PIEZOELECTRIC ACTUATORS DESIGN & MEMS APPLICATIONS
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1 Integrated Actuator Laboratory (LAI) Dr. Y. Civet PIEZOELECTRIC ACTUATORS DESIGN & MEMS APPLICATIONS 2 1
2 3 Piezoelectricity? 1880 Direct Piezoelectricity Pierre and Jacques Curie 1881 Inverse piezoelectricity Gabriel Lippman 4 2
3 History of Piezoelectric Motors Prominence (publications, patents, etc.) Watch Motors Piezo MEMS Nanopositioning Micromotors Autofocus Thin Film PZT Multilayer PZT Large-Scale Commercialisation of Actuators (AFM tip, waver positioning, print-heads, fuel injection ) Advanced Control Techniques Converse Shinsei Piezoelectric First Affordable Effect Practical PZT Early implementations Lead-free Motor High Performance, PZT Concepts Long lifetime PZT PZT time FUTURE OF MOTORS??? 5 Non centro-symmetrical material F F P Direct piezoelectric effect 6 3
4 Synthetic ceramics 7 High Performance Lead-free Piezoelectric Material Yasuyoshi Saito, Hisaaki Takao, Toshihiko Tani, Tatsuhiko Nonoyama, Kazumasa Takatori, Takahiko Homma, Toshiatsu Nagaya, Masaya Nakamura 8 4
5 Polarisation 9 Electro-mechanical conversion Classic material Piezo material 10 5
![tensor [ Pa ]](/docs-images/72/66770546/images/6-5.jpg "Compliance tensor [ Pa")
![-1 ] Stiffness](/docs-images/72/66770546/images/6-8.jpg "Electric displacement")
![field [ C/m -2 ]](/docs-images/72/66770546/images/6-9.jpg "Electric field [ V/m ]")
6 Constitutive equations Mechanical: Electrical: Piezoelectric constants: 11 Constitutive equations Strain tensor [ - ] Stress tensor [ Pa ] Compliance tensor [ Pa -1 ] Stiffness tensor [ Pa ] Electric displacement field [ C/m -2 ] Electric field [ V/m ] Electric permittivity [ F/m ] Piezoelectric coefficient [ C/N ] 12 6
7 Practically products/piezo_tutorial.php 13 Example A z F l 0 P y V x Questions: Maximum displacement? Maximum force? 14 7
![Example E F [N]](/docs-images/72/66770546/images/8-1.jpg "Δl [nm] A.N.")
8 Example E F [N] Δl [nm] A.N.: Noliac NCE55: d 33 = 670 E -12 C/N s E 33 = 21E -12 m 2 /N A = 2 cm 2 l 0 = 2 mm 15 Questions How to increase the displacement? How to decrease the operating voltage? Stack actuators - Thin layers, high E even at low voltage - Total displacement = N*the displacement of one layer PI P : D = 10 mm, l 0 = 17 mm Δl max = 15 µm, F max = V 16 8
9 Our enemies 17 Some literature Matériaux piézoélectriques Caractérisation, modélisation et vibration Michel Brissaud PPUR 2007 Piezoelectric Transducers and Applications Antonio Arnau Vives (Ed.) Springer
10
11 Travelling waves SHINSEI USR60 Motor: Invented in 1982 (Sashida) Commercialized since 1987 by Shinsei ( 21 Shinsei - USR60 Specifications Power: 5W Nominal speed: 100 rpm Nominal torque: 500 mnm Maximum torque: 1 Nm 22 11
12 PCBmotor ~ 0.20CHF/pce No load speed: 60 rpm Stall torque: 18 mn.m 200V 23 Standing wave No load speed: 600mm/s Maximum force : 60N 200V P mech : 16W Physik instrumente 24 12
13 25 Stepper File:Piezomotor_type_inchworm.gif Prof. Toshiro Higuchi Tokyo University
![: 51 x 72 x 115 [mm] 27](/docs-images/72/66770546/images/14-6.jpg "Impact Drive Mechanism")
14 Stepper motor - Inchworm NEXLINE N-216 de PI Specifications : Travel range: 20 mm Max speed: 1 mm/s Supply voltage : ± 250 V Resolution : 0.03 nm / 5 nm Dimensions : 51 x 72 x 115 [mm] 27 Impact Drive Mechanism (IDM) Tokyo University (Prof. Toshiro Higuchi)
15 IDM, application example Insertion of a micro pipette into the cytoplasm hydraulic micro manipulator micro manipulator with piezo IDM (step size: ~4nm)
16 Why MEMS? 2mm Variables 100factor nm (α<1) Scale Dimension α Area α2 Volume α3 Frequency α-1 Thermal time constant α Micro Electro Mechanical Systems 100µm 31 What MEMS? Cheng-Hsien Liu, NTHU 32 16
17 Why piezo? Zupan & Al Why Piezo MEMS actuators? Available force Bell & Al
18 Why Piezo MEMS actuators? Available force Resolution Bell & Al Why Piezo MEMS actuators? Available force Resolution Frequency Bell & Al
19 Why piezo MEMS sensors? Resolution Bell & Al Why piezo MEMS sensors? Resolution Frequency Bell & Al
20 Why Piezo MEMS? Strong force High speed and high frequency Low voltage (high dielectric constant) High efficiency in energy conversion High acoustic quality Rather linear behaviour Muralt Where using piezo MEMS? Piezoelectric ultrasonic transducer pmut
21 Where using piezo MEMS? Ink Jet Nozzle 41 Where using piezo MEMS? Gyroscope Panasonic 42 21
22 Where using piezo MEMS? Autofocus Lens Highlights Thin Piezo Film Applications of Piezo MEMS Examples 44 22
