arxiv:nlin/ v1 [nlin.cd] 21 Apr 2001

Transcription

1 Nonlinear vertical oscillations of a particle in a sheath of a rf discharge A. V. Ivlev, R. Sütterlin, V. Steinberg, M. Zuzic and G. Morfill Max-Planck-Institut für Extraterrestrische Physik, D Garching, Germany arxiv:nlin/ v1 [nlin.cd] 21 Apr 2001 Abstract A new simple method to measure the spatial distribution of the electric field in the plasma sheath is proposed. The method is based on the experimental investigation of vertical oscillations of a single particle in the sheath of a lowpressure radio-frequency discharge. It is shown that the oscillations become strongly nonlinear and secondary harmonics are generated as the amplitude increases. The theory of anharmonic oscillations provides a good qualitative description of the data and gives estimates for the first two anharmonic terms in an expansion of the sheath potential around the particle equilibrium. PACS number(s): Zb, Gj, g Typeset using REVTEX Permanent address: High Energy Density Research Center RAS, Moscow, Russia. Present address: Department of Physics of Complex Systems, Weizmann Institute of Science, Rehovot 76100, Israel. 1

2 There are various experimental methods on the plasma sheath diagnostic in low-pressure gas discharges (see, e.g., [1 3] and references therein). Most of the methods are based on optical emission spectroscopy and temporally resolved probe measurements and are rather complicated technically. We propose an alternative simple method to measure the spatial distribution of the electric field in the plasma sheath based on investigation of largeamplitude vertical oscillations of micron sized particles. So far, investigation of the particle oscillations in the sheath of a radio-frequency (rf) discharge [4 7] was one of the methods used to determine the particle charge [8 10]. This method is based on the assumption that the vertical distribution of the sheath potential is known and can be approximated by a parabolic profile [11], so that the oscillations are always harmonic. This assumption is reasonable for sufficiently high gas pressure, when the mean free path of ions is much less than the vertical spatial scale of the sheath field [11]: For example, the model of a parabolic rf sheath in an argon plasma can be applied for pressures above 20 Pa. But for p < 10 Pa the sheath profile might deviate strongly from a parabolic one. In this case, the oscillations are harmonic only if their amplitude is very small. In this Letter, we report experimental and theoretical investigations of nonlinear (largeamplitude) vertical oscillations of a single particle in the sheath of a low-pressure rf discharge. We compare the experimental results with the theory of anharmonic oscillations and estimate the first two anharmonic terms in an expansion of the sheath potential around the particle equilibrium height. Thus, the study of large-amplitude particle oscillations allows us to reconstruct the distribution of the vertical electric field in wide region of the sheath. Experimental setup and results The experiments are performed in a so-called Gaseous Electronic Conference (GEC) rf reference cell [12] with the electrode system modified as shown in Fig. 1. The lower aluminum electrode, 230 mm in diameter, is capacitively coupled to a rf generator providing a peak-to-peak voltage 70 V (rf power 2 W). A ring-shaped upper grounded electrode with an outer diameter of 200 mm and a thickness of 10 mm is located 50 mm above the lower electrode. A 2 mm thick copper ring with a 40 mm inner diameter is placed on the lower electrode to confine the particle above the center. Argon 2

