arxiv: v1 [cond-mat.mtrl-sci] 1 Nov 2018

Transcription

1 3-omega method for thermal roerties of thin film multilayers Leandro N. Acquaroli Deartment of Engineering Physics, Ecole Polytechnique Montreal P.O. Box 679, Station Centre-Ville, Montreal (QC) H3C 3A7, Canada November 5, 8 Short review on the different models for the electro-thermal 3-omega method. We resent the deduction of the fundamental relation between the 3ω voltage with the temerature rise to determine the thermal conductivity. The usage of the anisotroy of the films allows a smooth transition between D and D models. A comarison between the multilayer methods and analytical solutions are resented. arxiv:8.57v [cond-mat.mtrl-sci] Nov 8 I. Introduction In the 3-omega method, a metal line is deosited on the surface of the secimen of interest to serve as both the heating source and thermometer detector Fig.. An alternating current of frequency ω is assed through the wire, I ω, inducing a Joule heating event in the wire, Q ω = I ω R, where R is the steady state electrical resistance of the wire. The heating event causes a second harmonic temerature rise in the samle, T ω, which is a function of the thermohysical roerties of the underlying samle. The electrical resistance of the wire varies linearly with resect to temerature R/ T across moderate temerature ranges in which the metal does not undergo a hase change. This temerature varying resistance, R ω, induced by T ω rovides the third harmonic voltage oscillation, from which the exeriment obtains its name, via Ohm s law: V 3ω = R ω I ω. This quantity can be measured by a lock-in amlifier (which often serves as the function generator as well) (,). For small temerature changes, the resistance of the filament varies with temerature as (3,4) R = R ( + β T ), () where β is the temerature coefficient of resistance TCR, and R and R are the resistances at temeratures T and T + T, resectively. The ower dissiated by the heater/rtd from now on referred to simly as the heater due to Joule heating is defined as P = I h R h, () where I h and R h are the heater current and resistance resectively. The alternating current assing through the heater is given as I h (t) = I h, R h,, (3) where I h, is the eak amlitude of the nominal heater current at a frequency ω. Assuming that the change in resistance is negligible comared to the amlitude of the current, the instantaneous ower can be written as P (t) = I h, R h, [ + cos(ωt)], (4) where R h, is the nominal heater resistance. Then, The ower can be searated into two comonents: a constant Fig. : Schematic of the metal line filament deosited on a secimen used for the 3ω measurements. l h and b h denote the heater length and half-width, resectively. The contact ads are used to make electrical contact with the microfabricated heater, where the current and voltages inuts are deicted as well. An AC current source is thought for this. comonent indeendent of time and an oscillating comonent: P DC = I h, R h, = P (5) P AC (t) = I h, R h, cos(ωt) = P cos(ωt). (6) The average ower dissiated by the heater is also called the root mean square (rms) ower, which is half of the ower dissiated by a DC current of the same amlitude, defined as P rms = I h,rms R h, = P, (7) where the rms heater current is given by τ I h,rms = I τ h (t) dt ω π/ω = I h, cos π (ωt)dt = I h,. (8) Assuming that the heater circuit is stable, i.e., that all the transient erturbations decay over time, the steady-state harmonic temerature oscillations in the metal filament roduce harmonic variations in the resistance given by R h (t) = R h, [+β h T DC +β h T AC cos(ωt+φ)], (9) where R h, is the nominal room temerature resistance of 8

2 of the heater, T DC is the steady-state temerature increase due to the rms ower dissiated by the filament, T AC is the magnitude of the steady-state temerature oscillations due to the sinusoidal comonent of the ower and φ is the hase angle between the temerature oscillations and the excitation current. The resulting voltage across the sensor is obtained by multilying the inut current be the heater resistance yielding V h (t) = I h, R h, [( + β h T DC ) cos(ωt) + β h T AC cos(ωt + φ) + ] β h T AC cos(3ωt + φ). () The 3ω and ω comonents in the voltage with hase shift result from multilying the ω term in the resistance with the inut current oscillating at the frequency ω. We can exress the 3ω amlitude as amlitude as V h,3ω = V h, β h T AC = V h, β