プラズマ光源関連イオンの EBIT による分光
|
|
- Hilary McBride
- 5 years ago
- Views:
Transcription
1 プラズマ光源関連イオンの EBIT による分光 Emission spectroscopy of multiply charged ions related to plasma light sources with an EBIT 大橋隼人, 八釼純治, 坂上裕之 *, 中村信行 レーザー新世代研究センター, 電気通信大学 * 核融合科学研究所 2012 年度原子分子データ応用フォーラムセミナー 2012 年 12 月 日核融合科学研究所, 土岐市, 岐阜県
2 Outline Experimental setup Electron beam ion trap (EBIT) EUV spectrometer Motivation & Results and discussion for Sn ions Semiconductor photo-lithography Extreme ultra-violet (EUV) lithography Gd ions Beyond EUV lithography Bi ions Water window, Live cell imaging EBIT emission spectra Comparison with other emissions and Calc. (FAC) Summary and Outlook
3 Principle of an EBIT (Electron Beam Ion Trap) Penning-like ion trap + High density electron beam Successive ionization photon Ion trap Well-type potential (DT1, 2, 3) + Space charge (e-beam) High density electron beam Superconductive magnets Emission spectroscopy Ion extraction; collision expt. 3
4 Two EBITs at UEC Tokyo Tokyo-EBIT since 1995 CoBIT since 2007
5 Tokyo-EBIT e-beam energy e-beam current Magnetic field Cryostat temp. : kev : 330 ma (max) : 4.5 T (max) : 4.2 K (LHe) Ion trap Middle of the trap
6 CoBIT (Compact, Corona, EBIT) N. Nakamura et al., Rev. Sci. Instrum., 79 (2008) LN 2 tank 10 cm High-T c SCM Ion trap e-gun e-beam energy e-beam current Magnetic field Cryostat temp. : kev : 20 ma (max) : 0.2 T (max) : 77 K (LN 2 )
7 The core of CoBIT Extractor Collector DT3 DT2 DT1 Soft iron Trap Extractor Collector Trap region e-gun e-gun High-T c SCM
8 Comparison between two EBITs Tokyo-EBIT CoBIT e-beam energy / kev e-beam current (max) / ma Magnetic field (max) / T 4.5 (typically 4.0) 0.2 (typically < 0.1) Cryostat temp. / K Coolant LHe LN 2 Height / m ~ 4 ~ 0.4
9 Fractional abundance in hot plasmas W q+ T. Pütterich, Ph.D thesis. Running Reactor CoBIT ITER Tokyo-EBIT
10 What we can do using an EBIT? Kr nm IP(15+) : 538 ev IP(16+) : 588 ev IP(17+) : 640 ev Residual gas ions Kr nm N. Nakamura et al., Rev. Sci. Instrum., (2008)
11 EUV spectrometer at the Tokyo-EBIT Trapped ions Slide stage Peltier cooled CCD camera GV Grating Rotatable stage Grating 1 Grating 2 Groove density / lines/mm Curvature radius / m Distance (r) / mm Metallic Sn/Gd/Bi in a Knudsen 1100 o C Distance (r ) / mm Incident angle (α) / degree Wavelength H. Ohashi range et al., / nm Rev. Sci. Instrum (2011) 25
12 EUV spectrometer at the Tokyo-EBIT Back-illuminated CCD Grating chamber Tokyo-EBIT Grating chamber Back-illuminated CCD
13 Sn ions
14 Semiconductor Photo-Lithography Resolution Exposure light wavelength Shorter wavelength Highly integrated The optical layout of the engineering test stand for EUV lithography.
15 Developments of the exposure light wavelength What is next?
16 Reflectivity Extreme Ultra-Violet (EUV) Lithography Exposure light Wavelength E / ev l / m Light Source Optical Mirror Decided! Microwave Infrared Present Near future nm 13.5nm 380nm Ultra-Violet 780nm Visible Wavelength / nm X-ray Reflectivity of Mo/Si multi-layer mirror (MLM) for EUV lithography g-ray l = 13.5 nm ( 91.9 ev ) 3Li, 50 Sn and 54 Xe plasmas
17 Electron beam energy / nm EUV emission spectra of Sn ions Unresolved transition array (UTA) of 4d-4f and 4p-4d transitions near 13.5 nm IPs to produce each charge state / ev 10+ : : : : : : : : : : : : : : Wavelength / nm J. Yatsurugi et al., Phys. Scr., T (2011)
18 Intensity / arb. units Intensity / arb. units Complementary spectroscopy of Sn ions CXS : Sn 15+ -He EBIT : q max = 14 E e ~ 312 ev I e = 2.2 ma Charge exchange collision (CXS) Resonance line Transition between excited states Wavelength / nm CXS : Sn 18+ -He EBIT : electron impact Resonance line EBIT : q max = 17 E e ~ 473 ev I e = 3.3 ma EBIT Charge exchange Complementary Expt Wavelength / nm H. Ohashi et al., J. Phys. Conf. Ser., (2009)
19 Gd ions
20 Extreme Ultra-Violet (EUV) Lithography Exposure light Wavelength E / ev l / m Light Source Optical Mirror Microwave Infrared 1 Present Near future Future nm 13.5nm 6.x nm 10-9 Ultra-Violet X-ray 780nm Visible 380nm Calculated normal incidence reflectance and band width 1, g-ray l = 6.x nm 64Gd and 65 Tb plasmas R. Soufli et al., Appl. Opt., (2008). M. Fernandez-Perea et al., J. Opt. Soc. Am. A, (2007).
