Nanotube AFM Probe Resolution

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Influence of Elastic Deformation on Single-Wall Carbon Nanotube AFM Probe Resolution Ian R. Shapiro, Santiago D. Solares, Maria J. Esplandiu, Lawrence A. Wade, William A. Goddard,* and C. Patrick Collier* Supporting Information Tables of force field parameters: TABLE 1: Force Field Energy Expression Total Energy E = E bond stretch + E angle bend + E torsion + E stretch-bend-stretch + E stretch-stretch + E van der Waals * Bond Stretch Energy Type Harmonic Bond Stretch Energy Type Morse E = D o e E = 1 α ( R Ro ) ( 1) K ( R b R o ) where α = K b D o 1

Angle Bend Energy Theta Harmonic Angle Bend Energy Cosine Harmonic Torsion Energy Dihedral E = E = 1 Sin 1 K θ ( θ θ ) K ( ) θ Cosθ Cosθ o θ o 1 E = Kt[1 dtcos( ntφ )] o Stretch-Bend-Stretch Energy E = ( Cosθ Cosθo)[ Cij ( Rij Rijo) + C jk ( Rjk Rjko)] R-Cosine Stretch-Stretch Energy E = Kss ( Rij Rijo)( Rjk Rjko) R-R γ R Van der Waals Energy ( 1) Ro Morse E D ( χ χ) where χ = e = o Van der Waals Energy Lennard-Jones 6-1 Ro E = Do (( ) R 1 Ro ( ) R 6 ) * The present study did not consider charged samples or probes; hence the energy expression does not include electrostatic energy terms. TABLE : Force Field Atom Types H_ H A C_3 C_G O_3 Si0 SiS SiOH SiH Non-acid hydrogen Acid hydrogen SP 3 carbon SP graphite carbon SP 3 oxygen Bulk silicon Surface silicon Surface silicon connected to OH group Surface silicon connected to H_

TABLE 3: Harmonic Bond Stretch Parameters Atom 1 Atom K b R o SiOH O_3 700.0000 1.870 O_3 H A 00.0000 1.0000 C_3 H_ 66.6080 1.1094 C_3 C_3 699.90 1.140 C_G H_ 700.0000 1.000 C_G C_3 739.8881 1.4860 H_ H_ 700.0000 0.700 TABLE 4: Morse Bond Stretch Parameters Atom 1 Atom K b R o D o SiOH H_ 38.3870 1.4830 9.6000 SiH H_ 38.3870 1.4830 9.6000 Si0 Si0 193.0936.3810 73.7000 SiOH Si0 193.0936.3810 73.7000 SiH Si0 40.0660.3810 73.7000 SiOH SiOH 193.0936.3810 73.7000 SiH SiH 193.0936.3810 73.7000 C_G C_G 70.0000 1.4114 133.0000 SiS Si0 193.0936.3810 73.7000 SiS SiS 193.0936.3810 73.7000 3

TABLE : Angle Bend Parameters Atom 1 Atom Atom 3 Type K θ θ o C_G C_G C_G Cosine harmonic 196.1300 10.0000 C_G C_G C_3 Cosine harmonic 196.1300 10.0000 C_3 C_G C_3 Cosine harmonic 188.441 10.0000 C_G C_3 C_G Cosine harmonic 0.46 109.4710 C_3 C_3 C_3 Cosine harmonic 14.06 109.4710 C_3 C_G H_ Cosine harmonic 98.7841 10.0000 Si0 SiH H_ Cosine harmonic 4.00 11.1400 Si0 Si0 Si0 Cosine harmonic 31.68 10.0467 C_3 C_3 H_ Cosine harmonic 117.31 109.4710 C_G C_3 H_ Cosine harmonic 11.681 109.4710 C_G C_3 C_3 Cosine harmonic 0.46 109.4710 C_G C_G H_ Cosine harmonic 103.168 10.0000 Any O_3 Any Theta harmonic 100.0000 104.100 H_ SiOH H_ Cosine harmonic 8.60 110.930 Si0 SiOH O_3 Cosine harmonic 10.749 109.4710 SiOH SiOH Si0 Cosine harmonic 31.68 10.0467 SiOH Si0 Si0 Cosine harmonic 31.68 10.0467 SiOH Si0 SiOH Cosine harmonic 31.68 10.0467 SiH SiH Si0 Cosine harmonic 31.68 10.0467 Si0 SiH Si0 Cosine harmonic 31.68 10.0467 SiH Si0 SiH Cosine harmonic 31.68 10.0467 SiS Si0 Si0 Cosine harmonic 31.68 10.0467 SiS Si0 SiS Cosine harmonic 31.68 10.0467 Si0 SiOH Si0 Cosine harmonic 31.68 10.0467 SiOH SiOH O_3 Cosine harmonic 10.749 109.4710 SiH SiH H_ Cosine harmonic 4.00 11.1400 4

