Arguments for increased efficiency of a Xe excimer DBD by pulsed instead of sinusoidal excitation

Size: px
Start display at page:

Download "Arguments for increased efficiency of a Xe excimer DBD by pulsed instead of sinusoidal excitation"

Transcription

1 Arguments for increased efficiency of a Xe excimer DBD by pulsed instead of sinusoidal excitation Mark Paravia, Michael Meisser, Klaus Trampert, Wolfgang Heering Light Technology Institute University Karlsruhe 1/16/28 M.Paravia, GEC 28, 1/16/28, p. 1

2 Introduction Dielectric Barrier Discharge plane gas discharge Xenon excimer nonequilibrium plasma Efficiency gain due to pulsed instead of sinusoidal excitation [1] plasma efficiency up to 65 % [2] [1] Mildren, Carman, J. Phys. D: Appl. Phys. 34 (21) [2] Vollkommer, Hitzschke, US56441A (1994) M.Paravia, GEC 28, 1/16/28, p. 2

3 Outline 1. Experimental setup 2. Sinusoidal and pulsed excitation 3. Separation of energies 4. Conclusion M.Paravia, GEC 28, 1/16/28, p. 3

4 Experimental setup glass plate glass solder electrode gas gap spacer Measurements: lamp luminance L time resolved NIR emission (823 nm, 828 nm) external and internal electrical values gas gap: 2 mm xenon: 125 mbar active area: 5 cm² frequency: 4 khz v lamp(max) : kv M.Paravia, GEC 28, 1/16/28, p. 4

5 Internal values i lamp v lamp plasma barrier v C gap C barrier i blind i plasma z plasma v measurement of internal values: analogue measurement of plasma current plasma power without blind component Roth, M., Neiger, M., 21. IDRC, Nagoya, 21, p M.Paravia, GEC 28, 1/16/28, p. 5

6 Experimental setup 15 sinusoidal 15 pulsed lamp voltage/v 5-5 lamp voltage/v time/µs Electrical excitation 1. sinusoidal ECG resonant pulse ECG with variable pulse length time/µs M.Paravia, GEC 28, 1/16/28, p. 6

7 Sinusoidal excitation voltage/v ignition glow phase 823 nm 828 nm p plasma sinusoidal v lamp plasma power density/w/cm² NIR/a.u. sinusoidal excitation: one ignition per half-wave glow phase after ignition power consumption during glow phase filaments still burning 5 1 time/µs f = 4 khz, v lamp : = 93 Vrms, P = 33 mw/cm², η = 19 lm/w M.Paravia, GEC 28, 1/16/28, p. 7

8 Pulsed excitation 2 ignitionglow phase pulsed 15 pulsed excitation voltage/v p plasma 823 nm 828 nm v lamp plasma power density/w/cm² NIR/a.u. first and second ignition per pulse short glow phase after ignition discharge still burning during glow phase time/µs -15 f = 4 khz, pulse length 2.8 µs, P = 64 mw/cm², η = 17 lm/w M.Paravia, GEC 28, 1/16/28, p. 8

9 Pulsed excitation voltage/v t pulse = 2.1 µs t pulse = 2.8 µs time/µs pulsed excitation variation of pulse length pulse length.6 µs to 5.1 µs constant pulse shape V lamp(max) = kv 1.8 t pulse = 2.1 µs t pulse = 2.8 µs IR/a.u time/µs M.Paravia, GEC 28, 1/16/28, p. 9

10 Pulsed excitation luminace/cd/m² pulse length/µs power density/mw/cm² 4 2 luminance power η pulse length/µs lamp efficiency/lm/w pulse length/µs pulsed excitation luminance up to 3 cd/m² for t pulse =.6µs lamp efficiency rising up to 3 lm/w power density P = 5-62 mw/cm² M.Paravia, GEC 28, 1/16/28, p. 1

11 Separation of energies 2 CDI-5 Füllung 4 - Pplasma x plasma power power density/w/cm² density/w/cm² 1 plasma power plasma energy 1. Ignition 2. Ignition plasma energy energy density/j/cm² time/s time/µs x 1-6 Ignition phase: excitation of Xe* and Xe** generation of VUV radiation glow phase: Xe + heating, negligible generation of Xe*, Xe** Simplification: no VUV radiation is generated M.Paravia, GEC 28, 1/16/28, p. 11

12 Separation of energies energy density/nj/cm² E total energy density/nj/cm² pulsed ElampE lamp E total Eplasma E ignition sinusoidal f = 4 khz 2 E Ignition =E 1.Ignition +E 2. Ignition Separation of energy: t pulse ignition energy rises with decreasing t pulse ratio of ignition energy to total lamp energy depends on pulse length M.Paravia, GEC 28, 1/16/28, p. 12

13 Separation of energies Luminance/cd/m² pulsed Lumiance rlo E igntion L E ignition Eplasma sinusoidal f = 4 khz Eigntion/nJ/cm² Eigntion/nJ/cm² lamp efficiency/lm/w pulsed efficiency lamp P_ignition/P_a E igntion /EE total lamp sinusoidal f = 4 khz η E ignition /E total Eigntion/Elamp t pulse /µs t pulse /µs. good correlation between light and ignition energy: high efficient excitation during ignition losses during glow phase Conclusion: reduce glow phase energy by short pulses M.Paravia, GEC 28, 1/16/28, p. 13

14 Summary Compared sinusoidal and pulsed excitation Separation into ignition and glow phase Correlation: L E ignition η E ignition /E total High efficiency due to reduction of glow phase losses M.Paravia, GEC 28, 1/16/28, p. 14

15 GEC 28 Thank you for your attention. M.Paravia, GEC 28, 1/16/28, p. 15

ARGON EXCIMER LAMP. A. Sobottka, L. Prager, L. Drößler, M. Lenk. Leibniz Institute of Surface Modification

ARGON EXCIMER LAMP. A. Sobottka, L. Prager, L. Drößler, M. Lenk. Leibniz Institute of Surface Modification ARGON EXCIMER LAMP A. Sobottka, L. Prager, L. Drößler, M. Lenk 1 Introduction Ar-Zufuhr Excimer-Plasma Inertisierung Polymerfolie Sintermetall Inertisierung Post curing [1] EP 1050395 A2 2 Introduction