23 Highlights Thin Film Piezo FeRAM Material Manufacturing Applications of piezo MEMS Examples 45 Thin piezo film history Ferroelectric Nonvolatile access memories (FeRAM) DRAM cell FeRAM cell Low power / low voltage 46 23
24 FeRAM material Technology generation TI Agilent Fujitsu Matsushita Toshiba Infineon Samsung Sony 0.13µm 0.18µm 0.18µm 0.2µm 0.25µm 0.25µm Density 64Mbit 4Mbit 1Mbit 32Mbit 32Mbit 4Mbit Material PZT PZT SBTN* PZT PZT SBT* Cell size 0.54µm 2 1.3µm 2 1.1µm µm µm 2 2.6µm 2 *bismuth layer-structured family SBTN: SrBi 2 (TaNb) SBT: SrBi 2 Ta 2 O 9 47 Material Bulk ceramic Quartz Langasite (LGS) Lithium Niobate and Tantalum Thin Film Ferroelectrics (Poling) PZT : Polycrystalline lead Zirconium Titanate (Actuator) PMN-PT Piezoelectric semiconductor Groups III-V material (GaN, GaAs, AlN (CMOS compatible)) ZnO, SiC (gas sensor) Relaxor material Pb (MgNb)O 3, PbTiO 3, PbZrO
25 Material properties k 33, effective d ij and e ij Electromechanical coupling coefficient Property Units AlN ZnO PZT (thin film) Density g.cm % Tadigadapa & Al C.m to 12 pm.v Thin Film manufacturing MEMS technology Cheong & Al pmems Subtractive approach Additive approach Integrative approach Jiang & Al Tadigadapa & Al
26 Thin Film manufacturing Machine Ion beam Sputtering Magnetron Sputerring MOCVD CSD PLD Screen printing Aerosol deposition (AD) Temperature (PZT) C C 3 steps process : Spin-coating 130 C 5min 400 C 5min 700 C 1min 51 Thin Film manufacturing Integration Electrode : Pt, RuO2 plane or inter-digital Buffer layers Ti/SiO 2 or Ta/Si 3 N 4 Temperature deposition : Orientation Poling Thermal treatment 700 C Cracking effect Piezo coefficient depends on composition and crystal orientation 52 26
27 Ferroelectric properties Composition dependence Trolier-Mckinstry & Al Ferroelectric properties Composition dependence Orientation dependence Trolier-Mckinstry & Al
28 Thin Film manufacturing Intrinsic stress Deposition process Tensile stress up to +800MPa Pt / Ti Compressive stress SiO 2 300MPa Gross & Al Thin Film manufacturing Intrinsic stress Deposition process Tensile stress up to +800MPa Pt / Ti Compressive stress SiO 2 300MPa Poling Gross & Al Ledermann & Al
29 Few processed devices Piezo NRJ harvesting Defosseux & Al Few processed devices Piezo actuator Casset & Al
30 Soft Piezo MEMS Kapton substrate Petroni & Al Replace EAP 59 Bulk Vs thin Film Higher coercive fields (50-100kV.cm -1 ) Higher breakdown voltages ( kV.cm -1 ) Higher dielectric loss Microstructural difference Interface effects Lattice and domain wall Grain size, filed texture Doping Tadigadapa & Al
31 Highlights Thin Film Piezo Applications of Piezo MEMS Examples Conclusions & perspectives 61 Applications of Piezo MEMS : Actuator TWUM : Autofocus camera, automotive applications (Smith & Al. 2012) 62 31
32 Applications of Piezo MEMS : Actuator TWUM : Autofocus camera, automotive applications (Smith & Al. 2012) Switch (Proie & Al. 2011) 63 Applications of Piezo MEMS : Actuator Micropump Koch & Al Matsumoto et Al
33 Applications of Piezo MEMS : Actuator Micropump Koch & Al Inkjet nose Grishin et Al Applications of Piezo MEMS : Sensor Inertial sensor Kunz & Al
34 Applications of Piezo MEMS : Sensor NRJ harvesting Vibration Briand & Al Highlights Thin Film Piezo Applications of piezo MEMS Examples Conclusions & perspectives 68 34
35 Example 1 : QCM Quartz Crystal Microbalance Thin piezo layer sandwiched between two electrodes Shear wave Resonant frequency Rabe & Al. 2003, Kao & Al Schematic Micromachined Packaged Loading Elastic Viscous Formula Resolution zeptograms Example 2 : IR device Infrared detector Ferroelectric material with pyroelectric properties (TGS, LiNbO3 ) Modulated radiation absorption Photocurrent Micromachining techniques Hanson & Al Quartz crystal oscillators Increase performances 70 35
36 Example 3 : pmut Piezoelectric Micromachined Ultrasonic Transducers Array of transmitters / receivers Flexural membrane motion Passive material & piezoelectric layer Sonar, medical imaging, non destructive testing Yamashita & Al Intravascular ultrasound imaging 71 Example 4 MEMS Image Projection display Schroth & Al PZT + SiO2 V in Bending 2 V in 1D rotation 2 V in 2D rotation 72 36
37 Example 4 MEMS Image Projection display Tani & Al Example 4 MEMS laser scanners Holmstrom et al.,
38 75 Conclusions More than 100 years but Piezo coefficients & example Macroscale devices MEMS applications P-mems miniaturize sensors Classical micromachining technique Bulk (Quartz ), thin film (PZT, AlN ) 76 38
39 Perspectives Hysteresis, Creep, drift Deep understanding of poling Driving But Jeffrey & Al Thank you very much! Any questions? 78 39
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