Si0 SiS Si0 Cosine harmonic 31.68 10.0467 SiS SiS Si0 Cosine harmonic 31.68 10.0467 O_3 SiOH H_ Cosine harmonic 7.639 109.4710 TABLE 6: Torsion Parameters Atom 1 Atom Atom 3 Atom 4 K t n t d t C_G C_G C_G C_G 8.100.0000 1.0000 Any C_G C_G Any 100.0000.0000 1.0000 Any C_G C_3 Any.0000 3.0000-1.0000 Any C_3 C_3 Any.0000 3.0000-1.0000 Any SiOH O_3 Any.0000 3.0000-1.0000 TABLE 7: Stretch-Bend-Stretch Parameters Atom 1 Atom Atom 3 Rij Rjk θ o C ij C jk Si0 Si0 Si0.3810.3810 109.471-14.8184-14.8184 TABLE 8: Stretch-Stretch Parameters Atom 1 Atom Atom 3 K ss Rij o Rjk o Si0 Si0 Si0 3.6001.3810.3810 TABLE 9: van der Waals Parameters Atom 1 Atom Type D o R o γ H_ H_ Morse 0.01814 3.6979 10.70940

H A H A LJ 6-1 0.000099 3.19499 N/A C_3 C_3 LJ 6-1 0.146699 3.98300 N/A C_G C_G Morse 0.098999 3.993999 10.96300 O_3 O_3 LJ 6-1 0.09700 3.40499 N/A Si0 Si0 LJ 6-1 0.310000 4.69999 N/A SiS SiS LJ 6-1 0.310000 4.69999 N/A SiOH SiOH LJ 6-1 0.310000 4.69999 N/A SiH SiH LJ 6-1 0.310000 4.69999 N/A C_G H_ Morse 0.034710 3.744610 1.614 SiOH C_G LJ 6-1 0.17186 4.13000 N/A Si0 C_G LJ 6-1 0.17186 4.13000 N/A SiH C_G LJ 6-1 0.17186 4.13000 N/A SiS C_G LJ 6-1 0.17186 4.13000 N/A O_3 C_G LJ 6-1 0.097336 3.69999 N/A The original parameters used to create these force fields were developed in the Materials and Process Simulation Center (California Institute of Technology). 1,,3 Additional parameters were added to study mixed systems (containing silicon, graphitic systems, oxygen and hydrogen) by applying arithmetic and/or geometric combination rules to existing parameters, by quantum mechanics calculations conducted by Weiqiao Deng, Richard Muller and William A. Goddard III or by using generic terms from the Dreiding force field. 4 6

Energy-position and force-position curves from MD simulations: Scan Points 1 and 11 Scan Points 1 and 11 000 4000 3000-1.0 0.0 1.0.0 3 1-1 - 0 1 3 4 47000 Scan Point 4000 3 1 Scan Point -1-0 1 3 4 47000 4000 Scan Point 3 3 1 Scan Point 3-1 - 0 1 3 4 Scan Point 4 Scan Point 4 47000 4000 3 1-1 - 0 1 3 4 7

48000 47000 4000 Scan Point Tip Position,nm 3 1 Scan Point -1-0 1 3 4 0000 48000 44000 Energy Vs. Tip Postion Scan Point 6 40 30 0 10 Scan Point 6 0-1.0 0.0-10 1.0.0 3.0 4.0 1000 48000 4000 Scan Point 7 3 0 - -40 Scan Point 7-1 -10 0 1 3 4 Tip Position,nm 0000 48000 44000 Energy Vs. Tip Postion Scan Point 8 Scan Point 8 4 30 1 0-1 -1 0 1 3 4-30 -4 8