More information

A KINETIC MODEL FOR EXCIMER UV AND VUV RADIATION IN DIELECTRIC BARRIER DISCHARGES*

A KINETIC MODEL FOR EXCIMER UV AND VUV RADIATION IN DIELECTRIC BARRIER DISCHARGES* A KINETIC MODEL FOR EXCIMER UV AND VUV RADIATION IN DIELECTRIC BARRIER DISCHARGES* Xudong Peter Xu and Mark J. Kushner University of Illinois Department of Electrical and Computer Engineering Urbana, IL

More information

MAPPING OF ATOMIC NITROGEN IN SINGLE FILAMENTS OF A BARRIER DISCHARGE MEASURED BY TWO PHOTON FLUORESCENCE SPECTROSCOPY (TALIF)

MAPPING OF ATOMIC NITROGEN IN SINGLE FILAMENTS OF A BARRIER DISCHARGE MEASURED BY TWO PHOTON FLUORESCENCE SPECTROSCOPY (TALIF) MAPPING OF ATOMIC NITROGEN IN SINGLE FILAMENTS OF A BARRIER DISCHARGE MEASURED BY TWO PHOTON FLUORESCENCE SPECTROSCOPY (TALIF) C. LUKAS, M. SPAAN, V. SCHULZ VON DER GATHEN, H. F. DÖBELE Institut für Laser

More information

Analysis of Discharge Parameters and Spectroscopic Diagnostic of DBDs

Analysis of Discharge Parameters and Spectroscopic Diagnostic of DBDs Analysis of Discharge Parameters and Spectroscopic Diagnostic of DBDs Pooja Gulati Plasma Device Technology, Microwave Tubes Division CSIR-Central Electronics Engineering Research Institute (CSIR-CEERI)

More information

Formation of white-eye pattern with microdischarge in an air. dielectric barrier discharge system

Formation of white-eye pattern with microdischarge in an air. dielectric barrier discharge system Formation of white-eye pattern with microdischarge in an air dielectric barrier discharge system Yafeng He, Lifang Dong*, Weili Liu, Hongfang Wang, Zengchao Zhao, and Weili Fan College of Physics Science

More information

DEVELOPMENT OF MERCURY-FREE DIELECTRIC BARRIER DISCHARGE LIGHT SOURCES

DEVELOPMENT OF MERCURY-FREE DIELECTRIC BARRIER DISCHARGE LIGHT SOURCES DEVELOPMENT OF MERCURY-FREE DIELECTRIC BARRIER DISCHARGE LIGHT SOURCES PH.D. THESIS Szabolcs Beleznai Budapest University of Technology and Economics Department of Atomic Physics Supervisor: Dr. Péter

More information

Bu Ren an, Song Mingdong *, Wang Zhongrui, Jin Jing, Hu Wenbo, Qiu Feng, Wang Wenjiang, Zhang Jintao

Bu Ren an, Song Mingdong *, Wang Zhongrui, Jin Jing, Hu Wenbo, Qiu Feng, Wang Wenjiang, Zhang Jintao Available online at www.sciencedirect.com Physics Procedia 32 (2012 ) 477 481 18 th International Vacuum Congress Development of 146nm Vacuum UV Light Source Bu Ren an, Song Mingdong *, Wang Zhongrui,

More information

Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon

Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon Home Search Collections Journals About Contact us My IOPscience Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon This article has been downloaded from IOPscience. Please

More information

Electric Field Measurements in Atmospheric Pressure Electric Discharges

Electric Field Measurements in Atmospheric Pressure Electric Discharges 70 th Gaseous Electronics Conference Pittsburgh, PA, November 6-10, 2017 Electric Field Measurements in Atmospheric Pressure Electric Discharges M. Simeni Simeni, B.M. Goldberg, E. Baratte, C. Zhang, K.

More information

Simulation of Excimer Ultraviolet (EUV) Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages

Simulation of Excimer Ultraviolet (EUV) Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted Bipolar Square Voltages Plasma Chem Plasma Process (2010) 30:907 931 DOI 10.1007/s11090-010-9254-3 ORIGINAL PAPER Simulation of Excimer Ultraviolet (EUV) Emission from a Coaxial Xenon Excimer Ultraviolet Lamp Driven by Distorted

More information

The Effect of Discharge Characteristics on Dielectric Barrier Discharges According to the Relative Permittivity

The Effect of Discharge Characteristics on Dielectric Barrier Discharges According to the Relative Permittivity , pp.21-27 http://dx.doi.org/10.14257/astl.2017.145.05 The Effect of Discharge Characteristics on Dielectric Barrier Discharges According to the Relative Permittivity Don-Kyu Lee Electrical Engineering,

More information

ESTIMATION OF ELECTRON TEMPERATURE IN ATMOSPHERIC PRESSURE DIELECTRIC BARRIER DISCHARGE USING LINE INTENSITY RATIO METHOD

ESTIMATION OF ELECTRON TEMPERATURE IN ATMOSPHERIC PRESSURE DIELECTRIC BARRIER DISCHARGE USING LINE INTENSITY RATIO METHOD KATHMANDU UNIVERSITY JOURNAL OF SCIENCE, ENGINEERING AND TECHNOLOGY ESTIMATION OF ELECTRON TEMPERATURE IN ATMOSPHERIC PRESSURE DIELECTRIC BARRIER DISCHARGE USING LINE INTENSITY RATIO METHOD 1, 2 R. Shrestha,

More information

E. Robert, H. Sarroukh, C. Cachoncinlle, R. Viladrosa, V. Hochet, S. Eddaoui, and J. M. Pouvesle

E. Robert, H. Sarroukh, C. Cachoncinlle, R. Viladrosa, V. Hochet, S. Eddaoui, and J. M. Pouvesle Pure Appl. Chem., Vol. 77, No. 2, pp. 463 474, 2005. DOI: 10.1351/pac200577020463 2005 IUPAC Spectroscopic and electrical study of rare-gasbased, hollow cathode luminescent discharges: Application to the

More information

Modeling nonthermal plasmas generated in glow discharges*

Modeling nonthermal plasmas generated in glow discharges* Pure Appl. Chem., Vol. 71, No. 10, pp. 1837±1844, 1999. Printed in Great Britain. q 1999 IUPAC Modeling nonthermal plasmas generated in glow discharges* I. Revel, Ph. Belenguer, J. P. Boeuf and L. C. Pitchford²