21 Next-Generation EUV Lithography at 6.x nm S.S.Churilov et al., Phys.Scr (2009) Atomic data for each charge state is needed to understand and optimize the plasma!! Atomic data accumulation!!
22 Electron beam energy dependence Expt. Calc. with FAC, I e = 5 ma, B = 1.5 T Calc. 4-4 band, S.S.Churilov et al.
23 Intensity / arb. units Identification of observed lines with FAC Gd XXXVI 4s-4p (FAC) E e = 1.51 kev (Expt.) Gd XXXV 4s 2-4s4p E e = 1.44 kev Gd XXXIV 4p-4d E e = 1.35 kev Wavelength / nm
24 Identification of observed lines with FAC Ion Sequence Lower level Upper level Expt.wavelength / nm Calc. / nm Conf. State Conf. State This work Previous FAC Gd 35+ Cu-like 4s 4s 1/2 4p 4p 3/ Gd 34+ Zn-like 4s 2 (4s 2 ) 0 4s4p (4s4p) (15) (15) (3) (20) (10) (2) 6 Gd 33+ Ga-like 4s 2 4p 4p 1/2 4s 2 4d 4d 3/ (20) Under identification for other observed emission lines. 1 J. Reader and G. Luther, Phys. Scr., (1981) 2 G. A. Doschek et al., J. Opt. Soc. Am. B, (1988) 3 J. F. Seely et al., Phys. Rev. A, (1989) 4 C. M. Brown et al., At. Data Nucl. Data Tables, (1994) 5 N. Acquista and J. Reader, J. Opt. Soc. Am. B, (1984) 6 J. Reader and G. Luther, Phys. Rev. Lett., (1980) 7 K. B. Fournier et al., Phys. Rev. A, (1994)
25 Bi ions
26 Water window & X-ray microscopy for live cell imaging In vivo!! Light Source: Synchrotrons or Free Electron Laser (FEL) Too big and not easy to use Table-top (laboratory-scale) broadband emission source
27 LPP spectra of Bi ions Cowan code T. Higashiguchi et al., Appl. Phys. Lett., (2012)
28 Summary EUV emission spectroscopy of 50 Sn, 64 Gd and 83 Bi ions with an EBIT. UTA of 4d-4f and 4p-4d transitions contribute to main emissions for EUV light sources. FAC Calc. for line identification discrepancy between Expt. and Calc. Comparison with other emission spectra in different Expt. Outlook Identification of observed emission lines Lower energy Expt. using CoBIT ( Lower charge states) Charge exchange spectroscopy ( Including transitions between excited states) Terbium( 65 Tb) for BEUVL, Zirconium ( 40 Zr) for water window
29 Thank you for your attention!!
EUV spectra from the NIST EBIT
EUV spectra from the NIST EBIT D. Kilbane and G. O Sullivan Atomic and Molecular Plasma Physics group, UCD, Ireland J. D. Gillaspy, Yu. Ralchenko and J. Reader National Institute of Standards and Technology,
More informationPlasma-Related Atomic Physics with an Electron Beam Ion Trap
Plasma-Related Atomic Physics with an Electron Beam Ion Trap Nobuyuki NAKAMURA Institute for Laser Science, The University of Electro-Communications, Tokyo 182-8585, Japan (Received 20 May 2013 / Accepted
More informationPlasma EUV source has been studied to achieve 180W of power at λ=13.5nm, which is required for the next generation microlithography
Acknowledgement K. Nishihara, H. Nishimura, S. Fujioka Institute for Laser Engineering, Osaka University A. Sunahara, H. Furukawa Institute for Laser Technology T. Nishikawa, Okayama University F. Koike,
More informationSpectroscopic Studies of Soft X-Ray Emission from Gadolinium Plasmas
I. Kambali, G. Atom O Sullivan Indonesia / Atom Vol. Indonesia 4 No. 2 (24) Vol. 47 No. - 2 (24) 7 - Spectroscopic Studies of Soft X-Ray Emission from Gadolinium Plasmas I. Kambali * and G. O Sullivan
More informationRare-earth plasma extreme ultraviolet sources at nm for next generation semiconductor lithography
Rare-earth plasma extreme ultraviolet sources at 6.5-6.7 nm for next generation semiconductor lithography Takeshi Higashiguchi 1 Takamitsu Otsuka 1, Deirdre Kilbane 3, John White 3, Noboru Yugami 1,2,
More informationApplication of atomic data to quantitative analysis of tungsten spectra on EAST tokamak
Technical Meeting on Uncertainty Assessment and Benchmark Experiments for Atomic and Molecular Data for Fusion Applications, 19-21 December 2016, Vienna, Austria Application of atomic data to quantitative
More informationVisualization of Xe and Sn Atoms Generated from Laser-Produced Plasma for EUV Light Source
3rd International EUVL Symposium NOVEMBER 1-4, 2004 Miyazaki, Japan Visualization of Xe and Sn Atoms Generated from Laser-Produced Plasma for EUV Light Source H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi
More information低電離タングステンイオンの電子捕獲断面積測定 Cross Sections for Electron Capture Collision of W Ions
低電離タングステンイオンの電子捕獲断面積測定 Cross Sections for Electron Capture Collision of W ons 京都大学工学研究科原子核工学専攻今井誠, 入来仁隆 Makoto MA, Yoshitaka RK Department of Nuclear Engineering, Kyoto University 原子分子データ応用フォーラムセミナー, NFS,
More informationEXTREME ULTRAVIOLET AND SOFT X-RAY LASERS
Chapter 7 EXTREME ULTRAVIOLET AND SOFT X-RAY LASERS Hot dense plasma lasing medium d θ λ λ Visible laser pump Ch07_00VG.ai The Processes of Absorption, Spontaneous Emission, and Stimulated Emission Absorption