3 gas at a pressure 0.5 Pa is used for the discharge. For this pressure, a self-bias voltage 33 V on the lower electrode provides the sheath with a (visible) thickness of 20 mm and causes a spherical polystyrene particle (density 1.05 g/cm 3, diameter 7.6±0.1 µm) to levitate 14 mm above the electrode. At a height 8 mm above the lower electrode a horizontal wire of 0.5 mm diameter and 80 mm length is placed directly below the levitated particle. A low-frequency sinusoidal voltage of amplitude U ex is applied to this wire to excite the vertical oscillations of the particle. The frequency ω/2π of the voltage could be varied from 0.1 Hz up to 40 Hz and back in 0.1 Hz steps. To determine the oscillation amplitude at each step, we illuminated the particle with a vertical laser sheet of 140 µm thickness and imaged it from the side by an external digital CCD camera (max. field rate is 50 fields/s, resolution is pixels). Forrelatively small values oftheexcitation voltage(u ex < 30mV), we observed theusual linear (harmonic) oscillations: The dependence of the oscillation amplitude on the frequency has a single symmetric narrow maximum at the resonance frequency ω 0 /2π 17.0 Hz (primary resonance). However, for larger U ex the dependence clearly exhibits nonlinearity of the oscillations (see, e.g., [13]). Figure 2 shows that the maximum of the primary resonance shifts to the left, as the excitation voltage increases. When U ex exceeds some critical value, a hysteresis appears. To illustrate this phenomenon, we can compare Figs. 2(a) and 2(b) (U ex = 100 mv and 200 mv). When the frequency increases [Fig. 2(a)], the amplitude grows continuously until a certain frequency (ω + ) is reached, then it jumps upward and thereafter decreases monotonically as ω is further increased. On the way back [Fig. 2(b)], the amplitude grows continuously until another frequency (ω ) is reached. Then it spontaneously jumps downward and continuous to decrease slowly as the frequency is reduced further. We found that ω + is always larger, than ω. Outside this hysteresis zone, the experimental points obtained for increasing and decreasing frequencies practically overlap. The shift of the maximum, as well as the width of the hysteresis zone rapidly increase with U ex. 3

4 Another peculiarity of the oscillations are the secondary resonances two maxima at ω 1ω 2 0 and ω 2ω 0, which are observed for sufficiently high excitation voltage. Figure 3 shows the peak inthe vicinity ω 1ω 2 0 (superharmonic resonance) for different values of U ex. We see that the dependence has a finite offset with some slope (marked by the dashed line), which represents the low-frequency tail of the primary resonance. The shape of the peaks resembles that of the primary resonance: As U ex increases, the maximum shifts to lower ω and the hysteresis appears. In contrast, for the subharmonic resonance at ω 2ω 0 (Fig. 4) the dependence is qualitatively different. When U ex is below a certain threshold, we see only the offset the high-frequency tail of the primary resonance but when U ex exceeds this threshold, the amplitude increases abruptly. When ω is increased [Fig. 4(a)], the amplitude decreases very slowly along the offset line up to some point. Then the amplitude jumps upward and subsequently decreases rapidly until the resonance branch crosses the offset line. At higher frequencies the dependence again follows the offset. When ω is decreased [Fig. 4(b)], the amplitude varies approximately as in the case of increasing frequency, but there is no readjustment downward anywhere. The amplitude increases until the particle is ejected from the sheath. Both the height and the width of the peak rapidly increase with U ex. It is worth noting that the amplitude of oscillations both for primary and secondary resonances is always much smaller than the sheath thickness ( 20 mm). Theory and discussion The particle oscillations are determined by the spatial distribution of the electrostatic potential, φ(z), in the sheath. In the absence of excitation, a particle is levitated in the minimum of the potential well (at the height z = 0), where the gravitational force, Mg, is balanced by the electrostatic force, Q(0)E(0) Q 0 E 0. We assume that the equilibrium particle charge, Q(z), changes weakly with z [compared to the electric field of the sheath, E(z)], so that we can set Q Q 0 = const. The particle collision experiments [14] in Ar discharge at pressures p 1 Pa confirm this assumption: Typically, the spatial scale of the field change is approximately one order smaller than that of the charge change [15]. The electrostatic energy of the particle, U = Qφ, can be expanded around z = 0 in the 4

