Characteristics and classification of plasmas

Size: px
Start display at page:

Download "Characteristics and classification of plasmas"

Transcription

1 Characteristics and classification of plasmas PlasTEP trainings course and Summer school 2011 Warsaw/Szczecin Indrek Jõgi, University of Tartu Partfinanced by the European Union (European Regional Development Fund

2 Outline of the talk Introduction Characterization classification 1

3 Plasma and environment Environmental plasma Ionized gas with low temperatures but high electron energies Large amount of active species are produced radicals: O, OH, N etc. phenol CO 2 and H 2 O Other organic and inorganic species are neutralised similarly At some cost of energy 2

4 Plasma in the Universe Everything was plasma at the beginning of the Universe 95 or 99 % 3

5 Artificial plasma 4

6 Various plasma sources Different ways to generate plasma Corona discharge Dielectric barrier discharge Plasma torches Microwave plasmas Hollow cathode discharge Electron beams 5

7 Plasma: 4th state of the matter Solid 120 K Liquid Temperature Energy 0,01 ev 10 5 K 10eV 10 4 K 1eV Plasma 0,1 ev Gas 1200 K 10 3 K 0.1 ev 10 2 K 0.01 ev K 110 ev k B E = e0 T E = T/

8 Plasma: role of charge carriers F L = e 0 ( Ev B ) Occurrence of electrical conductivity Screening of electric fields Occurence of a multitude of oscillation and waves (Langmuir oscillations, ion acoustic oscillations, cyclotron oscillations, drift waves, surface waves etc.) Interaction with magnetic fields Formation of characteristic boundary sheaths due to the contact of plasmas with solid surfaces 7

9 Plasma: definition Neutral particles in gas interact only during collisions while charged particles in plasma interact through longrange forces Quasineutral gas of charged particles that exhibits collective behaviour How many charges do we need? Main criterias: Charged particles are close enough to affect large number of other particles Debye screening length is short compared to the dimensions of plasma itself. Plasmas are quasineutral Electron plasma frequency (plasma oscillations) is large compared to electron neutral collision frequency 8

10 Plasma: characteristics Neutrality and ionization degree Debye length, plasma frequency and plasma parameter Larmor radius and cyclotron frequency Conductivity Crosssections and mean free path Electron energy distribution 9

11 Ideal gas For ideal gas in thermal equilibrium the probability that velocity lays in the range dvaround velocity vis proportional to Maxwellian distribution: Rms. speed Average kinetic energy per particle electron at 300K: 10 5 m/s nitrogen at 300K: 500 m/s e 0= C m e = kg m p = kg k B = J/K ε 0 = F/m c= m/s 0.04 ev at 300K while 1.3 ev at 10 4 K Pressure is a measure of the density in thermal energy associated with the number of gas atoms per unit volume 10

12 Ionization degree All neutrals in a volume do not have to be ionized to obtain plasma Ionization degree the relative amount of charged particles in the total gas i = n e n 0 n e In atmosphere n cm 3 n i 110 cm 3 Collisions with neutrals vs. the collective charge effects Environmental plasmas collisions dominate plasma density n e i In environmental plasmas n i to cm 3 i

13 Plasma neutrality Neutral particle Sphere of influence Charged particle Q Q/r In most cases, the number of positive and negative charges will be roughly equal Quasineutral These charged particles will strongly intract with each other in plasma Collective motions Nonneutral plasmas: Ebeams, some magnetized plasmas 12

14 Debye length When there is charge imbalance in the plasma, it s influence will be neutralised in short distance E = e 0 (n i n e ) V m In plasma the influence decays faster than in neutral gas 1/r vs. exp(r/λ D ) 2 0 Debye Coulomb Space charge Debye length λ D = ε 0 k B T e e 02 n e In practical units: k B T e [ev], n e [cm 3 ] electron temperature electron density k λ D = 740 B T e cm n e 1 r/λ D 13

15 Debye length Inside the sphere defined by Debye length, one can observe charge imbalance while in larger sphere the charges are neutral Debye length k λ D = 740 B T e cm n e k B T e =4 ev n e =10 12 cm 3 λ D =14.8 µm k B T e =10 ev n e =10 15 cm 3 λ D =0.74 µm Debye screening length is short compared to the dimensions of plasma itself. Plasmas are quasineutral Electric field does not penetrate the plasma 14

16 Plasma parameter Charged particles are close enough to affect large number of other particles Plasma parameter inverse value of the number of charged particles inside the Debye sphere g = 1/N D λ D N D = n 4 πλ 3 D 3 k B T e n e N D T 3 n g<1 ideal plasma g>1 nonideal plasma 15

17 Plasma frequency When charges with opposite signs are slightly moved in plasma, there will be restoring force moving it back and the charges will oscillate with a certain frequency E Plasma frequency f 2 p = 1/2π e 02 n ε 0 m charge density mass of charges Electron mass smaller and thus they respond faster defining the plasma frequency f p = 1/2π e 02 n e ε 0 m e f p = 8980 n e Hz f p GHz 16

18 Plasma frequency Responsible for longitudinal electrical oscillations These oscillations are collisionless differently from acoustic waves where collisions between particles are necessary Determines the cut off frequency for electric fields to penetrate the plasma Determines one condition for the ideal plasma to occur When f c is the collision frequency f p GHz f p >> f c f c MHz to 100 GHz Electron plasma frequency (plasma oscillations) is large compared to electron neutral collision frequency 17

19 Larmor radius and cyclotron frequency Moving charge will experience Lorentz force in magnetic induction B v F L = e 0 v B F L It will start to move in circular motion perpenticularly to magnetic field Moving in parallel to magnetic field is not affected Composite motion is a helical spiral motion along the lines of magnetic induction Cyclotron frequency ω L = e 0B m Larmor radius r L = mv e 0 B 18

20 Larmor radius and cyclotron frequency Oppositely charged particles move along opposite direction v B v r L = mv e 0 B Radius is smaller for electrons ω L = e 0B m Cyclotron frequency is larger for electrons Magnetic field penertates the plasma Cyclotron frequency has to be larger than collision frequency for plasma to be magnetized E B Drift velocity v E = B 2 19

