Study of DC Cylindrical Magnetron by Langmuir Probe

Size: px
Start display at page:

Download "Study of DC Cylindrical Magnetron by Langmuir Probe"

Transcription

1 WDS'2 Proceedings of Contributed Papers, Part II, 76 8, 22. ISBN MATFYZPRESS Study of DC Cylindrical Magnetron by Langmuir Probe A. Kolpaková, P. Kudrna, and M. Tichý Charles University Prague, Faculty of Mathematics and Physics, Prague, Czech Republic. Abstract. We present results of the Langmuir probe measurements in the cylindrical magnetron apparatus in this paper. Measurements were performed in low-temperature and low-pressure neon plasma. This work aims to study the impact of different values of macroparameters (e.g. discharge current, the strength of the magnetic field, pressure) on plasma microparameters (floating potential, plasma potential, electron density). The radial profiles of plasma parameters were obtained from Langmuir probe characteristics. w results of neon plasma are mutually complementary and well comparable with previous measurements in argon. Introduction Cylindrical magnetron is often used for deposition of thin films with interesting physical or chemical properties or materials with special characteristics (e.g. magnetic or optical). The configuration of cylindrical magnetron is relatively simple and the cylindrical symmetry is suitable for computer simulations of measurements [Golubovskii et al., 26]. Experimental data can be compared and verified by results obtained from model. The basic physics and various configuration of magnetron sputtering sources are reviewed in [Thorton, 977]. The principle of the cylindrical magnetron is based on the radial electric field and magnetic field applied parallel to the axis. This configuration of crossed electric and magnetic fields causes ExB drift of charged particles. Electron drift velocity is studied in work [Borah et al., 2]. High-energetic electrons are confined by applied magnetic field and they are responsible for the ionization of the neutral noble gas atoms. Formed positive ions are accelerated towards the negatively biased cathode target and their impact on cathode cause secondary electron emission and sputtering of cathode material. Secondary electrons are also by the influence of Lorentz force confined in E B drift loops in vicinity of cathode and they help to sustain the discharge. The sputtered atoms deposit thin film on the substrate situated near the anode. Understanding the behavior of discharge requires making systematic experimental studies of the spatial and temporal plasma parameters. Langmuir probes are used as suitable experimental tools for determining the plasma parameters during deposition of thin films when the discharge burns. This plasma diagnostic is comparatively cheap and easily technically practicable. Several methods are used for interpretation of probe data [Pfau et al., 2]. Simple explanation of probe characteristic interpretation is described in work [Merlino, 27]. In the previous experiments [Holík et al., 22, 24] the Langmuir probe method was used to study axial and radial dependences of plasma parameters in the argon plasma. In this paper we present radial profiles of floating potential, plasma potential and electron density for neon discharge. Our results of measurements in neon plasma are also used as input parameters for numerical model. This model is being developed at Department of Physical Electronics of Faculty of Science on Masaryk University in Brno. Experimental apparatus and measurements Experiments are performed in low temperature weakly magnetized DC plasma using the cylindrical magnetron apparatus. The scheme of this experimental system is shown in Figure. The system of cylindrical magnetron consists of two cylindrical electrodes placed in the stainless steel vacuum chamber. The inner electrode with diameter of 8 mm is negatively biased and coaxially placed in the chamber and is cooled by water to prevent its overheating. The grounded outer electrode is 58 mm in diameter. The discharge length is 3 mm. Constant and homogeneous magnetic field parallel to the axis is created by six coils mounted round the vacuum chamber. Magnetic field can vary up to 4 mt. The vacuum chamber is equipped by six vacuum ports for Langmuir or emissive probes and two ports with glass windows for optical 76

2 emission spectroscopy situated between coils. The apparatus is pumped by tandem of piston and turbomolecular pump to the ultimate pressure in the order of 3 Pa. The working gas is usually argon or neon. Typical working pressure range is of Pa and working gas flow rate range is of.5 2 sccm. The discharge current can be set up in the range of 25 ma. The apparatus is detailed described in [Golubovskii et al., 26]. Measurements are performed by cylindrical Langmuir probe, which is shown in Figure 2. Langmuir probe consists of tungsten wire with a diameter of 35 μm fixed in a copper tube. The probe holder is made up of two degussit tubes placed one into other. This construction aims to minimize impact of the sputtered cathode material on the probe (to prevent conductive connection between deposited layer on the ceramic holder and the wire of the probe). The probe is radially movable and placed at the axial position of 6 mm from the center of magnetron. The orientation of probe wire is perpendicular to the magnetic field lines to minimize the effect of the magnetic field on the probe characteristics, see [Pfau et al., 2, Kudrna, 997]. The probe characteristics are obtained by means of computer controlled data acquisition system. The measuring probe circuit consists of DC power supply Siemens calibrator B35, which is used as probe bias voltage generator and Siemens multimeter B322, which measures the probe current. Battery powered circuit with high-voltage operational amplifier Apex PA24 is used to double the voltage sweep of the Siemens calibrator. The exact value of generated voltage is calibrated using the control software. The entire probe electronics is driven by GPIB interface and it is controlled by software, which is created in graphical programming language Agilent VEE. One probe characteristic consists of about 2 points and it takes approximately one minute to record it. For displaying and analyzing measured probe characteristics the software START [Kudrna, 993] is used. The program estimates the floating potential V fl from the measured probe characteristic. The plasma potential V p is estimated from the zero-cross of the second derivative. The electron density N e is evaluated from the slope of the square of the probe current in the electron accelerating regime versus probe voltage dependence. All measurements presented in this paper were performed in neon plasma. The work aims to study the impact of macro-parameters (e.g. discharge current, the strength of the magnetic field, pressure) on plasma micro-parameters. Probe characteristics were measured for different values of macroparameters: discharge current was changed in the range of 5 25 ma, magnetic field was adjusted Figure. Schematic diagram of the cylindrical magnetron apparatus. Figure 2. The scheme of the cylindrical Langmuir probe construction. 77

