Epitaxial piezoelectric heterostructures for ultrasound micro-transducers

Transcription

1 15 th Korea-U.S. Forum on Nanotechnology Epitaxial piezoelectric heterostructures for ultrasound micro-transducers Seung-Hyub Baek Center for Electronic Materials Korea Institute of Science and Technology (KIST)

2 Security issue for mobile electronics Personal information Banking

3 Biometrics-based authentication systems Fingervein Highly secured Convenient Vein Iris Finger print Face Fingerprint Easy to hack Voice

4 Ultrasound-based fingerprint/vein recognition Ultrasonic transducer array Similar to medical imaging Not affected by sweat or dirt Convenient Small, low-power consumption 3 dimensional recognition Fingerprint/vein/blood flow

5 Principle of ultrasound imaging Ultrasound Probe Ultrasonic Beam Reflected Signal Human Body

6 2D Transducer Array! Beam-forming for 3D imaging

7 Issues on 2D array with bulk piezoelectric materials Wiring issue Not scalable

8 Micro-Machined Transducer (MUT) Electrodes cmut Membrane Electrodes pmut Piezoelectric layer Insulation Cavity V ac +V dc SiO 2 Cavity V ac Si substrate Deflection Si substrate Deflection Electrostatically-driven Piezoelectrically-driven Hard to fabricate High DC-field (electric shock!) Electrical charging Non-linear behavior Relatively easy to fabricate No DC-field necessary Stable Linear behavior

9 pmut-based fingerprint/vein imaging system Vein recognition without gel! Dermis vein Air Air vs. vs. Ultrasonic transducer array <gel for impedance matching>

10 Giant piezoelectric relaxor-ferroelectrics Pb(Mg 1/3 Nb 2/3 )O 3 - PbTiO 3 Single Crystals Giant piezoelectric material. PMN-PT Single crystal is 10 times higher than PZT ceramic. (d 33 = ~2000 pc/n, k 33 = ~0.92) S-E. Park, T.R. Shrout, J. Appl. Phys. 82, 1804 (1997).

11 Giant piezoelectric relaxor-ferroelectrics > 1.7% strain Field-Induced Phase Transition in (001) PZN-8% PT Single Crystal S-E. Park, T.R. Shrout, J. Appl. Phys. 82, 1804 (1997).

12 Giant piezoelectric relaxor-ferroelectrics Anisotropic piezo-property: d 33 [001] > d 33 [111] Polycrystalline (001) Epitaxial

13 Epitaxial PMN-PT thin films on Si Piezoelectric material Perovskite structure ~4.02 Å Sputter MBE Conducting oxide Perovskite structure ~3.930 Å Insulating oxide Perovskite structure Å Si substrate Diamond Cubic structure Lattice parameter: Å

14 Off-Axis Sputtering for high-quality films Heater Block Diffused particles Energetic particles Sputtering gun

15 Polarization (µc/cm 2 ) Challenge for PMN-PT film growth Volatile PbO Leaky! Voltage (V)

16 Miscut substrate to fix volatile PbO Step as a preferential nucleation site

17 X-ray diffraction with 2D area detector for PMN-PT /SrRuO 3 /Si Exact (001) Si 4 o miscut (001) Si

18 Cross Sectional TEM images of PMN-PT on silicon PMN-PT PMN-PT Rocking Curve FWHM 0.23 o SrRuO o SrTiO nm Si 2 nm SrRuO o (bulk PMN-PT single crystal) TEM by X.Q. Pan, Michigan

19 Polarization (µc/cm 2 ) Dielectric constant Strong Imprint- Unipolar Operation Loss tangent Electrical field (kv/cm) Electrical field (kv/cm) 0 Highly insulating (>600 kv/cm) Strong imprint: unipolar operation Reduced dielectric constant for better detection

20 Piezoelectric and energy harvesting FOM

21 Height (µm) Tip displacement (µm) Z (μm) MEMS performance Simulations match experimental data using bulk PMN-PT parameters. PMN-PT piezoelectric properties unaffected by processing Length:35µm Cantilever clamping point Length (mm) 2.8V 0V Modeled PMN-PT cantilever Voltage (V) Actual PMN-PT cantilever Modeled electrostatic cantilever µm / V deflection Voltage (V) S.H. Baek et al. Science 334, 958 (2011)

22 Development of relaxor-ferroelectrics

23 PMN-PZT heterostructure on SOI 1. Mn: Pb(Mg 1/3 Nb 2/3 )O 3 -Pb(Zr,Ti)O 3 Giant piezoelectricity & high temperature field stability 2. All sputtering process

24 Intensity (cps) CeO 2 (002) YSZ (002) YSZ (004) PMN-PZT (001) LSMO (001) PMN-PZT (002) LSMO (002) CeO 2 (004) Polarization ( C/cm 2 ) 1 μm PMN-PZT/LSMO/CeO 2 /YSZ/Si XRD Si (004) 40 P E Curve Drive Voltage (V)

25 Summary We have fabricated epitaxial PMN-PT piezoelectric heterostructures on silicon with unparalleled piezoelectric properties. (d 33 : 1200 pm/v and e 31 : -29 C/m 2 ) (2-3 times better than best piezoelectric films ever reported and on Si!) High strain piezoelectric heterostructures on silicon can be used for integrated MEMS devices for actuation, sensing and imaging High frequency ultrasound transducer 2-D arrays Hyper-Active NEMS High frequency filters Energy Harvesting

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28 Buffer layer for epitaxial Oxide on Si SRO, LSMO, PZT 3.86~3.93 A Perovskite oxides Buffer Layers CeO A YSZ 5.15 A Si substrate Si 5.43 Å

29 Doppler effect for blood flow imaging Principle of ultrasound imaging

30 S.W. Smith, Duke Univ. (1960) (2003) Ceramic PZT transducer array At 1 MHz GE Medical 20x20 first 2-D array (currently 256x256 = 65,536 subdiced elements)