, narrower emission spectrum is observed from 4d open shell ( Rh to Rb isoelectronic sequence) ions. S. S. Churilov, Phys. Scr. 80, (2009).
4 Proper&es of 4d 4f + 4p 4d transi&on arrays Similar spectral profile from Sn to W. Wavelength decreases as atomic number increases. Weak dependence on ion charge.
5 Tb plasma T e =105eV, n i =10 19 /cm 3 4d 4f + 4p 4d transi&on array dominates the emission and absorp&on in photon energy 190eV band.
6 Calcula&on of CR (collisional radia&ve) model We calculate the level popula&on using the CR model, and coefficients of radia&ve transfer by applying detailed spectral profile of emission lines. 4d ions of Gd is obtained in the T e range of eV at the typical density of n i =10 19 /cm 3. 4d ions
7 Spectral efficiency of Sn, Xe, Nd and Gd T e [ev] Sn Nd Xe Gd n i [/cm 3 ]
8 Calculated spectrum of Tb assuming exponen&al density profile reproduces the experiment, except for side peaks originates from lower charged ions. T e =80eV n 0 =10 19 /cm 3 scale length = 50µm spectral shih= 0.15nm S. S. Churilov, Phys. Scr. 80, (2009).
9 Es&ma&on of CE using power balance model Self similar profile of plasma is sustained by a balance of incoming laser power and outgoing thermal, kine&c and radia&ve power at the cri&cal density point. target surface cri&cal density point n 0 plasma I laser log(n i ) T e I kin + I thermal + I rad I laser = I kin + I thermal + I rad I rad = CE = ( ) j ν n i x ( ),T e [ ] dxdν exp κ ν ( n ( i x ),T )d x e n i x ( x) = n 0 exp x, c s = zkt e c s t I EUV I kin + I thermal + I rad M i K. Nishihara, et al., Phys. Plasmas 15, (2008)
10 Op&miza&on of pumping condi&ons Radia&ve power loss is calculated using emissivity and opacity, taking absorp&on of radia&on in the plasma into account. Laser intensity is determined from the radia&ve power loss, which is calculated from ini&al density n 0, temperature T e, and pulse dura&on τ. At each n 0 and T e, op&mum pulse dura&on can be determined.
11 Op&mum point shihs towards higher Te and ni Sn 1019 ni [/cm3] Nd Te [ev] Te [ev] Te [ev] Te [ev] ni [/cm3] laser intensity [W/cm2] 8 CE(%) 4 40 Xe 1019 ni [/cm3] Gd ni [/cm3] 1020
12 CE of Tb sources Max. SE is obtained at zbar slightly less than 20. CE comparable to Sn sources can be obtained. laser intensity [W/cm 2 ] zbar spectral efficiency (%) CE (%)
13 Discussion on the result of Gd and Tb sources Calcula&on shows EUV sources based on 4d 4f + 4p 4d transi&on array can be scalable to λ=65å, using the similar atomic structure of 4d open shell ions. Half the emission wavelength results in 10 &mes increase of pumping power from Sn sources, as expected from Planck s law. Much higher pumping power ( W/cm 2 ) and short demands innova&on in the laser technology. Theore&cal methods should be improve for the op&miza&on of the source with high accuracy.
14 Subjects of atomic codes Calculated wavelength differs from experiment due to the effect of CI. Calcula&on including CI is impossible for 4f open shell ions with any exis&ng atomic codes. Development of new atomic code is necessary. Tb T e =80eV n 0 =10 19 /cm 3 Iden&fica&on of emission lines is very difficult for complex spectrum. Machine learning algorithms help spectroscopy.
15 Agreement between calc. and exp. some&me occurs at more than one condi&ons, making determina&on of T e and n i difficult. Result from each code is different depending on the atomic model and rate coefficients (a) 26eV exp. calc wavelength [nm] 1.0 (b) exp eV calc wavelength [nm] Code benchmark result Sn n i =8x10 20 /cm 3 A. Sasaki, et al. J. Appl. Phys.107, (2010)
16
17 Subjects of radia&on hydrodynamics simula&on (1) As the op&cal thickness of the plasma increases, difference between calcula&on and experiment. Coupled hydrodynamics, atomic process, and radia&on transport is difficult to calculate.
18 Subjects of radia&on hydrodynamics simula&on (2) Ini&al laser and target interac&on some&mes creates nonuniform structure in the plasma, which is difficult to calculate. Mechanism of non uniform abla&on is also important for debris forma&on and development of the method of mi&ga&on. D. Nakamura, et al., J. Phys. D: Appl. Phys. 41 (2008)
19 Summary For the development of short wavelength light sources, not only laser technology improved theore&cal methods will also be useful. To overcome difficulty to produce high temperature plasmas. To find new atomic transi&ons which have strong emission in the λ=6.5nm region. Subjects: Development of a new atomic code. Development of new methods to calculate non uniform structure and radia&on transport in plasmas.