3 in the range of 5, and also the gas pressure was altered from 4 to. According to [Pfau et al., 2] the influence of the magnetic field to the probe electron current in the collision-free case depends on the parameter β = r p /r L (r p is the probe radius; r L is the radius of the cyclotron motion of a charged particle). In our case for magnetic field strengths 5 mt, 2 mt and parameter β was calculated: β 5mT =.5, β 2mT =.6, β 22.5mT =.7. For parameter β << the influence of magnetic field is small and can be neglected. Magnetic field was therefore not considered in the evaluation of plasma parameters from Langmuir probe characteristics. Results and discussion Presented figures show dependences of plasma parameters on relative radial distance between cathode and anode, r a is the inner radius of the anode and r denotes the probe distance from the magnetron axis. Cathode surface corresponds to position x=.3 and anode surface is at position x=. The typical radial profiles of floating potential V fl are shown in Figures 3, 6 and 9. Radial dependences of plasma potential V p are depicted in Figures 4, 7 and. From these figures, we can see that values of plasma potential are higher than the values of floating potential and this difference is higher near the cathode where the higher electron temperature is expected. This kind of potential profile is typical for glow discharge. It can be observed the cathode fall in the cathode region and also anode fall in the anode region. Between these two regions the plasma potential has only very slow, approximately linear increase. This area of glow discharge is associated with positive column. The plasma potentials slightly go beyond V in the vicinity of anode. We assume that reason for this effect could have been the absence of vessel wall and the presence of the vacuum port for probe in that place. The influence of pressure and discharge current on plasma and floating potential is visible in Figures 3, 4, 6 and 7. Potentials increase with higher value of pressure and discharge current. Radial distributions of electron densities N e in the magnetron for different discharge conditions are shown in Figures 5, 8 and. Electron concentration slightly varying is in order of 6 m 3 for all measurements. The Figures 6 and 9 show that electron concentration increases for higher values of working pressure and discharge current. We observed that its maximum is located approximately at position x=.5 of relative distance and with increasing distance from the cathode N e decreases gradually. The influence of magnetic field strength on floating and plasma potentials is depicted in Figure 9 and. We observed that for higher magnetic fields the potential decreases. The reason is that at higher magnetic fields charged particles are confined closer to the cathode. For the same pre-set current flow the higher radial electric field is necessary to move charged particles across magnetic field lines. This fact causes increasing of radial electric field in the positive column. From Figure, we can see decreasing electron density for higher magnetic filed. We observed that its maximum moves towards the cathode, because electrons are stronger confined near the cathode by stronger magnetic field. It was found that for the magnetic field values greater than 2 mt, the amplitude of potential fluctuations increases [Kudrna et al., 997]. The probe current is much noisier for higher magnetic field and it can not be correctly interpreted. Therefore we limited our measurements to values of magnetic field around 2 mt. Conclusion Radial profiles of plasma parameters were determined from probe characteristics obtained for different values of gas pressure, discharge current and magnetic field strength. Measurements were performed in the neon weakly magnetized DC plasma. All obtained results agree with previous measurements in argon plasma published in works [Rusz, 23, Holík et al., 24]. It can be concluded that behavior of plasma parameters for both neon and argon are very well comparable. Obtained experimental results will be compared with numerical model of neon plasma, which is being developed at Masaryk University in Brno. Acknowledgments. This research has been supported by the Charles University Grant Agency, grant No.25 and No. 6462, by the CEEPUS CII-AT3 and by EURATOM. The financial support by the Czech Science Foundation, grant 4/9/H8 and by project P25//386 is also gratefully acknowledged. 78

4 5 6 Pa 25 ma 5 Pa 4 Pa Figure 3: The radial dependences of floating potential for different neon pressures obtained using discharge current of 25 ma and strength of magnetic field of. 6 Pa ma 5 Pa 4 Pa Figure 4: The radial profiles of the plasma potential for different value of gas pressure obtained using discharge current of 25 ma and strength of magnetic field of. Electron density [ 6 x m ] 3,5 3, 2,5 2,,5,,5 25 ma 6 Pa 5 Pa 4 Pa, Figure 5: The radial distributions of the electron density for different neon pressures obtained using discharge current of 25 ma and strength of magnetic field of ma 5 Pa 2 ma 5 ma Figure 6: The radial profiles of the floating potential for different discharge currents obtained magnetic field of. 25 ma 5 Pa 2 ma -7 5 ma Figure 7: The radial dependences of the plasma potential for different discharge currents obtained magnetic field of. Electron density [ 6 x m ] 3,2 2,4,6,8 5 Pa 25 ma 2 ma 5 ma, Figure 8: The radial distributions of the electron density for different discharge currents obtained magnetic field of. 79

5 ma 5 mt 8 2 mt Figure 9: The radial profiles of the floating potentials for different strength of magnetic field obtained using neon pressure of and discharge current of 5 ma. 5 ma 5 mt 2 mt Figure : The radial dependences of the plasma potential for different strength of magnetic field obtained using neon pressure of and discharge current of 5 ma. Electron density [ 6 x m ] 3,5 3, 2,5 2,,5,,5 5 ma 5 mt 2 mt, Figure : The radial distributions of the electron densities determined from square of the probe current in the electron accelerating regime versus probe voltage. The parameter is magnetic field strength. References Borah, S. M., A. R. Pal, H. Bailung, and J. Chutia, Effect of E B electron drift and plasma discharge in dc magnetron sputtering plasma, Chin. Phys. B, 2, 47, 9, 2. Golubovskii, Yu. B., I. A. Porokhova, V. P. Sushkov, M. Holík, P. Kudrna, and M. Tichý, Electron kinetics in cylindrical discharges of magnetron configurations, Plasma Sources Sci. Technol., 5, , 26. Holík, M., P. Kudrna, O. Bilyk, J. Rusz, M. Tichý, J. F. Behnke, I. A. Porokhova, Yu. B. Golubovskii, 2-D experimental study of plasma parameters in the cylindrical magnetron dc discharge, Czechoslovak Journal of physics, 52, D673 D68, 22. Holík, M., O. Bilyk, A. Marek, P. Kudrna, J. F. Behnke, and M. Tichý, 2-D Experimental study of the plasma parameter variations of the magnetically sustained DC discharge in cylindrical symmetry in argon, Contrib. Plasma Phys., 44, 63 68, 24. Kudrna, P., PhD. Dissertation, Charles University in Prague, Faculty of Mathematics and Physics, Prague, 997. Kudrna, P., E. Passoth, Langmuir probe diagnostics of a low temperature non-isothermal plasma in a week magnetic field, Contributions to Plasma Physics, 5, , 997. Merlino, R. L., Understanding Langmuir probe current-voltage characteristics, Am. J. Phys., 75, 78 85, 27. Pfau, S., M. Tichý, Langmuir probe diagnostics of low-temperature plasma, in Hippler R., Pfau, S., Schmidt M., Schoenbach K. H., Low temperature plasma physics, WILEY-VCH, Verlag, Berlin, 3 72, 2. Rusz, J., PhD. Dissertation, Charles University in Prague, Faculty of Mathematics and Physics, Prague, 23. Thorton, J. A., Magnetron sputtering: basic physics and application to cylindrical magnetrons, J. Vac. Sci. Technol., 5, 7 77,

