Safety Data Sheets (SDS) Learning Module

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1 Southwest Center for Microsystems Education (SCME) University of New Mexico MEMS Safety Topic Safety Data Sheets (SDS) Learning Module This Safety Data Sheets (SDS) Learning Module contains the following: Knowledge Probe (KP / pretest) Primary Knowledge (Reading material) SDS Research Activity SDS Activity for KOH Activity Assessment for KOH Final Assessment The purpose of this learning module is to provide information on the requirements and content of Safety Data Sheets (SDS), how to locate a SDS, and how to interpret a SDS. Activities allow students to demonstrate their ability to find a specific SDS and to extract and interpret important safety information from the SDS. Target audiences: High School, Community College, University Made possible through grants from the National Science Foundation Department of Undergraduate Education # , , and Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the National Science Foundation. Southwest Center for Microsystems Education (SCME) NSF ATE Center 2010 Regents of the University of New Mexico Content is protected by the CC Attribution Non-Commercial Share Alike license. Website:

2 Safety Data Sheets (SDS) Knowledge Probe (KP) Participant Guide KP Description and Purpose Being able to locate and interpret a Safety Data Sheet (SDS) is important to anyone involved in the fabrication of MEMS devices. MEMS fabrication requires several hazardous chemicals. A SDS explains these hazards and provides information necessary to protect one's self and how to respond to an emergency involving a certain chemical. One should always study a chemical's SDS prior to working around or handling a chemical. (Note: Prior to 2013 SDS was called MSDS) This knowledge helps you to identify what you do and don t know about the SDS. Following are ten (10) knowledge probe questions. Answer them to the best of your knowledge. 1. What is a SDS? a. Standard Data Sheet b. Safety Data Statistics c. Safety Data Sheet d. Supplier Data Sheet 2. For which type of chemicals does OSHA require a SDS? a. Only those that pose a health hazard b. Only those that are flammable c. Only those that are considered hazardous to health and environment d. All chemicals in a facility 3. Who is responsible for developing a SDS for a chemical? a. OSHA b. The chemical manufacturer c. The chemical buyer d. NFPA 4. OSHA requires that SDS's are readily accessible to all employees. This can be through having accessible copies on the premises or having access to the Internet to acquire a copy. a. True b. False Southwest Center for Microsystems Education (SCME) Page 1 of 3 Saf_HazMat_KP30_PG_January2017.docx SDS Knowledge Probe

3 5. Which of the following is NOT a mandatory requirement by OSHA to be included in a SDS? a. Physical / Chemical Properties b. Handling and Storage requirements c. Control Measures d. Transport information 6. In which section of a SDS would you find the safety information listed in Figure 1? a. Health Hazards and First Aid b. Spill or Leak Procedures c. Control Measures d. Fire / Explosion Hazards Data Figure Which of the following is considered a "product name"? a. Ammonia b. Chlorine solution c. Window cleaner d. Cl 2 8. The information in Figure 2 would be found in which section of a SDS. a. First-aid measures b. Hazard Identification c. Physical and chemical Properties d. Stability and Reactivity Figure 2 Southwest Center for Microsystems Education (SCME) Page 2 of 3 Saf_HazMat_KP30_PG_January2017.docx SDS Knowledge Probe

4 9. PEL stands for. 10. In which section of a SDS would one find "conditions to avoid?" a. Health Hazards b. Physical / Chemical Properties c. Fire and Explosion Hazard Data d. Reactivity Data Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program. For more safety learning modules and modules related to microtechnology, visit the SCME website ( Southwest Center for Microsystems Education (SCME) Page 3 of 3 Saf_HazMat_KP30_PG_January2017.docx SDS Knowledge Probe