More information

Comparison of Townsend dielectric barrier discharge in N2, N2/O2 and N2/N2O: behavior and density of radicals

Comparison of Townsend dielectric barrier discharge in N2, N2/O2 and N2/N2O: behavior and density of radicals Paul Scherrer Institut From the SelectedWorks of Dr. Et-touhami Es-sebbar June 9, 2008 Comparison of Townsend dielectric barrier discharge in N2, N2/O2 and N2/N2O: behavior and density of radicals F. Massines

More information

PHYSICAL AND CHEMICAL PROPERTIES OF ATMOSPHERIC PRESSURE PLASMA POLYMER FILMS

PHYSICAL AND CHEMICAL PROPERTIES OF ATMOSPHERIC PRESSURE PLASMA POLYMER FILMS PHYSICAL AND CHEMICAL PROPERTIES OF ATMOSPHERIC PRESSURE PLASMA POLYMER FILMS O. Goossens, D. Vangeneugden, S. Paulussen and E. Dekempeneer VITO Flemish Institute for Technological Research, Boeretang

More information

Optical Emission Spectroscopy of Diffuse Coplanar Surface Barrier Discharge

Optical Emission Spectroscopy of Diffuse Coplanar Surface Barrier Discharge WDS'13 Proceedings of Contributed Papers, Part II, 144 148, 2013. ISBN 978-80-7378-251-1 MATFYZPRESS Optical Emission Spectroscopy of Diffuse Coplanar Surface Barrier Discharge Z. Tučeková, 1 A. Zahoranová,

More information

The Hook Method - Interferometric Diagnostics of Gas Discharges

The Hook Method - Interferometric Diagnostics of Gas Discharges The Hook Method - Interferometric Diagnostics of Gas Discharges E. Kindel, F. Adler Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, F.-L.-Jahn-Str. 19 Germany 1 Introduction The hook method

More information

INFLUENCE OF MAGNETIC FIELD ON MONOCHROME VISIBLE LIGHT IN ELECTROPOSITIVE ELECTRONEGATIVE GAS MIXTURES DISCHARGES PLASMA

INFLUENCE OF MAGNETIC FIELD ON MONOCHROME VISIBLE LIGHT IN ELECTROPOSITIVE ELECTRONEGATIVE GAS MIXTURES DISCHARGES PLASMA THE PUBLISHING HOUSE PROCEEDINGS OF THE ROMANIAN ACADEMY, Series A, OF THE ROMANIAN ACADEMY Volume 7, Number /, pp. 3 3 INFLUENCE OF MAGNETIC FIELD ON MONOCHROME VISIBLE LIGHT IN ELECTROPOSITIVE ELECTRONEGATIVE

More information

Numerical Study on Influences of Barrier Arrangements on Dielectric Barrier Discharge Characteristics

Numerical Study on Influences of Barrier Arrangements on Dielectric Barrier Discharge Characteristics 504 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 31, NO. 4, AUGUST 2003 Numerical Study on Influences of Barrier Arrangements on Dielectric Barrier Discharge Characteristics Woo Seok Kang, Jin Myung Park,

More information

RF/Microwave Discharge Plasma for Mercury-Free Lighting

RF/Microwave Discharge Plasma for Mercury-Free Lighting J-STAGE Advanced published date: September 19, 2014, Paper RF/Microwave Discharge Plasma for Mercury-Free Lighting Ahmad Nazri DAGANG*, **, Hideki MOTOMURA** and Masafumi JINNO** * ** ABSTRACT This research

More information

MONOCHROMATIZATION AND POLARIZATION OF THE NEON SPECTRAL LINES IN CONSTANT/VARIABLE MAGNETIC FIELD

MONOCHROMATIZATION AND POLARIZATION OF THE NEON SPECTRAL LINES IN CONSTANT/VARIABLE MAGNETIC FIELD Romanian Reports in Physics 69, 49 (217) MONOCHROMATIZATION AND POLARIZATION OF THE NEON SPECTRAL LINES IN CONSTANT/VARIABLE MAGNETIC FIELD I. GRUIA, L.C. CIOBOTARU* University of Bucharest, Faculty of

More information

J. G. Eden. University of Illinois. University of Illinois. Laboratory for Optical Physics and Engineering

J. G. Eden. University of Illinois. University of Illinois. Laboratory for Optical Physics and Engineering NEW OPPORTUNITIES IN PHOTONICS APPLICATIONS : MICROPLASMA DEVICES AND ARRAYS FABRICATED IN SEMICONDUCTORS, CERAMIC AND POLYMER/METAL MULTILAYER STRUCTURES J. G. Eden MICROPLASMAS: AT THE INTERSECTION OF

More information

Modern optics Lasers

Modern optics Lasers Chapter 13 Phys 322 Lecture 36 Modern optics Lasers Reminder: Please complete the online course evaluation Last lecture: Review discussion (no quiz) LASER = Light Amplification by Stimulated Emission of

More information

Sealed-off CO 2 lasers excited by an all-solid-state 0.6 MHz generator

Sealed-off CO 2 lasers excited by an all-solid-state 0.6 MHz generator J. Phys. D: Appl. Phys. 33 (2000) 1282 1286. Printed in the UK PII: S0022-3727(00)11677-8 Sealed-off CO 2 lasers excited by an all-solid-state 0.6 MHz generator S Wieneke, S Born and W Viöl Department

More information

Modeling and Simulation of Plasma-Assisted Ignition and Combustion

Modeling and Simulation of Plasma-Assisted Ignition and Combustion Modeling and Simulation of Plasma-Assisted Ignition and Combustion Vigor Yang and Sharath Nagaraja Georgia Institute of Technology Atlanta, GA AFOSR MURI Fundamental Mechanisms, Predictive Modeling, and

More information

All about sparks in EDM

All about sparks in EDM All about sparks in EDM (and links with the CLIC DC spark test) Antoine Descoeudres, Christoph Hollenstein, Georg Wälder, René Demellayer and Roberto Perez Centre de Recherches en Physique des Plasmas

More information

Generation and diagnostics of atmospheric pressure dielectric barrier discharge in argon/air

Generation and diagnostics of atmospheric pressure dielectric barrier discharge in argon/air Indian Journal of Pure & Applied Physics Vol. 55, February 017, pp. 155-16 Generation and diagnostics of atmospheric pressure dielectric barrier discharge in argon/air R Shrestha a,b *, D P Subedi a, R