More informationDirect Observation of the M1 Transition between the Ground Term Fine Structure Levels of W VIII
Article Direct Observation of the M1 Transition between the Ground Term Fine Structure Levels of W VIII Momoe Mita 1, Hiroyuki A. Sakaue 2, Daiji Kato 2,3, Izumi Murakami 2,3 and Nobuyuki Nakamura 1, *
More informationThis work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under contract
This work was performed under the auspices of the U.S. Department of Energy by under contract DE-AC52-7NA27344. Lawrence Livermore National Security, LLC The ITER tokamak Tungsten (W) is attractive as
More informationNIST Research on Spectroscopy and Collisional-Radiative Modeling of Highly-Charged Ions of Tungsten
NIST Research on Spectroscopy and Collisional-Radiative Modeling of Highly-Charged Ions of Tungsten Yuri Ralchenko National Institute of Standards and Technology Gaithersburg, USA Vienna, Austria, Dec
More informationInvestigation of M1 transitions of the ground-state configuration of In-like Tungsten
Investigation of M1 transitions of the ground-state configuration of In-like Tungsten W Li 1,2,3, J Xiao 1,2, Z Shi 1,2a, Z Fei 1,2b, R Zhao 1,2c, T Brage 3, S Huldt, R Hutton 1, 2 * and Y Zou 1,2 * 1
More informationAn import year!
1759.. An import year! Some Historic and Current Aspects of Plasma Diagnostics Using Atomic Spectroscopy Roger Hutton and Yaming Zou Shanghai Electron Beam Ion Trap Laboratory Modern Physics Institute,
More informationTrapped in Shanghai Spectroscopy with the Shanghai Electron Beam Ion Traps
Trapped in Shanghai Spectroscopy with the Shanghai Electron Beam Ion Traps Roger Hutton! "#on behalf of the Shanghai EBIT laboratory Modern Physics Institute, Fudan University, Shanghai China Outline Where
More informationThe Extreme Ultraviolet Emissions of W 23+ (4f 5 )
The Extreme Ultraviolet Emissions of W 23+ (4f 5 ) T Pütterich, V. Jonauskas, R Neu, R Dux and ASDEX Upgrade Team Max Planck Institut für Plasmaphysik, EURATOM Association, D 85748 Garching, Germany Institute
More informationExtreme ultraviolet spectroscopy of highly charged argon ions at the Berlin EBIT
Extreme ultraviolet spectroscopy of highly charged argon ions at the Berlin EBIT C. Biedermann, R. Radtke, G. Fussmann, F.I. Allen Institut für Physik der Humboldt-Universität zu Berlin, Lehrstuhl Plasmaphysik,
More informationEUV lithography and Source Technology
EUV lithography and Source Technology History and Present Akira Endo Hilase Project 22. September 2017 EXTATIC, Prague Optical wavelength and EUV (Extreme Ultraviolet) VIS 13.5nm 92eV Characteristics of
More informationStudies of the ECR plasma in the visible light range
Studies of the ECR plasma in the visible light range S. Biri, R. Rácz, J. Pálinkás* Institute of Nuclear Research (ATOMKI), Debrecen, Hungary *University of Debrecen, Dept. Exp. Physics, Hungary 1 S. Biri,
More informationEUV Reflectivity measurements on Acktar Sample Magic Black
Report EUV Reflectivity measurements on Acktar Sample Magic Black S. Döring, Dr. K. Mann Laser-Laboratorium Göttingen e.v. October 28, 2011 Contents 1 Introduction 3 2 Setup 3 3 Measurements 4 4 Conclusion
More informationDual Laser Plasma Photoabsorption Studies Of Gadolinium In The Extreme Ultraviolet Region
Dual Laser Plasma Photoabsorption Studies Of Gadolinium In The Extreme Ultraviolet Region Paddy Hayden National Centre for Plasma Science & Technology (NCPST) / School of Physical Sciences, Dublin City
More informationEvaluation at the intermediate focus for EUV Light Source
Evaluation at the intermediate focus for EUV Light Source Takashi Suganuma, Georg Soumagne, Masato Moriya, Tamotsu Abe, Akira Sumitani, Akira Endo Extreme Ultraviolet Lithography System Development Association
More informationImpurity accumulation in the main plasma and radiation processes in the divetor plasma of JT-60U
1 EX/P4-25 Impurity accumulation in the main plasma and radiation processes in the divetor plasma of JT-6U T. Nakano, H. Kubo, N. Asakura, K. Shimizu and S. Higashijima Japan Atomic Energy Agency, Naka,
More informationFormation of High-b ECH Plasma and Inward Particle Diffusion in RT-1
J Fusion Energ (2010) 29:553 557 DOI 10.1007/s10894-010-9327-6 ORIGINAL RESEARCH Formation of High-b ECH Plasma and Inward Particle Diffusion in RT-1 H. Saitoh Z. Yoshida J. Morikawa Y. Yano T. Mizushima
More informationMultilayer Optics, Past and Future. Eberhard Spiller
Multilayer Optics, Past and Future Eberhard Spiller 1 Imaging with light Waves move by λ in 10-15 to 10-19 sec Wave trains are 10-14 to 10-18 sec long Each wavelet contains less than 1 photon Eye responds
More informationA laser-produced plasma extreme ultraviolet (EUV) source by use of liquid microjet target
A laser-produced plasma extreme ultraviolet (EUV) source by use of liquid microjet target Takeshi Higashiguchi E-mail: higashi@opt.miyazaki-u.ac.jp Keita Kawasaki, Naoto Dojyo, Masaya Hamada, Wataru Sasaki,