Rare-earth plasma extreme ultraviolet sources at nm for next generation semiconductor lithography
Rare-earth plasma extreme ultraviolet sources at 6.5-6.7 nm for next generation semiconductor lithography Takeshi Higashiguchi 1 Takamitsu Otsuka 1, Deirdre Kilbane 3, John White 3, Noboru Yugami 1,2,
More informationPlasma EUV source has been studied to achieve 180W of power at λ=13.5nm, which is required for the next generation microlithography
Acknowledgement K. Nishihara, H. Nishimura, S. Fujioka Institute for Laser Engineering, Osaka University A. Sunahara, H. Furukawa Institute for Laser Technology T. Nishikawa, Okayama University F. Koike,
More informationProgress in LPP EUV Source Development by Japan MEXT Project
Progress in LPP EUV Source Development by Japan MEXT Project Y. Izawa, N. Miyanaga, H. Nishimura, S. Fujioka, T. Aota, K. Nagai, T. Norimatsu,K. Nishihara, M. Murakami, Y. -G. Kang, M. Nakatsuka, H. Fujita,
More informationRadiative Hydrodynamic Simulation of Laser-produced Tin Plasma for Extreme Ultraviolet Lithography
P10 Radiative Hydrodynamic Simulation of Laser-produced Tin Plasma for Extreme Ultraviolet Lithography A. Sunahara 1 K. Nishihara 2 A. Sasaki 3 1 Institute for Laser Technology (ILT) 2 Institute of Laser
More informationCollisionally- excited emission Lines
Collisionally- excited emission Lines Excita9on and emission in a 2- level atom Emission Lines Emission lines result from photon- emi@ng downward transi9ons, and provide key informa9on on the emi@ng objects,
More informationRadia-ve transfer and the TRUST benchmarks. Maarten Baes
Radia-ve transfer and the TRUST benchmarks Maarten Baes The passage of light within spiral galaxies, Leiden, 9 May 2014 The radia-ve transfer problem The general radia,ve transfer problem describes the
More informationPeculiarities of Modeling LPP Source at 6.X nm
V.Novikov, V.Ivanov, K.Koshelev, V.Krivtsun, A.Grushin, R.Kildiyarova, A.Solomyannaya Peculiarities of Modeling LPP Source at 6.X nm Outline Theoretical base Optimal plasma parameters Band position Scaling
More informationVisualization of Xe and Sn Atoms Generated from Laser-Produced Plasma for EUV Light Source
3rd International EUVL Symposium NOVEMBER 1-4, 2004 Miyazaki, Japan Visualization of Xe and Sn Atoms Generated from Laser-Produced Plasma for EUV Light Source H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi
More informationA 21 spontaneous radia:ve decay (s - 1 ) B 12 induced excita:on (via photons) [B 12 U ν s - 1 ]
Collisionally- excited emission Lines Excita:on and emission in a - level atom Emission Lines Emission lines result from photon- emiang downward transi:ons, and provide key informa:on on the emiang objects,
More informationLecture 7 Pumping & Popula3on Inversion*
Lecture 7 Pumping & Popula3on Inversion* Min Yan Op3cs and Photonics, KTH 15/04/16 1 * Some figures and texts belong to: O. Svelto, Principles of Lasers, 5th Ed., Springer. Reading Principles of Lasers
More informationPlasma Source Modelling for Future Lithography at 6.7 nm and Other Applications
Plasma Source Modelling for Future Lithography at 6.7 nm and Other Applications Gerry O Sullivan, Deirdre Kilbane, Li Bowen and Padraig Dunne, School of Physics, University College Dublin, Belfield, Dublin
More informationUtsunomiya University Experiments, September - November 2011
Colm O Gorman 1, Thomas Cummins 1, Takamitsu Otsuka 2, Noboru Yugami 2,4,Weihua Jiang 5, Akira Endo 6, Bowen Li 1, Padraig Dunne 1,Emma Sokell 1, Gerry O Sullivan 1 and Takeshi Higashiguchi 2,4 Utsunomiya
More informationOptimization of EUV Lithography Plasma Radiation Source Characteristics Using HELIOS-CR
Optimization of EUV Lithography Plasma Radiation Source Characteristics Using HELIOS-CR J. J. MacFarlane, P. Wang, I. E. Golovkin, P. R. Woodruff Prism Computational Sciences, Inc. Madison, WI (USA) http://www.prism-cs.com
More informationEUV spectra from the NIST EBIT