h T ω, () where V h, = I h, R h,, and T ω is the comlex AC temerature oscillations at ω. This is the fundamental result for the 3ω method, which can be exressed in general terms of transfer functions (5), since by measuring the voltage at the frequency 3ω one is able to deduce the in-hase R(T ω ) and out-of-hase I(T ω ) comonents of the temerature oscillations. Both the magnitude and hase of the temerature oscillations vary with excitation frequency, due to the finite thermal-diffusion time τ D of the secimen. The thermal-diffusion time required for a thermal wave to roagate a distance L is given by (6) τ D = L α, () where α is the thermal diffusivity, which is defined as the ratio of thermal conductivity k to volumetric heat caacity c. In turn, the thermal-diffusion angular frequency is ω D = π = πα τ D L. (3) In the limit of infinite thermal diffusivity i.e., infinite thermal conductivity, heat roagates with infinite velocity such that the temerature is constant throughout the secimen. This leads to undamed temerature oscillations with zero hase lag. Conversely, zero thermal diffusivity (i.e., infinite volumetric heat caacity), results in no heat roagation, zero oscillation amlitude, and large hase lag. Note that the dissiation of the rms ower is indeendent of the frequency resonse of the secimen since it is constant with time. II. Heat diffusion from an infinite lanar heater with sinusoidal heating The sinusoidal current with frequency ω assing through the heater results in a steady DC temerature rise and Fig. : One dimensional heat flow from a thin infinitely long lane heater on a substrate. Heat enters the secimen uniformly over the width of the heater and edge-effects are not considered. The zero level of x-coordinate is located at the heater/secimen interface. an oscillating AC temerature comonent (4). The DC comonent creates a constant temerature gradient into the secimen while the AC art results in thermal waves diffusing into the secimen at frequency ω. Solving the heat equation in lanar coordinates ermits to determine the lag φ between the heater temerature and T ω. Consider Fig.. The heat diffusion equation to be solved for the system reads T xx α T t =. (4) In the case of sinusoidal heating the temerature can be searated into time and satially deendent arts T (x, t) = Θ(x) ex(iωt). (5) Relacing (5) into (4), erforming differentiation and dividing by ex(iωt) yields: d Θ dx iω α Θ =. (6) The solution of (6) can be exressed as Θ(x) = Θ ex( qx), for x >, (7) where q is the thermal wavenumber defined as iω ω ω q = = ( + i) α α = ex(iπ/4). (8) α Plugging (6) and (7) into (5) gives T (x, t) = Θ ex(iωt qx). (9) Consider one of the boundary condition to be Φ x + = k dt dx x + = kqθ ex(iωt) = kθ ex(iωt iπ/4). () The flux equals the oscillating heat comonent roduced in the heater er unit area. The oscillating ower of the heater can be written in comlex notation, according to (6): P cos(ωt) = P R[ex(iωt)]. () Dividing the comlex ower by the heater area A, setting it equal to the heat flux from () and dividing both sides of 8

3 3 K (w) I (w) Fig. 3: The geometry of an infinite circular cylinder with one dimensional line heater running through the cylinder axis. by ex(iωt) gives Θ = P α ex( iπ/4). () Ak ω Finally, relacing this last result into (9) roduces T ω (x, t) = P α ex(iωt qx iπ/4) (3) Ak ω establishing that the temerature rise lags the heater current by φ = π/4, with a ω / deendence. III. Heat diffusion from a line heater inside a cylindrical secimen To understand how to use the 3ω method to determine the thermal conductivity of a secimen, it is convenient to start by solving the heat equation of an infinitely long cylinder, when heated from an inside linear heater at a distance r = x + y Fig. 3. The volume of the secimen is considered to be infinite, with no axial or circumferential temerature gradients. The heat equation to be solved for this system reads as follow (7) : T rr + r T r α T t =. (4) Given that the heating ower is sinusoidal, the solution for this equation can be written as T (r, t) = Θ(r) ex(iωt). (5) Introducing (5) into (4), erforming differentiation, and dividing by ex(iω), gives d Θ dr + r dθ dr q Θ =, (6) where q = iω/α, is the thermal wavenumber. Performing change of variables w = qr, leads to the zero-th order modified Bessel differential equation, w d Θ dw + w dθ dw w Θ =, (7) whose solution can be written as Θ(w) = c I (w) + c K (w), (8) where