LTCC TECHNOLOGY FOR MESOSYSTEMS. Mário Ricardo Gongora-Rubio

Transcription

1 LTCC TECHNOLOGY FOR MESOSYSTEMS Mário Ricardo Gongora-Rubio

2 LTCC TECHNOLOGY LTCC was originally developed by Hughes and DuPont for Military Electronic Systems. The (LTCC) technology can be defined as a way to produce multilayer circuits with the help of single tapes, which are to be used to apply conductive, dielectric and / or resistive pastes on. These single sheets have to be laminated together and fired in one step all. Multi Chip Module Bluetooth Interface (National)

3 TECHNOLOGY VISION Meso System Module Actuator Micro Fluidics

4 LTCC DEVICE FABRICATION PROCESS

5 Layer LTCC FLOW SENSORS A-A Layer 1 Layer 2 Layer 3 Device Lay-out L1 L2 L3 L4 L5 Experimental Set-Up Fabricated Device Layer 4 Layer 5 Cross-section A-A Dissipation Factor (Watt/Kelvin) Dissipation factor Vs. Flow velocity k = 18, ,03 * e exponential regression (-vf / 1,66) for Flow Velocity (SLM)

6 MESO-SCALE PLASMA GENERATOR Front view Side view 2 mm

7 OXYGEN SENSORS The dissolved oxygen (DO) sensor is one of the most important sensors for environmental monitoring. A Clark-type DO sensor using (LTCC) targeted for continuous monitoring applications was implemented I(nA) dissolved oxygen (%)

8 3D MICRO MIXERS IN LTCC 3D Serpentine Micromixers can be used for chemical Microreactors in order to fabricate emulsions, particle packaging and nanomaterial fabrication 10 mm

9 LAB ON A PACKAGE APPLICATION TO ANALYTICAL PROCEDURES LTCC Device Led FT PCL 812 A/D Salidas D/A OUTPUT digitales Puerto serie Ordenes CONTROL y respuestas

10 HEAVY METAL DETECTION Among several electroanalytical methods, differential pulse anodic stripping voltammetry (DPASV) and square-wave anodic stripping voltammetry (SWASV) are candidates for this application due to theirs inherent characteristics of pre-concentration, achieving part-per-billion sensitivity. Gold is a chosen material for the detection electrode due its sharp and high stripping peaks.

11 FIA MANIFOLD WITH SENSOR ELECTRODES Inlets Fluid Merging Passive Mixer Nozzle Measuring Cavity Sensor Array Fluid Outlet

12 LAB ON A PACKAGE APPLICATIONS CHLORIDE ION WITH POTENTIOMETRIC DETECTION Cable Disc Ag 2 S/AgCl ppm Sample Cl- (ppm) CE Cl- (ppm) LTCC (n=3, 95%) ppm 20ppm 40ppm 50ppm S ±2 Peak height (mv) Potential (mv) 80ppm ppm 200ppm ppm 500ppm Time (s) S2 S3 S4 S5 S ±0.8 17±2 26±2 31.2± ± [Cl - ] (ppm) Paired t test Linear regression LTCC vs CE t cal =1.065, t tab =2.571 t cal <t tab Interception:3±3 Slope:0.99±0.01 r 2 = Grupo de Sensores y Biosensores Universidad Autónoma de Barcelona (GSB) No No

13 ION PHOSPHATE ANALYZER WITH POTENTIOMETRIC DETECCION Cable f 4 f1 f3 f2 a b c f d 6cm e g h Cobalt disc 3cm Radiografía RX Grupo de Sensores y Biosensores Universidad Autónoma de Barcelona (GSB)

14 ION PHOSPHATE ANALYZER WITH POTENTIOMETRIC DETECCION Potencial (mv) Temps (min) 0.2ppm 0.5ppm 1ppm 2ppm 4ppm 8ppm 10ppm 15ppm 20ppm Potencial (mv) [H 2 PO 4 - ] (ppm) Cali1: E= log(x+1.974); LD=1.57 ppm Cali2: E= log(x+1.925); LD=1.78 ppm Cali3: E= log(x+1.615); LD=1.65 ppm Cali4: E= log(x+1.779); LD=1.62 ppm Carrier [KHP]=0.025M Sample Volumen: ml Flow: KHP: 1.6ml/min; Sample: 1.2ml/min LOD : 1.8±0.3ppm Grupo de Sensores y Biosensores Universidad Autónoma de Barcelona (GSB)

15 NITRITE ION ANALYZER WITH COLORIMETRIC DETECTION LTCC Device Lab on a Package Optic Window RX 0,6 0, Abs= [NITRITE] Absorbance 0,4 0,3 0,2 0,1 0,0-0, Time (s) 0.1ppm 0.5ppm 1ppm 2ppm 5ppm 7ppm 10ppm ABSORBANCIA Q=5.83µl/s Vol. sample & reactant =29µl Range ppm r 2 = [NO 2- ] (ppm) Grupo de Sensores y Biosensores Universidad Autónoma de Barcelona (GSB)

16 ION AMMONIUM ANALYZER WITH POTENTIOMETRIC DETECCION TOTAL: 15 CAPAS Conectores: 3 Entrada: 3 Canal superior: 2 Conexión canales: 3 Canal inferior: 2 Base: 2 MIXER Grupo de Sensores y Biosensores Universidad Autónoma de Barcelona (GSB)

17 ION AMMONIUM ANALYZER WITH POTENTIOMETRIC DETECCION E= log([nh4+]+1.044) 80 E= log([nh + 4 ]+1.044) r 2 = Mostra Aigua NaOH Waste Alçada de pic (mv) [NH 4 +] (ppm) ESI REF Waste TRIS OPTIMIZED PARAMETRES: Accumulation time: 2min LOD=1.044ppm TRIS: 0.01M NaOH: 0.1M PVC NH 3 PVDF PVC NH OH - Grupo de Sensores y Biosensores Universidad Autónoma de Barcelona (GSB)