More informationLASER-COMPTON SCATTERING AS A POTENTIAL BRIGHT X-RAY SOURCE
Copyright(C)JCPDS-International Centre for Diffraction Data 2003, Advances in X-ray Analysis, Vol.46 74 ISSN 1097-0002 LASER-COMPTON SCATTERING AS A POTENTIAL BRIGHT X-RAY SOURCE K. Chouffani 1, D. Wells
More informationFundamental investigation on CO 2 laser-produced Sn plasma for an EUVL source
Fundamental investigation on CO 2 laser-produced Sn plasma for an EUVL source Yezheng Tao*, Mark Tillack, Kevin Sequoia, Russel Burdt, Sam Yuspeh, and Farrokh Najmabadi University of California, San Diego
More informationComparison of EUV spectral and ion emission features from laserproduced
Comparison of EUV spectral and ion emission features from laserproduced and plasmas R. W. Coons, D. Campos, M. Crank, S. S. Harilal, and A. Hassanein School of Nuclear Engineering, and Center for Materials
More informationCore-Level spectroscopy. Experiments and first-principles calculations. Tomoyuki Yamamoto. Waseda University, Japan
Core-Level spectroscopy Experiments and first-principles calculations Tomoyuki Yamamoto Waseda University, Japan 22 nd WIEN2k workshop Jun. 26 th, 2015@Singapore Outline What is core-level spectroscopy
More informationEfficient EUV source by use of a micro-target containing tin nanoparticles
2008 International Workshop on EUV Lithography Efficient EUV source by use of a micro-target containing tin nanoparticles Takeshi Higashiguchi higashi@cc.utsunomiya-u.ac.jp Utsunomiya University, Japan
More informationPlasma Radiation. Ø Free electrons Blackbody emission Bremsstrahlung
Plasma Radiation Ø Free electrons Blackbody emission Bremsstrahlung Ø Bound electrons (Z>2) Unresolved, multi-line emission Resolved line emission -- Single Z +n Objective Infer a thermodynamic quantity
More informationHypTPC for high-rate beams
HypTPC for high-rate beams 佐甲博之 ( 原子力機構 ) 新学術領域 中性子星核物質 第 2 回検出器ワークショップ 2017/3/4, 東工大 1 Outline HypTPC の設計 The TPC vs HypTPC High rateへの対応 Field cageの帯電対策 HypTPC,TPCの応用 2 TPC The best three-dimensional
More informationMain Magnetic Focus Ion Trap, new tool for trapping of highly charged ions
V. P. Ovsyannikov a Main Magnetic Focus Ion Trap, new tool for trapping of highly charged ions Hochschulstr. 13, 01069, Dresden, Germany It is proposed to produce the highly charged ions in the local ion
More informationLaser heating of noble gas droplet sprays: EUV source efficiency considerations
Laser heating of noble gas droplet sprays: EUV source efficiency considerations S.J. McNaught, J. Fan, E. Parra and H.M. Milchberg Institute for Physical Science and Technology University of Maryland College
More informationTakeo Watanabe Center for EUVL, University of Hyogo
Soft X-ray Absorption Spectroscopy using SR for EUV Resist Chemical Reaction Analysis Takeo Watanabe Center for EUVL, University of Hyogo Outline 1) Background 2) Princple of X-ray absorption spectroscopy
More informationChapter 6. Atomic Physics and Process in Partially Ionized Plasma
Chapter 6 Atomic Physics and Process in Partially Ionized Plasma 6.1 Fundamentals of Atomic Physics Hydrogen Atom E 2 1 1 2 2 2m a n Photon(Radiation) Emission from H Atom Opacity Photon Energy Energy
More informationUltrafast X-Ray-Matter Interaction and Damage of Inorganic Solids October 10, 2008
Ultrafast X-Ray-Matter Interaction and Damage of Inorganic Solids October 10, 2008 Richard London rlondon@llnl.gov Workshop on Interaction of Free Electron Laser Radiation with Matter Hamburg This work
More informationCathodoluminescence of Rare Earth Ions in Semiconductors and Insulators
p. 1/1 Cathodoluminescence of Rare Earth Ions in Semiconductors and Insulators Leon Maurer International Materials Institute for New Functionality in Glass and Lehigh University Department of Physics REU
More informationHigh Brightness Electrodeless Z-Pinch TM EUV Source for Mask Inspection Tools
High Brightness Electrodeless Z-Pinch TM EUV Source for Mask Inspection Tools Stephen F. Horne, Matthew M. Besen, Matthew J. Partlow, Donald K. Smith, Paul A. Blackborow, Deborah S. Gustafson Agenda Background
More informationJT-60U における慣性力を通じた回転分布の熱輸送への影響
第 9 回若手科学者によるプラズマ研究会日本原子力研究開発機構那珂核融合研究所 6.3.-6 / JT-6U における慣性力を通じた回転分布の熱輸送への影響 成田絵美 本多充 吉田麻衣子 林伸彦 浦野創 井手俊介原子力機構 This work was carried out using the HELIOS supercomputer system at InternaDonal Fusion Energy
More informationCold Metastable Neon Atoms Towards Degenerated Ne*- Ensembles
Cold Metastable Neon Atoms Towards Degenerated Ne*- Ensembles Supported by the DFG Schwerpunktprogramm SPP 1116 and the European Research Training Network Cold Quantum Gases Peter Spoden, Martin Zinner,
More informationPulsed-power based bright EUV light source for metrology