5 series, U(z) = U 0z z U 6 U 0 z U(4) 0 z 4 +O(z 5 ). (1) Using the condition of equilibrium Mg = QE 0 U 0 and the definition of the resonance frequency, Mω0 2 = QE 0 U 0, we rewrite it as follows: U(z) M ( gz ω2 0z αz βz4), (2) where α = U 0 /2M and β = U (4) 0 /6M are the anharmonic coefficients. We keep only the first two anharmonic coefficients, because in practice they are sufficient to describe all major peculiarities of a nonlinear oscillator [13,16]. Introducing the damping rate due to neutral gas friction, γ, and using Eq. (2), we can write the following equation for the particle oscillation: z +2γż +ω 2 0 z +αz2 +βz 3 = F(z) M cosωt. (3) Here F is the excitation force acting from the wire below the particle. This force presumably depends on the vertical position of the particle, and we expand it up to quadratic terms, F(z) F 0 +F 0 z F 0 z2. (4) First, let us consider the primary resonance ω ω 0. Nonlinear effects are stronger when the oscillation amplitude is larger, and therefore we are interested in a narrow region ǫ = ω ω 0 around the resonance frequency, where ǫ ω 0. This approach is normally valid in the limit γ ω 0 and is justified for our case: From the expression for the neutral friction force [17] we evaluate γ/2π Hz which is much less than the measured ω 0 /2π 17.0 Hz. Then, we obtain from Eq. (3), z +2γż +ω 2 0 z +αz2 +βz 3 = ω 2 0 Acos(ω 0 +ǫ)t, (5) where A = F 0 /Mω 2 0 ku ex and k is a scale factor of the oscillation amplitude, normalized to the excitation voltage. In Eq. (5) we omit the terms of higher order in F(z), because for 5

6 the primary resonance they are not important when the inequality A F 0 /F 0 1 is satisfied (this condition always holds in our case). In accordance with the method of successive approximations for anharmonic oscillations [13,16], the first term in the solution of Eq. (5) is z(t) acos(ω 0 +ǫ)t, and the dependence of the amplitude a on ǫ and A (frequencyresponse equation) is given by a 2 [(ǫ κa 2 ) 2 +γ 2 ] = 1 4 ω2 0 A2, (6) where the constant κ characterizes a nonlinear shift of the primary resonance frequency, κ = 3β 5α2. (7) 8ω 0 12ω0 3 The least-squares fit of the experimental points for the low-amplitude (linear) primary resonance gives us the following values: the resonance frequency ω 0 /2π = 17.0 Hz, the damping rate γ/2π = Hz, and the amplitude scale factor k = mm/v (note that the fitted damping rate is very close to γ/2π = Hz evaluated from the theory [17]). Using these values, we fit the points for the nonlinear oscillations in Fig. 2 to the function a(ǫ,a) from Eq. (6). The solid lines represent the least-squares fit with κ/2π = 0.96 Hz/mm 2. If each curve is fitted independently, this value varies within 5%. The hysteresis appears on the curves, when A exceeds the critical value: A 2 cr = (γ3 / κ ω 2 0 ) ( mm) 2, which corresponds to U ex 60 mv. For the superharmonic resonance ω 1 2 ω 0, we set ǫ = ω 1 2 ω 0. The solution of Eq. (3) is approximately a sum of the first- and second-order terms [13], z(t) z 1 (t) +z 2 (t). The first (linear) term is z 1 (t) = a 1 cos( 1 2 ω 0 +ǫ)t, where a ( 1+ 4 ǫ/ω ) 3 0 A, (8) represents the amplitude offset (dashed line in Fig. 3), and z 2 describes the resonance peak due to nonlinearity. Substituting the expression for z 1 (t) together with Eq. (4) in Eq. (3), we get the resonance terms z 2 1 cos(ω 0 + 2ǫ)t in the resulting equation (see Ref. [13]). Retaining these terms, we obtain, 6