21 Electrical conductivity Action of electrical field E forces free electrons and ions of the plasma to gain drift velocities and generate an electric current E j = e 0 ( n e v e n i v i )= e 0 ( n e µ e n i µ i ) E Usually electrons determine the currents and µ e >>µ i n e n i Electrical conductivity σ = e 0 n e µ e σ = e 0 n e τ e /m e τ e mean free time of flight Weakly ionized plasmas τ e is independent on n e σ n e Fully ionized plasmas τ e 1/n e σ is not a function of n e 20

22 Ambipolar diffusion Diffusion will result in the expandsion of plasma Diffusion of electrons faster due to higher speed and smaller mass n Γ e = nµ e E D e n Γ i = nµ i E D i n electron flux ion flux ions Electric field due to different flux will counteract electron diffusion E E electrons x D a = µ i D e µ e D e µ i µ e n ambipolar diffusion The diffusion will be controlled by the inertia of ion collisions but increased by electron temperature There will be slightly more electrons at the boundary of plasma and more positive ions in the bulk of the plasma 21

23 Plasma sheaths Larger loss of charges at the boundaries with electrodes or other surfaces Electrons losses higher Positive charge in sheath Surface obtains negative potential in respect to plasma V E Electric field will prevent electrons to escape the plasma and will accelerate the ions Sheath thickness will be roughly 4λ D without applied voltage and potential drop in the range of kt e /e 0 Applying external voltage will change the thickness of plasma sheath 22

24 Formation of plasma Ionization Recombination Attachment Charge extraction from walls Diffusion to walls ionization has to balance the loss mechanisms Ionization e on O 2 Collisions by electrons, ions and neutrals photoionization There is certain threshold energy for ionization: U i 23

25 Formation of plasma Ionization at high temperatures Thermal energy of heavy particles becomes large enough for ionization Saha equation n i exp( ) n n i T T 3/2 n n U i Ionization by electric fields Electric field accelerates charges and when they gain sufficient energy they will ionize the neutrals Most of environmental plasmas produced in this way Electrons mostly doing the work 24

26 Collisions Elastic collisions m Momentum is redistributed total kinetic energy is conserved Light particles, electrons, can not loose much of the energy M Redistributed energy < 2m M Inelastic collisions Momentum is redistributed Total kinetic energy transferred to internal energy Energy is lost for ionization, dissocitiation or excitation m M e A A 2e e A A * e e AB A B e Penning effect: excited atom or molecule has enough energy to ionize or dissociate another atom or molecule 25

27 Collision crosssections By the simplest approach the particles are treated as hard spheres without charge z x y Each atom presents a cross sectionobscuring electrons path σ=πr 2 volume xyz Number of target atoms is n xyz y x Viewed from the side of xy there is a distance λwhere the face xy is totally blocked by other particles: mean free path λ = 1/nσ around 0.1 µm at atmospheric pressures Collision frequency ν c = vnσ around Hz at v ~ 10 5 m/s and atmospheric pressures In reality the particles not simple spheres and one has to take into account charge effects and the energy of the particles 26

28 Collision crosssections The probability for collisions depends on electron energy Inelastic collisions have certain thershold ionization (above 10 ev) excitation (about ev) dissociation (about 110 ev) Cross sections decrease at higher energies Ar At high speed of electrons the time for interactions decreases The rate of ionizations, dissociations and excitations by electrons depend on electron energy which has a distribution 27

29 Electron energydistribution In environmental plasmas, electrons are carrying most of the energy and are main agents in the ionization, dissociation and exitation processes These processes depend strongly on electron energy distribution Maxwellian and Druyvesteyn Calculated Electron energy distribution becomes in equilibrium in timescales of 10 9 s 28

30 Nonequilibrium plasma Electron energy and average speed much higher than ions and neutrals Average electron energy 1 ev and average speed 10 6 m/s Average energy of surrounding gas ev and average speed 1000 m/s Ionization, excitation and dissociation frequency can be obtained by integrating over energy distribution and cross sections Gas energy Electron energy Crosssection rate is additionally proportional to n e Energy not used in reactions is eventually lost Optimization of both the electron density and energy ev 29

31 Plasmachemistry The species with high energy have higher activity and shorter lifetime Plasma physics Plasma chemistry Electron energy distribution Ionization Dissociation Excitation Attachmenty Time, s Ion reactions Reactions of active species Radical reactions Diffusion Usually radical reactions in timescales of 10 6 to 10 s are most important in respect to removal of hazardous gases 30

32 Plasma: Classification Temperature low temperature plasmas (less than 2000K) high temperature plasmas (above 2000K) Thermodynamic equilibrium nonthermal or nonequilibrium plasmas T e >>T i T g thermal or equilibrium plasmas T e T i T g Pressure lowpressure plasmas <1 Pa moderate pressure plasmas 100 Pa atmospheric pressure plasmas Ionization degree weakly ionized plasmas fully ionized plasmas 1 Frequency DC discharge pulsed DC (khz) RF discharge (MHz) Microwave discharge (GHz) Neutrality Magnetization magnetic plasmas nonmagnetic plasmas Dusty plasmas neutral nonneutral 31

33 Plasma: Classification Most often classified by electron temperature and plasma density 7 orders of magnitude by electron temperature 16 orders of magnitude by plasma density Environmental plasmas Electron temperature 110 ev Plasma density cm 3 32

Fundamentals of Plasma Physics

Fundamentals of Plasma Physics Fundamentals of Plasma Physics Definition of Plasma: A gas with an ionized fraction (n i + + e ). Depending on density, E and B fields, there can be many regimes. Collisions and the Mean Free Path (mfp)

More information

Physique des plasmas radiofréquence Pascal Chabert

Physique des plasmas radiofréquence Pascal Chabert Physique des plasmas radiofréquence Pascal Chabert LPP, Ecole Polytechnique pascal.chabert@lpp.polytechnique.fr Planning trois cours : Lundi 30 Janvier: Rappels de physique des plasmas froids Lundi 6 Février:

More information

Matti Laan Gas Discharge Laboratory University of Tartu ESTONIA

Matti Laan Gas Discharge Laboratory University of Tartu ESTONIA Matti Laan Gas Discharge Laboratory University of Tartu ESTONIA Outline 1. Ionisation 2. Plasma definition 3. Plasma properties 4. Plasma classification 5. Energy transfer in non-equilibrium plasma 6.