STRONG DOUBLE LAYER STRUCTURE IN THERMIONIC VACUUM ARC PLASMA *

STRONG DOUBLE LAYER STRUCTURE IN THERMIONIC VACUUM ARC PLASMA * STRONG DOUBLE LAYER STRUCTURE IN THERMIONIC VACUUM ARC PLASMA * V. TIRON 1, L. MIHAESCU 1, C.P. LUNGU 2 and G. POPA 1 1 Faculty of Physics, Al. I. Cuza University, 700506, Iasi, Romania 2 National Institute

More information

Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor

Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor WDS'06 Proceedings of Contributed Papers, Part II, 150 155, 2006. ISBN 80-86732-85-1 MATFYZPRESS Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor R. Šmíd Masaryk University,

More information

Effect of negative ions on the characteristics of plasma in a cylindrical discharge

Effect of negative ions on the characteristics of plasma in a cylindrical discharge Araghi and Dorranian Journal of Theoritical and Applied Physics 2013, 7:41 RESEARCH Open Access Effect of negative ions on the characteristics of plasma in a cylindrical discharge Farnaz Araghi and Davoud

More information

The Computational Simulation of the Positive Ion Propagation to Uneven Substrates

The Computational Simulation of the Positive Ion Propagation to Uneven Substrates WDS' Proceedings of Contributed Papers, Part II, 5 9,. ISBN 978-8-778-85-9 MATFYZPRESS The Computational Simulation of the Positive Ion Propagation to Uneven Substrates V. Hrubý and R. Hrach Charles University,

More information

THE INFLUENCE OF EXTERNAL MAGNETIC FIELD ON THE RADIATION EMITTED BY NEGATIVE GLOW OF A DC GLOW DISCHARGE

THE INFLUENCE OF EXTERNAL MAGNETIC FIELD ON THE RADIATION EMITTED BY NEGATIVE GLOW OF A DC GLOW DISCHARGE PLASMA PHYSICS THE INFLUENCE OF EXTERNAL MAGNETIC FIELD ON THE RADIATION EMITTED BY NEGATIVE GLOW OF A DC GLOW DISCHARGE M. TOMA, I. A. RUSU, D. O. DOROHOI Plasma Physics Department, A. I. Cuza University,

More information

Energy fluxes in plasmas for fabrication of nanostructured materials

Energy fluxes in plasmas for fabrication of nanostructured materials Energy fluxes in plasmas for fabrication of nanostructured materials IEAP, Universität Kiel 2nd Graduate Summer Institute "Complex Plasmas" August 5-13, 2010 in Greifswald (Germany) AG 1 Outline Motivation

More information

The Q Machine. 60 cm 198 cm Oven. Plasma. 6 cm 30 cm. 50 cm. Axial. Probe. PUMP End Plate Magnet Coil. Filament Cathode. Radial. Hot Plate.

The Q Machine. 60 cm 198 cm Oven. Plasma. 6 cm 30 cm. 50 cm. Axial. Probe. PUMP End Plate Magnet Coil. Filament Cathode. Radial. Hot Plate. 1 The Q Machine 60 cm 198 cm Oven 50 cm Axial Probe Plasma 6 cm 30 cm PUMP End Plate Magnet Coil Radial Probe Hot Plate Filament Cathode 2 THE Q MACHINE 1. GENERAL CHARACTERISTICS OF A Q MACHINE A Q machine

More information

CHARACTERIZATION OF A DC PLASMA WITH HOLLOW CATHODE EFFECT

CHARACTERIZATION OF A DC PLASMA WITH HOLLOW CATHODE EFFECT Romanian Reports in Phisics, Vol. 56, No., P. 71-76, 004 CHARACTERIZATION OF A DC PLASMA WITH HOLLOW CATHODE EFFECT A. R. PETRE 1, M. BÃZÃVAN 1, V. COVLEA 1, V.V. COVLEA 1, ISABELLA IOANA OPREA, H. ANDREI

More information

AL. I. CUZA UNIVERSITY, IAŞI FACULTY OF PHYSICS. Doctorate Thesis Summary

AL. I. CUZA UNIVERSITY, IAŞI FACULTY OF PHYSICS. Doctorate Thesis Summary AL. I. CUZA UNIVERSITY, IAŞI FACULTY OF PHYSICS Doctorate Thesis Summary CONTRIBUTIONS TO THE STUDY OF CATHODE SPUTTERING PROCESSES IN STRUCTURES WITH ELECTRO- MAGNETIC CONFINEMENT Radu-Paul APETREI Scientific

More information

Electrical Discharges Characterization of Planar Sputtering System

Electrical Discharges Characterization of Planar Sputtering System International Journal of Recent Research and Review, Vol. V, March 213 ISSN 2277 8322 Electrical Discharges Characterization of Planar Sputtering System Bahaa T. Chaid 1, Nathera Abass Ali Al-Tememee 2,

More information

Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement

Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement M. Mišina, a) Y. Setsuhara, and S. Miyake Joining and Welding Research Institute,

More information

PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen

PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen HAN Qing ( ), WANG Jing ( ), ZHANG Lianzhu ( ) College of Physics Science and Information Engineering, Hebei Normal University,

More information

Chapter 5: Nanoparticle Production from Cathode Sputtering. in High-Pressure Microhollow Cathode and Arc Discharges

Chapter 5: Nanoparticle Production from Cathode Sputtering. in High-Pressure Microhollow Cathode and Arc Discharges 96 Chapter 5: Nanoparticle Production from Cathode Sputtering in High-Pressure Microhollow Cathode and Arc Discharges 5.1. Introduction Sputtering is a fundamental aspect of plasma operation and has been

More information

DEPOSITION OF THIN TiO 2 FILMS BY DC MAGNETRON SPUTTERING METHOD

DEPOSITION OF THIN TiO 2 FILMS BY DC MAGNETRON SPUTTERING METHOD Chapter 4 DEPOSITION OF THIN TiO 2 FILMS BY DC MAGNETRON SPUTTERING METHOD 4.1 INTRODUCTION Sputter deposition process is another old technique being used in modern semiconductor industries. Sputtering

More information

Adjustment of electron temperature in ECR microwave plasma

Adjustment of electron temperature in ECR microwave plasma Vacuum (3) 53 Adjustment of electron temperature in ECR microwave plasma Ru-Juan Zhan a, Xiaohui Wen a,b, *, Xiaodong Zhu a,b, Aidi zhao a,b a Structure Research Laboratory, University of Science and Technology

More information

Chaotic-to-ordered state transition of cathode-sheath instabilities in DC glow discharge plasmas

Chaotic-to-ordered state transition of cathode-sheath instabilities in DC glow discharge plasmas PRAMANA c Indian Academy of Sciences Vol. 67, No. 2 journal of August 2006 physics pp. 299 304 Chaotic-to-ordered state transition of cathode-sheath instabilities in DC glow discharge plasmas MD NURUJJAMAN