5 Safety Data Sheets (SDS) SDS Learning Module Participant Guide Description and Estimated Time to Complete Being able to locate and interpret a Safety Data Sheet (SDS) is important to anyone involved in the fabrication of MEMS (microelectromechanical systems) and any micro or nano-sized devices. Micro and nanotechnology fabrication require several hazardous chemicals. SDSs are available for each chemical used in these facilities. A SDS explains the potential hazards of a chemical. It also provides information necessary to protect you from unnecessary exposure as well as other valuable safety information. You should always study a chemical's SDS prior to working around or handling a chemical. The purpose of this learning module is to provide information on the requirements and content of Safety Data Sheets (SDS), how to locate a SDS, and how to interpret a SDS. Activities allow students to demonstrate their ability to find a specific SDS and to extract and interpret important safety information from the SDS. This unit provides content information about Safety Data Sheets (SDS), data contained within a SDS, and interpretation of that data. This information will assist in extracting specifics from a SDS and interpreting the information. This unit has been updated to the new OSHA Hazard Communication Standard 29CFR [ that became effective May 25, This standard was revised to better align the United States with the UN Globally Harmonized System of Classification and Labeling of Chemicals (GHS), Revision 3. It would be helpful to download two different SDS's prior to beginning this lesson. Suggestion: Isopropyl Alcohol and Chlorine. To download a specific SDS, just do a search for Isopropyl Alcohol SDS. Your search will return many websites to choose from. Laboratories and suppliers are the best sources. Estimated Time to Complete Allow at least 15 minutes Southwest Center for Microsystems Education (SCME) Page 1 of 10 Saf_HazMat_PK30_PG_January2017.docx SDS PK

6 Introduction In order to work safely in a laboratory or manufacturing facility in which hazardous materials are found, you must understand the purpose of a SDS and how to extract information about a chemical. The knowledge in this unit will provide information about a SDS that can be used to investigate any chemical. Pouring Acid under a fume hood A Safety Data Sheet (SDS) is a document that provides vital information about a chemical for all those that use it, transport it, store it, or work around it in any manner. A SDS is required by Federal law to be prepared for each chemical imported or produced in this country. It is the chemical manufacturer's responsibility to supply a SDS with each chemical it sells. It is the employer's responsibility to maintain an updated SDS for all chemicals on the premises, and to make them readily accessible to all employees. This responsibility extends to chemicals such as Super Glue, Elmers, and Scotch Guard. If such chemicals are on the premises, a SDS must be available. A SDS contains information on the hazards associated with a particular chemical, handling information, emergency procedures for spills or human contact, and data associated with its flammability and reactivity. Before storing, handling or working with a chemical in any manner, you should become familiar with the information provided in the chemical's SDS. OSHA s* (HazCom standard (29 CFR )[ identifies all 16 elements that must be on a SDS. Those elements are briefly discussed in this unit. *U.S. Occupational Safety and Health Administration (OSHA), an agency of the U.S. Department of Labor. Learning Module Objectives Interpret the contents of at least three SDSs for specific chemicals. Identify the applications of at least three chemicals in microtechnology fabrication processes. Define the basic terms used by a SDS to describe a chemical s hazards Southwest Center for Microsystems Education (SCME) Page 2 of 10

7 Dependencies A basic understanding of Hazardous Materials terminology would enhance learning. (See SCME's Hazardous Materials I and II) SDS Requirements BEFORE storing, handling or working with a chemical in any manner, you should become familiar with the information provided in that chemical's SDS. You should always know how to properly handle a chemical, how to prevent exposure, how to recognize the symptoms of overexposure, and the emergency procedure for overexposure. It is the employer s responsibility as well as the employee s to ensure that all safety precautions are used and all safety procedures are followed. SAFETY FIRST! Sixteen sections required in a SDS (OSHA s* HazCom standard (29 CFR ) [ ] 1. Identification 2. Hazard(s) identification 3. Composition/information on ingredients 4. First-aid measures 5. Fire-fighting measures 6. Accidental release measures 7. Handling and storage 8. Exposure controls/personal protection 9. Physical and chemical properties 10. Stability and reactivity 11. Toxicological information 12. Ecological information* 13. Disposal considerations* 14. Transport information* 15. Regulatory information* 16. Other information including date of preparation or last revision *Non-mandatory To see the specific information required in each of these sections, click on the following link. Appendix D to Safety Data Sheets (Mandatory) [ Keep this table accessible as you go through the rest of this learning module. Southwest Center for Microsystems Education (SCME) Page 3 of 10