More information

Microhollow cathode discharges

Microhollow cathode discharges Microhollow cathode discharges K. H. Schoenbach, a) M. Moselhy, W. Shi, and R. Bentley Physical Electronics Research Institute, Old Dominion University, Norfolk, Virginia 23529 Received 16 December 2002;

More information

Influence of the charges deposition on the spatio-temporal self-organization of streamers in a DBD

Influence of the charges deposition on the spatio-temporal self-organization of streamers in a DBD IOP PUBLISHING JOURNAL OF PHYSICS D: APPLIED PHYSICS J. Phys. D: Appl. Phys. 41 (2008) 205214 (10pp) doi:10.1088/0022-3727/41/20/205214 Influence of the charges deposition on the spatio-temporal self-organization

More information

Reduction of Power Consumption of Counter Electrode Structure in AC-PDP

Reduction of Power Consumption of Counter Electrode Structure in AC-PDP Mol. Cryst. Liq. Cryst., Vol. 564: pp. 85 93, 2012 Copyright Kyungpook National Univeristy ISSN: 1542-1406 print/1563-5287 online DOI: 10.1080/15421406.2012.691690 Reduction of Power Consumption of Counter

More information

Atmospheric pressure plasma of dielectric barrier discharges*

Atmospheric pressure plasma of dielectric barrier discharges* Pure Appl. Chem., Vol. 77, No. 2, pp. 487 495, 2005. DOI: 10.1351/pac200577020487 2005 IUPAC Atmospheric pressure plasma of dielectric barrier discharges* A. Chirokov, A. Gutsol, and A. Fridman Department

More information

Development of an excimer UV light source system for water treatment

Development of an excimer UV light source system for water treatment Development of an excimer UV light source system for water treatment Zoran Falkenstein Ushio America, Inc. May 2001 Zoran Falkenstein Development of an excimer UV light source system for water treatment

More information

FLOW CONTROL USING DBD PLASMA ON BACKWARD-FACING STEP

FLOW CONTROL USING DBD PLASMA ON BACKWARD-FACING STEP 28 TH INTERNATIONAL CONGRESS OF THE AERONAUTICAL SCIENCES FLOW CONTROL USING DBD PLASMA ON BACKWARD-FACING STEP Jiwoon Song* * Department of Mechanical Engineering, Yonsei University, 120-749, Korea dolguard@yonsei.ac.kr

More information

Nonequilibrium discharges in air and nitrogen plasmas at atmospheric pressure*

Nonequilibrium discharges in air and nitrogen plasmas at atmospheric pressure* Pure Appl. Chem., Vol. 74, No. 3, pp. 337 347, 2002. 2002 IUPAC Nonequilibrium discharges in air and nitrogen plasmas at atmospheric pressure* Charles H. Kruger, Christophe O. Laux, Lan Yu, Denis M. Packan,

More information

EXPERIMENTAL STUDY OF SHOCK WAVE INTERACTING PLANE GAS-PLASMA BOUNDARY

EXPERIMENTAL STUDY OF SHOCK WAVE INTERACTING PLANE GAS-PLASMA BOUNDARY ISTP-16, 2005, PRAGUE 16 TH INTERNATIONAL SYMPOSIUM ON TRANSPORT PHENOMENA EXPERIMENTAL STUDY OF SHOCK WAVE INTERACTING PLANE GAS-PLASMA BOUNDARY Znamenskaya I.A., Koroteev D.А., Popov N.A. Moscow State

More information

SPECTRAL INVESTIGATION OF A COMPLEX SPACE CHARGE STRUCTURE IN PLASMA

SPECTRAL INVESTIGATION OF A COMPLEX SPACE CHARGE STRUCTURE IN PLASMA SPECTRAL INVESTIGATION OF A COMPLEX SPACE CHARGE STRUCTURE IN PLASMA S. GURLUI 1, D. G. DIMITRIU 1, C. IONITA 2, R. W. SCHRITTWIESER 2 1 Faculty of Physics, Al. I. Cuza University, 11 Carol I Blvd., RO-700506

More information

Nanosecond-scale Processes in a Plasma Pilot for Ignition and Flame Control

Nanosecond-scale Processes in a Plasma Pilot for Ignition and Flame Control Nanosecond-scale Processes in a Plasma Pilot for Ignition and Flame Control Yu. D. Korolev, I. B. Matveev Institute of High Current Electronics, 634055 Tomsk, Russia Applied Plasma Technologies, Falls

More information

Numerical Simulation of Townsend Discharge, Paschen Breakdown and Dielectric Barrier Discharges Napoleon Leoni, Bhooshan Paradkar

Numerical Simulation of Townsend Discharge, Paschen Breakdown and Dielectric Barrier Discharges Napoleon Leoni, Bhooshan Paradkar Numerical Simulation of Townsend Discharge, Paschen Breakdown and Dielectric Barrier Discharges Napoleon Leoni, Bhooshan Paradkar HP Laboratories HPL-2009-234 Keyword(s): Townsend Discharge, Paschen Breakdown,

More information

Measurement of wettability for polymer materials using non-contact surface resistivity

Measurement of wettability for polymer materials using non-contact surface resistivity Proc. 26 Electrostatics Joint Conference Measurement of wettability for polymer materials using non-contact surface resistivity tester Toshiyuki Sugimoto, Takuya Aoki Graduate school of Science and Engineering

More information

Generation of uniform atmospheric pressure argon glow plasma by dielectric barrier discharge

Generation of uniform atmospheric pressure argon glow plasma by dielectric barrier discharge PRAMANA c Indian Academy of Sciences Vol. 8, No. 3 journal of March 213 physics pp. 57 517 Generation of uniform atmospheric pressure argon glow plasma by dielectric barrier discharge RAJU BHAI TYATA 1,2,

More information

/ https://www.growland.fr / https://www.growland.co.uk https://www.growland.es /

/  https://www.growland.fr / https://www.growland.co.uk https://www.growland.es / www.growland.net / www.growland-hydroponics.com https://www.growland.fr / https://www.growland.co.uk https://www.growland.es / https://www.growland.at https://www.growland.nl / https://www.growland.it