More information

SPECTRAL INVESTIGATION OF A COMPLEX SPACE CHARGE STRUCTURE IN PLASMA

SPECTRAL INVESTIGATION OF A COMPLEX SPACE CHARGE STRUCTURE IN PLASMA SPECTRAL INVESTIGATION OF A COMPLEX SPACE CHARGE STRUCTURE IN PLASMA S. GURLUI 1, D. G. DIMITRIU 1, C. IONITA 2, R. W. SCHRITTWIESER 2 1 Faculty of Physics, Al. I. Cuza University, 11 Carol I Blvd., RO-700506

More information

1. INTRODUCTION 2. EXPERIMENTAL SET-UP CHARACTERIZATION OF A TUBULAR PLASMA REACTOR WITH EXTERNAL ANNULAR ELECTRODES

1. INTRODUCTION 2. EXPERIMENTAL SET-UP CHARACTERIZATION OF A TUBULAR PLASMA REACTOR WITH EXTERNAL ANNULAR ELECTRODES Romanian Reports in Physics, Vol. 57, No. 3, P. 390-395, 2005 CHARACTERIZATION OF A TUBULAR PLASMA REACTOR WITH EXTERNAL ANNULAR ELECTRODES C. PETCU, B. MITU, G. DINESCU National Institute for Lasers,

More information

The effect of self-absorption in hollow cathode lamp on its temperature

The effect of self-absorption in hollow cathode lamp on its temperature Plasma Science and Applications (ICPSA 2013) International Journal of Modern Physics: Conference Series Vol. 32 (2014) 1460349 (9 pages) The Author DOI: 10.1142/S2010194514603494 The effect of self-absorption

More information

Influence of Axial Magnetic Field on the Electrical Breakdown and Secondary Electron Emission in Plane-Parallel Plasma Discharge

Influence of Axial Magnetic Field on the Electrical Breakdown and Secondary Electron Emission in Plane-Parallel Plasma Discharge Vol:5, No:8, 211 Influence of Axial Magnetic Field on the Electrical Breakdown and Secondary Electron Emission in Plane-Parallel Plasma Discharge Sabah I. Wais, Raghad Y. Mohammed, Sedki O. Yousif International

More information

Measurements of Plasma Potential Distribution in Segmented Electrode Hall Thruster

Measurements of Plasma Potential Distribution in Segmented Electrode Hall Thruster Measurements of Plasma Potential Distribution in Segmented Electrode Hall Thruster Y. Raitses, D. Staack and N. J. Fisch Princeton University Plasma Physics Laboratory P. O. Box 451, Princeton, NJ 08543

More information

Experimental Studies of Ion Beam Neutralization: Preliminary Results

Experimental Studies of Ion Beam Neutralization: Preliminary Results Experimental Studies of Ion Beam Neutralization: Preliminary Results N. Ding, J. Polansky, R. Downey and J. Wang Department of Astronautical Engineering University of Southern California Los Angeles, CA

More information

1) Jozef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia

1) Jozef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia SI0100095 Nuclear Energy in Central Europe '98 Terme Catez, September 7 to 10, 1998 PLASMA RESPONSE TO A POSITIVE VOLTAGE STEP APPLIED TO AN ANODE IMMERSED IN A WEAKLY MAGNETIZED DISCHARGE PLASMA COLUMN

More information

FLASH CHAMBER OF A QUASI-CONTINUOUS VOLUME SOURCE OF NEGATIVE IONS

FLASH CHAMBER OF A QUASI-CONTINUOUS VOLUME SOURCE OF NEGATIVE IONS FLASH CHAMBER OF A QUASI-CONTINUOUS VOLUME SOURCE OF NEGATIVE IONS P.A. Litvinov, V.A. Baturin * Institute of Applied Physics, National Academy of Science of Ukraine, 58 Petropavlovskaya St. Sumy, 40030

More information

Plasma diagnostics of pulsed sputtering discharge

Plasma diagnostics of pulsed sputtering discharge Plasma diagnostics of pulsed sputtering discharge Vitezslav Stranak Zdenek Hubicka, Martin Cada and Rainer Hippler University of Greifswald, Institute of Physics, Felix-Hausdorff-Str. 6, 174 89 Greifswald,

More information

SCALING OF HOLLOW CATHODE MAGNETRONS FOR METAL DEPOSITION a)

SCALING OF HOLLOW CATHODE MAGNETRONS FOR METAL DEPOSITION a) SCALING OF HOLLOW CATHODE MAGNETRONS FOR METAL DEPOSITION a) Gabriel Font b) Novellus Systems, Inc. San Jose, CA, 95134 USA and Mark J. Kushner Dept. of Electrical and Computer Engineering Urbana, IL,

More information

Extrel Application Note

Extrel Application Note Extrel Application Note Real-Time Plasma Monitoring and Detection of Trace H 2 O and HF Species in an Argon Based Plasma Jian Wei, 575 Epsilon Drive, Pittsburgh, PA 15238. (Presented at the 191st Electrochemical

More information

PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING

PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING Second Edition MICHAEL A. LIEBERMAN ALLAN J, LICHTENBERG WILEY- INTERSCIENCE A JOHN WILEY & SONS, INC PUBLICATION CONTENTS PREFACE xrrii PREFACE

More information

Effect of Biasing on Electron Temperature in IR-T1 Tokamak

Effect of Biasing on Electron Temperature in IR-T1 Tokamak Effect of Biasing on Electron Temperature in IR-T1 Tokamak Sakineh Meshkani 1, Mahmood Ghoranneviss 1 and Mansoureh Lafouti 2 1 Plasma Physics Research Center, Science and Research Branch, Islamic Azad

More information

Anode double layer in magnetized radio frequency inductively coupled hydrogen plasma

Anode double layer in magnetized radio frequency inductively coupled hydrogen plasma JOURNAL OF APPLIED PHYSICS VOLUME 94, NUMBER 3 1 AUGUST 2003 Anode double layer in magnetized radio frequency inductively coupled hydrogen plasma Deli Tang and Paul K. Chu a) Department of Physics and

More information

Effect of Spiral Microwave Antenna Configuration on the Production of Nano-crystalline Film by Chemical Sputtering in ECR Plasma

Effect of Spiral Microwave Antenna Configuration on the Production of Nano-crystalline Film by Chemical Sputtering in ECR Plasma THE HARRIS SCIENCE REVIEW OF DOSHISHA UNIVERSITY, VOL. 56, No. 1 April 2015 Effect of Spiral Microwave Antenna Configuration on the Production of Nano-crystalline Film by Chemical Sputtering in ECR Plasma

More information

Figure 1, Schematic Illustrating the Physics of Operation of a Single-Stage Hall 4

Figure 1, Schematic Illustrating the Physics of Operation of a Single-Stage Hall 4 A Proposal to Develop a Double-Stage Hall Thruster for Increased Efficiencies at Low Specific-Impulses Peter Y. Peterson Plasmadynamics and Electric Propulsion Laboratory (PEPL) Aerospace Engineering The