More information

PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING

PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING Second Edition MICHAEL A. LIEBERMAN ALLAN J, LICHTENBERG WILEY- INTERSCIENCE A JOHN WILEY & SONS, INC PUBLICATION CONTENTS PREFACE xrrii PREFACE

More information

Theory of Gas Discharge

Theory of Gas Discharge Boris M. Smirnov Theory of Gas Discharge Plasma l Springer Contents 1 Introduction 1 Part I Processes in Gas Discharge Plasma 2 Properties of Gas Discharge Plasma 13 2.1 Equilibria and Distributions of

More information

The ideal Maxwellian plasma

The ideal Maxwellian plasma The ideal Maxwellian plasma Dr. L. Conde Departamento de Física Aplicada. E.T.S. Ingenieros Aeronáuticos Universidad Politécnica de Madrid Plasmas are,... The plasma state of matter may be defined as a

More information

4 Modeling of a capacitive RF discharge

4 Modeling of a capacitive RF discharge 4 Modeling of a capacitive discharge 4.1 PIC MCC model for capacitive discharge Capacitive radio frequency () discharges are very popular, both in laboratory research for the production of low-temperature

More information

Electron temperature is the temperature that describes, through Maxwell's law, the kinetic energy distribution of the free electrons.

Electron temperature is the temperature that describes, through Maxwell's law, the kinetic energy distribution of the free electrons. 10.3.1.1 Excitation and radiation of spectra 10.3.1.1.1 Plasmas A plasma of the type occurring in spectrochemical radiation sources may be described as a gas which is at least partly ionized and contains

More information

Figure 1.1: Ionization and Recombination

Figure 1.1: Ionization and Recombination Chapter 1 Introduction 1.1 What is a Plasma? 1.1.1 An ionized gas A plasma is a gas in which an important fraction of the atoms is ionized, so that the electrons and ions are separately free. When does

More information

Collisions and transport phenomena

Collisions and transport phenomena Collisions and transport phenomena Collisions in partly and fully ionized plasmas Typical collision parameters Conductivity and transport coefficients Conductivity tensor Formation of the ionosphere and

More information

xkcd.com It IS about physics. It ALL is.

xkcd.com It IS about physics. It ALL is. xkcd.com It IS about physics. It ALL is. Introduction to Space Plasmas! The Plasma State What is a plasma? Basic plasma properties: Qualitative & Quantitative Examples of plasmas! Single particle motion

More information

Lectures on basic plasma physics: Introduction

Lectures on basic plasma physics: Introduction Lectures on basic plasma physics: Introduction Department of applied physics, Aalto University Compiled: January 13, 2016 Definition of a plasma Layout 1 Definition of a plasma 2 Basic plasma parameters

More information

Fundamentals of Plasma Physics Transport in weakly ionized plasmas

Fundamentals of Plasma Physics Transport in weakly ionized plasmas Fundamentals of Plasma Physics Transport in weakly ionized plasmas APPLAuSE Instituto Superior Técnico Instituto de Plasmas e Fusão Nuclear Luís L Alves (based on Vasco Guerra s original slides) 1 As perguntas

More information

Plasma collisions and conductivity

Plasma collisions and conductivity e ion conductivity Plasma collisions and conductivity Collisions in weakly and fully ionized plasmas Electric conductivity in non-magnetized and magnetized plasmas Collision frequencies In weakly ionized

More information

PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen

PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen HAN Qing ( ), WANG Jing ( ), ZHANG Lianzhu ( ) College of Physics Science and Information Engineering, Hebei Normal University,

More information

Chapter VI: Cold plasma generation

Chapter VI: Cold plasma generation Introduction This photo shows the electrical discharge inside a highpressure mercury vapor lamp (Philips HO 50) just after ignition (Hg + Ar) Chapter VI: Cold plasma generation Anode Positive column Cathode

More information

Diffusion during Plasma Formation

Diffusion during Plasma Formation Chapter 6 Diffusion during Plasma Formation Interesting processes occur in the plasma formation stage of the Basil discharge. This early stage has particular interest because the highest plasma densities

More information

3. Gas Detectors General introduction

3. Gas Detectors General introduction 3. Gas Detectors 3.1. General introduction principle ionizing particle creates primary and secondary charges via energy loss by ionization (Bethe Bloch, chapter 2) N0 electrons and ions charges drift in

More information

Lecture 2. Introduction to plasma physics. Dr. Ashutosh Sharma

Lecture 2. Introduction to plasma physics. Dr. Ashutosh Sharma Preparation of the concerned sectors for educational and R&D activities related to the Hungarian ELI project Ion acceleration in plasmas Lecture 2. Introduction to plasma physics Dr. Ashutosh Sharma Zoltán

More information

Low Temperature Plasma Technology Laboratory

Low Temperature Plasma Technology Laboratory Low Temperature Plasma Technology Laboratory CENTRAL PEAKING OF MAGNETIZED GAS DISCHARGES Francis F. Chen and Davide Curreli LTP-1210 Oct. 2012 Electrical Engineering Department Los Angeles, California

More information

xkcd.com It IS about physics. It ALL is.

xkcd.com It IS about physics. It ALL is. xkcd.com It IS about physics. It ALL is. Introduction to Space Plasmas The Plasma State What is a plasma? Basic plasma properties: Qualitative & Quantitative Examples of plasmas Single particle motion

More information

Huashun Zhang. Ion Sources. With 187 Figures and 26 Tables Э SCIENCE PRESS. Springer

Huashun Zhang. Ion Sources. With 187 Figures and 26 Tables Э SCIENCE PRESS. Springer Huashun Zhang Ion Sources With 187 Figures and 26 Tables Э SCIENCE PRESS Springer XI Contents 1 INTRODUCTION 1 1.1 Major Applications and Requirements 1 1.2 Performances and Research Subjects 1 1.3 Historical

More information

Introduction to Plasma Physics

Introduction to Plasma Physics Introduction to Plasma Physics Hartmut Zohm Max-Planck-Institut für Plasmaphysik 85748 Garching DPG Advanced Physics School The Physics of ITER Bad Honnef, 22.09.2014 A simplistic view on a Fusion Power

More information

PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma

PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma Kallol Bera a, Shahid Rauf a and Ken Collins a a Applied Materials, Inc. 974 E. Arques Ave., M/S 81517, Sunnyvale, CA 9485, USA

More information

PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma

PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma Kallol Bera a, Shahid Rauf a and Ken Collins a a Applied Materials, Inc. 974 E. Arques Ave., M/S 81517, Sunnyvale, CA 9485, USA

