( KS A 3014-91 ) (1), standard reference conditions for gases 0, 101325 Pa (1 =760mmHg ), vacuum, low ( rough ) vacuum 100Pa, medium vacuum 100 01 Pa, high vacuum 01 10 5 Pa, ultra high vacuum ( UHV ) 10 5 10 8 Pa, extreme ultrahigh vacuum ( XHV ) 10 8, pressure, : p, P, Pa pascal Pa, 1 Pa = 1 N m - 2, Torr 1 (101325 Pa ) 760 1 1 Torr = 133322 Pa, partial pressure : i p i, : Pa, total pressure : p, P, Pa, gas, :,,,, (2000 )p16, non- condensable gas, vapour, vapor (USA), saturation vapour pressure P L, Pa, degree of saturation,, saturated vapour,, unsaturated vapour, number density of molecules :n, m -3, mean free path ( ) (,,,,, ), :,l, : m, collision rate :, : s -1, volume collision rate, :, : m -3 s -1 pv, quantity of gas : Pa m 3, diffusion ( ), diffusion coefficient, diffusivity : D, : m 2 s -1, viscous flow, Poissuille flpw ( ), Reynolds number, (, ),,, molecular flow
( ), Knudsen number, (, ), intermediate flow, molecular effusion,, thermal transpiration 2,, molecule flow rate, molecule flux : q N, :s -1, molecule flow rate density : m -2 s -1 ( ), throughput pv : Q, : Pa m 3 s -1, mass flow rate : Q m, : kg s -1, volume flow rate : Q v, : m 3 s -1, molar flow rate : Q, : mol s -1, Maxwellian velocity distribution,, transmission probability, Clausing factor, conductance, 2, : C, U, G, : m 3 s -1, absorption, (absorbate), (absorbent), adsorption ( ) ( ), physical adsorption, physisorption, chemical adsorption, chemisorption, sorption ( ) ( ) 2,, accommodation coefficient :, impingement rate :,, : m -2 s -1, impingement rate, condensation rate,, condensation coefficient : c, sticking rate, sticking probability : s ( ), ( ), residence time :, : s, migration, desorption, outgassing, degassing, evaporation rate, outgassing or desorption or degassing rate pv : q d, : p a m s -1, m -2 s -1, permeation,,,
(2), vacuum pump, positive displacement pump,,, 2, piston vacuum pump, liquid ring vacuum pump ( ), oil-sealed rotary vacuum pump,,, sliding vane rotary vacuum pump 2,,,, ( ), rotary piston vacuum pump ( ),, ( ),,, rotary plunger vacuum pump,,, ( ), Roots vacuum pump ( ), gas ballast (vacuum) pump ( ), dry-sealed vacuum pump, kinetic vacuum pump 2 ( ), turbine vacuum pump, molecular drag pump, turbo molecular pump ( ), ejector vacuum pump ( ), liquid jet vacuum pump
( ) ( ), gas jet vacuum pump ( ) ( ), vapour jet vacuum pump (, ), diffusion pump,, diffusion ejector pump, fractionating diffusion pump,, self purifying diffusion pump ( ), vapour pump, entrapment vacuum pump ( ), adsorption pump (, ), getter pump (, ), sublimation pump, ( ), getter ion pump,,, evaporation ion pump,, sputter ion pump, cryopump, cryosorption pump ( ), pump case, inlet, outlet,, blade, vane, discharge valve, vacuum pump oil,,, pump fluid, nozzle, nozzle throat, nozzle clearance, nozzle clearance area, jet, diffuser, ( ), diffuser throat,, vapour tube, vapour pipe, nozzle assembly, trap,, cold trap, sorption trap, baffle
, oil separator, oil purifier, main pump, backing vacuum pump, roughing vacuum pump, holding vacuum pump,, high vacuum pump, rough(or low) vacuum pump ( ), booster vacuum pump, appendage vacuum pump, throughput of a vacuum pump : S, : m 3 s -1, pumping speed, volume flow rate of a vacuum pump : S, : m 3 s -1, inlet pressure, maximum working pressure, backing pressure : P b,:, : Pa, critical backing pressure : P bc, : Pa, starting pressure, ultimate pressure of a pump : P u, : Pa, compression ratio, back diffusion of gas, back streaming, back migration (3), pressure gauge,, vacuum gauge,,,, gauge head ( ), nude gauge, gauge control unit, absolute vacuum gauge, differential vacuum gauge
, total pressure vacuum gauge, partial pressure vacuum gauge, partial pressure analyzer,, sensitivity, relative sensitivity factor,: ( ), ionization gauge coefficient : K, : Pa -1 ( ), equivalent nitrogen pressure X, X ray limit, liquid level manometer U, U tube manometer U, elastic element gauge (, ), diaphragm gauge, Bourdon gauge, compression gauge,, Mcleod gauge, viscosity gauge, thermal conductivity gauge, Pirani gauge, thermister gauge, Knudsen gauge 2, ionization vacuum gauge,, cold cathode ionization gauge, Penning gauge, cold cathode magnetron gauge, discharge tube indicator,, hot cathode ionization gauge 3, triode ionization gauge 3 - (B-A), Bayard Alpert gauge X, modulator gauge -, extractor gauge X, suppressor gauge
2 X, bent beam gauge, hot cathode magnetron gauge, radio frequency mass spectrometer 4 (4 ), quadrupole mass spectrometer 4, magnetic deflection mass spectrometer, trochoidal focusing mass spectrometer, omegatron mass spectrometer, time of flight mass spectrometer