More information

Femtosecond laser microfabrication in. Prof. Dr. Cleber R. Mendonca

Femtosecond laser microfabrication in. Prof. Dr. Cleber R. Mendonca Femtosecond laser microfabrication in polymers Prof. Dr. Cleber R. Mendonca laser microfabrication focus laser beam on material s surface laser microfabrication laser microfabrication laser microfabrication

More information

w w w. o n e r a. f r

w w w. o n e r a. f r w w w. o n e r a. fr SEY properties of dielectric materials, modeling and measurements M. Belhaj ONERA\Centre de Toulouse\DPHY Motivation (@ONERA) Multipactor in RF components -metals and dielectric -Incident

More information

LDLS Laser-Driven Light Source

LDLS Laser-Driven Light Source LDLS Laser-Driven Light Source From The Innovators in Light ENERGETIQ 7/8/2011 1 Peter J. Dwyer, Ph.D. pdwyer@energetiq.com +1 781 939 0763 x 141 The LDLS Product Range EQ-99FC LDLS System EQ-1500 LDLS

More information

Electron Current Extraction and Interaction of RF mdbd Arrays

Electron Current Extraction and Interaction of RF mdbd Arrays Electron Current Extraction and Interaction of RF mdbd Arrays Jun-Chieh Wang a), Napoleon Leoni b), Henryk Birecki b), Omer Gila b), and Mark J. Kushner a) a), Ann Arbor, MI 48109 USA mkush@umich.edu,

More information

INTEGRAL AND SPECTRAL CHARACTERISTICS OF ATON STATIONARY PLASMA THRUSTER OPERATING ON KRYPTON AND XENON

INTEGRAL AND SPECTRAL CHARACTERISTICS OF ATON STATIONARY PLASMA THRUSTER OPERATING ON KRYPTON AND XENON 1 INTEGRAL AND SPECTRAL CHARACTERISTICS OF ATON STATIONARY PLASMA THRUSTER OPERATING ON KRYPTON AND XENON A.I.Bugrova, A.I.Morozov *, A.S.Lipatov, A.M.Bishaev, V.K.Kharchevnikov, M.V.Kozintseva. Moscow

More information

Generation of Plasma Induced Flow Actuation by DC Glow-like Discharge in a Supersonic Flow

Generation of Plasma Induced Flow Actuation by DC Glow-like Discharge in a Supersonic Flow 44th AIAA Aerospace Sciences Meeting and Exhibit 9-12 January 2006, Reno, Nevada AIAA 2006-169 Generation of Plasma Induced Flow Actuation by DC Glow-like Discharge in a Supersonic Flow J. Shin, V. Narayanaswamy,

More information

Role of confinement in the development of a helium impacting plasma jet at atmospheric pressure

Role of confinement in the development of a helium impacting plasma jet at atmospheric pressure Role of confinement in the development of a helium impacting plasma jet at atmospheric pressure T. Gaudy 1,2, J. Iacono 1, A. Toutant 1, P. Descamps 2, P Leempoel 2, F. Massines 1 1 : Laboratoire PROcédés,

More information

Influence of the Microplasma Actuator Electrode Configuration on the Induced EHD Flow

Influence of the Microplasma Actuator Electrode Configuration on the Induced EHD Flow Proc. 2018 Electrostatics Joint Conference 1 Influence of the Microplasma Actuator Electrode Configuration on the Induced EHD Flow Marius Blajan, Daisuke Nonanka, Jaroslav Kristof and Kazuo Shimizu Organization

More information

ULTRASONIC IONIZATION SPECTROSCOPY ABSTRACT

ULTRASONIC IONIZATION SPECTROSCOPY ABSTRACT ULTRASONIC IONIZATION SPECTROSCOPY Thomas Prevenslik Consultant 15 H, Greenwood Court, Discovery Bay, Hong Kong E-mail: micronenergy@yahoo.com Christopher Beling, Chor Keung Cheung Department of Physics

More information

SEERS in Sampling Mode A Tool to Investigate Dynamics in Pulsed R.F.-Plasma

SEERS in Sampling Mode A Tool to Investigate Dynamics in Pulsed R.F.-Plasma SEERS in Sampling Mode A Tool to Investigate Dynamics in Pulsed R.F.-Plasma Rolf-Dieter Schulze, Jörg F. Friedrich, Bundesanstalt für Materialforschung und -prüfung Berlin * Introduction - pulsed r.f.-plasma

More information

New blue and green emitting BAM Phosphors for Fluorescent Lamps and Plasma Displays

New blue and green emitting BAM Phosphors for Fluorescent Lamps and Plasma Displays New blue and green emitting BAM Phosphors for Fluorescent Lamps and Plasma Displays T. Jüstel*, W. Busselt, P. Huppertz, W. Mayr, J. Meyer, P.J. Schmidt, D.U. Wiechert Philips Research Laboratories, D-52066

More information

Study of a Micro Hollow Cathode Discharge at medium argon gas pressure

Study of a Micro Hollow Cathode Discharge at medium argon gas pressure Study of a Micro Hollow Cathode Discharge at medium argon gas pressure Claudia LAZZARONI Antoine ROUSSEAU Pascal CHABERT LPP Ecole Polytechnique, Palaiseau, FRANCE Nader SADEGHI LSP Grenoble, FRANCE I-V

More information

Proportional Counters

Proportional Counters Proportional Counters 3 1 Introduction 3 2 Before we can look at individual radiation processes, we need to understand how the radiation is detected: Non-imaging detectors Detectors capable of detecting

More information

POWER CONSUMPTION BY AN SDBD PLASMA ACTUATOR AT VARIOUS PRESSURES

POWER CONSUMPTION BY AN SDBD PLASMA ACTUATOR AT VARIOUS PRESSURES AME60637: Ionization and Ion Transport Final Project Paper May 5, 2010 Notre Dame, IN USA POWER CONSUMPTION BY AN SDBD PLASMA ACTUATOR AT VARIOUS PRESSURES John A. Cooney, Jr. University of Notre Dame

More information

The electrical Discharge Characteristics of the 3.5 KJ Electrothermal Plasma Gun Experiment

The electrical Discharge Characteristics of the 3.5 KJ Electrothermal Plasma Gun Experiment The electrical Discharge Characteristics of the 3.5 KJ Electrothermal Plasma Gun Experiment F. Diab, G. M. El-Aragi, G. M. El-Kashef and A. H. Saudy* Plasma and Nuclear fusion Department, AEA, Cairo, Egypt