More information

Plasma Astrophysics Chapter 1: Basic Concepts of Plasma. Yosuke Mizuno Institute of Astronomy National Tsing-Hua University

Plasma Astrophysics Chapter 1: Basic Concepts of Plasma. Yosuke Mizuno Institute of Astronomy National Tsing-Hua University Plasma Astrophysics Chapter 1: Basic Concepts of Plasma Yosuke Mizuno Institute of Astronomy National Tsing-Hua University What is a Plasma? A plasma is a quasi-neutral gas consisting of positive and negative

More information

PLASMA: WHAT IT IS, HOW TO MAKE IT AND HOW TO HOLD IT. Felix I. Parra Rudolf Peierls Centre for Theoretical Physics, University of Oxford

PLASMA: WHAT IT IS, HOW TO MAKE IT AND HOW TO HOLD IT. Felix I. Parra Rudolf Peierls Centre for Theoretical Physics, University of Oxford 1 PLASMA: WHAT IT IS, HOW TO MAKE IT AND HOW TO HOLD IT Felix I. Parra Rudolf Peierls Centre for Theoretical Physics, University of Oxford 2 Overview Why do we need plasmas? For fusion, among other things

More information

Contents. 2. Fluids. 1. Introduction

Contents. 2. Fluids. 1. Introduction Contents 1. Introduction 2. Fluids 3. Physics of Microfluidic Systems 4. Microfabrication Technologies 5. Flow Control 6. Micropumps 7. Sensors 8. Ink-Jet Technology 9. Liquid Handling 10.Microarrays 11.Microreactors

More information

16.55 Ionized Gases Problem Set #5

16.55 Ionized Gases Problem Set #5 16.55 Ionized Gases Problem Set #5 Problem 1: A probe in a non-maxellian plasma The theory of cold probes, as explained in class, applies to plasmas with Maxwellian electron and ion distributions. However,

More information

Nonlinear Diffusion in Magnetized Discharges. Francis F. Chen. Electrical Engineering Department

Nonlinear Diffusion in Magnetized Discharges. Francis F. Chen. Electrical Engineering Department Nonlinear Diffusion in Magnetized Discharges Francis F. Chen Electrical Engineering Department PPG-1579 January, 1998 Revised April, 1998 Nonlinear Diffusion in Magnetized Discharges Francis F. Chen Electrical

More information

Plasma Spectroscopy Inferences from Line Emission

Plasma Spectroscopy Inferences from Line Emission Plasma Spectroscopy Inferences from Line Emission Ø From line λ, can determine element, ionization state, and energy levels involved Ø From line shape, can determine bulk and thermal velocity and often

More information

MODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES

MODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES MODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES Michael A. Lieberman University of California, Berkeley lieber@eecs.berkeley.edu DOE Center on Annual Meeting May 2015 Download this talk: http://www.eecs.berkeley.edu/~lieber

More information

Scattering in Cold- Cathode Discharges

Scattering in Cold- Cathode Discharges Simulating Electron Scattering in Cold- Cathode Discharges Alexander Khrabrov, Igor Kaganovich*, Vladimir I. Demidov**, George Petrov*** *Princeton Plasma Physics Laboratory ** Wright-Patterson Air Force

More information

Department of Aerospace Engineering and Engineering Mechanics, The University of Texas at Austin, Austin, Texas 78712, USA

Department of Aerospace Engineering and Engineering Mechanics, The University of Texas at Austin, Austin, Texas 78712, USA 1 MAGNETIZED DIRECT CURRENT MICRODISCHARGE, I: EFFECT OF THE GAS PRESSURE Dmitry Levko and Laxminarayan L. Raja Department of Aerospace Engineering and Engineering Mechanics, The University of Texas at

More information

DOE WEB SEMINAR,

DOE WEB SEMINAR, DOE WEB SEMINAR, 2013.03.29 Electron energy distribution function of the plasma in the presence of both capacitive field and inductive field : from electron heating to plasma processing control 1 mm PR

More information

Effect of Gas Flow Rate and Gas Composition in Ar/CH 4 Inductively Coupled Plasmas

Effect of Gas Flow Rate and Gas Composition in Ar/CH 4 Inductively Coupled Plasmas COMSOL CONFERENCE BOSTON 2011 Effect of Gas Flow Rate and Gas Composition in Ar/CH 4 Inductively Coupled Plasmas Keisoku Engineering System Co., Ltd., JAPAN Dr. Lizhu Tong October 14, 2011 1 Contents 1.

More information

Lecture 6 Plasmas. Chapters 10 &16 Wolf and Tauber. ECE611 / CHE611 Electronic Materials Processing Fall John Labram 1/68

Lecture 6 Plasmas. Chapters 10 &16 Wolf and Tauber. ECE611 / CHE611 Electronic Materials Processing Fall John Labram 1/68 Lecture 6 Plasmas Chapters 10 &16 Wolf and Tauber 1/68 Announcements Homework: Homework will be returned to you on Thursday (12 th October). Solutions will be also posted online on Thursday (12 th October)

More information

Physics and Modelling of a Negative Ion Source Prototype for the ITER Neutral Beam Injection

Physics and Modelling of a Negative Ion Source Prototype for the ITER Neutral Beam Injection 1 ITR/P1-37 Physics and Modelling of a Negative Ion Source Prototype for the ITER Neutral Beam Injection J.P. Boeuf a, G. Fubiani a, G. Hagelaar a, N. Kohen a, L. Pitchford a, P. Sarrailh a, and A. Simonin

More information

Mass Analyzers. Principles of the three most common types magnetic sector, quadrupole and time of flight - will be discussed herein.

