Surface Acoustic Wave Motor using Feed Back Controller with Dead Zone Linearization

Transcription

1 Surface Acoustic Wave Motor using Feed Back Controller with Dead Zone Linearization *1 *1 *2 Minoru Kuribayashi KUROSAWA (Mem.), Takaya SUZUKI and Katsuhiko ASAI Potential of surface acoustic wave (SAW) motor has been investigated during the past decade. A substrate of 128 degrees y-rotated lithium niobate was used for a stator of a SAW motor. Interdigital transducer (IDT) electrodes were fabricated by the vacuum evaporation and the lithography. In this paper, for the efficient generation of the wave, DIDTs were introduced for driving IDT to reduce the multiple reflections that cause the unbalance of the wave amplitude. The energy circulation performance was investigated. Then, we tried feed back control by introducing a nonlinear function that compensates the motor response. Closed-loop operation of the surface acoustic wave linear motor was demonstrated; sinusoidal speed control and stepping motion positioning were tested using PID controller. Keywords: micro actuator, linear motor, ultrasonic motor, surface acoustic wave, MEMS, PID control. [1-12] MEMS 1 mm [13,14] [1-4] [5] [6-8] [15] [16] [17] XY [18] 2.1 Fig G mkur@ip.titech.ac.jp *1 *2 Fig. 1 Schematic diagram of an energy circulation SAW motor. 125

2 sin tcos t [10] [2] 2.2 IDT (DIDT)[20] IDT/4 DIDT/8 /8/8/8 Fig mm 13mm Fig. 2 Transducer for an energy circulation drive. Fig. 4 Circuit for power transmission measurements. Fig. 3 Frequency responses of the IDTs. Fig. 5 Transmitting power to circulation IDT. 126

3 DIDT 14.34MHz Fig. 3 IDTDIDT inout khz 2.3 DIDT Fig. 4 Fig. 4 1/2 Fig. 4 Fig. 4P near P far Fig. 5 DIDT IDT P far Fig. 4 Fig. 6 IDTDIDT Fig. 7 DIDT Fig. 6 Fig. 6 Driving and power measurements. Fig. 7 Circulating energy in the circuits. Fig. 8 Circulation power decay by slider; upper is forward and lower is backward. 127

4 5μm14μmSi 8.7N 0.18[6] 1.6N Fig. 8 10W18W26W 3W Fig Fig. 10 Fig. 10 Experimental setup. Fig. 11 Transient response of the motor; forward. Fig. 9 Phase change at the circulation IDT due to the slider driving: upper is forward and lower is backward. Fig. 12 Transient response of the motor; backward. 128

5 52.3g Fig Fig. 13 Fig V 5.1 [14] Fig. 14 uv off AV=A 1 u+v off Fig. 15 Speed control system. Fig. 13 Dead zone of the motor response. Fig. 14 Modeling of the SAW motor. Fig. 16 Position control system. 129

6 F o F o =A 2 (V-V off )=A 1 A 2 u=au Fig. 15 LTI; Linear Time Invariable PID 5.2 DSP DSpaceDS khz Fig.1516 DSP DA FG MHz FGAMDA AM FG -90 FG LDV DSPAD DSPPID [19] 1μm Fig m/s3Hz Fig. 18 Sinusoidal response of the speed controlled surface acoustic wave motor. Fig. 17 Driving and controlling diagram for surface acoustic wave motor using DSP board hosted by PC. Fig. 19 Stepping response of the surface acoustic wave motor position. 130

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