8 SDS Terminology Much of the terminology found in a SDS is related to the hazardous characteristics of a chemical. This includes terms such as toxicity, flashpoint, and reactivity. You will also find terminology related to regulations such as the TLV or Threshold Limit Values for toxicity. There are several SDS glossaries that provide definitions for most of these terms. The SDS Hyperglossary ( ) is a great reference. As we go through the information and terminology of a SDS, locate the information on each of your SDS's. Chemical Information / Composition / Exposure Controls The following terms / acronyms are different ways of identifying the chemical on the SDS. Not all terms are used in a SDS. Product Name - The manufacturer's name for the chemical or the chemical mixture. In some cases the "product name" is protected as a trademark. An example is Clorox. Clorox is a trademark for chlorine bleach manufactured by the Clorox Company. Chemical Name - The name of the chemical (the element, chemical compound or mixture). The scientific designation of a chemical that clearly identifies the chemical for the purpose of conducting a hazardous evaluation. The chemical name in this label is "Boron Trichloride". CAS # - The Chemical Abstract Service registry number which identifies the chemical. What is the CAS for BCL3? EPA # - The number assigned to the chemical for regulatory purposes by the Environmental Protection Agency (EPA). Generic Name, Synonyms - Other names the chemical is commonly known by. For example, chlorine bleach is also referred to as bleach. TLV or Threshold Limit Value - The airborne concentration of a chemical. A TLV is the concentration in ppm (parts per million) under which workers may be repeatedly exposed day after day without adverse effects. TLV's are revised yearly by the American Conference of Governmental Industrial Hygienists'. PEL or permissible exposure limit - Similar to TLV, but is determined by OSHA. Find this information within your SDS's. Southwest Center for Microsystems Education (SCME) Page 4 of 10

9 Classification and Mixture Hazard Classification - The nature and degree of the predominant hazard associated with the chemical. Such classifications include flammable, poison, corrosive, oxidizer, combustible, and reactive. Material and Percentage of Mixture - The chemical ingredients by their percent (for chemicals that are mixtures). All ingredients that have been determined to be physical or health hazards and comprise 1.0% or more of the composition must be listed. Chemicals that have been identified as carcinogens must be identified if the concentrations are 0.1% or greater. Physical Data Boiling Point - The temperature at which the vapor pressure of a liquid equals atmospheric pressure or at which the liquid changes to a vapor. Freezing Point - The temperature at which the liquid takes on a solid state. Evaporation Rate - The rate at which a material converts to a vapor at any given temperature and pressure. Odor and Appearance What it looks like (e.g., color, transparency) and what it smells like (e.g., odorless, moldy, pungent). Percent Volatile by volume - The percent of a material (by volume) that will evaporate at an ambient temperature of 70 F. Surface area, length of time, and other factors influence percent volatile; no standard procedures exist. Solubility in Water - The solubility of a product by weight in water at ambient temperature as expressed in the following terms: Negligible - less than -0.1% Slight % Moderate 1.0 to 10% Appreciable - More than 10% Complete - 100% Solubility information is useful in determining effective fire extinguishing methods and spill cleanup procedures. Southwest Center for Microsystems Education (SCME) Page 5 of 10

10 Specific Gravity (Water = 1) - The ratio of the weight of a volume of material to the weight of an equal volume of water. How heavy the material is in comparison to water. A ratio of less than 1 means the material is lighter than water and will float on the surface. Most flammables are less than one. Vapor Pressure - The pressure of a saturated vapor above a liquid, in millimeters of 20 C. Vapor Density - The relative density or weight of a vapor or gas compared to an equal amount of air. Air is rated at 1.0. Therefore, a number greater than 1.0 indicates a vapor or gas heavier than air, and vice versa. Concentrated vapors that are heavier than air can accumulate in low places such as along floors and pits. They can also settle in the lower lung. Physical Data for BCL3 Find this information within your SDS's. Fire and Explosion Hazard Data / Fire-Fighting Measures Flammability Data - A flammable, combustible, pyrophoric. Flashpoint - The lowest temperature at which a liquid gives off enough vapor to form an ignitable mixture with air and produce a flame when a source of ignition is present. LEL and UEL - For flammable liquids, the lower explosive limit (LEL) is the minimum concentration of the liquid s vapor in the air, below which, a flame does not occur on contact with an ignition source. The upper explosive limit (UEL) is the maximum concentration of the liquid s vapor in air, above which, a flame does not occur. Suitable extinguishing materials Personal Protective Equipment (PPE) for fire fighters. Fire and Explosion Data for BCL3 Southwest Center for Microsystems Education (SCME) Page 6 of 10