I (w) is the zero-th order modified Bessel function of the first kind, and K (w) is the zero-th order modified Argument, w Fig. 4: Behavior of the Bessel functions. Bessel function of the second kind. The temerature rofile of the system it is suosed to decay as r, then it is required to set c = Fig. 4. Then, the second boundary condition can be written in terms of the heat flux at r = r : Φ r=r = k dθ dr r=r = c k dk (qr) dr r=r = c kqk (qr ). (9) On the other hand, the heat flux from the heater through a cylindrical surface at r = r is related to the ower and the cylinder area A cyl by Φ r=r = P A cyl = P πr l h ex(iωt). (3) Equating (9) and (3), yields c = P πkl h qr K (qr ) = P πkl h, (3) since wk (w) when w. Then, Θ = P K (qr) πkl h. (3) Plugging last equation into (5), gives T ω (r, t) = P K (qr) πkl h ex(iωt). (33) IV. One-dimensional line heater at the surface of the secimen By halving the cylinder of Fig. 3 the heater remains at the surface of the secimen. The result for infinite volume can used to exress the temerature oscillations for infinite half-volume. Halving the volume means that twice as much of heat flux flows into the remaining volume, assuming no radiation, convection or conduction on the surface. Thus, 3 of 8

4 L. N. Acquaroli. 3-omega method for thermal roerties of thin film multilayers. Heater inside a cylindrical secimen: K (qr) ex(iωt) ωt [ π ] qr.5 ber, m u.5 ven a W Fig. 5: Visualization of the normalized real art of equation (34). The oscillations decay raidly away from the heater and are even in the time-domain. (33) becomes K (qr) ex(iωt). (34) πk In Fig. 5 it is deicted the normalized real art of Tω πk/, where is the ower er unit length of the heater. The hysical secimen may not be a semi-infinite solid, but rather has a finite thickness. Since the thermal waves decay raidly away from the heat source following a modified Bessel function of the second kind it must ensured that the enetration deth of the thermal wave is much less than the thickness of the secimen λ << d, where the thermal enetration deth is defined as r α λ= =. (35) q ω Tω (r, t) = Since the amlitude of an exonentially decaying function reduces to aroximately % of its initial magnitude after 5 length constants, it is exected that the magnitude of the thermal oscillations will decrease below % of its initial amlitude after 5 thermal enetration deths as the Bessel function decays faster than an exonential function. Thus, the secimen thickness must exceed 5 times the thermal enetration deth to be considered semi-infinite d >> 5λ. IV.. Effects of Finite Width of the Heater In order to generalize the D line solution to one with a finite-width, one needs to suerimose an infinite number of D line sources over the width of the heater (). This leads to a convolution integral, since the temerature at any arbitrary set of coordinates (x, y) within the secimen deends on its relative osition to all the line sources Fig. 6. Mathematically this is done by taking a Fourier transform of (34) with resect to x-coordinate as the temoral deendence is not of interest at this oint. Fig. 6: Schematic of a finite-width b line heater showing the temerature contributions from the extremities of the heater to a oint in the secimen. Only the oscillations at the surface are imortant, so y = and r = x. Now Fourier cosine transformation can be used because the temerature function is an even function. The Fourier cosine transform air is: Z fˆ(η) = f (x) cos(ηx)dx, (36) Z f (x) = fˆ(η) cos(ηx)dη. (37) π For the satial temerature oscillations the cosine transform reads Z Tω (η) = Tω (x) cos(ηx)dx Z = K (qη) cos(ηx)dη πk =. (38) πk η + q The finite width can be added into (38) by multilying it with the Fourier transform of the heat source as a function of the x-coordinate. Heat enters the secimen evenly over the width of the heater ranging from b to b. This behavior can be exressed as a rectangular function with values for x < b and elsewhere. According to the convolution theorem, the multilication of the Fourier transforms of (38) and the rectangular function equals the Fourier transform of the convolution of the functions in the x-sace: Z Tω (η) = rect(x) cos(ηx)dx πk η + q sin(ηb) =. (39) πk η + q Taking the inverse transform gives Z sin(ηb) cos(ηx) Tω (x) = dη. πk (ηb) η + q (4) Equation (4) gives the form of temerature oscillations on the surface of the secimen a distance x away from the center of the heat source that has a finite width b. Since the thermometer and the heater are the same element the measured temerature is some average temerature over the width of the line. Exression (4) can be averaged by integrating it with resect to x from to b and dividing by b to give the temerature measured by the thermometer as 4 of 8