More information

Effect of a Plume Reduction in Segmented Electrode Hall Thruster. Y. Raitses, L.A. Dorf, A A. Litvak and N.J. Fisch

Effect of a Plume Reduction in Segmented Electrode Hall Thruster. Y. Raitses, L.A. Dorf, A A. Litvak and N.J. Fisch Effect of a Plume Reduction in Segmented Electrode Hall Thruster Y. Raitses, L.A. Dorf, A A. Litvak and N.J. Fisch Princeton Plasma Physics Laboratory, P.O. Box 451, Princeton University, Princeton NJ

More information

( ) U-probe for the COMPASS Tokamak. Introduction

( ) U-probe for the COMPASS Tokamak. Introduction WDS'11 Proceedings of Contributed Papers, Part II, 227 232, 2011. ISBN 978-80-7378-185-9 MATFYZPRESS U-probe for the COMPASS Tokamak K. Kovařík, 1,2 I. Ďuran, 1 J. Stöckel, 1 J. Seidl, 1,2 D. Šesták, 1

More information

Lab 6 - Electron Charge-To-Mass Ratio

Lab 6 - Electron Charge-To-Mass Ratio Lab 6 Electron Charge-To-Mass Ratio L6-1 Name Date Partners Lab 6 - Electron Charge-To-Mass Ratio OBJECTIVES To understand how electric and magnetic fields impact an electron beam To experimentally determine

More information

Effects of the Gas Pressure on Low Frequency Oscillations in E B Discharges

Effects of the Gas Pressure on Low Frequency Oscillations in E B Discharges Effects of the Gas Pressure on Low Frequency Oscillations in E B Discharges IEPC-2015-307 /ISTS-2015-b-307 Presented at Joint Conference of 30th International Symposium on Space Technology and Science

More information

A simple electric thruster based on ion charge exchange

A simple electric thruster based on ion charge exchange A simple electric thruster based on ion charge exchange IEPC-2007-35 Presented at the 30 th International Electric Propulsion Conference, Florence, Italy Joe Khachan and Lachlan Blackhall University of

More information

Lab 5 - ELECTRON CHARGE-TO-MASS RATIO

Lab 5 - ELECTRON CHARGE-TO-MASS RATIO 79 Name Date Partners OBJECTIVES OVERVIEW Lab 5 - ELECTRON CHARGE-TO-MASS RATIO To understand how electric and magnetic fields impact an electron beam To experimentally determine the electron charge-to-mass

More information

Formation of High-b ECH Plasma and Inward Particle Diffusion in RT-1

Formation of High-b ECH Plasma and Inward Particle Diffusion in RT-1 J Fusion Energ (2010) 29:553 557 DOI 10.1007/s10894-010-9327-6 ORIGINAL RESEARCH Formation of High-b ECH Plasma and Inward Particle Diffusion in RT-1 H. Saitoh Z. Yoshida J. Morikawa Y. Yano T. Mizushima

More information

Lab 5 - ELECTRON CHARGE-TO-MASS RATIO

Lab 5 - ELECTRON CHARGE-TO-MASS RATIO 81 Name Date Partners Lab 5 - ELECTRON CHARGE-TO-MASS RATIO OBJECTIVES To understand how electric and magnetic fields impact an electron beam To experimentally determine the electron charge-to-mass ratio

More information

A novel diagnostic for time-resolved spectroscopic argon and lithium density measurements

A novel diagnostic for time-resolved spectroscopic argon and lithium density measurements Journal of Nuclear Materials 337 339 (2005) 1096 1100 www.elsevier.com/locate/jnucmat A novel diagnostic for time-resolved spectroscopic argon and lithium density measurements L. Schmitz *, P. Calderoni,

More information

A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS)

A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS) IOP Conference Series: Materials Science and Engineering A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS) To cite this article: D A L Loch and A P Ehiasarian 2012 IOP Conf. Ser.:

More information

Lab 6 - ELECTRON CHARGE-TO-MASS RATIO

Lab 6 - ELECTRON CHARGE-TO-MASS RATIO 101 Name Date Partners OBJECTIVES OVERVIEW Lab 6 - ELECTRON CHARGE-TO-MASS RATIO To understand how electric and magnetic fields impact an electron beam To experimentally determine the electron charge-to-mass

More information

Comparison of Hollow Cathode Discharge Plasma Configurations

Comparison of Hollow Cathode Discharge Plasma Configurations Comparison of Hollow Cathode Discharge Plasma Configurations IEPC-29-16 Presented at the 31st International Electric Propulsion Conference, University of Michigan Ann Arbor, Michigan USA September 2 24,

More information

Keywords. 1=magnetron sputtering, 2= rotatable cathodes, 3=substrate temperature, 4=anode. Abstract

Keywords. 1=magnetron sputtering, 2= rotatable cathodes, 3=substrate temperature, 4=anode. Abstract Managing Anode Effects and Substrate Heating from Rotatable Sputter Targets. F. Papa*, V. Bellido-Gonzalez**, Alex Azzopardi**, Dr. Dermot Monaghan**, *Gencoa Technical & Business Support in US, Davis,

More information

Profiling and modeling of dc nitrogen microplasmas

Profiling and modeling of dc nitrogen microplasmas JOURNAL OF APPLIED PHYSICS VOLUME 94, NUMBER 5 1 SEPTEMBER 2003 Profiling and modeling of dc nitrogen microplasmas Chester G. Wilson a) and Yogesh B. Gianchandani EECS Department, University of Michigan,

More information

Modélisation de sources plasma froid magnétisé

Modélisation de sources plasma froid magnétisé Modélisation de sources plasma froid magnétisé Gerjan Hagelaar Groupe de Recherche Energétique, Plasma & Hors Equilibre (GREPHE) Laboratoire Plasma et Conversion d Énergie (LAPLACE) Université Paul Sabatier,

More information

Experiment 6: Franck Hertz Experiment v1.3

Experiment 6: Franck Hertz Experiment v1.3 Experiment 6: Franck Hertz Experiment v1.3 Background This series of experiments demonstrates the energy quantization of atoms. The concept was first implemented by James Franck and Gustaf Ludwig Hertz

More information

This lab was adapted from Kwantlen University College s Determination of e/m lab.