Mass Analyzers. Principles of the three most common types magnetic sector, quadrupole and time of flight - will be discussed herein. Mass Analyzers After the production of ions in ion sources, the next critical step in mass spectrometry is to separate these gas phase ions according to their mass-to-charge ratio (m/z). Ions are extracted

More information

Ionization Detectors. Mostly Gaseous Detectors

Ionization Detectors. Mostly Gaseous Detectors Ionization Detectors Mostly Gaseous Detectors Introduction Ionization detectors were the first electrical devices developed for radiation detection During the first half of the century: 3 basic types of

More information

Inplane Microwave Plasma

Inplane Microwave Plasma Inplane Microwave Plasma Introduction Wave heated discharges may be very simple where a plane wave is guided into a reactor using a waveguide or very complicated as in the case with ECR (electron cyclotron

More information

PIC-MCC simulations for complex plasmas

PIC-MCC simulations for complex plasmas GRADUATE SUMMER INSTITUTE "Complex Plasmas August 4, 008 PIC-MCC simulations for complex plasmas Irina Schweigert Institute of Theoretical and Applied Mechanics, SB RAS, Novosibirsk Outline GRADUATE SUMMER

More information

Chapter 7 Plasma Basic

Chapter 7 Plasma Basic Chapter 7 Plasma Basic Hong Xiao, Ph. D. hxiao89@hotmail.com www2.austin.cc.tx.us/hongxiao/book.htm Hong Xiao, Ph. D. www2.austin.cc.tx.us/hongxiao/book.htm 1 Objectives List at least three IC processes

More information

Beams and magnetized plasmas

Beams and magnetized plasmas Beams and magnetized plasmas 1 Jean-Pierre BOEUF LAboratoire PLAsma et Conversion d Energie LAPLACE/ CNRS, Université Paul SABATIER, TOULOUSE Beams and magnetized plasmas 2 Outline Ion acceleration and

More information

Chapter 7. Plasma Basics

Chapter 7. Plasma Basics Chapter 7 Plasma Basics 2006/4/12 1 Objectives List at least three IC processes using plasma Name three important collisions in plasma Describe mean free path Explain how plasma enhance etch and CVD processes

More information

General Physics Contest 2010

General Physics Contest 2010 General Physics Contest 2010 May 22, 2010 (9:10-10:50), Total 6 pages Part I : Choice Questions (20 single-choice questions of 3% each. Use 2B pencil to mark the answer.) 1. A particle moving along the

More information

Plasma Modeling with COMSOL Multiphysics

Plasma Modeling with COMSOL Multiphysics Plasma Modeling with COMSOL Multiphysics Copyright 2014 COMSOL. Any of the images, text, and equations here may be copied and modified for your own internal use. All trademarks are the property of their

More information

Langmuir Probes as a Diagnostic to Study Plasma Parameter Dependancies, and Ion Acoustic Wave Propogation

Langmuir Probes as a Diagnostic to Study Plasma Parameter Dependancies, and Ion Acoustic Wave Propogation Langmuir Probes as a Diagnostic to Study Plasma Parameter Dependancies, and Ion Acoustic Wave Propogation Kent Lee, Dean Henze, Patrick Smith, and Janet Chao University of San Diego (Dated: May 1, 2013)

More information

Multi-fluid Simulation Models for Inductively Coupled Plasma Sources

Multi-fluid Simulation Models for Inductively Coupled Plasma Sources Multi-fluid Simulation Models for Inductively Coupled Plasma Sources Madhusudhan Kundrapu, Seth A. Veitzer, Peter H. Stoltz, Kristian R.C. Beckwith Tech-X Corporation, Boulder, CO, USA and Jonathan Smith

More information

Cluster fusion in a high magnetic field

Cluster fusion in a high magnetic field Santa Fe July 28, 2009 Cluster fusion in a high magnetic field Roger Bengtson, Boris Breizman Institute for Fusion Studies, Fusion Research Center The University of Texas at Austin In collaboration with:

More information

Development of a Hall Thruster Fully Kinetic Simulation Model Using Artificial Electron Mass

Development of a Hall Thruster Fully Kinetic Simulation Model Using Artificial Electron Mass Development of a Hall Thruster Fully Kinetic Simulation Model Using Artificial Electron Mass IEPC-013-178 Presented at the 33rd International Electric Propulsion Conference, The George Washington University

More information

Dynamics of ion-ion plasmas under radio frequency bias

Dynamics of ion-ion plasmas under radio frequency bias JOURNAL OF APPLIED PHYSICS VOLUME 90, NUMBER 3 1 AUGUST 2001 Dynamics of ion-ion plasmas under radio frequency bias Vikas Midha a) and Demetre J. Economou b) Plasma Processing Laboratory, Department of

More information

ADVENTURES IN TWO-DIMENSIONAL PARTICLE-IN-CELL SIMULATIONS OF ELECTRONEGATIVE DISCHARGES

ADVENTURES IN TWO-DIMENSIONAL PARTICLE-IN-CELL SIMULATIONS OF ELECTRONEGATIVE DISCHARGES ADVENTURES IN TWO-DIMENSIONAL PARTICLE-IN-CELL SIMULATIONS OF ELECTRONEGATIVE DISCHARGES PART 1: DOUBLE LAYERS IN A TWO REGION DISCHARGE E. Kawamura, A.J. Lichtenberg, M.A. Lieberman and J.P. Verboncoeur

More information

Lecture 10 Charge Carrier Mobility

Lecture 10 Charge Carrier Mobility Lecture 10 Charge Carrier Mobility Schroder: Chapter 8 1/64 Announcements Homework 2/6: Is online now. Due Today. I will return it next monday (7 th May). Midterm Exam: Friday May 4 th at 10:00am in STAG113

More information

MODERN PHYSICS OF PLASMAS (19 lectures)

MODERN PHYSICS OF PLASMAS (19 lectures) UNIT OF STUDY OUTLINE (PHYS 3021, 3921, 3024, 3924, 3025, 3925) MODERN PHYSICS OF PLASMAS (19 lectures) Course coordinator and principal lecturer: Dr Kostya (Ken) Ostrikov Lecturer (normal student stream,

More information

Lecture Note 1. 99% of the matter in the universe is in the plasma state. Solid -> liquid -> Gas -> Plasma (The fourth state of matter)

Lecture Note 1. 99% of the matter in the universe is in the plasma state. Solid -> liquid -> Gas -> Plasma (The fourth state of matter) Lecture Note 1 1.1 Plasma 99% of the matter in the universe is in the plasma state. Solid -> liquid -> Gas -> Plasma (The fourth state of matter) Recall: Concept of Temperature A gas in thermal equilibrium

More information

Numerical simulation of Vibrationally Active Ar-H2 Microwave Plasma

Numerical simulation of Vibrationally Active Ar-H2 Microwave Plasma Numerical simulation of Vibrationally Active Ar-H2 Microwave Plasma F. Bosi 1, M. Magarotto 2, P. de Carlo 2, M. Manente 2, F. Trezzolani 2, D. Pavarin 2, D. Melazzi 2, P. Alotto 1, R. Bertani 1 1 Department