EUV spectra from the NIST EBIT D. Kilbane and G. O Sullivan Atomic and Molecular Plasma Physics group, UCD, Ireland J. D. Gillaspy, Yu. Ralchenko and J. Reader National Institute of Standards and Technology,
More informationLaser heating of noble gas droplet sprays: EUV source efficiency considerations
Laser heating of noble gas droplet sprays: EUV source efficiency considerations S.J. McNaught, J. Fan, E. Parra and H.M. Milchberg Institute for Physical Science and Technology University of Maryland College
More informationLecture 2: Transfer theory. Credit: Kees Dullemond
Lecture 2: Transfer theory Credit: Kees Dullemond What is radia:ve transfer? Radia:ve transfer is the physical phenomenon of energy transfer in the form of electromagne:c radia:on The propaga:on of radia:on
More informationStrain Profile and Size Dependent Electronic Band Structure of GeSn/SiSn Quantum Dots for Optoelectronic Application
12 th International Conference on Fiber Optics and Photonics, 2014 Indian Institute of Technology (IIT) Kharagpur, India Paper Title Time : 2.30 PM Date : 14 Dec 2014 Strain Profile and Size Dependent
More informationSpectroscopic Studies of Soft X-Ray Emission from Gadolinium Plasmas
I. Kambali, G. Atom O Sullivan Indonesia / Atom Vol. Indonesia 4 No. 2 (24) Vol. 47 No. - 2 (24) 7 - Spectroscopic Studies of Soft X-Ray Emission from Gadolinium Plasmas I. Kambali * and G. O Sullivan
More informationMeasurement of CO 2 laser absorption by thin plasma as a 13.5 nm EUV light source!
Measurement of CO 2 laser absorption by thin plasma as a 13.5 nm EUV light source! H. Nishimura 1, H. Matsukuma 1, K. Yoshida 1, T. Hosoda 1, A. Yogo 1,! N. Tanaka 1, S. Fujioka 1, K. Nishihara 1,! A.
More informationDevelopment of Radiation Hydrodynamic code STAR for EUV plasmas. Atsushi Sunahara. Institute for Laser Technology
Development of Radiation Hydrodynamic code STAR for EUV plasmas Atsushi Sunahara suna@ile.osaka-u.ac.jp Institute for Laser Technology 2013 International Workshop on EUV and Soft x-ray Sources University
More informationLaser-produced extreme ultraviolet (EUV) light source plasma for the next generation lithography application
Laser-produced extreme ultraviolet (EUV) light source plasma for the next generation lithography application EUV light source plasma Tin icrodroplet Main pulse (CO2 laser pulse) Pre-pulse (Nd:YAG laser
More informationThis work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under contract
This work was performed under the auspices of the U.S. Department of Energy by under contract DE-AC52-7NA27344. Lawrence Livermore National Security, LLC The ITER tokamak Tungsten (W) is attractive as
More informationMagne&c Dissipa&on in Rela&vis&c Jets
Magne&c Dissipa&on in Rela&vis&c Jets Yosuke Mizuno Ins$tute for Theore$cal Physics Goethe University Frankfurt In Black Hole Cam collabora$on (Theory Team) Blazars through Sharp Mul$- Frequency Eyes,
More informationEUV lithography and Source Technology
EUV lithography and Source Technology History and Present Akira Endo Hilase Project 22. September 2017 EXTATIC, Prague Optical wavelength and EUV (Extreme Ultraviolet) VIS 13.5nm 92eV Characteristics of
More informationThe Sun as a Typical Star. Stellar Spectra. Stellar Spectroscopy
Stellar Spectroscopy Resolved observa7ons of the sun allow us to look at varia7ons across the surface, but we can only look at (almost all) other stars in integrated light. In the visible, we see the photosphere
More informationA laser-produced plasma extreme ultraviolet (EUV) source by use of liquid microjet target
A laser-produced plasma extreme ultraviolet (EUV) source by use of liquid microjet target Takeshi Higashiguchi E-mail: higashi@opt.miyazaki-u.ac.jp Keita Kawasaki, Naoto Dojyo, Masaya Hamada, Wataru Sasaki,
More informationOptimization of laser-produced plasma light sources for EUV lithography
page 1 of 17 Optimization of laser-produced plasma light sources for EUV lithography M. S. Tillack and Y. Tao 1 University of California, San Diego Center for Energy Research 1 Currently at Cymer Inc.