More information

Bluff Body Flow Separation Control using Surface Dielectric Barrier Discharges

Bluff Body Flow Separation Control using Surface Dielectric Barrier Discharges 45th AIAA Aerospace Sciences Meeting and Exhibit 8-45th 11 January AIAA Aerospace 2007, Reno, Sciences Nevada Meeting and Exhibit 8 11 January 2007, Reno, Nevada AIAA 2007-939 Bluff Body Flow Separation

More information

Electrohydrodynamic phenomena in atmospheric discharges : application to airflow control by plasma actuators

Electrohydrodynamic phenomena in atmospheric discharges : application to airflow control by plasma actuators Proc. 216 Electrostatics Joint Conference 1 Electrohydrodynamic phenomena in atmospheric discharges : application to airflow control by plasma actuators Eric Moreau, Nicolas Benard University of Poitiers,

More information

Discharge and photo-luminance properties of a parallel plates electron emission lighting device

Discharge and photo-luminance properties of a parallel plates electron emission lighting device Discharge and photo-luminance properties of a parallel plates electron emission lighting device Chia-Hung Li, 1,2 Ming-Chung Liu, 1,* Chang-Lin Chiang, 1,2 Jung-Yu Li, 1 Shih-Pu Chen, 1 Tai-Chiung Hsieh,

More information

Nanosecond pulse surface discharges for high-speed flow control

Nanosecond pulse surface discharges for high-speed flow control AIAA Paper 2012-3137 6 th AIAA Flow Control Conference, New Orleans 25-28 June 2012 Nanosecond pulse surface discharges for high-speed flow control Igor V. Adamovich, Jesse Little *, Munetake Nishihara,

More information

Electrical Discharges Characterization of Planar Sputtering System

Electrical Discharges Characterization of Planar Sputtering System International Journal of Recent Research and Review, Vol. V, March 213 ISSN 2277 8322 Electrical Discharges Characterization of Planar Sputtering System Bahaa T. Chaid 1, Nathera Abass Ali Al-Tememee 2,

More information

Plasma Focus Discharge of Low Energy Under Different Regimes of Input Power Density

Plasma Focus Discharge of Low Energy Under Different Regimes of Input Power Density Plasma Focus Discharge of Low Energy Under Different Regimes of Input Power Density Cristian Pavez 1,2, Adolfo Sepúlveda 3, Maximiliano Zorondo 2, José Pedreros 2, Gonzalo Avaria 1,2, José Moreno 1,2,

More information

NUMERICAL ANALYSES OF ELECTROMAGNETIC FIELDS IN HIGH VOLTAGE BUSHING AND IN ELECTROMAGNETIC FLOW METER

NUMERICAL ANALYSES OF ELECTROMAGNETIC FIELDS IN HIGH VOLTAGE BUSHING AND IN ELECTROMAGNETIC FLOW METER Intensive Programme Renewable Energy Sources May 2011, Železná Ruda-Špičák, University of West Bohemia, Czech Republic NUMERICAL ANALYSES OF ELECTROMAGNETIC FIELDS IN HIGH VOLTAGE BUSHING AND IN ELECTROMAGNETIC

More information

Comparison of Partial Discharge Characteristics for Different Defect Types in SF 6 Gas Insulation System

Comparison of Partial Discharge Characteristics for Different Defect Types in SF 6 Gas Insulation System Comparison of Partial Discharge Characteristics for Different Defect Types in SF 6 Gas Insulation System D.A. Mansour, T. Okusu, K. Nishizawa, H. Kojima, N. Hayakawa, F. Endo and H. Okubo Nagoya University

More information

Development of a dimensionless parameter for characterization of dielectric barrier discharge devices with respect to geometrical features

Development of a dimensionless parameter for characterization of dielectric barrier discharge devices with respect to geometrical features 2017 Hefei Institutes of Physical Science, Chinese Academy of Sciences and IOP Publishing Printed in China and the UK Plasma Science and Technology Plasma Sci. Technol. 19 (2017) 095402 (10pp) https://doi.org/10.1088/2058-6272/aa7382

More information

CHARACTERISATION OF NS-DBD PLASMA ACTUATORS FOR SUPERSONIC FLOW CONTROL

CHARACTERISATION OF NS-DBD PLASMA ACTUATORS FOR SUPERSONIC FLOW CONTROL CHARACTERISATION OF NS-DBD PLASMA ACTUATORS FOR SUPERSONIC FLOW CONTROL Andrew Russell*, Hossein Zare-Behtash*, Konstantinos Kontis* *University of Glasgow, School of Engineering, Glasgow, G12 8QQ, UK

More information

Laser Excitation Dynamics of Argon Metastables Generated in Atmospheric Pressure Flows by Microwave Frequency Microplasma Arrays

Laser Excitation Dynamics of Argon Metastables Generated in Atmospheric Pressure Flows by Microwave Frequency Microplasma Arrays Physical Sciences Inc. Laser Excitation Dynamics of Argon Metastables Generated in Atmospheric Pressure Flows by Microwave Frequency Microplasma Arrays W.T. Rawlins, K.L. Galbally-Kinney, S.J. Davis Physical

More information

Measurements of electric-field strengths in ionization fronts during breakdown Wagenaars, E.; Bowden, M.D.; Kroesen, G.M.W.

Measurements of electric-field strengths in ionization fronts during breakdown Wagenaars, E.; Bowden, M.D.; Kroesen, G.M.W. Measurements of electric-field strengths in ionization fronts during breakdown Wagenaars, E.; Bowden, M.D.; Kroesen, G.M.W. Published in: Physical Review Letters DOI: 10.1103/PhysRevLett.98.075002 Published:

More information

Plasma Modeling with COMSOL Multiphysics

Plasma Modeling with COMSOL Multiphysics Plasma Modeling with COMSOL Multiphysics Copyright 2014 COMSOL. Any of the images, text, and equations here may be copied and modified for your own internal use. All trademarks are the property of their

More information

Experimental analysis of DBD plasma jet properties using different gases and two kinds of transfer plate

Experimental analysis of DBD plasma jet properties using different gases and two kinds of transfer plate arxiv - 20160114 Experimental analysis of DBD plasma jet properties using different gases and two kinds of transfer plate Fellype do Nascimento 1,a), Stanislav Moshkalev 1, Munemasa Machida 2 1 Center