11 Toxicity Nature of Hazard and Toxicity Data - The nature of the hazard (e.g. irritant, corrosive, carcinogen) and significant animal studies that determine the chemical's toxicity commonly based on the LD50 (Lethal Dose, 50%). Toxicity data also includes the dose relative to the length of time exposed, such as the TLV and PEL. TLV and PEL are both legal limits. LD50 - The value that indicates the quantity of material that, if administered to a population of test animals, will cause 50% of the animals to perish. The LD50 is typically expressed in mg of material per kg of subject-body-weight. TLV or Threshold Limit Value - The airborne concentration of a chemical. A TLV is the concentration in ppm (parts per million) under which workers may be repeatedly exposed day after day without adverse effects. TLVs are revised yearly by the American Conference of Governmental Industrial Hygienists. PEL or permissible exposure limit - Similar to TLV, but is set by OSHA. Reactivity Conditions or Materials to Avoid Handling conditions to avoid when using a specific chemical, such as extreme temperatures, shaking, inappropriate storage, or dropping. Also, materials that this chemical should not come in contact with due to chemical reactions. Materials such as water and metals or common "materials to avoid." Hazardous Decomposition Products - Hazardous materials produced from a reaction by burning, oxidation, heating or reaction with other chemicals. Find this information within your SDS's. PPE (Personal Protective Equipment) Reactivity Data for BCL3 Safety equipment (if required) when working around or handling a chemical. Safety equipment could include goggles, face shield, chemical gloves (corrosive or solvent), aprons, shoes, or self-contained breathing apparatus (SCBA). Southwest Center for Microsystems Education (SCME) Page 7 of 10

12 Glossary of Key Terms Flammability - A measure of the extent to which a material will support combustion. Also know as inflammability. SDS (Safety Data Sheet) - A document that provides the necessary information about a chemical for all those that use it, store it, or work around it in any manner. PPE (Personal Protective Equipment) - Equipment employees wear that provides an effective protective barrier between the employee and MSD hazard. Reactivity - A description of the tendency of a substance to undergo chemical reaction with the release of energy. The conditions that cause the reaction, such as heat, or direct contact with other chemicals, are specified as "Conditions to avoid" when a chemical s reactivity is discussed on SDS. Toxicity - The effect a chemical has on the health of a human being under certain concentrations an exposure times. A chemical s toxicity depends on the duration of exposure and the chemical s concentration. Other terms can be found in the SDS HyperGlossary [ Summary A SDS is your information source about a chemical. Before working with or around a chemical, you should always study the appropriate SDS. Know where the SDS notebook or resource is located and know how to locate a SDS on the internet. Related Units or Activities Hazardous Materials Learning Module SDS Internet Research Activity SDS KOH Activity Chemical Labels Learning Module Southwest Center for Microsystems Education (SCME) Page 8 of 10

13 1. Review Questions What does OSHA stand for? 2. OSHA requires specific sections to be contained in a SDS. How many specific sections are required? 3. a. 6 b. 8 c. 12 d. 16 Which of the following would be considered a product name? a. Isopropyl Alcohol b. Fingernail polish remover c. Acetone d. Chlorine 4. An ingredient that has been determined to be a physical or health hazard, must be listed on a SDS if its composition is equal to or greater than what percent? a. 0.1% b. 0.5% c. 0.75% d. 1.0% 6. What is meant by a chemical s reactivity characteristic? Southwest Center for Microsystems Education (SCME) Page 9 of 10