More informationEfficient EUV source by use of a micro-target containing tin nanoparticles
2008 International Workshop on EUV Lithography Efficient EUV source by use of a micro-target containing tin nanoparticles Takeshi Higashiguchi higashi@cc.utsunomiya-u.ac.jp Utsunomiya University, Japan
More informationfree- electron lasers I (FEL)
free- electron lasers I (FEL) produc'on of copious radia'on using charged par'cle beam relies on coherence coherence is achieved by insuring the electron bunch length is that desired radia'on wavelength
More informationAdvanced beam manipula/ons
Advanced beam manipula/ons Beam manipula+ons involves the interac+on of the beam with external fields: laser tailored RF field (e.g. mul+ frequency) external beams The beam manipula+ons topics explored
More informationAblation Dynamics of Tin Micro-Droplet Target for LPP-based EUV light Source
1 Ablation Dynamics of Tin Micro-Droplet Target for LPP-based EUV light Source D. Nakamura, T. Akiyama, K. Tamaru, A. Takahashi* and T. Okada Graduate School of Information Science and Electrical Engineering,
More informationSpectroscopy of the Low Lying States of CaO +
Spectroscopy of the Low Lying States of CaO + 7 nd Interna+onal Symposium on Molecular Spectroscopy FE 09 July 3, 017 Robert A. VanGundy, Michael C. Heaven CaO + Mo8va8on Laser Cooling and Ion Trapping
More informationImportant processes in modeling and optimization of EUV lithography sources
Important processes in modeling and optimization of UV lithography sources T. Sizyuk and A. Hassanein Center for Materials under xtreme nvironment, School of Nuclear ngineering Purdue University, West
More informationAdvanced beam manipula/ons
Advanced beam manipula/ons beam manipula+ons are two fold: transverse (focusing, shaping, ) longitudinal (tailoring the current of energy spectrum of a beam) Transverse shaping is rather straigh>orward
More informationPIs: Louis DiMauro & Pierre Agostini
Interaction of Clusters with Intense, Long Wavelength Fields PIs: Louis DiMauro & Pierre Agostini project objective: explore intense laser-cluster interactions in the strong-field limit project approach:
More informationBEUV nanolithography: 6.7 or 11 nm?
BEUV nanolithography: 6.7 or 11 nm? N. I. Chkhalo, N. N. Salashchenko Institute for physics of microstructures of RAS, Nizhny Novgorod, Russia 2013 International Workshop on EUV and Soft X-Ray Dublin Ireland
More informationHigh Brightness Electrodeless Z-Pinch TM EUV Source for Mask Inspection Tools
High Brightness Electrodeless Z-Pinch TM EUV Source for Mask Inspection Tools Stephen F. Horne, Matthew M. Besen, Matthew J. Partlow, Donald K. Smith, Paul A. Blackborow, Deborah S. Gustafson Agenda Background
More informationfree- electron lasers II (FEL)
free- electron lasers II (FEL) undulator radia+on in the lab frame has the wavelength undulator period l = u 2 2 beam Lorentz factor K = eb 0 = eb 0 u mck u 2 mc ' 0.934B 0[T] u[cm] 1+ K2 2 + 2 2 angle
More informationProbabilis)c image reconstruc)on, foreground removal, and power spectrum inference from radio interferometers
Probabilis)c image reconstruc)on, foreground removal, and power spectrum inference from radio interferometers Ben Wandelt IAP, ILP, UPMC, CNRS Sorbonne University Theore>cal interest in 21cm cosmology
More informationDevelopment and Optimization of EUV Emission from Laser Produced Plasmas
Development and Optimization of EUV Emission from Laser Produced Plasmas Gerry O Sullivan School of Physics, University College Dublin, Belfield, Dublin 4, Ireland. 2011 International Workshop on EUV Lithography,
More informationComparison of EUV spectral and ion emission features from laserproduced
Comparison of EUV spectral and ion emission features from laserproduced and plasmas R. W. Coons, D. Campos, M. Crank, S. S. Harilal, and A. Hassanein School of Nuclear Engineering, and Center for Materials
More information- Covered thus far. - Specific Intensity, mean intensity, flux density, momentum flux. - Emission and absorp>on coefficients, op>cal depth
- Covered thus far - Specific Intensity, mean intensity, flux density, momentum flux - Emission and absorp>on coefficients, op>cal depth - Radia>ve transfer equa>on - Planck func>on, Planck spectrum, brightness
More informationLecture 8 Con,nuous- Wave Laser*
Lecture 8 Con,nuous- Wave Laser* Min Yan Op,cs and Photonics, KTH 24/04/15 1 * Some figures and texts belong to: O. Svelto, Principles of Lasers, 5th Ed., Springer. Reading Principles of Lasers (5th Ed.):
More informationSpectral control of emissions from Sn-doped targets for EUV lithography
University of California, San Diego UCSD-CER-05-05 Spectral control of emissions from Sn-doped targets for EUV lithography S. S. Harilal, B. O Shay, M. S. Tillack and Y. Tao August 2005 Center for Energy
More informationFundamental investigation on CO 2 laser-produced Sn plasma for an EUVL source
Fundamental investigation on CO 2 laser-produced Sn plasma for an EUVL source Yezheng Tao*, Mark Tillack, Kevin Sequoia, Russel Burdt, Sam Yuspeh, and Farrokh Najmabadi University of California, San Diego
More information5 questions, 3 points each, 15 points total possible. 26 Fe Cu Ni Co Pd Ag Ru 101.