This lab was adapted from Kwantlen University College s Determination of e/m lab. e /m: Charge to Mass Ratio of the Electron This lab was adapted from Kwantlen University College s Determination of e/m lab. Purpose To determine the charge to mass ratio of the electron, e /m, using Helmholtz

More information

Effect of Pressure and Hot Filament Cathode on Some Plasma Parameters of Hollow Anode Argon Glow Discharge Plasma

Effect of Pressure and Hot Filament Cathode on Some Plasma Parameters of Hollow Anode Argon Glow Discharge Plasma American Journal of Modern Physics 2016; 5(3): 30-38 http://www.sciencepublishinggroup.com/j/ajmp doi: 10.11648/j.ajmp.20160503.12 ISSN: 2326-8867 (Print); ISSN: 2326-8891 (Online) Review Article Effect

More information

3 A NEW FRENCH FACILITY FOR ION PROPULSION RESEARCH

3 A NEW FRENCH FACILITY FOR ION PROPULSION RESEARCH - 567-3 EPC-95-86 3 A NEW FRENCH FACLTY FOR ON PROPULSON RESEARCH P. Lasgorceix, M. Raffin, J.C. Lengrand, M. Dudeck Laboratoire d'airothermique du CNRS - Meudon (France). Gbkalp Laboratoire de Combustion

More information

CHARACTERIZATION AND FIELD EMISSION PROPERTIES OF FIELDS OF NANOTUBES

CHARACTERIZATION AND FIELD EMISSION PROPERTIES OF FIELDS OF NANOTUBES CHARACTERIZATION AND FIELD EMISSION PROPERTIES OF FIELDS OF NANOTUBES Martin MAGÁT a, Jan PEKÁREK, Radimír VRBA a Department of microelectronics, The Faculty of Electrical Engineeering and Communication,

More information

Langmuir Probe Measurements of a Magnetoplasmadynamic Thruster

Langmuir Probe Measurements of a Magnetoplasmadynamic Thruster Langmuir Probe Measurements of a Magnetoplasmadynamic Thruster IEPC-201-187 Presented at the rd International Electric Propulsion Conference, The George Washington University Washington, D.C. USA Yang

More information

Repetition: Practical Aspects

Repetition: Practical Aspects Repetition: Practical Aspects Reduction of the Cathode Dark Space! E x 0 Geometric limit of the extension of a sputter plant. Lowest distance between target and substrate V Cathode (Target/Source) - +

More information

Electrical Breakdown in Low-Pressure Nitrogen in Parallel Electric and Magnetic Fields

Electrical Breakdown in Low-Pressure Nitrogen in Parallel Electric and Magnetic Fields Electrical Breakdown in Low-Pressure Nitrogen in Parallel Electric and Magnetic Fields Karim Abu-Elabass Department of machinery and electrical equipment, Prince Sultan Industrial Institute, Military Industries

More information

Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma

Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma J. Plasma Fusion Res. SERIES, Vol. 8 (2009) Dynamics of Drift and Flute Modes in Linear Cylindrical ECR Plasma Kunihiro KAMATAKI 1), Sanae I. ITOH 2), Yoshihiko NAGASHIMA 3), Shigeru INAGAKI 2), Shunjiro

More information

Helicon Plasma Thruster Experiment Controlling Cross-Field Diffusion within a Magnetic Nozzle

Helicon Plasma Thruster Experiment Controlling Cross-Field Diffusion within a Magnetic Nozzle Helicon Plasma Thruster Experiment Controlling Cross-Field Diffusion within a Magnetic Nozzle IEPC-2013-163 Presented at the 33rd International Electric Propulsion Conference, The George Washington University

More information

Overview the CASTOR Fast Particles experiments

Overview the CASTOR Fast Particles experiments Overview the CASTOR Fast Particles experiments F. Zacek 1, V. Petrzilka 1, M. Goniche 2, P. Devynck 2, J. Adamek 1 1 Association Euratom/IPP.CR, Za Slovankou 3, 182 21 Prague 8, Czech Republic 2 Association

More information

This is an author produced version of a paper presented at 2nd PATCMC, June 6th-8th 2011 Plzeň, Czech Republic.

This is an author produced version of a paper presented at 2nd PATCMC, June 6th-8th 2011 Plzeň, Czech Republic. http://uu.diva-portal.org This is an author produced version of a paper presented at 2nd PATCMC, June 6th-8th 2011 Plzeň, Czech Republic. Kubart, T. 2011. Process modelling for reactive magnetron sputtering

More information

Physics 201: Experiment #1 Franck-Hertz Experiment

Physics 201: Experiment #1 Franck-Hertz Experiment Physics 201: Experiment #1 Franck-Hertz Experiment Carl Adams Winter 2004 Purpose To demonstrate that electrons colliding with gaseous mercury atoms lose energy in discrete amounts. Nobel Prize Winner

More information

Charge to Mass Ratio of the Electron

Charge to Mass Ratio of the Electron Charge to Mass Ratio of the Electron 1. Purpose: To determine the charge to mass ratio of the electron, e/m, by subjecting a beam of electrons to a magnetic field and examining their trajectories. It can

More information

Thin and Ultrathin Plasma Polymer Films and Their Characterization

Thin and Ultrathin Plasma Polymer Films and Their Characterization WDS'13 Proceedings of Contributed Papers, Part III, 134 138, 2013. ISBN 978-80-7378-252-8 MATFYZPRESS Thin and Ultrathin Plasma Polymer Films and Their Characterization M. Petr, O. Kylián, J. Hanuš, A.

More information

Effect of He and Ar Addition on N 2 Glow Discharge Characteristics and Plasma Diagnostics

Effect of He and Ar Addition on N 2 Glow Discharge Characteristics and Plasma Diagnostics Arab Journal of Nuclear Science and Applications, 6(1), (116-15) 13 Effect of He and Ar Addition on N Glow Discharge Characteristics and Plasma Diagnostics M. M. Mansour*, N. M. El-Sayed, O. F. Farag and

More information

Measurement of electron energy distribution function in an argon/copper plasma for ionized physical vapor deposition

Measurement of electron energy distribution function in an argon/copper plasma for ionized physical vapor deposition Measurement of electron energy distribution function in an argon/copper plasma for ionized physical vapor deposition Z. C. Lu, J. E. Foster, T. G. Snodgrass, J. H. Booske, and A. E. Wendt a) Engineering

More information

Time-averaged and time-varying plasma potential in the near-field plume of a Hall thruster.