5 roosed by Cahill () : T ω = b b T ω (x)dx = πk sin (ηb) (ηb) dη. (4) η + q The asymtotic behavior of the last equation when q b << normally termed sloe-method for its deendence on ln(ω) can be written as (8) T ω = πk [ ln ( α b ) ln(ω) + ζ ] i 4k. (4) where ζ is a constant. By defining the reduced frequency, Ω = b ω/α, equation (4) results (9) : T ω = πk sin (ξ) ξ dξ. (43) ξ + iω With roer substitutions and calculations, the last exression is related to the Meijer G-function by (9) : T ω = i ( ) 4πkΩ G 4 iω,3/,,/,, (44) Asymtotic analysis gives two distinct regimes: T ω Ω = ( πk ln Ω + 3 ) γ iπ, (45) 4 T ω Ω = k ( i), (46) Ω where γ =.577 is the Euler constant. IV.. Thin film on a substrate The effect of the thin film on the substrate can be added as a thermal resistance indeendent of the driving frequency. In the 3ω method, the temerature dro across the film is inferred from the difference between the exerimental temerature rise of the heater and the calculated temerature rise of the bare substrate samle. The substrate thermal conductivity is determined from the sloe method alied to the exerimental temerature rise of the heater and usually a one-dimensional heat conduction model is assumed across the film. With these aroximations, the exerimental temerature rise of the heater on the film lus substrate system can be written as (8) T s+f,ω = T s,ω + d f bk f, (47) where subscrit f denotes film roerties e.g. d f is the thickness of the film and T s,ω is calculated based on Eq. (4). Considering the exression from Eq. (47), the film thermal conductivity as determined from the sloe-based 3ω method may be written as k f = d f b (T f,ω T s,ω ) avg, (48) where T f,ω is calculated from Eq. () with the measured voltages and TCR, and the average over the frequency range is erformed. In order to determine the thermal conductivity of the film, the calculated temerature dro across the film is averaged over the exerimental frequency range. If the system contains additional films, the thickness and thermal roerties of these films must be known in order to subtract their contribution from the total exerimental temerature rise. Another way to calculate the thermal conductivity of the film may be carried out with the so-called differential 3ω technique, where the thermal conductivity of the film is calculated using the average temerature rise difference exerimentally measured at the same ower inut by similar heaters deosited on the secimen and a reference samle without the film of interest (8) : k f = d f [( ) b Tω r+f ( ) b Tω r ], (49) avg where subscrit r+f corresonds to the structure that includes the samle film and the subscrit r refers to the reference structure only. Although the differential technique requires two sets of measurements, the film thermal conductivity determined from Eq. (49) is insensitive to the substrate thermal conductivity, and the contributions from any additional films is nearly eliminated by the measurement on the reference samle. For further details and considerations on the alicability of the sloe and differential methods, Borca-Tarsiuc (8) and Dames 3 () are recommended readings. V. Heat conduction across a D multilayer-film on a substrate system The heat-conduction model develoed by Borca-Tarsiuc was emloyed for the data analysis throughout the resent work. Shortly, the model resents a solution based on a two-dimensional heat-conduction model across a multilayer system and a uniform heat flux boundary condition between the heater and the to film. Disregarding the contribution of the thermal mass of the heater, the comlex temerature oscillations of a heater is given by (8) : where T ω = π k y, A j = A j A (η) B (η) sin (bη) dη (5) (bη) k y,j B j k y,j B j tanh(b j d j ) A j k y,j B j k y,j B j tanh(b j d j ) j =,..., n, B j = k xy,j η + iω, α y,j k xy = k x k y, A n = tanh(b n d n ) s., (5a) (5b) (5c) (5d) In the revious exressions, η is the integration variable, i =, n is the total number of layers including the substrate, j corresonds to the jth layer starting from the to, subscrit y denotes the cross-lane erendicular to the film/substrate interface, while x defines the in-lane coordinate, b and l are the half-width and length (where the voltage dro is read) of the heater, resectively, is the eak electrical ower er unit length, k is the thermal con- 5 of 8

