AMBIENT INLINE PURIFIER 302 PURIFICATION MEDIA SPECIFICATION
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1 AMBIENT INLINE PURIFIER 302 PURIFICATION MEDIA SPECIFICATION 0 1,000 slpm Ambient Inline Purifiers. For consistent gas quality and Impurity removal to pptv levels. S _- DCN Specification subject to change
2 MicroTorr Ambient Inline Purifiers: MicroTorr purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification. Combining model size with a selection of gas-specific purification materials, MicroTorr purifiers can be tailored to many different customer applications, while maintaining impurity removal to Part-Per-Billion (ppbv) levels or better. Optional valves and a micron particle filter are available as well as custom subsystem configurations. Competitive Advantages and Benefits: Reliability: Uncompromised process consistency and yield improvement. Performance: State-of-the-art purification technology, low pressure drop, and long lifetimes. Regenerability: Most MicroTorr media are factory regenerable, minimizing potentially hazardous waste. Quality: 316L stainless steel, Helium leak checked, and analytical testing to part-per-trillion (pptv) levels. Support: Lifetime estimation and regeneration service available through SAES Pure Gas Sales Network. 302 Media Purifier Properties Gases Purified Impurities Removed Particle Filtration Vessel construction Installation Orientation Leak Rating Operating temperature Lifetime Regenerability Certification HCl, Cl2, B2H6, BCl3, CClH3, GeCl4, GeH4, H2S, H2Se, HBr, NF3, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2, CHClF2, BF3 H2O to < 1 ppb; Metals < 1 ppb micron metal Stainless Steel 316L, electropolished to 10 Ra Vertically with flow downward. Consult factory for other orientations. 1 x 10-9 atm cc/sec of He -20 to 40 C (-4 to 104 F) Contact SAES Pure Gas for application specific lifetime calculations Not Regenerable CE Certified to the Pressure Equipment Directive (PED) Designed in accordance with ASME Part Number Configuration: MCXXXX XX Model Sizes MC1 MC45 MC50 MC190 MC200 MC400 MC450 MC500 MC700 MC1500 MC3000 HP190 HP400 HP700 HP3000 PG1 Media 302 Options No options F 0.003µm Particle Filter V Inlet/Outlet Valves FV Filter and Valves S _- DCN Specification subject to change
![Purifier Sizes Part Number Standard Models Maximum Flow (slpm) Average Flow (slpm) Operating Pressure (psig) Must be in gas phase Inlet Outlet Face to Face Length Weight (lb. [kg]) MC1-302F 5 0.](/docs-images/79/78818797/images/3-1.jpg "5 1,000 1/4\" MVCR 1/4\" MVCR 1.5 [38.1] 3.31 [84.1] < 0.7 [0.3] MC45-302 MC45-302F 10 1.5 1,000 1/4\" MVCR 1/4\" MVCR 1.5 [38.1] 4.50 [114.3] < 0.9 [0.4] MC50-302F 10 1.5 1,000 1/4\" MVCR 1/4\" MVCR 1.5 [38.1] 5.")
3 Purifier Sizes Part Number Standard Models Maximum Flow (slpm) Average Flow (slpm) Operating Pressure (psig) Must be in gas phase Inlet Outlet Face to Face Length Weight (lb. [kg]) MC1-302F ,000 1/4" MVCR 1/4" MVCR 1.5 [38.1] 3.31 [84.1] < 0.7 [0.3] MC MC45-302F ,000 1/4" MVCR 1/4" MVCR 1.5 [38.1] 4.50 [114.3] < 0.9 [0.4] MC50-302F ,000 1/4" MVCR 1/4" MVCR 1.5 [38.1] 5.00 [127.0] < 0.9 [0.4] MC F /4" MVCR 1/4" MVCR 2.0 [50.8] 8.20 [208.3] < 1.6 [0.7] MC F /4" MVCR 1/4" MVCR 2.0 [50.8] 6.30 [160.0] < 1.8 [0.8] MC F /4" MVCR 1/4" MVCR 3.0 [76.2] 8.20 [208.3] < 4.9 [2.2] MC F /4" MVCR 1/4" MVCR 3.0 [76.2] 7.94 [201.7] < 4.1 [1.8] MC F /4" MVCR 1/4" MVCR 2.0 [50.8] [317.5] < 2.8 [1.2] MC F /4" MVCR 1/4" MVCR 3.0 [76.2] [254.0] < 7.6 [3.4] MC F /2" MVCR 1/2" MVCR 3.0 [76.2] [462.3] < 8.0 [3.6] MC MC F /2" MVCR 1/2" MVCR 4.0 [101.6] [508.0] < 14.0 [6.4] High Pressure Models HP F ,000 1/4" MVCR 1/4" MVCR 2.0 [50.8] 8.20 [208.3] < 2.1 [0.9] HP F ,000 1/4" MVCR 1/4" MVCR 3.0 [76.2] 8.20 [208.3] < 4.9 [2.2] HP F ,000 1/4" MVCR 1/4" MVCR 3.0 [50.8] 10.0 [254.0] < 7.6 [3.4] HP F ,000 1/2" MVCR 1/2" MVCR 3.9 [100.1] 20.0 [508.0] < 26.0 [11.8] F = micron particle filter Face-Face Length S _- DCN Specification subject to change
