Flare Calculation on EUV Optics
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1 Pecision Equipment Company Flae Calculation on EUV Optics Masayuki Shiaishi* Tetsuya Oshino*, Katsuhiko Muakami*, Hioshi Chiba** * nd Development Depatment ** Optical Design Depatment Development Headquates Pecision Equipment Company Oct. 1, EUVL Pague, Czech Republic
2 Oveview Flae teatment Definition and notation Conventional method New method Multilaye extinct effect Obscuation of scatte Combine PSFs not via system-psd Two PSFs, fo flae and TIS Results of flae evaluation PO #1 Kik flae test, flae coection (OPC) PO # Kik flae test
3 Oveview Flae teatment Definition and notation Conventional method New method Multilaye extinct effect Obscuation of scatte Combine PSFs not via system-psd Two PSFs, fo flae and TIS Results of flae evaluation PO #1 Kik flae test, flae coection (OPC) PO # Kik flae test 3
4 Definition and notation Image Intensity I( x) = I0( x) SC ( x) + PSF ( x) I0( x) SC ( x) + PSF ( x x ) I { SC (1 TIS) δ ( x) + PSF ( x) } = (1 TIS) I = (1 TIS) I 0 0 Unifom intensity 0 ( x ) dx decease Image blu I(x): Flaed image intensity I 0 (x): Oiginal intensity TIS: Total integated scatte PSF SC : PSF contibuting flae; component eaching wafe PSF Flae (1 TIS)δ PSF SC = 1 TIS) I ( x) + F PD ( 0 DC-flae model F: DC flae PD: patten density TIS TIS SC0 SC0 = PSF ( x) dx = π PSF ( ) d PSF SC0 : PSF contibuting flae; component as scatteed, PSF SC 4 deived fom PSDs
5 Definition and notation Flae SC F( x0 ) = PSF ( x x0) dx Kik flae (KF) bight field KF = I I Dmin Bmax, I I D B ( x ( x D B ) = ) = (1 TIS) + bight field PSF PSF bight field SC SC ( x ( x x x D B ) dx ) dx I D (x D ): Intensity at dak pad x D I B (x B ): Intensity at bight aea x B Flae effect on image can be expessed using TIS & PSF SC. Kik flae, which can be expeimentally obseved as an intensity atio (= dimensionless), does not equal to flae. 5 Intensity 1 0 I D I B x
6 Oveview Flae teatment Definition and notation Conventional method New method Multilaye extinct effect Obscuation of scatte Combine PSFs not via system-psd Two PSFs, fo flae and TIS Results of flae evaluation PO #1 Kik flae test, flae coection (OPC) PO # Kik flae test 6
7 Conventional method Flae calculation fom powe spectal density (PSD) PSD ( f1), PSD ( f), L, PSD6 ( 6) 1 f SystemPSD( f F( ) PSF SC ) = ( ) 6 i= 1 = α Flae = π F( ) d in bight aea TIS = π F( ) d i 4 λ z PSD π i ( α f 7 i i ) SystemPSD λz Flae component should be calculated fom anothe PSF, not as-scatteed. This infinite integation cannot be caied out unde linea domain convesion. Mio PSDs equivalent system PSD on pupil λf i i Not adequate at a lage scatte angle PSF by scatteing i θ z Not adequate at a lage scatte angle Poblems: - No scatte extinction effect - No obscuation effect - Linea convesion twice (small angle appoximation) - PSF domain limited at a finite distance (not infinity) - Same PSF fo flae & TIS
8 Oveview Flae teatment Definition and notation Conventional method New method Multilaye extinct effect Obscuation of scatte Combine PSF not via system-psd Two PSFs, fo flae and TIS Results of flae evaluation PO #1 Kik flae test, flae coection (OPC) PO # Kik flae test 8
9 New method: TIS TIS calculation fom powe spectal density (PSD) PSD ( f1), PSD ( f), L, PSD6 ( 6) 1 f Mio PSDs ( i i λ f = sinθ ) PSD F π βi ( ) λ zi 0 ( ) = 4 i PSF TIS i Scatte extinction by ML ( fi ) = PSDi ( fi ) Exti ( θi ) SC0 ( ) = 6 i= 1 F 0 i SC0 ( ) PSDi λ = π PSF ( ) d 9 z i + Non-linea convesion, not via the SystemPSD. Mio PSFs PSF by scatteing, component as scatteed Consideation: - Scatte extinction effect included - Appoximation eleased patially (esp. between finite and infinite) - Not via system PSD
10 New method: Flae Flae calculation fom powe spectal density (PSD) PSD F ( ) = i PSF ( f1), PSD ( f), L, PSD6 ( 6) 1 f PSDi ( fi ) = PSDi ( fi ) Exti ( θi ) Obsi ( θi ) SC 4π β i ( ) λ zi ( ) = i= 1 Flae = π 6 in bight aea i F ( ) PSDi λ PSF SC 10 z ( ) d i + Mio PSDs Scatte extinction by ML ( i i λ f = sinθ ) Obscuation Non-linea convesion Mio PSFs PSF by scatteing, component eaching wafe Flae component on wafe Consideation: - Obscuation effect included - Sepaate PSF fo flae and TIS
11 Multilaye extinct effect Scatte extinction by intefeence in multilayes (MLs) E.M.Gullikson, SPIE 3331 incidence phase matched, peak eflectivity specula incidence phase mismatched, extinct specula multilayes incidence phase matched, peak eflectivity specula scatteed phase mismatched, extinct EUV eflection on ML substate EUV scatte on ML log (scatte), no ML log (extinct * scatte) ML extinct coeff. 11
