A Novel Measurement Method for Measuring CCC and MAC at once
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1 A Novel Measurement Method for Measuring CCC and MAC at once Achim Weiland Gunther Böhm FEINMETALL GmbH
2 Objectives New MEMS Product Large Scatter of Measurement Results Reproducable Characterization of Current Carrying Capability 2
3 CCC a Topic Often Presented at the SWTW 3
4 Current Carrying Capability Main Presentations 4
5 Test Setup Force sensor Piezo Applied: Fz Al- and. Rh- Wafer-parts V99Head with 4 beams Heat shield Adapter with thermocouple Connector Videooptics Hot stage Specimen holder with attached Al- and Rh-Wafer-parts Contacting (Tungsten needle) Thermocouple on the wafer surface 5
6 ON 120s OFF 30s 6
7 Standard CCC (ISMI 2009) Methods Force after 10s OFF-Time OFF 30s 356 ma 7
8 Influence on the CCC Result Methods CCC according to ISMI 2009 Vertical probe card technology DO WE COMPARE COMPARABLE FORCES? Evaluation position of the force Initial force 8
9 Methods Evaluation Position of the Force Why 10 seconds? Are the forces comparable? 9
10 Initial Force The initial force has a large impact on the CCC result! IS THE INITIAL FORCE WELL DEFINED? Influence? Velocity at Touch Down Relative movements 10
11 Velocity at Touch Down 11
12 Velocity at Touch Down 12
13 Methods Velocity at Touch Down 13
14 Relative Movements 14
15 Relative Movements 15
16 Influence on the CCC Result Methods CCC according to ISMI 2009 Vertical probe card technology DO WE COMPARE COMPARABLE FORCES? Evaluation position of the force Initial force 16
17 Understanding the CCC-Raw-Data F force sensor Connector Upper guide plate Buckling beam Simplified model Buckling beam = Spring with a nonlinear spring constant Lower guide plate F contact 17
18 Understanding the CCC-Raw-Data 1 Contacting F force sensor F connector Free cutting and equilibrium of forces F friction UGP F connector F friction UGP 1: F force sensor = F connector + F friction UGP + F friction LGP 2: F connector = F buckling beam - F friction UGP 3: F contact = F buckling beam + F friction LGP F friction LGP F force sensor = F contact = F BucklingBeam + F friction LGP F friction LGP F contact 18
19 Understanding the CCC-Raw-Data 1 Contacting F force sensor 2 F friction UGP F connector Free cutting and equilibrium of forces F friction UGP F connector F buckling beam F buckling beam 1: F force sensor = F connector + F friction UGP + F friction LGP 2: F connector = F buckling beam - F friction UGP 3: F contact = F buckling beam + F friction LGP F buckling beam 3 F buckling beam F force sensor = F contact = F BucklingBeam + F friction LGP F friction LGP F friction LGP F contact 19
20 Understanding the CCC-Raw-Data Contacting F force sensor = F BucklingBeam + F friction LGP Decontacting F force sensor = F BucklingBeam - F friction LGP 20
21 Understanding the CCC-Raw-Data Contacting F force sensor = F BucklingBeam + F friction LGP Decontacting F force sensor = F BucklingBeam - F friction LGP 21
22 Understanding the CCC-Raw-Data Current On F force sensor = F BucklingBeam + F friction LGP Current Off F force sensor = F BucklingBeam - F friction LGP Thermal expansion 22
23 Understanding the CCC-Raw-Data Current On F force sensor = F BucklingBeam + F friction LGP Current Off F force sensor = F BucklingBeam - F friction LGP Thermal contraction 23
24 Force vs. Overdrive Plots Before and After Current Load OFF 10s OFF 10s TD before 5 ma TD after TD before 400 ma TD after 24
25 Force vs. Overdrive Plots Before and After Current Load TD before 550 ma OFF TD after CCC according to ISMI 2009 Vertical probe card technology The FORCES are not comparable 10s 25
26 More Comparable Method FORCE nominal overdrive between the different current steps x. 5 FORCE nominal Overdrive Next CURRENT step applied 120 s CURRENT ON 30 s CURRENT OFF Restart again with 1. End with 5 FORCE nominal Overdrive 26
27 Better and More Comparable Method 5 Force measurements ON 120s OFF 63s ON 120s OFF 63s ON 120s OFF 63s ON 120s OFF 63s ON 120s OFF 63s 27
28 Better and More Comparable Method CCC 28
29 Better and More Comparable Method CCC 29
30 Better and More Comparable Method MAC 30
31 Better and More Comparable Method MAC 31
32 Results Comparison: OLD vs. NEW Method - Higher CCC with new method - Variance is much better (NEW: +/- 3% vs. OLD: +/- 10%) FORCE COMPARISON is much more reliable 32
33 Results ViProbe & MµProbe CCC values correlate very well with the contact element cross-section Comparison of 2 different materials High temperature Vs. High Current 33
34 Conclusion CCC (ISMI 2009) Vertical Probe Cards Comparison of not comparable forces New method presented: CCC MAC Forces are comparable and more stable 34
35 Follow-On Work Pulsed Current Carrying Capability (PCCC) Numerical / Analytical Model (CCC and PCCC) Comparison CCC / PCCC with Real Environment Experiments 35
36 Acknowledgement Lutz Benedix - Head Design FEINMETALL GmbH Thank you! Birgit Walloch - Head & Probe Assembly, FEINMETALL GmbH Mechanical Reliability Tests Daniel Malitius - Head & Probe Assembly, FEINMETALL GmbH Mechanical Reliability Tests Steffen Beutler - Force & CCC Measurements FEINMETALL GmbH 36
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