Physical Chemistry II Lab CHEM 4644 spring 2017 final exam KEY 5 questions, 3 points each, 15 points total possible h = 6.626 10-34 J s c = 3.00 10 8 m/s 1 GHz = 10 9 s -1. B= h 8π 2 I ν= 1 2 π k μ 6 P
More informationAnalysis, simulation, and experimental studies of YAG and CO 2 laserproduced plasma for EUV lithography sources
Analysis, simulation, and experimental studies of YAG and CO 2 laserproduced plasma for EUV lithography sources A. Hassanein, V. Sizyuk, S.S. Harilal, and T. Sizyuk School of Nuclear Engineering and Center
More informationInstitute for Laser Technology
Shinsuke Fujioka, Teruyuki Ugomori, Kensuke Yoshida, Chaogang Li, Atsushi Sunahara A, Katsunobu Nishihara, Nozomi Tanaka, Hiroaki Nishimura Institute of Laser Engineering, Osaka University A Institute
More informationCross-Beam Energy Transport in Direct-Drive-Implosion Experiments
Cross-Beam Energy Transport in Direct-Drive-Implosion Experiments 35 3 Laser pulse Power (TW) 25 2 15 1 Modeled scattered light Measured 5 D. H. Edgell University of Rochester Laboratory for Laser Energetics.5
More informationGenera&on of Turbulence and Magne&c Field Amplifica&on behind Shock Wave in the ISM
Genera&on of Turbulence and Magne&c Field Amplifica&on behind Shock Wave in the ISM Tsuyoshi Inoue Aoyama- Gakuin University, Japan Collaborators: Shu- ichiro Inutsuka (Nagoya Univ.), Ryo Yamazaki (Aoyama-
More informationSolar and Earth Radia.on
Solar and Earth Radia.on Solar and Earth Radia.on Solar radia.on Any incoming radia.on measured at the earth s surface Earth radia.on The long- wave band of radia.on emi>ed by the earth What are the typical
More informationHigh quality beam genera1on in density downramp injec1on and its early applica1ons
2017 FEACT-II Science Workshop 17-20 October, 2017 SLAC, Menlo Park, CA High quality beam genera1on in density downramp injec1on and its early applica1ons Xinlu Xu, Thamine Dalichaouch, Weiming An, Shiyu
More informationLesson1: Peak proving
Lesson1: Peak proving A par2cle detector claim detec2on of GLE; They confirm it by sta2s2cal analysis, see below. Their analysis is incorrect. Read their conclusions look on the plots and answer ques2ons
More informationPu#ng the physics into sea ice parameterisa3ons: a case study (melt ponds)
Pu#ng the physics into sea ice parameterisa3ons: a case study (melt ponds) April 1998 July 1998 Ice Sta3on SHEBA. Canadian Coast Guard icebreaker Des Groseilliers. Danny Feltham Centre for Polar Observa3on
More informationSpecial Topics in Physics (Experiment) PHYS 8361 Tuesday +Thursday 12:30 pm 1:50 pm Hyer Hall G 021
Special Topics in Physics (Experiment) PHYS 8361 Tuesday +Thursday 12:30 pm 1:50 pm Hyer Hall G 021 Course Objec
More informationプラズマ光源関連イオンの EBIT による分光
プラズマ光源関連イオンの EBIT による分光 Emission spectroscopy of multiply charged ions related to plasma light sources with an EBIT 大橋隼人, 八釼純治, 坂上裕之 *, 中村信行 レーザー新世代研究センター, 電気通信大学 * 核融合科学研究所 2012 年度原子分子データ応用フォーラムセミナー 2012
More informationattosecond laser pulse
Kenichi Ishikawa ( ) http://ishiken.free.fr/english/lecture.html ishiken@atto.t.u-tokyo.ac.jp Advanced Plasma and Laser Science E attosecond laser pulse 1 attosecond pulse train (APT) isolated attosecond
More informationIntegrated modeling of LHCD non- induc6ve scenario development on Alcator C- Mod
Integrated modeling of LHCD non- induc6ve scenario development on Alcator C- Mod S. Shiraiwa, P. Bonoli, R. Parker, F. Poli 1, G. Wallace, and J, R. Wilson 1 PSFC, MIT and 1 PPPL 40th European Physical
More informationHigh-Harmonic Generation II
Soft X-Rays and Extreme Ultraviolet Radiation High-Harmonic Generation II Phasematching techniques Attosecond pulse generation Applications Specialized optics for HHG sources Dr. Yanwei Liu, University
More informationFLAG-ERA JTC 2017 GRANSPORT
FLAG-ERA JTC 2017 GRANSPORT Correlations and defects in graphene and related materials: Charge and heat transport Mikhail Titov FLAG-ERA JTC 2017 Project Kick-off Seminar - Graphene - Madrid 21 March 2018