47000 4000 Energy Vs. Tip Postion Scan Point 9 40 30 0 10 Scan Point 9 0-1 -10 0 1 3 4 47000 4000 Scan Point 10 3 1 Scan Point 10-1 - 0 1 3 4 Figure S-1: Energy-distance and force-distance profiles generated for various probe positions, corresponding to the scan points in figure of the manuscript. Effect of thermal vibrations: The tip-sample potentials and the corresponding force curves were constructed at zero kelvin to minimize the cost of the simulations. However, thermal vibration calculations at 300 K show that the potentials would not be significantly different at room temperature. The additional thermal energy would have the effect of lowering the energy barriers that the system needs to overcome in order for the probe to slip off the sample. This is only relevant for scan points 6, 7 and 8, for which the probe did not slip at the tip-sample forces present during tapping mode imaging. Only at much higher forces (~30 nn) did the probe slip off the sample nanotube at these points. The force and energy curves presented here show that the energy requirement to cause these points to slip is the same as that required to longitudinally compress the probe by one full nm, which is much greater than the available thermal energy. Our calculations show that the maximum horizontal displacement of any atom on the tip of the probe at 300 K is below 0.09 nm (less than 1.8% of the probe width), which would not significantly 9

change the relative position of probe and sample. The amplitude of the vertical vibrations is less than 0.0 nm. Characterization of SWNT deformation modes: Figure S-: Degree of probe bending shown for two extreme cases: scan point, the point on the scan where the.4 nm diameter probe nanotube first comes into contact with the sample nanotube, and scan point, the last point for which slipping occurred during the imaging simulation. The probe images have been rotated from their original tilted position to illustrate the amount of bending that the probe undergoes. The local deformation of the tip is also shown in the bottom pictures. The images show that both bending and local deformation contributes significantly to the reduction in the probe s effective resolution for this SWNT diameter. 10

Slipping of smaller SWNT probes:. nm diameter, 0 nm in length: Figure S-3: The images from the simulation with the. nm diameter probe show that slipping also occurs for smaller probes, although it is primarily due to bending and not to local deformation, due to the higher radial stiffness for the thinner SWNT probes. In order to slip, the probe needed to displace laterally a distance of approximately 0. nm (% of the sample diameter). Force Curve for. nm Diameter SWNT Probe on. SWNT Sample 0. 0.0 0.0 0. 1.0 1..0. 3.0 3. 4.0-0. -1.0-1. Tip Position Above the Surface, nm Figure S-4: Force curve for the. nm SNWT probe. The dashed circle shows the region where slipping occurs. As the graph shows, there is no significant force opposing the slipping motion of the probe. The negative peak in the force is due to snap-to-contact as the probe first approaches the sample. 11

Illustration of reversibility in SWNT probe-sample interaction: Figure S-: Sequential images illustrating the reversible elastic nature of the deformation phenomenon. The top image on the left corresponds to the SWNT tip and sample before contact for scan point 6. The second image corresponds to the tip compressing the SWNT with a force of 33 nn (approximately twice the maximum tip-sample force observed during imaging). Images 3-6 correspond to intermediate geometry relaxation steps of the probe and sample after the probe has retracted. Note that the time required for geometry relaxation is on the order of 0 ps, one order of magnitude smaller than the integration time step used for AFM dynamics simulations (0.1 ns). This guarantees that the probe and sample are able to relax before the tip impacts the sample a second time. 1

References: 1. Musgrave, C.B., 199. PhD Dissertation Thesis: "Molecular Mechanics and ab Initio Simulations of Silicon (111) Surface Reconstructions, Semiconductors and Semiconductor Superlattices, H Abstraction Tool for Nanotechnology, Polysilanes, and Growth of CVD Diamond" California Institute of Technology.. Guo, Y.J. 199. PhD Dissertation Thesis: "Molecular Simulations of Buckyball Fullerenes. Quantum Chemistry Studies on High Tc Superconductors" California Institute of Technology. 3. Guo, Y.J.; Karasawan N.; Goddard W.A. III. Nature, 1991, 31, 636. 4. Mayo, S.; Olafson, B.; Goddard, W. A. III. J. Phys. Chem. 1990, 94, 8897. 13