6 Normalized temerature, (4k/)Tω 6 4 Heater on a silicon substrate 3 3 Reduced frequency, Ω Meijer-G Cahill Borca-Tarsiuc Matrix Fig. 7: Normalized T ω sectrum of isotroic bulk silicon with k y = 6 W m K, l = mm, b = 6.5 µm, =. W, calculated with Eqs. (43) Cahill, (44) Meijer-G, (5) Borca-Tarsiuc and (5) Matrix formalism. ductivity, α = k/(ρ c ) the thermal diffusivity (where ρ is the density and c is the secific heat caacity of the layer), ω indicates the angular frequency and d the thickness of the layer. Equation (5d) establishes the substrate boundary condition, where s takes the values for semi-infinite, for an adiabatic condition and - for an isothermal boundary when the substrate is finite. V.. Matrix formalism The matrix formalism is similar to that reorted elsewhere (,8,,). Consider a multilayer system in vacuum with the layers numbered from bottom to the to, to n, where the heater is in contact with the to layer. The 3ω signal is obtained from the ac temerature of the to surface of the to layer. An ac current at ω flows through the heater stri normal to the lane of age, generating heat at ω. The ac surface temerature for a multilayer system averaged over the stri, is thus () : with T ω = π λ j = k y,j B + (η) + B (η) A + (η) B (η) A (η) B + (η) k xy,j η + i ω α y,j, sin (ηb) dη (5) λ h (ηb) k xy,j = k x,j k y,j, (53) where the subscrit h first layer, j = n refers to the heater metal stri, A + (η), A (η), B + (η), and B (η) are arameters determined by a matrix rocedure analogous to that given in reference (). The recursion relations show symbolically how B + (η) and B (η) change if we add a layer, considering the thermal resistance of the interfaces (). For instance, since the semi-infinite boundary condition BC alies at the bottom of the substrate, for a heater on a substrate system we have: ( ) B + B = ( ) ( ) λ + λ + λ λ R λ λ λ λ R λ λ λ + λ λ R λ + λ λ λ R }{{}}{{} Interface i= BC (54) As we add layers to the system a recursive roduct develos as follow: ( ) B + n ( B = Λ U j Λ j (55) ) j= with the interface Λ j and transfer U j matrices defined as: Λ j = ( ) λj+ + λ j + λ j+ λ j R j λ j+ λ j λ j+ λ j R j λ j+ λ j+ λ j + λ j+ λ j R j λ j+ + λ j λ j+ λ j R j U j = ( ) ex ( uj d j ) ex (u j d j ) (56) (57) where u j = (λ j /k y,j ) is the transfer wave vector, d j is the thickness of layer j, and the deendence of all other arameters on η is imlied. Regardless of the number of layers, A + (η) = /, and A (η) = / (i.e., the heater is on the to of a the stack, otherwise see Bauer et al. 4). When j = nw, then B + (η) =, and B (η) = considering semi-infinite boundary condition. The R j arameter it is defined as the thermal boundary resistance at an interface j, known as the Kaitza resistance (). Comaring between the Cahill model, Meijer-G function, Borca-Tarsiuc model and the matrix formalism for a heater on a substrate system Fig. 7, we can see that the numerical integration solutions to the equation agree each other. As ointed out by Cahill (), the integratin is an aroximation, which actually we see that largely differs from the Meijer-G solution in the low frequency range, articularly the real art, with an absolute difference u to.5 in the normalized scale. The difference for the out of hase art, is narrowed for all solutions. We must use the analytical model whenever exerimenting with heater on a substrate, leaving to any of the recursive formalism for multilayer systems. We need to consider these results since the thermal conductivity is obtained from the real art of the temerature rise. For the silicon examle, the error becomes negligible as the frequency is over Hz. For a two layer system, the real art of the temerature rise of Borca-Tarsiuc model matches that of the matrix formalism Fig. 8. There is no close solution the author is aware of of the integrals involving recurrent multilayer information. VI. Effect of the metal interface on the system In order to consider the heat conduction effects inside the heater, its heat caacitance (ρ h c h ) and thickness d h, and the thermal resistance R h between the heater and the film in contact with the heater should be included into the 6 of 8