More information

of Plasma Assisted Combustion

of Plasma Assisted Combustion Fundamental Mechanisms, Predictive Modeling, and Novel Aerospace Applications of Plasma Assisted Combustion Overview of OSU research plan Walter Lempert, Igor Adamovich, J. William Rich, and Jeffrey Sutton

More information

THE INFLUENCE OF EXTERNAL MAGNETIC FIELD ON THE RADIATION EMITTED BY NEGATIVE GLOW OF A DC GLOW DISCHARGE

THE INFLUENCE OF EXTERNAL MAGNETIC FIELD ON THE RADIATION EMITTED BY NEGATIVE GLOW OF A DC GLOW DISCHARGE PLASMA PHYSICS THE INFLUENCE OF EXTERNAL MAGNETIC FIELD ON THE RADIATION EMITTED BY NEGATIVE GLOW OF A DC GLOW DISCHARGE M. TOMA, I. A. RUSU, D. O. DOROHOI Plasma Physics Department, A. I. Cuza University,

More information

Influence of surface charges on the structure of a dielectric barrier discharge in air at atmospheric pressure: experiment and modeling

Influence of surface charges on the structure of a dielectric barrier discharge in air at atmospheric pressure: experiment and modeling Eur. Phys. J. Appl. Phys. 47, 22810 (2009) DOI: 10.1051/epjap/2009078 Regular Article THE EUROPEAN PHYSICAL JOURNAL APPLIED PHYSICS Influence of surface charges on the structure of a dielectric barrier

More information

Formation of XeI(B) in low pressure inductive radio frequency electric discharges sustained in mixtures of Xe and I 2

Formation of XeI(B) in low pressure inductive radio frequency electric discharges sustained in mixtures of Xe and I 2 Formation of XeI(B) in low pressure inductive radio frequency electric discharges sustained in mixtures of Xe and I 2 Paul N. Barnes Advanced Plasma Research Section (POOC-2), Wright Laboratory, Wright-Patterson

More information

Electric Wind Produced by a Surface Dielectric Barrier Discharge Operating Over a Wide Range of Relative Humidity

Electric Wind Produced by a Surface Dielectric Barrier Discharge Operating Over a Wide Range of Relative Humidity 47th AIAA Aerospace Sciences Meeting Including The New Horizons Forum and Aerospace Exposition 5-8 January 2009, Orlando, Florida AIAA 2009-488 Electric Wind Produced by a Surface Dielectric Barrier Discharge

More information

Generation of Three-Dimensionally Integrated Micro Solution Plasmas and Its Application to Decomposition of Organic Contaminants in Water

Generation of Three-Dimensionally Integrated Micro Solution Plasmas and Its Application to Decomposition of Organic Contaminants in Water Journal of Photopolymer Science and Technology Volume 26, Number 4 (2013) 507 511 2013SPST Generation of Three-Dimensionally Integrated Micro Solution s and Its Application to Decomposition of Organic

More information

Raman spectroscopy of molecule densities in Hydrogen-Air mixture premixed gas ignited by spark discharge

Raman spectroscopy of molecule densities in Hydrogen-Air mixture premixed gas ignited by spark discharge Proc. 2012 Joint Electrostatics Conference 1 Raman spectroscopy of molecule densities in Hydrogen-Air mixture premixed gas ignited by spark discharge Ayumi Kumamoto, Ryo Ono, Tetsuji Oda Dept. of Advanced

More information

A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS)

A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS) IOP Conference Series: Materials Science and Engineering A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS) To cite this article: D A L Loch and A P Ehiasarian 2012 IOP Conf. Ser.:

More information

Characteristics and Definitions Used for Film Capacitors

Characteristics and Definitions Used for Film Capacitors Characteristics and Definitions Used for Film Capacitors COMMON FILM DIELECTRICS USED IN FILM CAPACITORS PRODUCTS PARAMETER DIELECTRIC (1) UNIT Dielectric constant 1 khz 3.3 3 3. - Dissipation factor 1

More information

Effect of Noble Gas. Plasma Processing Laboratory University of Houston. Acknowledgements: DoE Plasma Science Center and NSF

Effect of Noble Gas. Plasma Processing Laboratory University of Houston. Acknowledgements: DoE Plasma Science Center and NSF Ion Energy Distributions in Pulsed Plasmas with Synchronous DC Bias: Effect of Noble Gas W. Zhu, H. Shin, V. M. Donnelly and D. J. Economou Plasma Processing Laboratory University of Houston Acknowledgements:

More information

Influence of Axial Magnetic Field on the Electrical Breakdown and Secondary Electron Emission in Plane-Parallel Plasma Discharge

Influence of Axial Magnetic Field on the Electrical Breakdown and Secondary Electron Emission in Plane-Parallel Plasma Discharge Vol:5, No:8, 211 Influence of Axial Magnetic Field on the Electrical Breakdown and Secondary Electron Emission in Plane-Parallel Plasma Discharge Sabah I. Wais, Raghad Y. Mohammed, Sedki O. Yousif International

More information

New Plasma Diagnosis by Coherence Length Spectroscopy

New Plasma Diagnosis by Coherence Length Spectroscopy New Plasma Diagnosis by Coherence Length Spectroscopy Nopporn Poolyarat a and Young W. Kim b a The Development and Promotion of Science and Technology (DPST), Thailand b Department of Physics, Lehigh University

More information

EHD flow produced by positive and negative point-to-plate corona discharges

EHD flow produced by positive and negative point-to-plate corona discharges Proc. 2018 Electrostatics Joint Conference 1 EHD flow produced by positive and negative point-to-plate corona discharges Eric Moreau, Patrick Braud, Etienne Defoort, Nicolas Benard University of Poitiers,

More information

Performance of high pressure Xe/TMA in GEMs for neutron and X-ray detection

Performance of high pressure Xe/TMA in GEMs for neutron and X-ray detection Performance of high pressure Xe/TMA in GEMs for neutron and X-ray detection R. Kreuger, C. W. E. van Eijk, Member, IEEE, F. A. F. Fraga, M. M. Fraga, S. T. G. Fetal, R. W. Hollander, Member, IEEE, L. M.

