The importance of the momentum flux on the mechanical properties of sputter deposited TiN thin films.
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1 The importance of the momentum flux on the mechanical properties of sputter deposited TiN thin films. S. Mahieu and D. Depla Ghent University Partially Funded by the FWO-Flanders
2 P.H. Mayrhofer et al. TSF () 89 H. Wang et al. TSF 51 (8) 519 J. Musil et al. Surf. Coat. Techn () 89 Ion energy E i Ion-to-atom ratio i/a Ion energy flux E i x i/a Mechanical properties related to energy and flux of ions.
3 Increasing the ion energy or ion flux also influences momentum flux. Ar Ti e - Ar +- Ti target N d T-S E sp Ar E refl + Ar E ion How to quantify the momentum flux? Substrate
4 Ti target Ar Ti e - N Ar +- d T-S E sp Ar E refl + Ar E ion Substrate A: Quantify separate contribution 1 of - ions - sputtered particles - reflected neutrals B: Develop a tool to measure total momentum flux 1: S. Mahieu, D. Depla: J.Appl. Phys. 1 (8) 111 : UK patent application number GB9917. monitoring tool for deposition processes S. Mahieu, D. Depla
5 : ions Energy distribution and flux of ions: RFEA Mass distribution: energy resolved mass spectrometry 5 M ion = i m a m i i a i E ion : average mass of ions : ion-to-atom ratio (i from RFEA, a from SiMTRA 1 ) E ion : average energy of ions 1: K. Van Aeken, S. Mahieu, D. Depla: J. Phys. D: Appl. Phys 1 (8) 57 Free download:
6 : sputtered particles Energy distribution and flux: SiMTRA 1 Mass distribution: energy resolved mass spectrometry sp fraction of Ti/TiN adatoms ( f M f M ) M = + Ti Ti TiN 1: K. Van Aeken, S. Mahieu, D. Depla: J. Phys. D: Appl. Phys 1 (8) 57 Free download: TiN M = me sp average energy sputtered particles
7 : reflected neutrals Flux, energy and mass distribution: SiMTRA + SRIM 1 7 M refl Ar refl, Ar N refl, N = f, + refl, N Ar mar E refl Ar f N mn E YAr Fsp, Ar YN Fsp, N B F Backscatter yield Gas composition Average energy Sputter yield 1: Stopping Range of in Matter B F Transportation coefficients
8 : flux monitor Rotatable wire holder Torsion wire Front plate Front view Opening area A d Back view b 8 Fd = kθ period T and = π F I = pφa k => with Mb I = 1 momentum π Mb θ flux : P = pφ = dt A UK patent application number GB9917. monitoring tool for deposition processes S. Mahieu, D. Depla
9 : flux monitor Torsion wire Opening area A Torsion plate reflector Front view 9 Back view UK patent application number GB9917. monitoring tool for deposition processes S. Mahieu, D. Depla
10 Ti target Ar Ti e - N Ar +- d T-S E sp Ar E refl + Ar E ion Substrate 1 A: Quantify separate contribution 1 of - ions - sputtered particles - reflected neutrals B: Develop a tool to measure total momentum flux 1: S. Mahieu, D. Depla: J.Appl. Phys. 1 (8) 111 : UK patent application number GB9917. monitoring tool for deposition processes S. Mahieu, D. Depla
11 8x1-1 x1 - factor 5 calculated M tot measured calculated 1 Measured M tot 9 1 N flow (sccm) Momentum/metallic flux increases with - increasing N flow
12 1x1-1 1 calculated M tot 1 8 calculated measured 5x1-1 Measured M tot factor target-substrate distance (cm) 1 Momentum/metallic flux increases with - increasing N flow - decreasing T-S distance 8x1-1 calculated M tot 9 measured 1 N flow (sccm) calculated 1 18 x1 - Measured M tot
13 1 x1-1 calculated M tot. calculated.5 measured pressure (Pa) Momentum/metallic flux increases with - increasing N flow - decreasing T-S distance - decreasing pressure.7 Factor 5 due to callibration RFEA.9 5x1-1 Measured M tot 1x1-1 calculated M tot (kgm /s) 1 1 8x1-1 calculated M tot 8 7 factor 5 measured calculated target-substrate distance (cm) measured calculated 9 1 N flow (sccm) x1 - M easured M tot x1 - Measured M tot
14 Hardness (GPa) Mechanical properties versus measured momentum flux x1-1 1 Measured M tot Measured M tot 1 x1-1 Elastic Modulus (GPa) 1 If Kendall tau rank correlation coefficient >.58 significant correlation 1 : Z =. Z =. Statistical relation between mechanical properties and momentum flux 1: H. Abdi, in Encyclopedia of Measurement and Statistics, edited by N.J. Salkind (SAGE, New Delhi, 7), p.58
15 Mechanical properties versus ion energy Hardness (GPa) ion energy E i (ev) ion energy E i (ev) Elastic modulus (GPa) Z = 1.9 Z = 1.7 <.58 No statistical relation between mechanical properties and ion energy
16 Hardness (GPa) Mechanical properties versus ion-to-atom ratio ion-to-atom ratio I ion-to-atom ratio I Elastic modulus (GPa) 1 Z = 1.7 Z =. <.58 No statistical relation between mechanical properties and ion-to-atom ratio
17 M = M + M + tot ion sp M refl can be calculated Torsion wire can be measured reflector Torsion plate 1x1-1 5x1-17 Hardness (GPa) calculated M tot measured calculated target-substrate distance (cm) 1 Measured M tot 1 x1-1 Measured M tot (kgm /s) 1 Measured M tot 1 x1-1 Elastic Modulus (GPa) Measured and calculated values correspond Mechanical properties related to momentum flux
18 THANK YOU 18 Thanks to: -IWT Flanders and FWO Flanders for financial support Download SiMTRA from
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