Pulsed-power based bright EUV light source for metrology Sergey V. Zakharov NaextStream sas, Buc, France sergey.zakharov@naextstream.com + also with NRC Kurchatov Institute, Moscow, Russia 1 Sources for
More information! "#$ % " ! "#$ %& %'# ( #)*)+,-./*012)*)+3+*)331%2 %4# %##1;2 % ## : #<# % ' #% = # % = > #% #;: #
! "$ "! "$ & ' ( )*)+,-./*012)*)+3+*)3312 4 5 6! 7 6! 8"9 & ' 656! 1;2 < ' = = >
More informationSUPPLEMENTARY INFORMATION
doi:10.1038/nature10721 Experimental Methods The experiment was performed at the AMO scientific instrument 31 at the LCLS XFEL at the SLAC National Accelerator Laboratory. The nominal electron bunch charge
More informationMagnetic Field Design for a 2.45-GHz ECR Ion Source with Permanent Magnets
Journal of the Korean Physical Society, Vol. 55, No. 2, August 2009, pp. 409 414 Magnetic Field Design for a 2.45-GHz ECR Ion Source with Permanent Magnets J. Y. Park Department of Physics, Pusan National
More informationBecause light behaves like a wave, we can describe it in one of two ways by its wavelength or by its frequency.
Light We can use different terms to describe light: Color Wavelength Frequency Light is composed of electromagnetic waves that travel through some medium. The properties of the medium determine how light
More informationPol. e + source based on Compton scattering with FEL & 4 mirror cavity 第 8 回全体打合せ, 30 September 2014 KEK, Junji Urakawa
Pol. e + source based on Compton scattering with FEL & 4 mirror cavity 第 8 回全体打合せ, 30 September 2014 KEK, Junji Urakawa Super conducting electron linear accelerator for FEL We assume super radiant mode
More informationPB I FEL Gas-Monitor Detectors for FEL Online Photon Beam Diagnostics BESSY
FEL 2004 Gas-Monitor Detectors for FEL Online Photon Beam Diagnostics M. Richter S.V. Bobashev, J. Feldhaus A. Gottwald, U. Hahn A.A. Sorokin, K. Tiedtke BESSY PTB s Radiometry Laboratory at BESSY II 1
More informationLaboratory observation of forbidden transitions following charge exchange collisions between solar wind ions and neutrals
Laboratory observation of forbidden transitions following charge exchange collisions between solar wind ions and neutrals N. Numadate, K. Shimada, Y. Uchikura, H. Shimaya, T. Ishida, K. Okada A, N. Nakamura
More informationObservation of Tungsten Line Emissions in Wavelength Range of Å in Large Helical Device )
Observation of Tungsten Line Emissions in Wavelength Range of 10-500 Å in Large Helical Device ) Yang LIU 1), Shigeru MORITA 1,2), Tetsutarou OISHI 1,2), Motoshi GOTO 1,2) and Xianli HUANG 2) 1) Department
More informationCollisional radiative model
Lenka Dosoudilová Lenka Dosoudilová 1 / 14 Motivation Equations Approximative models Emission coefficient Particles J ij = 1 4π n j A ij hν ij, atoms in ground state atoms in excited states resonance metastable
More informationX-Rays From Laser Plasmas
X-Rays From Laser Plasmas Generation and Applications I. C. E. TURCU CLRC Rutherford Appleton Laboratory, UK and J. B. DANCE JOHN WILEY & SONS Chichester New York Weinheim Brisbane Singapore Toronto Contents
More informationTerahertz sensing and imaging based on carbon nanotubes:
Terahertz sensing and imaging based on carbon nanotubes: Frequency-selective detection and near-field imaging Yukio Kawano RIKEN, JST PRESTO ykawano@riken.jp http://www.riken.jp/lab-www/adv_device/kawano/index.html
More informationPossibilities for a Bose-Einstein Condensed Positronium Annihilation Gamma Ray Laser
Possibilities for a Bose-Einstein Condensed Positronium Annihilation Gamma Ray Laser Allen Mills, Jr., University of California Riverside in collaboration with David Cassidy and Harry Tom (UCR) Rod Greaves
More informationPWI 合同研究会筑波大学国際会議室, 国内国外直線 照射装置研究の展開 筑波大学プラズマ研究センター坂本瑞樹
PWI 合同研究会筑波大学国際会議室, 2014.07.31 国内国外直線 照射装置研究の展開 筑波大学プラズマ研究センター坂本瑞樹 Road Map to DEMO ITER & DEMO Plasma Confinement Devices ITER 2021 ITER Construction Design of DEMO DEMO DEMO DEMO Operation 2040 (?) Researches
More informationThe World s Smallest Extreme Laboratories:
The World s Smallest Extreme Laboratories: Probing QED with Highly Charged Ions. Joan Marler Clemson University Outline About HCIs About Ion trapping Precision spectroscopy with HCIs Highly Charged Ions
More informationSoft X - Ray Optics: Fundamentals and Applications
Soft X - Ray Optics: Fundamentals and Applications University of California, Berkeley and Center for X-Ray Optics Lawrence Berkeley National Laboratory 1 The Short Wavelength Region of the Electromagnetic
More informationNoninductive Formation of Spherical Tokamak at 7 Times the Plasma Cutoff Density by Electron Bernstein Wave Heating and Current Drive on LATE
1 EX/P6-18 Noninductive Formation of Spherical Tokamak at 7 Times the Plasma Cutoff Density by Electron Bernstein Wave Heating and Current Drive on LATE M. Uchida, T. Maekawa, H. Tanaka, F. Watanabe, Y.