More information

Operational characteristics and power scaling of a transverse flow transversely excited CW CO 2

Operational characteristics and power scaling of a transverse flow transversely excited CW CO 2 PRAMANA cfl Indian Academy of Sciences Vol. 60, No. 1 journal of January 2003 physics pp. 99 107 Operational characteristics and power scaling of a transverse flow transversely excited CW CO 2 laser JAI

More information

Energy conversion in transient molecular plasmas:

Energy conversion in transient molecular plasmas: Plenary lecture, 13 th International Conference on Flow Dynamics October 10-12, 2016, Sendai, Japan Energy conversion in transient molecular plasmas: Implications for plasma flow control and plasma assisted

More information

ELECTRON CYCLOTRON RESONANCE DISCHARGE AS A SOURCE FOR HYDROGEN AND DEUTERIUM IONS PRODUCTION

ELECTRON CYCLOTRON RESONANCE DISCHARGE AS A SOURCE FOR HYDROGEN AND DEUTERIUM IONS PRODUCTION ELECTRON CYCLOTRON RESONANCE DISCHARGE AS A SOURCE FOR HYDROGEN AND DEUTERIUM IONS PRODUCTION Angel.J.Chacon Velasco 1 and V.D.Dougar-Jabon 1 Universidad de Pamplona, Pamplona, Colombia angelch@unipamplona.edu.co

More information

AIAA MHD Flow Control and Power Generation in Low-Temperature Supersonic Air Flows

AIAA MHD Flow Control and Power Generation in Low-Temperature Supersonic Air Flows AIAA 2006-3076 MHD Flow Control and Power Generation in Low-Temperature Supersonic Air Flows Munetake Nishihara, J. William Rich, Walter R. Lempert, and Igor V. Adamovich Dept. of fmechanical lengineering

More information

Chemistry Instrumental Analysis Lecture 17. Chem 4631

Chemistry Instrumental Analysis Lecture 17. Chem 4631 Chemistry 4631 Instrumental Analysis Lecture 17 Introduction to Optical Atomic Spectrometry From molecular to elemental analysis there are three major techniques used for elemental analysis: Optical spectrometry

More information

Dielectric-barrier discharges in two-dimensional lattice potentials. J. Sinclair and M. Walhout*

Dielectric-barrier discharges in two-dimensional lattice potentials. J. Sinclair and M. Walhout* Dielectric-barrier discharges in two-dimensional lattice potentials J. Sinclair and M. Walhout* Department of Physics & Astronomy, Calvin College, Grand Rapids, MI 49546, USA We use a pin-grid electrode

More information

Modeling and Simulation of Plasma-Assisted Ignition and Combustion

Modeling and Simulation of Plasma-Assisted Ignition and Combustion Modeling and Simulation of Plasma-Assisted Ignition and Combustion Sharath Nagaraja and Vigor Yang Georgia Institute of Technology Atlanta, GA 30332-0150 AFOSR MURI Fundamental Mechanisms, Predictive Modeling,

More information

Extremely far from equilibrium: the multiscale dynamics of streamer discharges

Extremely far from equilibrium: the multiscale dynamics of streamer discharges Extremely far from equilibrium: the multiscale dynamics of streamer discharges Ute Ebert 1,2 1 Centrum Wiskunde & Informatica Amsterdam 2 Eindhoven University of Technology http://www.cwi.nl/~ebert www.cwi.nl/~ebert

More information

Product Description. MASTERColour CDM-T. Benefits. Features. Application. Versions

Product Description. MASTERColour CDM-T. Benefits. Features. Application. Versions Lighting Product Description Range of single-ended, compact, high-efficiency, discharge lamps with a stable colour over lifetime and a crisp, sparkling light Benefits Stable colour impression over lifetime

More information

Real-time electron-spin-resonance measurement of plasma induced surface interactions

Real-time electron-spin-resonance measurement of plasma induced surface interactions Realtime electronspinresonance measurement of plasma induced surface interactions 1 Naoya Sumi, 1 Kenji Ishikawa, 2 Hideo Horibe, 2 Akihiko Kono, 1 Keigo Takeda, 1 Hiroki Kondo, 1,3 Makoto Sekine and 1,3

More information

SHP-T Basic Plus. Sa Shp-T 150w Basic Plus E40 PRODUCT OVERVIEW DATA TABLE. Optical data. Range Features. Colour temperature (K) 2000 CRI (Ra) 20

SHP-T Basic Plus. Sa Shp-T 150w Basic Plus E40 PRODUCT OVERVIEW DATA TABLE. Optical data. Range Features. Colour temperature (K) 2000 CRI (Ra) 20 Range Features PRODUCT OVERVIEW Lamp finish clear Lamp shape High Pressure Sodium Colour temperature (K) 2000 CRI (Ra) 20 Dimmable Yes EAN code 5410288208473 Energy class A+ Cap/Base E40 Type SHP-T Watt

More information

Module 1. Illumination Engineering Basics. Version 2 EE IIT, Kharagpur 1

Module 1. Illumination Engineering Basics. Version 2 EE IIT, Kharagpur 1 Module 1 Illumination Engineering Basics Version 2 EE IIT, Kharagpur 1 Lesson 2 Radiation Version 2 EE IIT, Kharagpur 2 Instructional objectives 1. State the Visible Range of light. 2. State the range

More information

ARTIFICIAL TURBULIZATION OF THE SUPERSONIC BOUNDARY LAYER BY DIELECTRIC BARRIER DISCHARGE

ARTIFICIAL TURBULIZATION OF THE SUPERSONIC BOUNDARY LAYER BY DIELECTRIC BARRIER DISCHARGE ARTIFICIAL TURBULIZATION OF THE SUPERSONIC BOUNDARY LAYER BY DIELECTRIC BARRIER DISCHARGE P.А. Polivanov, A.А. Sidorenko & A.А. Maslov Khristianovich Institute of Theoretical and Applied Mechanics SB RAS

More information

MODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES

MODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES MODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES Michael A. Lieberman University of California, Berkeley lieber@eecs.berkeley.edu DOE Center on Annual Meeting May 2015 Download this talk: http://www.eecs.berkeley.edu/~lieber

More information

Surface cleaning mechanisms utilizing VUV radiation in oxygen containing gaseous environments

Surface cleaning mechanisms utilizing VUV radiation in oxygen containing gaseous environments Surface cleaning mechanisms utilizing VUV radiation in oxygen containing gaseous environments Zoran Falkenstein Ushio America, Inc. Zoran Falkenstein Surface cleaning mechanisms utilizing VUV radiation

More information