More informationSpace weathering and the color- color diagram of Plu6nos and Jupiter Trojans
Space weathering and the color- color diagram of Plu6nos and Jupiter Trojans M. Melita 1, Z. Kaňuchová 2, R. BruneGo 3, G. Strazzulla 4 1 Ins$tuto de Astronoma y Fsica del Espacio (IAFE), Buenos Aires,
More informationOpacity effect on extreme ultraviolet radiation from laser-produced tin plasmas
Physics Physics fields Okayama University Year 2005 Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas Shinsuke Fujioka, Osaka University Hiroaki Nishimura, Osaka University
More informationInfluence of an intensive UV preionization on evolution and EUV-emission of the laser plasma with Xe gas target (S12)
Influence of an intensive UV preionization on evolution and EUV-emission of the laser plasma with Xe gas target (S12) 2013 Int. Workshop on EUV and Soft X-ray Sources UCD, Dublin, November 4-7, 2013 A.Garbaruk
More informationASTRO 310: Galac/c & Extragalac/c Astronomy Prof. Jeff Kenney. Class 7 Sept 19, 2018 The Milky Way Galaxy: Gas: HII Regions
ASTRO 310: Galac/c & Extragalac/c Astronomy Prof. Jeff Kenney Class 7 Sept 19, 2018 The Milky Way Galaxy: Gas: HII Regions importance of HII regions one of main ISM phases great example for understanding
More informationEnergy Levels, Oscillator Strengths, and Transition Probabilities of Ni XIX and Cu XX
Optics and Photonics Journal, 2014, 4, 54-89 Published Online March 2014 in SciRes. http://www.scirp.org/journal/opj http://dx.doi.org/10.4236/opj.2014.43008 Energy Levels, Oscillator Strengths, and Transition
More informationHigh-power Cryogenic Yb:YAG Lasers and Optical Particle Targeting for EUV Sources *
High-power Cryogenic Yb:YAG Lasers and Optical Particle Targeting for EUV Sources * J.D. Hybl**, T.Y. Fan, W.D. Herzog, T.H. Jeys, D.J.Ripin, and A. Sanchez EUV Source Workshop 29 May 2009 * This work
More informationDual Laser Plasma Photoabsorption Studies Of Gadolinium In The Extreme Ultraviolet Region
Dual Laser Plasma Photoabsorption Studies Of Gadolinium In The Extreme Ultraviolet Region Paddy Hayden National Centre for Plasma Science & Technology (NCPST) / School of Physical Sciences, Dublin City
More informationEXTREME ULTRAVIOLET AND SOFT X-RAY LASERS
Chapter 7 EXTREME ULTRAVIOLET AND SOFT X-RAY LASERS Hot dense plasma lasing medium d θ λ λ Visible laser pump Ch07_00VG.ai The Processes of Absorption, Spontaneous Emission, and Stimulated Emission Absorption
More informationTheore&cal evalua&on of fluorescence emission and energy deposi&on in air generated by electrons
Theore&cal evalua&on of fluorescence emission and energy deposi&on in air generated by electrons Fernando Arqueros Universidad Complutense de Madrid 0 Introduc)on Rela)ve intensi)es Outline The role of
More informationRadiation hydrodynamics of tin targets for laser-plasma EUV sources
Radiation hydrodynamics of tin targets for laser-plasma EUV sources M. M. Basko, V. G. Novikov, A. S. Grushin Keldysh Institute of Applied Mathematics, Moscow, Russia RnD-ISAN, Troitsk, Moscow, Russia
More informationModelling of high intensity EUV light sources based on laser- & discharge- produced plasmas
Modelling of high intensity EUV light sources based on laser- & discharge- produced plasmas Sergey V. Zakharov +, Peter Choi, Vasily S. Zakharov NANO UV sas EPPRA sas + also with RRC Kurchatov Institute,
More informationEvaluation at the intermediate focus for EUV Light Source
Evaluation at the intermediate focus for EUV Light Source Takashi Suganuma, Georg Soumagne, Masato Moriya, Tamotsu Abe, Akira Sumitani, Akira Endo Extreme Ultraviolet Lithography System Development Association
More informationApplication of atomic data to quantitative analysis of tungsten spectra on EAST tokamak
Technical Meeting on Uncertainty Assessment and Benchmark Experiments for Atomic and Molecular Data for Fusion Applications, 19-21 December 2016, Vienna, Austria Application of atomic data to quantitative