More informationSupplementary Figure 1 Detailed illustration on the fabrication process of templatestripped
Supplementary Figure 1 Detailed illustration on the fabrication process of templatestripped gold substrate. (a) Spin coating of hydrogen silsesquioxane (HSQ) resist onto the silicon substrate with a thickness
More informationFirst Experiments with the Greifswald EBIT
First Experiments with the Greifswald EBIT B Schabinger 1, C Biedermann 2, S Gierke 1, G Marx 1, R Radtke 1,2 and L Schweikhard 1 1 Ernst Moritz Arndt University of Greifswald, Institute of Physics, Felix-Hausdorff-Str.
More informationProduction of HCI with an electron beam ion trap
Production of HCI with an electron beam ion trap I=450 ma E= 5 kev axially: electrodes radially: electron beam space charge total trap potential U trap 200 V (U trap ion charge) 10000 ev 15000 A/cm 2 n
More informationIntroduction to the Diagnosis of Magnetically Confined Thermonuclear Plasma
Introduction to the Diagnosis of Magnetically Confined Thermonuclear Plasma Core diagnostics II: Bolometry and Soft X-rays J. Arturo Alonso Laboratorio Nacional de Fusión EURATOM-CIEMAT E6 P2.10 arturo.alonso@ciemat.es
More informationProbing Matter: Diffraction, Spectroscopy and Photoemission
Probing Matter: Diffraction, Spectroscopy and Photoemission Anders Nilsson Stanford Synchrotron Radiation Laboratory Why X-rays? VUV? What can we hope to learn? 1 Photon Interaction Incident photon interacts
More informationLine analysis of EUV Spectra from Molybdenum and Tungsten Injected with Impurity Pellets in LHD
Line analysis of EUV Spectra from Molybdenum and Tungsten Injected with Impurity Pellets in LHD Malay Bikas CHOWDHURI, Shigeru MORITA 1),Motoshi GOTO 1), Hiroaki NISHIMURA 2),Keiji NAGAI and Shinsuke FUJIOKA
More informationGRASS 入門 Introduction to GRASS GIS
40 th GIS seminar GRASS 入門 Introduction to GRASS GIS 筑波大学生命環境科学研究科地球環境科学専攻空間情報科学分野 花島裕樹 email:hanashima@geoenv.tsukuba.ac.jp http://grass.osgeo.org/ 18 th December, 2008 Geographic Resource Analysis Support
More information新型人工电磁媒质对电磁波的调控及其应用. What s Metamaterial? Hot Research Topics. What s Metamaterial? Problem and Motivation. On Metamaterials 崔铁军 东南大学毫米波国家重点实验室
What s Metamaterial? 新型人工电磁媒质对电磁波的调控及其应用 崔铁军 东南大学毫米波国家重点实验室 全国微波毫米波会议 2011 年 6 月 3 日 青岛 Metamaterial: 超材料 ; 新型人工电磁材料 ; 新型人工电磁媒质 ; 特异材料 ; 特异介质 ; What s Metamaterial? Hot Research Topics most materials Metamaterial>LHM
More informationEnergy Spectroscopy. Ex.: Fe/MgO
Energy Spectroscopy Spectroscopy gives access to the electronic properties (and thus chemistry, magnetism,..) of the investigated system with thickness dependence Ex.: Fe/MgO Fe O Mg Control of the oxidation
More information統合シミュレーションコードによる高速点火実験解析大阪大学レーザーエネルギー学研究センター中村龍史
統合シミュレーションコードによる高速点火実験解析大阪大学レーザーエネルギー学研究センター中村龍史 概要 高速点火核融合ではターゲット爆縮から追加熱用レーザーによる高速電子発生まで時間 空間スケールにおいて非常に広範な領域の現象を理解する必要がある そこで本プロジェクトでは輻射流体コード 粒子コード Fokker-Planck コード の開発が進められており これらのコードをネットワークを介して結合することで統合コードの構築を目指している
More informationNeutron cross section measurement of MA
Neutron cross section measurement of MA Hideo Harada Nuclear Science and Engineering Directorate, Japan Atomic Energy Agency 2007 Symposium on Nuclear Data Nov. 30, 2007, RICOTTI Convention Center 2007
More informationMaterial Science. I. p electron systems. Kanoda. II. d electron systems. Fujimori. Download lecture note
Material Science I. p electron systems Kanoda II. d electron systems Fujimori Download lecture note Download the lecture note prior to each class. Fujimori group home, Department of Physics, School of
More information386 Brazilian Journal of Physics, vol. 30, no. 2, June, 2000 Atomic Transitions for the Doubly Ionized Argon Spectrum, Ar III 1 F. R. T. Luna, 2 F. Br