14 Matching Activity Match the following components with their functions. Component Function 1 Flashpoint A Reactivity 2 PPE B Physical Data 3 Chemical Name C Hazardous Characteristics 4 Substances to avoid D Control Measures 5 Appearance and odor E Fire and Explosion Data 6 PEL F Product Information Table 1: SDS Contents References The OSHA Hazard Communication Standard (HCS), 29 CFR The SDS HyperGlossary. Interactive Learning Paradigms Incorporated Disclaimer The information contained herein is considered to be true and accurate; however the Southwest Center for Microsystems Education (SCME) makes no guarantees concerning the authenticity of any statement. SCME accepts no liability for the content of this unit, or for the consequences of any actions taken on the basis of the information provided. Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program. For more safety learning module and more modules related to microtechnology, visit the SCME website ( Southwest Center for Microsystems Education (SCME) Page 10 of 10

15 Safety Data Sheets (SDS) Internet Research Activity Participant Guide Description and Estimated Time to Complete This is a research activity to locate specific Safety Data Sheets (SDS) that are relevant to microsystems fabrication. Such SDSs can be located at various sites on Internet. From these SDSs, you will extract specific information and interpret that information for its relevance to maintaining your safety and the safety of fellow employees in the workplace. This activity allows you to demonstrate your ability to locate a SDS and interpret the information found within it. Estimated time to complete: Allow at least 2 hours Introduction In order to work safely in a facility that fabricates MEMS devices, you must understand the purpose of a SDS and how to extract information about various chemicals. Such facilities use many hazardous materials that could be harmful to your health and the environment if not handled properly or if the required safety measures are not followed. A Safety Data Sheet (SDS) contains information on the hazards associated with a particular chemical, handling information, emergency procedures for spills or human contact, and data associated with its flammability and reactivity. Before storing, handling or working with a chemical in any manner, you should become familiar with the information provided in the chemical's SDS. Dependencies Knowledge of the terminology and acronyms associated with hazardous materials would be beneficial. Such terms can be found in the SDS HyperGlossary ( ). Resource: SCME Safety Data Sheets PK Southwest Center for Microsystems Education (SCME) Page 1 of 5 Saf_HazMat_AC30_PG_January2017.docx SDS Internet Research Activity

16 Documentation Create a written report documenting the information collected for this activity. Your report should include the following: The information extracted for each step of the procedure Explanations and justifications when required Post-Activity Questions with answers SDS Internet Research When you are working with chemicals, it is important that you know how to locate a SDS, extract information from it, understand the meaning of the information extracted, and know how to use the information. Description Use the Internet to locate the required SDS's and information for the following chemicals. SDS for HexaMethylDiSilazane (HMDS) Extract the following information: SDS Source (Manufacturer and URL) Ingredients and respective percents (%) Primary health hazard(s) Chemical characteristic(s) First aid measures for eye contact with HMDS First responder's responsibility to an HMDS fire Flashpoint temperature Toxicity limits Safety procedure for filling an HMDS bottle at the equipment.(write in your own words) SDS for Hydrofluoric Acid Extract the following information: SDS Source (Manufacturer and URL) Ingredients and respective percents (%) First responder's responsibility to a co-worker being splashed with HF Effects of HF when mixed with water Required PPE when working with HF Flammability characteristics Safety procedure for working with any concentration of HF (Write in your own words) Southwest Center for Microsystems Education (SCME) Page 2 of 5 Saf_HazMat_AC30_PG_January2017.docx SDS Internet Research Activity

17 SDS for TetraMethylAmmoniumHydroxide (TMAH) Extract the following information: SDS Source (Manufacturer and URL) Ingredients and percents (%) Chemical characteristics (i.e. corrosive, poison, mutagen, etc.) Flammability characteristics Physical properties of TMAH Procedure for responding to a possible TMAH spill (Write in your own words) Comparison of the three SDSs Using the three SDSs from the previous steps, complete the following table. Indicate with a check mark which characteristic applies to which chemical(s). Characteristics HMDS HF TMAH Carcinogen Flammable Poison Strong acid Strong base Flashpoint > 200 C Reactive with water Soluble in water Requires safety glasses Table 1: SDS Comparison Southwest Center for Microsystems Education (SCME) Page 3 of 5 Saf_HazMat_AC30_PG_January2017.docx SDS Internet Research Activity