7 z 2 +2γż 2 +ω 2 0 z 2 +αz 2 2 +βz3 2 = 8 9 α (ω/2)a 2 cos(ω 0 +2ǫ)t, (9) where α (ω/2) = α 3 4 ω2 0/l and l = F 0 /F 0 < 0 is the spatial scale of change of the excitation force. In Eq. (9) we omit the small terms O(A 2 /l 2 ). Formally, the derived equation for the superharmonic resonance is similar to that for the primary resonance [see Eq. (5)], and therefore shapes of the corresponding curves are qualitatively the same. Assuming z 2 (t) a 2 cos(ω 0 +2ǫ)t, we obtainthefollowing frequency-response equation forthesuperharmonic resonance: a 2 2 [ (2ǫ κa 2 2 ) 2 +γ 2] = ( α(ω/2) ω 0 ) 2A 4. (10) The independent least-squares fit of the experimental points in Fig. 3 using Eq. (10) gives for each curve values of ω 0 and γ, which are nearly the same as those for the primary resonance (deviation within 0.5%), κ/2π = 1.0 ± 5% Hz/mm 2, and α (ω/2) /(2π) 2 = 32±10% Hz 2 /mm. The critical value of A for the hysteresis: A 4 cr = (γ3 ω 2 0 / κ α2 (ω/2) ) ( mm) 4, which corresponds to U ex 3.5 V. Next, for the subharmonic resonance ω 2ω 0, we set ǫ = ω 2ω 0. The first-order term is z 1 (t) = a 1 cos(2ω 0 +ǫ)t with the amplitude offset a ( 1 4 ǫ/ω ) 3 0 A. (11) Retaining the necessary terms (see Ref. [13]), we derive from Eq. (3) the equation for z 2, z 2 +2γż 2 +ω 2 0 [ ( ) 1 2 α(2ω) A/ω cos(2ω0 +ǫ)t ] z 2 +αz2 2 +βz3 2 = 0, (12) where α (2ω) = α ω2 0 /l. We see that Eq. (12) is an equation of a nonlinear parametric oscillator, and therefore the subharmonic resonance increases due to a parametric instability [13]. Putting z 2 (t) a 2 cos(ω ǫ)t, we get the frequency-response equation, 2 a 2 2 [ ( 1 2 ǫ κa2 2 )2 +γ 2] = 1 36 ( α(2ω) ω 0 ) 2A 2 a 2 2. (13) Solution of Eq. (13) has the following peculiarities [13]: If A is less than the threshold value A th = 6γω 0 / α (2ω), then Eq. (13) has only the zero solution a 2 = 0, and thus just the 7

8 offset a 1 (ω) can be observed in experiments. For sufficiently high U ex (A > A th ), a non-zero solution exists for ǫ b1 < ǫ < ǫ b2, where ǫ b1,2 = 2γ A 2 /A 2 th 1. If the frequency increases, a 2 jumps upward from zero at ǫ b1 and then continuously decreases to zero at ǫ b2. On the way back, a 2 starts from zero at ǫ b2 and then grows monotonically. The least-squares fit of the points in Fig. 4 (U ex = 2.0 V) with Eq. (13) gives us κ/2π = 0.95 Hz/mm 2 and α (2ω) /(2π) 2 = 320 Hz 2 /mm. Thus, A th 0.02 mm, which corresponds to U ex 0.5 V. The fit for the center ǫ = 0 yields Hz, which is 2% larger than the double value of the resonance frequency obtained for the primary and superharmonic resonance. Now we can finally reconstruct the sheath potential, φ(z). Using the fitted values α (ω/2) = α 3 4 ω2 0 /l (2π)2 30 Hz 2 /mm and α (2ω) = α+ 3 2 ω2 0 /l (2π)2 320 Hz 2 /mm, we evaluate the first anharmonic coefficient and the spatial scale of the excitation force: α/(2π) Hz 2 /mm and l 2 mm. Substituting this value for α and putting κ/2π = 0.95 Hz/mm in Eq. (7), we estimate the second anharmonic coefficient: β/(2π) 2 20 Hz 2 /mm 2. Then, using the series Eq. (2) we evaluate the potential energy of a particle in the sheath field (z in mm), U(z) Mω 2 0 ( 0.9z z z z4) φ(z). (14) We see that in our case at least the first anharmonic term results in a significant deviation of the sheath potential from a parabolic one, and therefore the oscillations become strongly nonlinear when the amplitude reaches a few tenths of mm, or more. At the same time the obtained coefficients of the series converge rapidly (β/α 0.15 mm 1 ), so that for z < 2 mm we can limit ourselves to expansion (1). Thus, Eq. (14) provides convenient analytical expression for the electric field in rather wide vicinity of the equilibrium particle position. Other experiments performed with different particle sizes and discharge conditions (Ar and Kr, p 1 7 Pa) confirm that the sheath potential contains considerable anharmonic terms at low pressures. We have also investigated, how strongly the sheath potential is perturbed by the wire below the particle. Experiments with a wire at the same level with 8