386 Brazilian Journal of Physics, vol. 30, no. 2, June, 2000 Atomic Transitions for the Doubly Ionized Argon Spectrum, Ar III 1 F. R. T. Luna, 2 F. Bredice, 3 G. H. Cavalcanti, and 1;4 A. G. Trigueiros,
More informationMaterial Science I. p electron systems Kanoda II. d electron systems Fujimori
Material Science I. p electron systems Kanoda II. d electron systems Fujimori Download lecture note Download the lecture note prior to each class. Fujimori group home, Department of Physics, School of
More informationCHARACTERISTICS OF ION EMISSION FROM CO 2 /Nd:YAG LPP WITH TIN TARGET
CHARACTERISTICS OF ION EMISSION FROM CO 2 /Nd:YAG LPP WITH TIN TARGET Akihiko Takahashi 1, Hiroki Tanaka 2, Atsushi Matsumoto 2, Yuuki Hashimoto 2, Kiichiro Uchino 3, Tatsuo Okada 2 1 Department of Health
More informationSurvey of EUV Impurity Line Spectra and EUV Bremsstrahlung Continuum in LHD )
Plasma and Fusion Research: Regular Articles Volume 6, 2402078 (2011) Survey of EUV Impurity Line Spectra and EUV Bremsstrahlung Continuum in LHD ) Chunfeng DONG, Shigeru MORITA 1), Malay Bikas CHOWDHURI
More informationFree Electron Laser. Project report: Synchrotron radiation. Sadaf Jamil Rana
Free Electron Laser Project report: Synchrotron radiation By Sadaf Jamil Rana History of Free-Electron Laser (FEL) The FEL is the result of many years of theoretical and experimental work on the generation
More informationLaser spectroscopy of actinides at the IGISOL facility, JYFL. Iain Moore University of Jyväskylä, Finland
Laser spectroscopy of actinides at the IGISOL facility, JYFL Iain Moore University of Jyväskylä, Finland Outline Motivation for heavy element studies Laser ionization and spectroscopy of plutonium Comparison
More informationInves&ga&on of atomic processes in laser produced plasmas for the short wavelength light sources
Inves&ga&on of atomic processes in laser produced plasmas for the short wavelength light sources Akira Sasaki Quantum Beam Science Directorate Japan Atomic Energy Agency Introduc&on EUV source at λ=6.5nm
More information質量起源 暗黒物質 暗黒エネルギー 宇宙線 陽子崩壊 ニュートリノ質量 米国 P5 ニュートリノ CPV 宇宙背景ニュートリノクォーク レプトンマヨラナ粒子 ニュートリノ測定器 陽子崩壊探索. Diagram courtesy of P5. Origin of Mass.
Diagram courtesy of P5 The Energy Frontier Origin of Mass Matter/Antimatter Asymmetry Dark Matter Origin of Universe Unification of Forces New Physics Beyond the Standard Model ニュートリノ質量 質量起源 The Intensity
More informationDependency of Gabor Lens Focusing Characteristics on Nonneutral Plasma Properties
Dependency of Gabor Lens Focusing Characteristics on Nonneutral Plasma Properties Kathrin Schulte HIC for FAIR Workshop Riezlern, 14.03.2013 Outline 1. 2. 3. 4. 1. 1.1. Relevant to know about Gabor lenses...or
More information1) Introduction 2) Photo electric effect 3) Dual nature of matter 4) Bohr s atom model 5) LASERS
1) Introduction 2) Photo electric effect 3) Dual nature of matter 4) Bohr s atom model 5) LASERS 1. Introduction Types of electron emission, Dunnington s method, different types of spectra, Fraunhoffer
More informationLecture 22 Ion Beam Techniques
Lecture 22 Ion Beam Techniques Schroder: Chapter 11.3 1/44 Announcements Homework 6/6: Will be online on later today. Due Wednesday June 6th at 10:00am. I will return it at the final exam (14 th June).
More informationSLS Symposium on X-Ray Instrumentation
SLS Symposium on X-Ray Instrumentation Tuesday, December 7, 2010 10:00 to 12:15, WBGB/019 10:00 The optics layout of the PEARL beamline P. Oberta, U. Flechsig and M. Muntwiler 10:30 Instrumentation for
More informationOptimization of laser-produced plasma light sources for EUV lithography
page 1 of 17 Optimization of laser-produced plasma light sources for EUV lithography M. S. Tillack and Y. Tao 1 University of California, San Diego Center for Energy Research 1 Currently at Cymer Inc.