7 Normalized temerature, (4k/)Tω Heater on a film-on-a-silicon-substrate 4 Reduced frequency, Ω Borca-Tarsiuc Matrix Fig. 8: T ω sectrum of an isotroic µm-thick film on bulk silicon, with k y =. W m K keeing the rest of the values as calculated in Fig. 7, calculated with Eqs. (5) Borca-Tarsiuc and (5) Matrix formalism. model. ρ h and c h are the density and the secific heat caacity of the heater, resectively. Under these conditions the comlex temerature rise of the heater is given by the following exression: ( ) T ω + R h T ω,h = ( b ). (58) b + i ω ρ h c h d h R h + T ω VII. Effects of black-body radiation and convection The ower is lost by radiation from the surface of the samle at osition x according to: 4ɛσT 3 T (x). To evaluate the influence of this radiative term, to Eq. (4), Cahill has roosed a corrected factor to the average temerature rise given by (,3) : T ω = π sin (ηb) ( (ηb) k )dη, (59) η + q + ɛσt 3 where ɛ is the emissivity, and σ = W m K 4 is the Stefan-Boltzmann constant. Fig. 9 shows a numerical analysis of the effect of the temerature on a substrate of. W m K, with thermal diffusivity m s, b = 6.5 µm and l = mm. The effects of radiation on the temerature oscillations are shown for several temerature values using an emissivity of. The influence of radiation is small, corresonding to an error in determining thermal conductivity less than % (,3). Dames exlained that the combined effects can be disregarded given some considerations are taken into account for the exerimental system (). Values for the microscoic heater stris as used in 3ω exeriments are not readily aarent in the literature but will be subject to two cometing effects. The narrower heater width tends to increase the convection heat transfer coefficient h conv, while the surrounding unheated substrate tends to imede air flow Normalized temerature, (4k/)Tω Reduced frequency, Ω 6 Fig. 9: Temerature rise variation for different temeratures in the black-body radiation effect Eqs. (59), taking ɛ =. and reduce h conv. The relative imact of heat losses is Q rad+conv Q cond 8 4 Temerature, T [K] h q s k s, (6) where Q rad, Q conv and Q cond are the radiation, convective and conduction heat ower, resectively, while q s and k s are the substrate thermal wavelength and thermal conductivity, resectively, and h = h conv + h rad is the total heat transfer coefficient convective lus radiative. For a tyical exeriment with q s µm and k s W m K, the losses are <% if h <. W m K, which as noted above is very easily satisfied. In contrast, DC measurements on larger samles with characteristic lengths at the centimeter scale would reduce the threshold h to the low hundreds of W m K. [] D. G. Cahill. Thermal conductivity measurement from 3 to 75 K: the 3ω method. Rev. Sci. Instrum., 6():8 88, 99. [] M. L. Bauer and P. M. Norris. General bidirectional thermal characterization via the 3ω technique. Rev. Sci. Instrum., 85(6), 4. [3] D. de Koninck. Thermal Conductivity Measurements Using the 3-Omega Technique: Alication to Power Harvesting Microsystems. PhD thesis, McGill University, Montreal, Canada, 8. [4] T. Häninnen. Imlementing the 3-Omega Technique for Thermal Conductivity Measurements. University of Jyväskylä. Aril 3. Finland. [5] C. Dames and G. Chen. ω, ω, and 3ω methods for measurements of thermal roerties. Rev. Sci. Instrum., 76(), 5. [6] N. O. Birge. Secific-heat sectroscoy of glycerol and roylene glycol near the glass transition. Phys. Rev. B, 34:63 64, of 8

8 [7] J. C. Jaeger H. S. Carslaw. Conduction of heat in solids. Oxford University Press, 959. [8] T. Borca-Tasciuc, A. R. Kumar, and G. Chen. Data reduction in 3ω method for thin-film thermal conductivity determination. Rev. Sci. Instrum., 7(4):39,. [9] J.-Y. Duquesne, D. Fournier, and C. Frétigny. Analytical solutions of the heat diffusion equation for 3ω method geometry. J. Al. Phys., 8(8),. [] C. Dames. Measuring the thermal conductivity of thin films: 3-omega and related electrothermal methods. In Annual Review of Heat Transfer, volume 6, chater. Begell House Digital Library, 3. [] D. Novotny J. H. Kim, A. Feldman. Alication of the three omega thermal conductivity measurement method to a film on a substrate of finite thickness. J. Al. Phys., 86:3959, 999. [] K. Chen B. W. Olson, S. Graham. A ractical extension of the 3ω method to multilayer structures. Rev. Sci. Instrum., 76:539, 5. [3] David G. Cahill and R. O. Pohl. Thermal conductivity of amorhous solids above the lateau. Phys. Rev. B, 35: , of 8