More information

2/8/16 Dispersive Media, Lecture 5 - Thomas Johnson 1. Waves in plasmas. T. Johnson

2/8/16 Dispersive Media, Lecture 5 - Thomas Johnson 1. Waves in plasmas. T. Johnson 2/8/16 Dispersive Media, Lecture 5 - Thomas Johnson 1 Waves in plasmas T. Johnson Introduction to plasma physics Magneto-Hydro Dynamics, MHD Plasmas without magnetic fields Cold plasmas Transverse waves

More information

Lecture 6: High Voltage Gas Switches

Lecture 6: High Voltage Gas Switches Lecture 6: High Voltage Gas Switches Switching is a central problem in high voltage pulse generation. We need fast switches to generate pulses, but in our case, they must also hold off high voltages before

More information

Modélisation de sources plasma froid magnétisé

Modélisation de sources plasma froid magnétisé Modélisation de sources plasma froid magnétisé Gerjan Hagelaar Groupe de Recherche Energétique, Plasma & Hors Equilibre (GREPHE) Laboratoire Plasma et Conversion d Énergie (LAPLACE) Université Paul Sabatier,

More information

Ionization Detectors

Ionization Detectors Ionization Detectors Basic operation Charged particle passes through a gas (argon, air, ) and ionizes it Electrons and ions are collected by the detector anode and cathode Often there is secondary ionization

More information

Electron Current Extraction and Interaction of RF mdbd Arrays

Electron Current Extraction and Interaction of RF mdbd Arrays Electron Current Extraction and Interaction of RF mdbd Arrays Jun-Chieh Wang a), Napoleon Leoni b), Henryk Birecki b), Omer Gila b), and Mark J. Kushner a) a), Ann Arbor, MI 48109 USA mkush@umich.edu,

More information

Plasma based modification of thin films and nanoparticles. Johannes Berndt, GREMI,Orléans

Plasma based modification of thin films and nanoparticles. Johannes Berndt, GREMI,Orléans Plasma based modification of thin films and nanoparticles Johannes Berndt, GREMI,Orléans What is a plasma? A plasma is a ionized quasineutral gas! + electron electrons Neon bottle Ne atom Ne ion: Ne +

More information

Contents: 1) IEC and Helicon 2) What is HIIPER? 3) Analysis of Helicon 4) Coupling of the Helicon and the IEC 5) Conclusions 6) Acknowledgments

Contents: 1) IEC and Helicon 2) What is HIIPER? 3) Analysis of Helicon 4) Coupling of the Helicon and the IEC 5) Conclusions 6) Acknowledgments Contents: 1) IEC and Helicon 2) What is HIIPER? 3) Analysis of Helicon 4) Coupling of the Helicon and the IEC 5) Conclusions 6) Acknowledgments IEC:! IEC at UIUC modified into a space thruster.! IEC has

More information

ATOMS. Central field model (4 quantum numbers + Pauli exclusion) n = 1, 2, 3,... 0 l n 1 (0, 1, 2, 3 s, p, d, f) m l l, m s = ±1/2

ATOMS. Central field model (4 quantum numbers + Pauli exclusion) n = 1, 2, 3,... 0 l n 1 (0, 1, 2, 3 s, p, d, f) m l l, m s = ±1/2 ATOMS Central field model (4 quantum numbers + Pauli exclusion) n = 1, 2, 3,... 0 l n 1 (0, 1, 2, 3 s, p, d, f) m l l, m s = ±1/2 Spectroscopic notation: 2S+1 L J (Z 40) L is total orbital angular momentum

More information

CHAPTER 27. Continuum Emission Mechanisms

CHAPTER 27. Continuum Emission Mechanisms CHAPTER 27 Continuum Emission Mechanisms Continuum radiation is any radiation that forms a continuous spectrum and is not restricted to a narrow frequency range. In what follows we briefly describe five

More information

ESE 372 / Spring 2013 / Lecture 5 Metal Oxide Semiconductor Field Effect Transistor

ESE 372 / Spring 2013 / Lecture 5 Metal Oxide Semiconductor Field Effect Transistor Metal Oxide Semiconductor Field Effect Transistor V G V G 1 Metal Oxide Semiconductor Field Effect Transistor We will need to understand how this current flows through Si What is electric current? 2 Back

More information

Kinetic theory. Collective behaviour of large systems Statistical basis for the ideal gas equation Deviations from ideality

Kinetic theory. Collective behaviour of large systems Statistical basis for the ideal gas equation Deviations from ideality Kinetic theory Collective behaviour of large systems Statistical basis for the ideal gas equation Deviations from ideality Learning objectives Describe physical basis for the kinetic theory of gases Describe

More information

An Investigation of Target Poisoning during Reactive Magnetron Sputtering

An Investigation of Target Poisoning during Reactive Magnetron Sputtering Institut für Ionenstrahlphysik und Materialforschung Forschungszentrum Dresden-Rossendorf e.v. An Investigation of Target Poisoning during Reactive Magnetron Sputtering von der Fakultät Mathematik und

More information

1 Introduction to Plasmas

1 Introduction to Plasmas 1 1 Introduction to Plasmas Hideo Ikegami 1.1 Plasmas In physics and engineering, the word plasma means electrically conductive ionized gas media composed of neutral gases, ions, and electrons. Words like

More information

Monte Carlo Collisions in Particle in Cell simulations

Monte Carlo Collisions in Particle in Cell simulations Monte Carlo Collisions in Particle in Cell simulations Konstantin Matyash, Ralf Schneider HGF-Junior research group COMAS : Study of effects on materials in contact with plasma, either with fusion or low-temperature

More information

Homework 2: Forces on Charged Particles

Homework 2: Forces on Charged Particles Homework 2: Forces on Charged Particles 1. In the arrangement shown below, 2 C of positive charge is moved from plate S, which is at a potential of 250 V, to plate T, which is at a potential of 750 V.

