Thermoelectricity: From Atoms to Systems
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1 Thermoelectricity: From Atoms to Systems Week 3: Thermoelectric Characterization Lecture 3.6: Summary of Week 3 By Ali Shakouri Professor of Electrical and Computer Engineering Birck Nanotechnology Center Purdue University 1
2 Measuring heat flow at nanometer scale Reservoir Other objects/ environment Heat Source A. Shakouri, Advanced Workshop on Energy Transport in Low- Dimensional Systems, ICTP, Trieste, Italy; Oct
3 Micro thermocouple measurements 5 (60x60 µm 2 ) 4 Emitter Superlattice Measurement Thermocouple Top Contact Cooling ( o C) Bulk material 0 Bottom Reference Contact Thermocouple Current (ma) Current (ma) Collector Substrate Temperature Controlled Stage X. Fan, E. Croke, A. Shakouri, J. E. Bowers, SiGe/Si Superlattice Coolers, Phys. Low-Dim. Struct., 5/6 (2000) pp
4 Scanning Thermal Microscopy (SThM) Pt-Cr Junction Courtesy: Arun Majumdar, UC Berkeley; Stefan Dilhaire, Univ. Bordeaux J. Christofferson, et al, J. Electronic Packaging, 130 (4) ,
5 UHV Scanning TE Microscopy I T 1 W Tip V Thermoelectric Voltage (mv) Measurement Theory D T Position (nm) H.-K. Lyeo, A.A. Khajetoorians, L. Shi, K.P. Pipe, R.J. Ram, A. Shakouri, and C.K. Shih. Science 303, 816 (2004) Zhixi Bian et al. Appl. Phys. Lett. 87 (5), 53115,
6 Seebeck of single molecules (BDT) 6
7 Infrared imaging Micro processor Microrefrigerator 70 µm Francisco Mesa-Martinez, Jose Renau, UCSC Vivek Sahu, Georgia Tech Measuring Power and Temperature from Real Processors, Javi Martinez, Jose Renau, et al. The Next Generation Software (NGS) Workshop (NGS08), April
8 Thermoreflectance image of microcooler J. Christofferson, A. Shakouri, Rev. of Scientific Instruments, 2005 DC Reflection Thermal Image T (C) 50µm Temperature resolution: 0.08 o C Spatial resolution: submicron Time resolution: 800ps, 100ns; 1024x1024 pixels 8
9 High Speed Thermal Imaging (800ps) J. Christofferson et al., Heat Transfer Conf., August 2010 Temperature Change from Ambient Heating on Metal Above Via 550nm Via, 600mA 350nm Via, 400mA 17ns Delay in Nanoseconds 550nm 600mA 350nm 400mA 56ns 9
10 Calibration: experiment determination of thermoreflectance coefficients, C TH 10
11 Raman spectroscopy and temperature measurement Scattered light intensity versus wavelength shift Cm -1 11
12 Thermal Measurements of Nanowires Themal conductance: G = Q / (T h -T s ) Long SiN x beams Suspended SiN x membrane I Pt resistance thermometer Kim et al, PRL 87, Shi et al, JHT 12
13 3ω method for thermal conductivity 3ω method (Cahill, Rev. Sci. Instrum. 61, 802) Metal line Thin Film L 2b V Substrate I 0 sin(ωt) See: Annual Review of Heat Transfer, Edited by Gang Chen,
14 In-plane Seebeck/electrical conductivity J.-H Bahk, T. Favaloro and A. Shakouri, Thin film thermal characterization techniques, Annual Review of Heat Transfer, Chapter 3,
15 Cross-plane Seebeck/electrical conductivity J.-H Bahk, T. Favaloro and A. Shakouri, Annual Review of Heat Transfer, Chapter 3,
16 Simultaneous S, σ, κ, ZT measurements Neck SiN Device Gold lead ErAs/InGaAlAs Gold AlN Key issues: Current injection uniformity (aspect ratio) Heat load from probes or leads Transient response in µsec Courtesy: Gehong Zeng UCSB R. Singh, Z. Bian et al. Appl. Phys. Lett May; 94:
17 Single leg Z-meter measurement Measured parameters: Seebeck coefficient, thermal conductivity and electrical conductivity + output power and efficiency 50um thick material (k~3-5 W/mK, σ~ /ωcm) Reja Amatya, Katey Lo and Rajeev Ram (MIT) 17
18 Thin Film Thermal Characterization R (normalized) Thermal decay => K Si/SiGe(30%) =8.1W/mK K Si/SiGe(60%) = 2.8W/mK Acoustic echoes Y. Ezzahri et al. Appl. Phys. Letters 2005 Time (ps) Metal film is heated by laser pulse and it acts both as a heat source and a transducer (creates acoustic waves). It can characterize thermal interface resistances as well as interface quality (acoustic mismatch). 18
19 Frequency-Dependent Thermal Conductivity Koh and Cahill, PHYSICAL REVIEW B 76, (2007) See also: Minnich, Nelson, Chen, et al. Physical Review Letters, Vol. 107, (2011) 19
20 Week 3: Summary 3.1 Thermal measurements at nanoscale Micro thermocouple, Scanning thermal microscopy 3.2 Scanning Seebeck Microscopy, Single molecule Seebeck Infrared and micro Raman thermal imaging 3.3 Thermoreflectance imaging Suspended heaters for nanowire characterization 3.4 Thin film electrical/thermal characterization (in-plane, cross-plane) Transient Harman/Z-meter 3.5 Time/Frequency-Domain Thermo Reflectance Ballistic vs. Diffusive heat conduction 20
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