More informationHigh-power Cryogenic Yb:YAG Lasers and Optical Particle Targeting for EUV Sources *
High-power Cryogenic Yb:YAG Lasers and Optical Particle Targeting for EUV Sources * J.D. Hybl**, T.Y. Fan, W.D. Herzog, T.H. Jeys, D.J.Ripin, and A. Sanchez 2008 International Workshop on EUV Lithography
More informationNumerical Modeling of Radiative Kinetic Plasmas
2014 US-Japan JIFT Workshop on Progress in kinetic plasma simulations Oct.31-Nov.1, 2014, Salon F, New Orleans Marriott, New Orleans, LA, U.S.A Numerical Modeling of Radiative Kinetic Plasmas T. Johzaki
More informationHigh-density implosion via suppression of Rayleigh Taylor instability
Journal of Physics: Conference Series PAPER OPEN ACCESS High-density implosion via suppression of Rayleigh Taylor instability Recent citations - Experimental study of shock-accelerated inclined heavy gas
More informationSpectral analysis of K-shell X-ray emission of magnesium plasma produced by ultrashort high-intensity laser pulse irradiation
PRAMANA c Indian Academy of Sciences Vol. 82, No. 2 journal of February 2014 physics pp. 365 371 Spectral analysis of K-shell X-ray emission of magnesium plasma produced by ultrashort high-intensity laser
More informationCri$cal Casimir forces from the equa$on of state of quantum cri$cal systems
Cri$cal Casimir forces from the equa$on of state of quantum cri$cal systems A. Rançon D. Lopes Cardozo T. Roscilde P. Holdsworth Ecole Normale Superieure de Lyon F. Rose N. Dupuis LPTMC Paris 6 L.-P. Henry
More informationTransport Simula/ons for Fast Igni/on on NIF
Transport Simula/ons for Fast Igni/on on NIF D. J. Strozzi, M. Tabak, D. P. Grote, B. I. Cohen, H. D. Shay, R. P. J. Town, A. J. Kemp, M. Key Lawrence Livermore Na.onal Laboratory 7000 East Avenue, Livermore,
More informationMo#va#on J B = P. Magne&cally confined fusion devices require detailed &meresolved measurement of J(r) and B(r):
Mo#va#on Magne&cally confined fusion devices require detailed &meresolved measurement of J(r) and B(r): J B = P Measurements of δβ and δj associated with instabili&es (MHD, fast par&cle modes, turbulence,
More informationCritical Path to Impact Fast Ignition Suppression of the Rayleigh-Taylor Instability
Critical Path to Impact Fast Ignition Suppression of the Rayleigh-Taylor Instability H. Azechi Vice Director Institute of Laser Engineering, Osaka University Jpn-US WS on HIF and HEDP September 28, 2005
More informationRadiation-Hydrodynamics, Spectral, and Atomic Physics Modeling of Laser-Produced Plasma EUV Lithography Light Sources
Radiation-Hydrodynamics, Spectral, and Atomic Physics Modeling of aser-produced Plasma EUV ithography ight Sources J. J. MacFarlane, C.. Rettig, P. Wang, I. E. Golovkin, and P. R. Woodruff Prism Computational
More informationPB I FEL Gas-Monitor Detectors for FEL Online Photon Beam Diagnostics BESSY
FEL 2004 Gas-Monitor Detectors for FEL Online Photon Beam Diagnostics M. Richter S.V. Bobashev, J. Feldhaus A. Gottwald, U. Hahn A.A. Sorokin, K. Tiedtke BESSY PTB s Radiometry Laboratory at BESSY II 1
More informationIntroduction to intense laser-matter interaction
Pohang, 22 Aug. 2013 Introduction to intense laser-matter interaction Chul Min Kim Advanced Photonics Research Institute (APRI), Gwangju Institute of Science and Technology (GIST) & Center for Relativistic
More informationAtomic Emission Spectra. and. Flame Tests. Burlingame High School Chemistry
Atomic Structure Atomic Emission Spectra and Flame Tests Flame Tests Sodium potassium lithium When electrons are excited they bump up to a higher energy level. As they bounce back down they release energy
More informationMulti-Scale Simulations for Fast Ignition. H. Nagatomo, T. Johzaki, A. Sunahara, and K. Mima Institute of Laser Engineering g Osaka University
