Innovation in Semiconductor Equipment a Tec-Sem Group company. Phil Kim HP: 上海成道贸易有限公司

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1 Innovation in Semiconductor Equipment RX TWS-300.ppt Brooks Automation Page 1 Aug 01 as I n t e l l i g e n c e i n A u t o m a t i o n TM 上海成道贸易有限公司 Phil Kim HP: philkim@sdglovy.com

2 Group Structure Tec-Sem Group AG CH- Tägerwilen Tec-Sem AG CH-Tä gerwilen icada GmbH D-Ludwigshafen NETinvest (Overseas) Ltd KY Grand Cayman Tec-Sem Singapore Pte Ltd Singapore Tec-Sem USA Inc US Tyngsboro, MA Tec-Sem Taiwan Rep. Office Taiwan Our Customers NA ASIA EUR

3 Product Overview Reticle Management Solutions Equipment Software Wafer Management Solutions Equipment Software RX(200& 300mm) New WX8(200mm) RSM & WSM (200 & 300mmmm)

4 Sales & services locations Asia Tec-Sem Singapore Pte. Ltd Tec-Sem Taiwan (Hsinchu) Tec-Sem Korea (Seoul) Tec-Sem China South Korea Taiwan Singapore USA Boston, MA Manassas, VA Lehi,UT Dallas & Austin,TX Portland, OR Boston,MA Portland, OR Europe Tec-Sem & Group HQ, Switzerland icada, Germany Germany Switzerland

5 RX Introduction The RX high density reticle storage system is a innovative combination of reticle stocker and carrier buffer managing the reticles throughout your fab. The RX provides a fully automated reticle management system that combines a sorter with a stocker for up to 2304 reticles, while using a minimum of footprint. The reticles are safely stored in Tec-Cell modules, which are providing an ISO class 1 micro-environment and optionally N 2 /xcda purged.

6 Reticles per sq.ft Market comparison Storage Density Today s Stocker RX Carousel Box Stocker Rack Storage Rack Box Carousel Today's stockers Muratec

7 Benefits Increase stepper uptime No stepper waiting time correct reticle arrives safe & clean. Reduce reticle rework Less reticle rework costs Reticle is protected to limit haze & crystal grow. High performance Integrated pod buffer quick reticle access due to integrated carrier buffer Field upgradeable options Particle detection or N2 purge upgraded in minimum of time no production limitations.

8 SAVINGS 1'000 USD SAVINGS Low Cost of Ownership The RX reduces the litho operation costs: Reduced quantity of pods (needed for transportation only). Reduced waiting time for Stepper & AMHS (with integrated Pod-Buffer). Reduces reticle rework costs caused by haze 1'000 Cost of Pods For both models, the cost reduction (with less pods) over-pays the investment RXB (with pod buffer) 1'536 ret pods RXHF 2'304 ret. RSP150: 400 USD (assumption) Saving 0 RXHF RX Models 24 RXB Pod Cost

9 Model Overview The RX provides a high level of modularity. Tec-Cell storage Fix-Shelve RSP buffer 6 different models on the same foot print. Model Reticles in Tec-Cell RSP 150 In buffer RSP150 in fix shelve total reticle storage RXB & RXHB models with integrated RSP150 buffer RXB RXHB RXF & RXHF models only reticle storage in Tec-Cell (no RSP buffer) RXF RXHF RXP & RXPP models only reticle storage in Tec-Cell (no RSP buffer) RXP RXPP

10 The main modules Storage Tec-Cell for reticles AMHS load-ports Storage tower for Tec-Cell and buffering RSP150 Handling area Manual load-ports Operator interface (GUI)

11 Reticle handling Reticle handler: Reticle always secured Embedded sensing capability for correct placement Pod handler Separated from reticle handling

12 Storage method (1/2) Top down ISO class 1 air flow with Ion shower Storage / handling area Storage tower (carousel) Fix shelf for RSP Independent rotating shelves for RSP Side view / cross section

13 Centering Labyrinth sealing Storage method (2/2) Each reticle is stored within a Tec-Cell Tec-Cell 12 stacked Tec-Cell form a Storage-Module which provide the ISO class 1 Micro-Environment 16 Storage-Modules are mounted on the shelves within the storage tower. 12x Easy Handling Atmospheric Pressure Overpressure ISO class1within the Tec-Cell Storage Module Particle barrier N 2, xcda or CDA Supply The RX helps to prevent haze & crystal grow

14 RX Tec-Cell technology Maintained overpressure in Tec-Cell due to continuous purge. No residual oxygen Tec-Cell permanently clamped in shelve. Reticle is protected from vibrations and earthquakes. The RX helps to prevent haze & crystal grow N2 or xcda purged Tec-Cell