18 Post-Activity Questions 1. What does SDS stand for? 2. List ten (10) requirements for a SDS. 3. Under which section would one find the flashpoint for a chemical? What happens when a chemical reaches its flashpoint? 4. Under which section would one find the maximum amount of concentration of a chemical that a worker may be exposed to under OSHA regulations? What is this called? 5. Under which section would one find a chemical's ability to be mixed with water or other chemicals? 6. In what fabrication process is HMDS used in microsystems manufacturing? 7. What is an application of HF in microsystems fabrication? 8. Where is TMAH used in microsystems fabrication? Final Documentation Create a written report documenting the information collected for this activity. Your report should include the following: The information extracted for each step of the procedure Explanations and justifications when required Post-Activity Questions with answers References SCME Safety Data Sheet OSHA ( ) Safety Data Sheets ( ) Disclaimer The information contained herein is considered to be true and accurate; however the Southwest Center for Microsystems Education (SCME) makes no guarantees concerning the authenticity of any statement. SCME accepts no liability for the content of this unit, or for the consequences of any actions taken on the basis of the information provided. Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program. For more safety learning module and modules related to microtechnology, visit the SCME website ( Southwest Center for Microsystems Education (SCME) Page 4 of 5 Saf_HazMat_AC30_PG_January2017.docx SDS Internet Research Activity

19 Southwest Center for Microsystems Education (SCME) Page 5 of 5 Saf_HazMat_AC30_PG_January2017.docx SDS Internet Research Activity

20 KOH (Potassium Hydroxide) SDS Activity Participant Guide Description and Estimated Time to Complete This activity allows you to learn more about KOH (Potassium Hydroxide), a chemical used in the fabrication of MEMS. You will study a Safety Data Sheet (SDS) for KOH and write a safety procedure for process technicians that work with KOH. Estimated time to complete: Allow approximately 2 hours NOTE: Safety Data Sheets (SDS) used to be called Material Safety Data Sheets (MSDS). Some websites and documentation you find in this activity may still use the term MSDS. Introduction KOH (Potassium Hydroxide) is one of the most used liquid chemical etchants for creating channels, grooves, and cavities in silicon crystal wafer substrates for microsystems devices. Anyone working within a lab or fabrication environment in which MEMS are made will be working around, if not with KOH. Therefore, it is imperative that one understands the information provided on the SDS and implements all safety precautions and safety rules when working in the cleanroom. For those technicians actually working with KOH, it is imperative that they have a thorough understanding of the potential hazards of the chemical and how to prevent problems from occurring. They also need to know how to respond to any problem that could arise, such as exposure or spill. Southwest Center for Microsystems Education Page 1 of 4 Saf_HazMat_AC31_PG_January2017.docx KOH SDS Activity

21 Activity Objectives and Outcomes Activity Objectives Locate a KOH SDS on an Internet site Demonstrate your understanding of the safety precautions for working with KOH by writing a safety procedure for KOH process technicians (those technicians that perform or oversee a KOH process) Activity Outcomes A process technician should be able to clearly read, understand and implement your safety procedure and use it in the fabrication facility (the cleanroom). Safety KOH is a hazardous chemical. In addition to making use of the information provided in the SDS, one should always apply the general safety rules for working with chemicals. Attitude & Behavior Chemicals are dangerous and can kill if handled improperly! A small spill of a corrosive could release toxic fumes into the air. Some of the spilled chemical could also come into contact with the skin causing severe burns. This is why it is important to understand the potential dangers of a chemical and know how to identify its hazards. Use this exercise to become confident in working with and around KOH in a lab environment. Documentation Prepare a written safety procedure that could be used by KOH process technicians to adequately prepare for working with and around KOH. Use the template attached to this activity. Be sure to record all sources of your information under Resources. Documentation should reflect your understanding of the terminology associated with a SDS. KOH SDS Internet Research Activity Complete this procedure to gain familiarity with a KOH SDS. Work with one or two other students to complete this activity. Southwest Center for Microsystems Education Page 2 of 4 Saf_HazMat_AC31_PG_January2017.docx KOH SDS Activity