Time-averaged and time-varying plasma potential in the near-field plume of a Hall thruster. Time-averaged and time-varying plasma potential in the near-field plume of a Hall thruster. IEPC-2013-214 Presented at the 33 rd International Electric Propulsion Conference, The George Washington University,

More information

Measurement of the Momentum Flux in an Ion Beam

Measurement of the Momentum Flux in an Ion Beam Measurement of the Momentum Flux in an Ion Beam IEPC-2011-232 Presented at the 32 nd International Electric Propulsion Conference, Wiesbaden Germany Alexander Spethmann 1, Thomas Trottenberg 2, and Holger

More information

Confinement of toroidal non-neutral plasma in Proto-RT

Confinement of toroidal non-neutral plasma in Proto-RT Workshop on Physics with Ultra Slow Antiproton Beams, RIKEN, March 15, 2005 Confinement of toroidal non-neutral plasma in Proto-RT H. Saitoh, Z. Yoshida, and S. Watanabe Graduate School of Frontier Sciences,

More information

Diffusion during Plasma Formation

Diffusion during Plasma Formation Chapter 6 Diffusion during Plasma Formation Interesting processes occur in the plasma formation stage of the Basil discharge. This early stage has particular interest because the highest plasma densities

More information

Assessment of the Azimuthal Homogeneity of the Neutral Gas in a Hall Effect Thruster using Electron Beam Fluorescence

Assessment of the Azimuthal Homogeneity of the Neutral Gas in a Hall Effect Thruster using Electron Beam Fluorescence Assessment of the Azimuthal Homogeneity of the Neutral Gas in a Hall Effect Thruster using Electron Beam Fluorescence IEPC-2015-91059 / ISTS-2015-b-91059 Presented at Joint Conference of 30th International

More information

Lasers... the optical cavity

Lasers... the optical cavity Lasers... the optical cavity history principle, intuitive aspects, characteristics 2 levels systems Ti: Helium Al2O3 - Neon model-locked laser laser VCSEL bragg mirrors cleaved facets 13 ptical and/or

More information

A comparison of emissive probe techniques for electric potential measurements in a Hall thruster plasma

A comparison of emissive probe techniques for electric potential measurements in a Hall thruster plasma A comparison of emissive probe techniques for electric potential measurements in a Hall thruster plasma J. P. Sheehan*, Y. Raitses**, N. Hershkowitz*, I. Kaganovich**, and N. J. Fisch** *University of

More information

Development of Micro-Vacuum Arc Thruster with Extended Lifetime

Development of Micro-Vacuum Arc Thruster with Extended Lifetime Development of Micro-Vacuum Arc Thruster with Extended Lifetime IEPC-9-9 Presented at the st International Electric Propulsion Conference, University of Michigan Ann Arbor, Michigan USA September, 9 TaiSen

More information

The Role of Secondary Electrons in Low Pressure RF Glow Discharge

The Role of Secondary Electrons in Low Pressure RF Glow Discharge WDS'05 Proceedings of Contributed Papers, Part II, 306 312, 2005. ISBN 80-86732-59-2 MATFYZPRESS The Role of Secondary Electrons in Low Pressure RF Glow Discharge O. Brzobohatý and D. Trunec Department

More information

Earlier Lecture. In the earlier lecture, we have seen non metallic sensors like Silicon diode, Cernox and Ruthenium Oxide.

Earlier Lecture. In the earlier lecture, we have seen non metallic sensors like Silicon diode, Cernox and Ruthenium Oxide. 41 1 Earlier Lecture In the earlier lecture, we have seen non metallic sensors like Silicon diode, Cernox and Ruthenium Oxide. Silicon diodes have negligible i 2 R losses. Cernox RTDs offer high response

More information

arxiv: v1 [physics.plasm-ph] 10 Nov 2014

arxiv: v1 [physics.plasm-ph] 10 Nov 2014 arxiv:1411.2464v1 [physics.plasm-ph] 10 Nov 2014 Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas A. Derzsi 1, I. Korolov

More information

Measurement of Anode Current Density Distribution in a Cusped Field Thruster

Measurement of Anode Current Density Distribution in a Cusped Field Thruster Measurement of Anode Current Density Distribution in a Cusped Field Thruster IEPC-2015-375 Presented at Joint Conference of 30th International Symposium on Space Technology and Science 34th International

More information

6.5 Optical-Coating-Deposition Technologies

6.5 Optical-Coating-Deposition Technologies 92 Chapter 6 6.5 Optical-Coating-Deposition Technologies The coating process takes place in an evaporation chamber with a fully controlled system for the specified requirements. Typical systems are depicted

More information

LECTURE 5 SUMMARY OF KEY IDEAS

LECTURE 5 SUMMARY OF KEY IDEAS LECTURE 5 SUMMARY OF KEY IDEAS Etching is a processing step following lithography: it transfers a circuit image from the photoresist to materials form which devices are made or to hard masking or sacrificial

More information

Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications

Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications Philip D. Rack,, Jason D. Fowlkes,, and Yuepeng Deng Department of Materials Science and Engineering University

More information

Electrode and Limiter Biasing Experiments on the Tokamak ISTTOK

Electrode and Limiter Biasing Experiments on the Tokamak ISTTOK Electrode and Limiter Biasing Experiments on the Tokamak ISTTOK C. Silva, H. Figueiredo, J.A.C. Cabral,, I. Nedzelsky, C.A.F. Varandas Associação Euratom/IST, Centro de Fusão Nuclear, Instituto Superior

More information

MICROCHIP MANUFACTURING by S. Wolf

MICROCHIP MANUFACTURING by S. Wolf by S. Wolf Chapter 15 ALUMINUM THIN-FILMS and SPUTTER-DEPOSITION 2004 by LATTICE PRESS CHAPTER 15 - CONTENTS Aluminum Thin-Films Sputter-Deposition Process Steps Physics of Sputter-Deposition Magnetron-Sputtering

More information

1 EX/P7-35. Spectroscopic Studies on GLAST-III Varying the Inductance and Charging Voltage of Vertical Field Coils

1 EX/P7-35. Spectroscopic Studies on GLAST-III Varying the Inductance and Charging Voltage of Vertical Field Coils 1 EX/P7-35 Spectroscopic Studies on GLAST-III Varying the Inductance and Charging Voltage of Vertical Field Coils Farah Deeba, A.Qayyum, Zahoor Ahmad, S. Ahmad, R. Khan and S. Hussain National Tokamak

More information

Plasma Diagnosis for Microwave ECR Plasma Enhanced Sputtering Deposition of DLC Films

Plasma Diagnosis for Microwave ECR Plasma Enhanced Sputtering Deposition of DLC Films Plasma Science and Technology, Vol.14, No.2, Feb. 2012 Plasma Diagnosis for Microwave ECR Plasma Enhanced Sputtering Deposition of DLC Films PANG Jianhua ( ) 1, LU Wenqi ( ) 1, XIN Yu ( ) 2, WANG Hanghang

More information

Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe

Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe PRAMANA c Indian Academy of Sciences Vol. 81, No. 1 journal of July 2013 physics pp. 157 167 Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe SKJAIN, V K SENECHA,

More information

1 AT/P5-05. Institute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, Ukraine

1 AT/P5-05. Institute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, Ukraine 1 AT/P5-05 H - Ion Source with Inverse Gas Magnetron Geometry for SNS Project V.A. Baturin, P.A. Litvinov, S.A. Pustovoitov, A.Yu. Karpenko Institute of Applied Physics, National Academy of Sciences of

More information

''Formation and Deposition of Nanoclusters'' Rainer Hippler. University of Greifswald Hoboken 31 July 2008

''Formation and Deposition of Nanoclusters'' Rainer Hippler. University of Greifswald Hoboken 31 July 2008 ''Formation and Deposition of Nanoclusters'' Rainer Hippler University of Greifswald Hoboken 31 July 28 Hansestadt Greifswald Home town of Caspar David Friedrich Rainer Hippler Hoboken 28 2 Marktplatz

More information

June 5, 2012: Did you miss it? No Problem. Next chance in Venus in Front of the Sun and there is more: plasma imaging!