More informationLaser-produced extreme ultraviolet (EUV) light source plasma for the next generation lithography application
Laser-produced extreme ultraviolet (EUV) light source plasma for the next generation lithography application EUV light source plasma Tin icrodroplet Main pulse (CO2 laser pulse) Pre-pulse (Nd:YAG laser
More informationVolume Production of D - Negative Ions in Low-Pressure D 2 Plasmas - Negative Ion Densities versus Plasma Parameters -
Volume Production of D - Negative Ions in Low-Pressure D 2 Plasmas - Negative Ion Densities versus Plasma Parameters - Osamu Fukumasa and Shigefumi Mori Department of Electrical and Electronic Engineering,
More informationPeculiarities of Modeling LPP Source at 6.X nm
V.Novikov, V.Ivanov, K.Koshelev, V.Krivtsun, A.Grushin, R.Kildiyarova, A.Solomyannaya Peculiarities of Modeling LPP Source at 6.X nm Outline Theoretical base Optimal plasma parameters Band position Scaling
More informationADEOS-II ミッションと海洋学 海洋気象学 (ADEOS-II Mission and Oceanography/Marine Meteorology)
ADEOS-II ミッションと海洋学 海洋気象学 (ADEOS-II Mission and Oceanography/Marine Meteorology) 川村宏 ( 東北大学大気海洋変動観測研究センター教授 ) Hiroshi Kawamura (Tohoku University, Center for Atmospheric and Oceanic Studies, Professor)
More informationAtomic and Molecular Data Activities at NIFS in
21 th DCN meeting, IAEA, Sep. 7-9, 2011 Atomic and Molecular Data Activities at NIFS in 2009 2011 Izumi Murakami Atomic and Molecular Processes Section, Fusion Systems Research Division, Department of
More informationSuperconductivity Induced Transparency
Superconductivity Induced Transparency Coskun Kocabas In this paper I will discuss the effect of the superconducting phase transition on the optical properties of the superconductors. Firstly I will give
More informationPhysik und Anwendungen von weicher Röntgenstrahlung I (Physics and applications of soft X-rays I)
Physik und Anwendungen von weicher Röntgenstrahlung I (Physics and applications of soft X-rays I) Sommersemester 2015 Veranstalter : Prof. Dr. Ulf Kleineberg (ulf.kleineberg@physik.uni-muenchen.de) LMU,
More informationComparison of hollow cathode and Penning discharges for metastable He production
INSTITUTE OF PHYSICS PUBLISHING Plasma Sources Sci. Technol. 11 (2002) 426 430 Comparison of hollow cathode and Penning discharges for metastable He production PLASMA SOURCES SCIENCE AND TECHNOLOGY PII:
More informationConstruction of a 100-TW laser and its applications in EUV laser, wakefield accelerator, and nonlinear optics
Construction of a 100-TW laser and its applications in EUV laser, wakefield accelerator, and nonlinear optics Jyhpyng Wang ( ) Institute of Atomic and Molecular Sciences Academia Sinica, Taiwan National
More information2015 年度研究活動報告理工学術院 先進理工 応用物理学科小澤徹 Department of Applied Physics, Waseda University
2015 年度研究活動報告理工学術院 先進理工 応用物理学科小澤徹 Tohru OZAWA Department of Applied Physics, Waseda University 出版された論文 R. Carles, T. Ozawa Finite time extinction for nonlinear Schrödinger equation in 1D and 2D, Commun.
More informationWavefront metrology and beam characterization in the EUV/soft X-ray spectral range
2 nd Swedish-German Workshop on X-Ray Optics HZB Berlin-Adlershof, 28-30 April 2015 Wavefront metrology and beam characterization in the EUV/soft X-ray spectral range K. Mann J.O. Dette, J. Holburg, F.
More informationSimple strategy for enhancing terahertz emission from coherent longitudinal optical phonons using undoped GaAs/n-type GaAs epitaxial layer structures
Presented at ISCS21 June 4, 21 Session # FrP3 Simple strategy for enhancing terahertz emission from coherent longitudinal optical phonons using undoped GaAs/n-type GaAs epitaxial layer structures Hideo
More informationDetecting high energy photons. Interactions of photons with matter Properties of detectors (with examples)
Detecting high energy photons Interactions of photons with matter Properties of detectors (with examples) Interactions of high energy photons with matter Cross section/attenution length/optical depth Photoelectric
More informationSchemes to generate entangled photon pairs via spontaneous parametric down conversion
Schemes to generate entangled photon pairs via spontaneous parametric down conversion Atsushi Yabushita Department of Electrophysics National Chiao-Tung University? Outline Introduction Optical parametric
More informationWaseda University. Design of High Brightness Laser-Compton Light Source for EUV Lithography Research in Shorter Wavelength Region
Waseda University Research Institute for Science and Engineering Design of High Brightness Laser-Compton Light Source for EUV Lithography Research in Shorter Wavelength Region Research Institute for Science
More informationDevelopment and application for X-ray excited optical luminescence (XEOL) technology at STXM beamline of SSRF
Development and application for X-ray excited optical luminescence (XEOL) technology at STXM beamline of SSRF Content Introduction to XEOL Application of XEOL Development and Application of XEOL in STXM
More information