22 Procedure 1. Locate at least two SDS s for KOH. 2. Study the SDSs and highlight the information that one should know before starting to work with or around KOH. 3. Use the highlighted information to create a Technician Safety Procedure for KOH. Use the template provided at this end of this activity. 4. In your safety procedure you should include resources and definitions of terms critical to the understanding of this document. 5. Switch finished procedures with another team. Identify the strengths and weaknesses of their procedure and how their procedure might be stronger than yours in specific areas. 6. With the other team, discuss the comparisons and evaluations. References SCME's Safety Data Sheet Primary Knowledge unit Southwest Center for Microsystems Education Page 3 of 4 Saf_HazMat_AC31_PG_January2017.docx KOH SDS Activity

23 IMPORTANT STEPS (Identify the critical steps for working with KOH Before, During, After, and any steps for special procedures such as spills or exposure) KEY POINTS (List the key points or critical information for each step) REASON (State the reason for knowing, completing and understanding each step) Resources SDS - Science lab Terminology Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program through Grants. For more safety related learning module and modules related to microtechnology, visit the SCME website ( Southwest Center for Microsystems Education Page 4 of 4 Saf_HazMat_AC31_PG_January2017.docx KOH SDS Activity

24 KOH SDS Activity Assessment Participant Guide Introduction The purpose of this assessment is to test your knowledge of the information provided in a SDS for the chemical compound KOH. This assessment should be taken after completing the KOH SDS Activity. Below are ten questions. 1. What is does the chemical compound, KOH stand for? a. Sodium peroxide b. Hydroxide c. Potassium hydroxide d. Peroxide 2. If KOH gets in the eyes, what steps should be followed? a. Nothing, KOH does not harm the eyes b. Briefly rinse eyes with water c. Contact lab manager and wait for his/her response d. Get medical aid at once and immediately flush eyes with water for minutes. 3. Which of the following statements is TRUE about KOH? a. Highly reactive b. Incompatible with water c. Has a low flashpoint d. Stable under normal condition 4. In case of skin contact with KOH, which of the following is NOT recommended. a. Immediately flush skin with water for at least 15 minutes. b. DO NOT flush irritated skin. Cover immediately with an emollient. c. Get medical attention immediately. d. All of the above. 5. Which of the following properties do NOT apply to KOH. a. Flammable b. Caustic c. Toxic if swallowed d. Non-combustible Southwest Center for Microsystems Education Page 1 of 2 Saf_HazMat_AA31_PG_January2017.docx KOH Activity Assessment

25 6. Which of the following lists of Personal Protective Equipment (PPE) is required when working with a. KOH? Safety glasses and nitrile gloves b. Chemical splash goggles and nitrile gloves c. Chemical splash goggles, face shield, rubber apron, chemical gloves d. Chemical splash goggles, face shield, rubber apron, chemical gloves and respirator 7. What odor would one smell when working around KOH? a. Citrus b. Rotting eggs c. Sulphuric d. No odor 8. What are the routes of entry for KOH? a. Absorbed through skin b. Inhalation c. Ingestion d. All of the above 9. What is the chemical family of KOH? a. Alkali metal b. Transition metal c. Halogen gas d. Noble gas 10. What section of the SDS would you find the information needed if KOH were ingested? Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program. Southwest Center for Microsystems Education Page 2 of 2 Saf_HazMat_AA31_PG_January2017.docx KOH Activity Assessment

26 Safety Data Sheets - Final Assessment Participant Guide Instructions The purpose of this assessment is to determie your ability to locate a SDS, extract information from it and interpret that information for a practical application. BEFORE BEGINNING THIS ASSESSMENT: Locate and download at least one SDS for Boron Trifluoride. You will need this SDS to answer some of the questions in this assessment. Below are the assessment questions. 1. Who is responsible for creating and supplying chemical SDSs? a. OSHA b. NFPA c. Chemical Manufacturer d. Chemical user 2. Which of the following sections is NOT required by OSHA to be included in a SDS? a. Exposure Controls b. Handling and Storage c. Fire Fighting Measures d. Disposal Considerations 3. Which section of the SDS deals with the information concerning the outcomes of inhalation, skin/eye contact, and ingestion? a. First-aid measures b. Hazard(s) identification c. Accidental Release measures d. Physical and Chemical Properties 4. Which section of the SDS deals with the information related to fire hazard, extinguishing media and Flashpoint? a. Physical and Chemical Properties b. Accidental Release Measures c. Fire and Explosion Data d. Exposure Controls 5. For a hazardous ingredient to be listed on the SDS, it must comprise what percent of the chemical? a. 0.1% or more b. 1.0% or more c. 5.0% or more d. 10% or more Southwest Center for Microsystems Education Page 1 of 2 Saf_HazMat_FA30_PG.docx SDS Final Assessment