9 a particle (horizontal separation 11 mm) show results, which are very similar to those reported here. In this Letter, we have presented one example of nonlinear particle oscillations in the sheath of a low-pressure rf discharge and its quantitative analysis. The proposed simple method opens a possibility to retrieve the profile of the electric field in the whole pre-sheath and upper part of the sheath region, using particles of different masses (and thus levitating at different heights). Analysis for each particle allows us to reconstruct the electric field in a range of a few mm, and therefore it is sufficient to use just a few different particles to get rather precise field distribution in the whole sheath range. Hence, we believe that experiments with excitation of nonlinear oscillations might be an effective way to study the sheath distribution. 9

10 REFERENCES [1] U. Czarnetzki, D. Luggenhölscher, and H. F. Döbele, Plasma Sources Sci. Technol. 8, 230 (1999). [2] A. H. Sato and M. A. Lieberman, J. Appl. Phys. 68, 6117 (1990). [3] C. M. O. Mahony, R. Al Wazzan, and W. G. Graham, Appl. Phys. Lett. 71, 608 (1997). [4] T. Nitter, Plasma Sourses Sci. Technol. 5, 93 (1996). [5] M. Zuzic, H. M. Thomas, and G. E. Morfill, J. Vac. Sci. Technol. A 14, 496 (1996). [6] S. Nunomura et al., Phys. Rev. Lett. 83, 1970 (1999). [7] A. V. Ivlev, U. Konopka, and G. Morfill, Phys. Rev. E 62, 2739 (2000). [8] A. Melzer, T. Trottenberg, and A. Piel, Phys. Lett. A 191, 301 (1994). [9] T. Trottenberg, A. Melzer, and A. Piel, Plasma Sources Sci. Technol. 4, 450 (1995). [10] H. Schollmeyer et al., Phys. Plasmas 6, 2693 (1999). [11] E. B. Tomme et al., Phys. Rev. Lett. (to be published). [12] P. J. Hargis, Jr. et al., Rev. Sci. Instrum. 65, 140 (1994). [13] L. D. Landau and E. M. Lifshitz, Mechanics (Pergamon, Oxford, 1960). [14] U. Konopka, L. Ratke, and G. E. Morfill, Phys. Rev. Lett. 84, 891 (2000). [15] U. Konopka, Ph.D. thesis, Ruhr-Universität Bochum, [16] A. H. Nayfeh and D. T. Mook, Nonlinear Oscillations (Wiley, New York, 1979). [17] P. Epstein, Phys. Rev. 23, 710 (1924). 10

11 FIGURES FIG. 1. Experimental setup. FIG. 2. Variation of the amplitude of particle oscillations close to the primary resonance for increasing (a) and decreasing (b) frequency of excitation, ω, and for different magnitudes of the excitation voltage U ex : 50 mv (open circles), 100 mv (closed circles), and 200 mv (squares). Solid lines show the least-squares fit of the points using Eq. (6). The vertical dotted line indicates the position of the resonance frequency, ω 0, obtained from the fit. FIG. 3. Variation of the amplitude of particle oscillations close to the superharmonic resonance for increasing (a) and decreasing (b) frequency of excitation, ω, and for different magnitudes of the excitation voltage U ex : 4 V (open circles), 6 V (closed circles), and 7 V (squares). Solid lines show the least-squares fit of the points using Eq. (10). The tilted dashed lines represent the amplitude offset [Eq. (8)]. The vertical dotted line indicates the position of the half resonance frequency, 1 2 ω 0, obtained from the fit. FIG. 4. Variation of the amplitude of particle oscillations close to the subharmonic resonance for increasing (a) and decreasing (b) frequency of excitation, ω. The excitation voltage U ex = 2 V. Solid lines show the least-squares fit of the points using Eq. (13). The tilted dashed lines represent the amplitude offset [Eq. (11)]. The vertical dotted line indicates the position of the double resonance frequency, 2ω 0, obtained from the fit. 11