15 Relative Humidity (%) Temperature (deg C) Purge efficency (By CDA only) Relative Humidity (%) Temp (deg C) RX 2007: CDA Temp and Humidity Time (min) 21.7

16 Tec-Cell shielding case Differential Pressure Meter 2 Cell Oxygen meter Differential Pressure Meter 1 External air 1. Extrusion internal air of Cell Stop air purging for case Start N2 purging for Cell by 5L/min Continue N2 purging 15min. 2. Measurement 2.1. Confirm the indicated value of oxygen meter. => 0.01% (= lower limit) Set up the purging N2 volume for Cell Start air purging for case with 5L/min. 2.3 Measurement start. N2 purging line for Cell Speed Ctrl Speed Ctrl 5L/min (Fix) Air purging line for Case N2 Compressed air

17 RX air flow concept Based on over 25 years experience the Air-Flow design inhibits potential particle sources Air or N 2 Controlled Air Pressure Cascade Micro-Environment (in Reticles Storage-Modules) Mini-Environment (in Reticle area) Mini-Environment (in Pod area) ~ Your Clean-Room Filter ISO:1 Air or N 2 Clean Room Fan Filter Unit ISO:1 Air Pressure Air Flow Sub-Floor

18 ESD Protection All the Reticle Contact-Points of the Storage-Modules (A) are in ESD-Protective material (A) Storage-Modules are mounted on metal plates (B) that are connected to the tool ground (C) through the especially designed ESD-protective circuitry (D) Every Contact Point for Handling and Storage area (E) are wired through the especially designed ESD protective circuitry (D) (E) (B) Reticle Handler Module Lifter Alignement Station Ω Ω Ω (D) (C)

19 Integrated Pod Buffer Fix Buffer with shelves for 12 High Priority Pods Pod Storage on carousel for 48 Pods Fully automatic Pod management Pod Storage rotates independently from the reticle storage Fastest access time: Input Output from Fix Buffer Pod Storage Pod opener 12s 12 s 15 s 12 s Fix Shelf Pod Storage Pod Opener

20 Pod Input / Output 2 x OHT Load Ports for RSP150 (optional) Near OHT track No interferences from Operators ID reader for RF Tag, SmartTag or Barcode SEMI E84 interface Bi-directional (in + out) 2 x manual Load Ports for RSP150 ID reader for RF Tag, SmartTag or Barcode Lockable cover for safety while loading/unloading Bi-directional (in + out)

21 Serviceability (1/2) Several RX s can be placed side by side to minimize the AMHS track length. Access optimized on 2 sides only. (front & back) The back can be opened to access to the control cabinet and to every storage modules. The front can be swivelled out for easy maintenance access to every sub components

22 Serviceability (2/2) In case of emergency every Reticle can be easily & safely retrieved from its storage location 1. From the inventory list identify the Storagelocation of the selected Reticle Ret. ID Type Level Module Cell Nikon Canon XYZ AD ASML Open the back door (a), rotate the Storage Tower to the selected Storage Module (b) 3. Take the Storage-Module and the empty Carrier onto a clean environment the Reticles remain protected during transportation! 4. Transfer the Reticle form the Storage-Cell into the Carrier.done

23 H2 H3 min.h4 H mm 4.79 ft Layouts Ceiling Ceiling RX top view Only 3m2 (35sqft) 1835 mm / 6.02 ft 2250mm / 7.38 ft Tool heights Model RXB RXHB RXF RXHF [mm] [inch] [mm] [inch] [mm] [inch] [mm] [inch] H H H H

24 HMI/GUI and PC PC with Windows XP Mirrored drive to back all data. GUI on 15 Flat Panel Display. Views for: - Job s, job queuing, - inventory manual functions Configurable access levels - operator - supervisor - maintenance HMI SEMI E95 compliant

25 Available options Integrated Particle Detection System, PDS Air knife for particle blow off after PDS Ionization unit for handling area Reticle rotary unit Reticle Stocker Manager (RSM), SW AMC filtering (FFU) N2/xCDA purging of reticle storage modules Host communication, SW Label printer & hand held scanner Uninterrupted Power Supply, UPS All options field upgradeable

26 Advantages for RX selection Flexible configurable models The RX series fit in any new or existing production line, designed to be integrated in fully automated litho bays. High density storage The RX provides the highest reticle storage density in the market. Reticle protection to reduce haze and crystal grow First reticle stocker that provides independent controlled N2/xCDA purged ISO class1 micro-environment. Fault free reticle selection The reticles are checked by the intelligent barcode reader system on each insert and retrieval. Optionally the reticle can be oriented by 180. High reliability Field proven technology of used components Easy to use for operation, PM and tool service The RX is fully automated and is easy to handle by your operators, results in low operating cost.