27 6. Which of the following indicates the toxicity of a chemical? a. A vapor density of 4.6 b. Incompatible with water c. Upper explosion limit of 16.3% d. TLV of 25 ppm 7. Which section of a SDS indicates which "conditions / materials to avoid"? a. Toxicological Information b. Physical and Chemical Properties c. Exposure Controls d. Stability and Reactivity Data 8. Refer to the SDS for Boron Trifluoride. List three (3) physical characteristics of BCl Refer to the SDS for Boron Trifluoride. This chemical has a health hazard rating of 4. List the characteristic(s) of BCl 3 that would substantiate this rating? 10. Refer to the SDS for Boron Trifluoride. You enter the service aisle and notice that your co-worker has passed out. Due to the circumstances, you can safely assume it is due to inhalation of boron trifluoride gas. What would be a correct response procedure? 11. Refer to the SDS for Boron Trifluoride. Scenario: You are a member of the emergency response team for spills and leaks. What would be a correct procedure when responding to an accidental release of boron trifluoride? 12. Refer to the SDS for Boron Trifluoride. Which of the following BEST describes the reactivity properties of Boron Trifluoride? a. Stable under normal conditions, but incompatible with water and some metals. b. Reacts violently with water and heat c. Unstable under most conditions. Avoid water. Corrodes some metals. d. Stable under most conditions, but reacts violently when exposed to wet metals. Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE) Program. Southwest Center for Microsystems Education Page 2 of 2 Saf_HazMat_FA30_PG.docx SDS Final Assessment

28 Southwest Center for Microsystems Education (SCME) Learning Modules available for scme-nm.org MEMS Introductory Topics MEMS Fabrication MEMS History MEMS: Making Micro Machines DVD and LM (Kit) Units of Weights and Measures A Comparison of Scale: Macro, Micro, and Nano Introduction to Transducers Introduction to Sensors Introduction to Actuators Problem Solving A Systematic Approach Crystallography for Microsystems (Crystallography Kit) Deposition Overview Microsystems (Science of Thin Films Kit) Photolithography Overview for Microsystems Etch Overview for Microsystems (Bulk Micromachining An Etch Process Kit) MEMS Micromachining Overview LIGA Micromachining Simulation Activities (LIGA Micromachining Lithography & Electroplating Kit) Manufacturing Technology Training Center Pressure Sensor Process (Three Activity Kits) A Systematic Approach to Problem Solving Introduction to Statistical Process Control Learning Microsystems Through Problem Solving Activity and related kit MEMS Applications MEMS Applications Overview Microcantilevers (Microcantilever Model Kit) Atomic Force Microscope Overview Micro Pressure Sensors and The Wheatstone Bridge (Modeling A Micro Pressure Sensor Kit) Micropumps Overview BioMEMS BioMEMS Overview BioMEMS Applications Overview DNA Overview DNA to Protein Overview Cells The Building Blocks of Life Biomolecular Applications for biomems BioMEMS Therapeutics Overview BioMEMS Diagnostics Overview Clinical Laboratory Techniques and MEMS MEMS for Environmental and Bioterrorism Applications Regulations of biomems DNA Microarrays (DNA Microarray Model Kit available) Microtechnology of Pacemakers Revised January 2017 Nanotechnology Nanotechnology: The World Beyond Micro (Supports the film of the same name by Silicon Run Productions) Safety Hazardous Materials Material Safety Data Sheets Interpreting Chemical Labels / NFPA Chemical Lab Safety Personal Protective Equipment (PPE) Check our website regularly for the most recent versions of our Learning Modules. For more information about SCME and its Learning Modules and kits, visit our website scme-nm.org or contact Dr. Matthias Pleil at mpleil@unm.edu

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