More information

Plasma Chamber. Fortgeschrittenes Praktikum I. Supervisors: Baran Eren, Dr. Marco Wisse, Dr. Laurent Marot. Abstract

Plasma Chamber. Fortgeschrittenes Praktikum I. Supervisors: Baran Eren, Dr. Marco Wisse, Dr. Laurent Marot. Abstract Plasma Chamber Fortgeschrittenes Praktikum I Supervisors: Baran Eren, Dr. Marco Wisse, Dr. Laurent Marot Abstract The aims of this experiment are to be familiar with a vacuum chamber, to understand what

More information

EXPERIMENTAL STUDIES ON ELECTRO- POSITIVE/NEGATIVE PLASMAS PRODUCED BY RF DISCHARGES WITH EXTERNAL ANTENNA IN LOW-PRESSURE GASES

EXPERIMENTAL STUDIES ON ELECTRO- POSITIVE/NEGATIVE PLASMAS PRODUCED BY RF DISCHARGES WITH EXTERNAL ANTENNA IN LOW-PRESSURE GASES EXPERIMENTAL STUDIES ON ELECTRO- POSITIVE/NEGATIVE PLASMAS PRODUCED BY RF DISCHARGES WITH EXTERNAL ANTENNA IN LOW-PRESSURE GASES SEPTEMBER 2004 DEPARTMENT OF ENERGY AND MATERIALS SCIENCE GRADUATE SCHOOL

More information

MICRODISCHARGES AS SOURCES OF PHOTONS, RADICALS AND THRUST*

MICRODISCHARGES AS SOURCES OF PHOTONS, RADICALS AND THRUST* MICRODISCHARGES AS SOURCES OF PHOTONS, RADICALS AND THRUST* Ramesh Arakoni a) and Mark J. Kushner b) a) Dept. Aerospace Engineering b) Dept. Electrical and Computer Engineering Urbana, IL 61801 USA mjk@uiuc.edu

More information

TURBULENT TRANSPORT THEORY

TURBULENT TRANSPORT THEORY ASDEX Upgrade Max-Planck-Institut für Plasmaphysik TURBULENT TRANSPORT THEORY C. Angioni GYRO, J. Candy and R.E. Waltz, GA The problem of Transport Transport is the physics subject which studies the physical

More information

Two-dimensional Particle-In-Cell model of the extraction region of the PEGASES ion-ion plasma source

Two-dimensional Particle-In-Cell model of the extraction region of the PEGASES ion-ion plasma source Two-dimensional Particle-In-Cell model of the extraction region of the PEGASES ion-ion plasma source IEPC-2013-249 Presented at the 33rdInternational Electric Propulsion Conference, The George Washington

More information

Ultra-Cold Plasma: Ion Motion

Ultra-Cold Plasma: Ion Motion Ultra-Cold Plasma: Ion Motion F. Robicheaux Physics Department, Auburn University Collaborator: James D. Hanson This work supported by the DOE. Discussion w/ experimentalists: Rolston, Roberts, Killian,

More information

Application of Rarefied Flow & Plasma Simulation Software

Application of Rarefied Flow & Plasma Simulation Software 2016/5/18 Application of Rarefied Flow & Plasma Simulation Software Yokohama City in Japan Profile of Wave Front Co., Ltd. Name : Wave Front Co., Ltd. Incorporation : March 1990 Head Office : Yokohama

More information

Electric Propulsion. An short introduction to plasma and ion spacecraft propulsion. S. Barral. Instytut Podstawowych Problemów Techniki - PAN

Electric Propulsion. An short introduction to plasma and ion spacecraft propulsion. S. Barral. Instytut Podstawowych Problemów Techniki - PAN Electric Propulsion An short introduction to plasma and ion spacecraft propulsion S. Barral Instytut Podstawowych Problemów Techniki - PAN sbarral@ippt.gov.pl S. Barral (IPPT-PAN) Electric Propulsion 1

More information

Low Temperature Plasma Technology Laboratory

Low Temperature Plasma Technology Laboratory Low Temperature Plasma Technology Laboratory Equilibrium theory for plasma discharges of finite length Francis F. Chen and Davide Curreli LTP-6 June, Electrical Engineering Department Los Angeles, California

More information

LOW-PRESSURE radio-frequency (RF) inductive-coupled

LOW-PRESSURE radio-frequency (RF) inductive-coupled IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 34, NO. 3, JUNE 2006 767 Self-Consistent Modeling of Nonlocal Inductively Coupled Plasmas Oleg V. Polomarov, Constantine E. Theodosiou, Igor D. Kaganovich, Demetre

More information

Electric Field Measurements in Atmospheric Pressure Electric Discharges

Electric Field Measurements in Atmospheric Pressure Electric Discharges 70 th Gaseous Electronics Conference Pittsburgh, PA, November 6-10, 2017 Electric Field Measurements in Atmospheric Pressure Electric Discharges M. Simeni Simeni, B.M. Goldberg, E. Baratte, C. Zhang, K.

More information

The Plasma Phase. Chapter 1. An experiment - measure and understand transport processes in a plasma. Chapter 2. An introduction to plasma physics

The Plasma Phase. Chapter 1. An experiment - measure and understand transport processes in a plasma. Chapter 2. An introduction to plasma physics The Plasma Phase Chapter 1. An experiment - measure and understand transport processes in a plasma Three important vugraphs What we have just talked about The diagnostics Chapter 2. An introduction to

More information

Penning Traps. Contents. Plasma Physics Penning Traps AJW August 16, Introduction. Clasical picture. Radiation Damping.

Penning Traps. Contents. Plasma Physics Penning Traps AJW August 16, Introduction. Clasical picture. Radiation Damping. Penning Traps Contents Introduction Clasical picture Radiation Damping Number density B and E fields used to increase time that an electron remains within a discharge: Penning, 936. Can now trap a particle

More information

Supplementary Information

Supplementary Information 1 Supplementary Information 3 Supplementary Figures 4 5 6 7 8 9 10 11 Supplementary Figure 1. Absorbing material placed between two dielectric media The incident electromagnetic wave propagates in stratified

More information

CONSEQUENCES OF RADIATION TRAPPING ON ELECTRON ENERGY DISTRIBUTIONS IN LOW PRESSURE INDUCTIVELY COUPLED Hg/Ar DISCHARGES*

CONSEQUENCES OF RADIATION TRAPPING ON ELECTRON ENERGY DISTRIBUTIONS IN LOW PRESSURE INDUCTIVELY COUPLED Hg/Ar DISCHARGES* CONSEQUENCES OF RADIATION TRAPPING ON ELECTRON ENERGY DISTRIBUTIONS IN LOW PRESSURE INDUCTIVELY COUPLED Hg/Ar DISCHARGES* Kapil Rajaraman**, Alex Vasenkov*** and Mark J. Kushner*** **Department of Physics