12 Obscuation of scatte Obscuation atio (of component eaching wafe to as-scatteed component) scatteed light, not eaching wafe scatte loss scatteed light, eaching wafe (outside static field) intenal obscuation scatteed light, eaching wafe (within static field) static field Mio Wafe scatte ay tacing 5,000,000 ays wee thown away fom the light souce pe condition. Intenal obscuation was modeled. About 1,500,000 ays eached the exposue field on the eticle plane. Each ay ceated scatte light on each PO mio in andom diection at each scatte angle (including specula lights, of couse 100% of them can each wafe). Intenal obscuation: apetues, mechanics, mio coating aeas and a flae stop. Total ~1 billion ays wee thown away. Obscuation atios (how many scatte ays, out of ays leaving eticle, each wafe) fo each scatte angle fo each PO mio wee obtained. 1
13 Combine PSF not via system PSD Conventional convesion M1 PSD M PSD M3 PSD M4 PSD linea SystemPSD on pupil linea Flae PSF same PSF TIS Image Calc., Kik Flae,... M5 PSD M6 PSD New convesion M1 PSD M PSD M3 PSD M4 PSD M5 PSD M6 PSD ML extinct Obscuation M1 eq.psd... M6 eq.psd M1 eq.psd... M6 eq.psd non-linea M1 PSF... M6 PSF M1 PSF... M6 PSF PSF SC0 diffeent PSF PSF SC equivalent PSD Mio PSF Flae PSF not via systempsd 13 TIS Image Calc., Kik flae,...
14 Two PSFs, fo flae and TIS TIS and PSF SC ae deived fom PSF SC0 scatteed light, not eaching wafe scatte loss scatteed light, eaching wafe (outside static field) intenal obscuation scatteed light, eaching wafe (within static field) static field Mio Wafe apply all obscuations SC0 PSF PSF as scatteed: ceated fom mio PSDs TIS is obtained by integation of this to infinity. total integation (constant) PSF as eaching wafe: applied all obscuations effect to PSF SC0 convolution with I 0 (x). PSF SC TIS 14 chaacteistic of PO PSF SC0 ( x ) dx
15 Oveview Flae teatment Definition and notation Conventional method New method Multilaye extinct effect Obscuation of scatte Combine PSFs not via system-psd Two PSFs, fo flae and TIS Results of flae evaluation PO #1 Kik flae test, flae coection (OPC) PO # Kik flae test 15
16 EUV1 PO #1 flae evaluation Kik-flae measuement By coutesy of Selete Kik Flae [%] 0% 18% 16% 14% 1% 10% 8% 6% 4% % 0% Kik flae Calculation (oute 6xmm) Expeiment (oute 6xmm) Calculation (oute 00um dia.) Expeiment (oute 00um dia.) dak pad's adius [um] Fo the smallest pad, the appaent flae seems to be affected also by wavefont eo. (~1%) Kik flae measuement and calculation agee well with each othe by ~1% eo. 16
17 EUV1 PO #1 flae evaluation Pinted CD vaiation on dak aea By coutesy of Selete H. Aoyama et al., Jpn. J. Appl. Phys., 48 (009) on clea aea CD vaiation with flae can be pecisely pedicted using flae PSF and TIS. calculation also including mask CD and esist blu effect 17
18 EUV1 PO #1 flae evaluation FVC evaluation on PL test site Raw PSF and multi-factal function By coutesy of Selete/Toshiba H. Aoyama et al., Poc. SPIE 771 (009) 771D. flae mapping & mask esizing with EDA Mask taget size with FVC full chip hp 35nm cone Top view of SEM images FVC evaluation cente Patten density: % 36% 50% 65% Flae vaiation compensation (FVC) based on flae PSF and TIS has +/ nm CD eo in the ange of %~65% patten density. 18
19 EUV1 PO # flae evaluation Kik-flae measuement By coutesy of Intel um pad in bight field This vaiation includes mask contast vaiation of ~1% and the illumination non-unifomity. Calculated Kik-flae value is 7.4% at the cente of field. *Additional details ae on Intel s poste pesented by Yashesh Shoff on EUV1 static imaging. ( Static Test Evaluation of EUV1 Full-Field Exposue Tools ) 19
20 Summay New calculation method of flae PSF and TIS is developed. Using flae PSF and TIS obtained by ou new method, actual flae behavio can be well pedicted. Paametes chaacteistic of PO ae flae PSF and TIS, which should be sepaately povided. (TIS should not be obtained by integating povided PSF.) Acknowledgements H. Aoyama, K. Tawaayama, Y. Tanaka and I. Moi (Selete), poviding pecious flae evaluation data on Kik-flae tests and on PL test site evaluation. Y. Nakajima and R. Inanami (Toshiba), PL test site design and evaluation. A. Myes, Y. Shoff (Intel), poviding pecious flae evaluation data. M. Nakajima (Nikon), thowing billions of scatte ays fo months. 0
21 Thank you. 1
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