June 5, 2012: Did you miss it? No Problem. Next chance in Venus in Front of the Sun and there is more: plasma imaging! July 18 20, 2012 5th Int. Workshop on "Thin Films Applied To Superconducting RF And New Ideas For Pushing The Limits Of RF Superconductivity" Jefferson Lab, VA Strong localization of ionization in high

More information

acta physica slovaca vol. 54 No. 2, April 2004 SIMPLE EXPERIMENTAL METHODS TO CONTROL CHAOS IN A DOUBLE PLASMA MACHINE 1

acta physica slovaca vol. 54 No. 2, April 2004 SIMPLE EXPERIMENTAL METHODS TO CONTROL CHAOS IN A DOUBLE PLASMA MACHINE 1 acta physica slovaca vol. 54 No. 2, 89 96 April 2004 SIMPLE EXPERIMENTAL METHODS TO CONTROL CHAOS IN A DOUBLE PLASMA MACHINE 1 D. G. Dimitriu 2, C. Găman, M. Mihai-Plugaru, G. Amarandei, C. Ioniţă, E.

More information

PHYSICAL VAPOR DEPOSITION OF THIN FILMS

PHYSICAL VAPOR DEPOSITION OF THIN FILMS PHYSICAL VAPOR DEPOSITION OF THIN FILMS JOHN E. MAHAN Colorado State University A Wiley-Interscience Publication JOHN WILEY & SONS, INC. New York Chichester Weinheim Brisbane Singapore Toronto CONTENTS

More information

Lab in a Box Measuring the e/m ratio

Lab in a Box Measuring the e/m ratio Safety Precautions All the signal voltages are small and harmless. The mains voltages in the mains powered equipment is dangerous but is screened in normal use. The fine beam tube requires dangerous contact

More information

Ion Implanter Cyclotron Apparatus System

Ion Implanter Cyclotron Apparatus System Ion Implanter Cyclotron Apparatus System A. Latuszyñski, K. Pyszniak, A. DroŸdziel, D. M¹czka Institute of Physics, Maria Curie-Sk³odowska University, Lublin, Poland Abstract In this paper the authors

More information

Reduction of Turbulence via Feedback in a Dipole Confined Plasma. Thomas Max Roberts Applied Physics Applied Mathematics Columbia University

Reduction of Turbulence via Feedback in a Dipole Confined Plasma. Thomas Max Roberts Applied Physics Applied Mathematics Columbia University Reduction of Turbulence via Feedback in a Dipole Confined Plasma Thomas Max Roberts Applied Physics Applied Mathematics Columbia University Outline Dipole Confinement Physics The Collisionless Terrella

More information

vacuum analysis plasma diagnostics surface science gas analysis

vacuum analysis plasma diagnostics surface science gas analysis Hiden EQP Systems High Sensitivity Mass and Energy Analysers for Monitoring, Control and Characterisation of Ions, Neutrals and Radicals in Plasma. vacuum analysis surface science gas analysis plasma diagnostics

More information

OPTICAL DETECTION OF SLOW EXCITED NEUTRALS IN PLASMA- ASSISTED EXCIMER LASER ABLATION

OPTICAL DETECTION OF SLOW EXCITED NEUTRALS IN PLASMA- ASSISTED EXCIMER LASER ABLATION OPTICAL DETECTION OF SLOW EXCITED NEUTRALS IN PLASMA- ASSISTED EXCIMER LASER ABLATION P. MUKHERJEE, P. SAKTHIVEL AND S. WITANACHCHI Department of Physics, University of South Florida, Tampa, FL 33620,

More information

Discovered by German scientist Johann Hittorf in 1869 and in 1876 named by Eugen Goldstein.

Discovered by German scientist Johann Hittorf in 1869 and in 1876 named by Eugen Goldstein. DO PHYSICS ONLINE CATHODE RAYS CATHODE RAYS (electron beams) Streams of electrons (negatively charged particles) observed in vacuum tubes - evacuated glass tubes that are equipped with at least two metal

More information

Large Plasma Device (LAPD)

Large Plasma Device (LAPD) Large Plasma Device (LAPD) Over 450 Access ports Computer Controlled Data Acquisition Microwave Interferometers Laser Induced Fluorescence DC Magnetic Field: 0.05-4 kg, variable on axis Highly Ionized

More information

Langmuir Probes as a Diagnostic to Study Plasma Parameter Dependancies, and Ion Acoustic Wave Propogation

Langmuir Probes as a Diagnostic to Study Plasma Parameter Dependancies, and Ion Acoustic Wave Propogation Langmuir Probes as a Diagnostic to Study Plasma Parameter Dependancies, and Ion Acoustic Wave Propogation Kent Lee, Dean Henze, Patrick Smith, and Janet Chao University of San Diego (Dated: May 1, 2013)

More information

Confinement of toroidal non-neutral plasma in Proto-RT

Confinement of toroidal non-neutral plasma in Proto-RT Workshop on Physics with Ultra Slow Antiproton Beams, RIKEN, March 15, 2005 Confinement of toroidal non-neutral plasma in Proto-RT H. Saitoh, Z. Yoshida, and S. Watanabe Graduate School of Frontier Sciences,

More information

Dust collected in MAST and in Tore Supra. Nanoparticle growth in laboratory plasmas

Dust collected in MAST and in Tore Supra. Nanoparticle growth in laboratory plasmas FDR-FM Association EURATOM-EA Dust collected in MAST and in Tore Supra. Pardanaud 1,. Martin 1, P. Roubin 1,. Arnas 1 and G. De Temmerman 2 1 Lab. PIIM, NRS-Université de Provence, UMR 6633, 13397 Marseille,

More information

Robert A. Meger Richard F. Fernster Martin Lampe W. M. Manheimer NOTICE

Robert A. Meger Richard F. Fernster Martin Lampe W. M. Manheimer NOTICE Serial Number Filing Date Inventor 917.963 27 August 1997 Robert A. Meger Richard F. Fernster Martin Lampe W. M. Manheimer NOTICE The above identified patent application is available for licensing. Requests

More information