More information

Introduction. Chapter Plasma: definitions

Introduction. Chapter Plasma: definitions Chapter 1 Introduction 1.1 Plasma: definitions A plasma is a quasi-neutral gas of charged and neutral particles which exhibits collective behaviour. An equivalent, alternative definition: A plasma is a

More information

Nuclear Reactions A Z. Radioactivity, Spontaneous Decay: Nuclear Reaction, Induced Process: x + X Y + y + Q Q > 0. Exothermic Endothermic

Nuclear Reactions A Z. Radioactivity, Spontaneous Decay: Nuclear Reaction, Induced Process: x + X Y + y + Q Q > 0. Exothermic Endothermic Radioactivity, Spontaneous Decay: Nuclear Reactions A Z 4 P D+ He + Q A 4 Z 2 Q > 0 Nuclear Reaction, Induced Process: x + X Y + y + Q Q = ( m + m m m ) c 2 x X Y y Q > 0 Q < 0 Exothermic Endothermic 2

More information

State-to-State Kinetics of Molecular and Atomic Hydrogen Plasmas

State-to-State Kinetics of Molecular and Atomic Hydrogen Plasmas State-to-State Kinetics of Molecular and Atomic Hydrogen Plasmas MARIO CAPITELLI Department of Chemistry, University of Bari (Italy) CNR Institute of Inorganic Methodologies and Plasmas Bari (Italy) MOLECULAR

More information

MONTE CARLO SIMULATION OF RADIATION TRAPPING IN ELECTRODELESS LAMPS: A STUDY OF COLLISIONAL BROADENERS*

MONTE CARLO SIMULATION OF RADIATION TRAPPING IN ELECTRODELESS LAMPS: A STUDY OF COLLISIONAL BROADENERS* MONTE CARLO SIMULATION OF RADIATION TRAPPING IN ELECTRODELESS LAMPS: A STUDY OF COLLISIONAL BROADENERS* Kapil Rajaraman** and Mark J. Kushner*** **Department of Physics ***Department of Electrical and

More information

Week 5: Fourier Tranform-based Mass Analyzers: FT-ICR and Orbitrap

Week 5: Fourier Tranform-based Mass Analyzers: FT-ICR and Orbitrap Week 5: Fourier Tranform-based Mass Analyzers: FT-ICR and Orbitrap 1 Last Time Mass Analyzers; CAD and TOF mass analyzers: 2 Fourier Transforms A transform is when you change your analytical space without

More information

KINETIC DESCRIPTION OF MAGNETIZED TECHNOLOGICAL PLASMAS

KINETIC DESCRIPTION OF MAGNETIZED TECHNOLOGICAL PLASMAS KINETIC DESCRIPTION OF MAGNETIZED TECHNOLOGICAL PLASMAS Ralf Peter Brinkmann, Dennis Krüger Fakultät für Elektrotechnik und Informationstechnik Lehrstuhl für Theoretische Elektrotechnik Magnetized low

More information

A MINI-COURSE ON THE PRINCIPLES OF LOW-PRESSURE DISCHARGES AND MATERIALS PROCESSING

A MINI-COURSE ON THE PRINCIPLES OF LOW-PRESSURE DISCHARGES AND MATERIALS PROCESSING A MINI-COURSE ON THE PRINCIPLES OF LOW-PRESSURE DISCHARGES AND MATERIALS PROCESSING Michael A. Lieberman Department of Electrical Engineering and Computer Science, CA 94720 LiebermanMinicourse07 1 OUTLINE

More information

MONOCHROMATIZATION AND POLARIZATION OF THE NEON SPECTRAL LINES IN CONSTANT/VARIABLE MAGNETIC FIELD

MONOCHROMATIZATION AND POLARIZATION OF THE NEON SPECTRAL LINES IN CONSTANT/VARIABLE MAGNETIC FIELD Romanian Reports in Physics 69, 49 (217) MONOCHROMATIZATION AND POLARIZATION OF THE NEON SPECTRAL LINES IN CONSTANT/VARIABLE MAGNETIC FIELD I. GRUIA, L.C. CIOBOTARU* University of Bucharest, Faculty of

More information

MEASUREMENT OF THE ION DRAG FORCE IN A COMPLEX DC- PLASMA USING THE PK-4 EXPERIMENT

MEASUREMENT OF THE ION DRAG FORCE IN A COMPLEX DC- PLASMA USING THE PK-4 EXPERIMENT MEASUREMENT OF THE ION DRAG FORCE IN A COMPLEX DC- PLASMA USING THE PK-4 EXPERIMENT M.H.THOMA 1, H. HÖFNER 1, S. A. KHRAPAK 1, M. KRETSCHMER 1, R.A. QUINN 1, S. RATYNSKAIA 1, G.E. MORFILL 1, A. USACHEV,

More information

Simulations of the plasma dynamics in high-current ion diodes

Simulations of the plasma dynamics in high-current ion diodes Nuclear Instruments and Methods in Physics Research A 415 (1998) 473 477 Simulations of the plasma dynamics in high-current ion diodes O. Boine-Frankenheim *, T.D. Pointon, T.A. Mehlhorn Gesellschaft fu(

More information

Simulation of Low Pressure Plasma Processing Reactors: Kinetics of Electrons and Neutrals

Simulation of Low Pressure Plasma Processing Reactors: Kinetics of Electrons and Neutrals Simulation of Low Pressure Plasma Processing Reactors: Kinetics of Electrons and Neutrals R. R. Arslanbekov and V. I. Kolobov CFD Research Corporation, Huntsville, AL, USA Abstract. In this paper, we illustrate

More information

Types of Analyzers: Quadrupole: mass filter -part1

Types of Analyzers: Quadrupole: mass filter -part1 16 Types of Analyzers: Sector or double focusing: magnetic and electric Time-of-flight (TOF) Quadrupole (mass filter) Linear ion trap Quadrupole Ion Trap (3D trap) FTICR fourier transform ion cyclotron

More information

Two-dimensional Fluid Simulation of an RF Capacitively Coupled Ar/H 2 Discharge

Two-dimensional Fluid Simulation of an RF Capacitively Coupled Ar/H 2 Discharge Two-dimensional Fluid Simulation of an RF Capacitively Coupled Ar/H 2 Discharge Lizhu Tong Keisoku Engineering System Co., Ltd., Japan September 18, 2014 Keisoku Engineering System Co., Ltd., 1-9-5 Uchikanda,

More information