Multi-Scale Simulations for Fast Ignition and Related Laser Plasma Physics H. Nagatomo, T. Johzaki, A. Sunahara, and K. Mima Institute of Laser Engineering g Osaka University Y. Sentoku University of Nevada
More informationPlanning and Analyzing WFIRST Grism Observa:ons
Planning and Analyzing WFIRST Grism Observa:ons Stefano Casertano and the STScI Slitless Spectroscopy Working Group (Brammer, Dixon, MacKenty, Pirzkal, Ravindranath, Ryan) Pasadena 2/29/2016 - WFIRST mee6ng,
More informationChapter 6 Electronic Structure of Atoms
Sec$on 7.1 Electromagne,c Radia,on Chapter 6 Electronic Structure of Atoms Sec$on 7.1 Electromagne,c Radia,on Different Colored Fireworks Copyright Cengage Learning. All rights reserved 2 Sec$on 7.1 Electromagne,c
More informationIntroduc)on to Fuel Cells
Introduc)on to Fuel Cells Anode (oxida)on loss of electrons): 2H 2 à 4H + +4e - Cathode (reduc-on gain of electrons) O 2 +4H + +4e - à 2H 2 O Overall reac)on (redox): 2H 2 + O 2 à 2H 2 O We will par)cularly
More informationNIST Atomic Data Program: Update and Prospects
NIST Atomic Data Program: Update and Prospects Yuri Ralchenko National Institute of Standards and Technology Gaithersburg, MD 20899, USA DCN Meeting, IAEA, Vienna, 2013 Plan Staff Atomic Spectra Database
More informationR Process Nucleosynthesis And Its Site. Mario A. Riquelme Theore<cal Seminar Fall 2009
R Process Nucleosynthesis And Its Site Mario A. Riquelme Theore
More informationCosmological N-Body Simulations and Galaxy Surveys
Cosmological N-Body Simulations and Galaxy Surveys Adrian Pope, High Energy Physics, Argonne Na3onal Laboratory, apope@anl.gov CScADS: Scien3fic Data and Analy3cs for Extreme- scale Compu3ng, 30 July 2012
More informationWuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan , China
Research of the EUV radiation and CO 2 Laser produced tin plasma Wang Xinbing 1 *, Zuo DouLuo 1, Lu Peixiang 2, Wu Tao 3 1 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science
More informationModeling of radiative properties of Sn plasmas for EUV source
Modeling of radiative properties of Sn plasmas for EUV source Akira Sasaki Quantum Beam Science Directorate, Japan Atomic Energy Agency 8-1 Umemidai, Kizugawa-shi, Kyoto 619-0215, Japan Atsushi Sunahara,
More informationWhat must the PWFA Collabora2on do at FACET II Overview of requirements for Plasma Sources based on experimental needs
What must the PWFA Collabora2on do at FACET II Overview of requirements for Plasma Sources based on experimental needs Chan Joshi UCLA With help from Weiming An, Chris Clayton, Xinlu Xu, Ken Marsh, Warren
More informationCHARACTERISTICS OF ION EMISSION FROM CO 2 /Nd:YAG LPP WITH TIN TARGET
CHARACTERISTICS OF ION EMISSION FROM CO 2 /Nd:YAG LPP WITH TIN TARGET Akihiko Takahashi 1, Hiroki Tanaka 2, Atsushi Matsumoto 2, Yuuki Hashimoto 2, Kiichiro Uchino 3, Tatsuo Okada 2 1 Department of Health
More informationAMO at FLASH. FELs provide unique opportunities and challenges for AMO physics. due to essentially three reasons:
Experience at FLASH AMO at FLASH FELs provide unique opportunities and challenges for AMO physics due to essentially three reasons: AMO at FLASH 1. huge integrated flux dilute samples Highly charged ions
More informationWhat is Op*cs? Photonics?
What is Op*cs? Photonics? Think of op*cs as the science of light. It s a branch of physics that describes the behavior and proper*es of light and the interac*on of light with ma
More informationA Straight Forward Path (Roadmap) to EUV High Brightness LPP Source
Introduction and Outline A Straight Forward Path (Roadmap) to EUV High Brightness LPP Source Rainer Lebert, AIXUV Target Features of High Brightness EUV Source LPP Concept to reach Specification Target
More informationElectron Transport Simula2ons for Fast Igni2on on NIF
Electron Transport Simula2ons for Fast Igni2on on NIF D. J. Strozzi, D. P. Grote, M. Tabak, R. P. J. Town, A. J. Kemp Lawrence Livermore Na.onal Laboratory 7000 East Avenue, Livermore, CA 94550, USA Poster
More information