4 Purifier Sizes, with inlet and outlet isolation valves Part Number Maximum Flow (slpm) Average Flow (slpm) Operating Pressure (psig) Must be in gas phase Inlet Outlet Face to Face Length with valves Weight with valves (lb. [kg]) Standard Models MC1-302FV ,000 1/4" FVCR 1/4" FVCR 1.5 [38.1] 8.91 [226.3] < 2.6 [1.2] MC45-302V MC45-302FV ,000 1/4" FVCR 1/4" FVCR 1.5 [38.1] [256.5] < 2.9 [1.3] MC50-302FV ,000 1/4" FVCR 1/4" FVCR 1.5 [38.1] [269.2] < 2.9 [1.3] MC FV /4" FVCR 1/4" FVCR 2.0 [50.8] [350.5] < 3.7 [1.7] MC FV /4" FVCR 1/4" FVCR 2.0 [50.8] [302.3] < 3.8 [1.8] MC FV /4" FVCR 1/4" FVCR 3.0 [76.2] [350.5] < 6.8 [3.1] MC FV /4" FVCR 1/4" FVCR 3.0 [76.2] [343.9] < 6.0 [2.7] MC FV /4" FVCR 1/4" FVCR 2.0 [50.8] [459.7] < 4.5 [2.0] MC FV /4" FVCR 1/4" FVCR 3.0 [76.2] [396.2] < 9.6 [4.4] MC FV /2" FVCR 1/2" FVCR 3.0 [76.2] [732.5] < 12.5 [5.8] MC V MC FV /2" FVCR 1/2" FVCR 4.0 [101.6] [778.3] < 18.7 [8.5] High Pressure Models HP FV ,000 1/4" FVCR 1/4" FVCR 2.0 [50.8] [350.5] < 4.1 [1.8] HP FV ,000 1/4" FVCR 1/4" FVCR 3.0 [76.2] [350.5] < 6.8 [3.1] HP FV ,000 1/4" FVCR 1/4" FVCR 3.0 [50.8] [396.2] < 9.6 [4.4] HP FV ,000 1/2" FVCR 1/2" FVCR 3.9 [100.1] [756.0] < 30.7 [13.9] HP FV ,200 1/2" MVCR 1/2" MVCR 3.9 [100.1] [962.0] < 39.7 [18.0] U Shaped Manifold PG1-302FV /4" FVCR 1/4" MVCR 2.0 [50.8] [350.5] < 5.1 [2.3] F = micron particle filter V = inlet and outlet isolation valves Face-Face Length Bypass and Dual Purifier Manifold Assemblies: Many configurations are available; please consult the factory for details. S _- DCN Specification subject to change
5 Other Purification Media s Available: Media Gases Purified Impurities Removed 202 CDA, O2, N2, Ar, He, Kr, Ne, Xe, H2, D2, CO2, N2O, NO, CF4 H2O to < 1 ppb 203 CDA, O2, N2, Ar, He, Kr, Ne, Xe, H2, D2, N2O, NO, CF4 H2O, CO2 to < 100 ppt; Volatile Acids, Organics, Refractory Compounds to < 1 ppt; Volatile Bases < 5 ppt, Metals < 1 ppb 302 Covered by this Specification HCl, Cl2, B2H6, BCl3, CClH3, GeCl4, GeH4, H2S, H2Se, HBr, NF3, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2, CHClF2, BF3 H2O to < 1 ppb; Metals < 1 ppb 403 N2, Ar, He, Kr, Ne, Xe, H2, CDA, O2 Volatile Acids, Organics, Refractory Compounds to <1 ppt; Volatile Bases < 5 ppt, Metals < 1 ppb 404 N2, Ar, He, Kr, Ne, Xe, H2, CDA, O2, CO2, C2H2, C3H6, C2H4, NH3, C2H6, C3H8, C4H10 Organics < 1 pptv, Metals < 1 ppbv 502 AsH3, PH3 H2O, O2 to < 1 ppb, Metals < 1 ppbv 503 H2 with up to 1% O2; O2 with up to 2% H2 H2 in O2 or O2 in H2 < 1 ppmv 602 CO H2O, O2, CO2, Acids, Bases, Organics, Refractory Compounds, Metals < 1 ppbv 702 NH3, C2H7N, C2H8N2, C2H4, C3H6, CH3SiH3, GeH4, SF6, SiH4, H2/SiH4 mixtures H2O, O2, CO2, NMHCs, Metals to < 1 ppb 802 SiH4 H2O, O2, CO, CO2, NMHCs, Sulphur compounds, Metals removal < 1 ppb 804 CO2 805 CO2 902 N2, Ar, He, Kr, Ne, Xe, CH4, C2H6, C3H8, C4H10, SF6, Fluorocarbons 904 H2, D2, H2-Inerts Mix H2O, O2, CO, H2 to < 100 ppt; Volatile Acids, Organics, Refractory Compounds to < 1 ppt; Volatile Bases < 5 ppt, Metals < 1 ppbv H2O < 100 ppt; Volatile Acids, Organics, Refractory Compounds to < 1 ppt; Volatile Bases < 5 ppt, Metals < 1 ppbv H2O, O2, CO, CO2, H2 to < 100 ppt; Volatile Acids, Organics, Refractory Compounds to < 1 ppt; Volatile Bases < 5 ppt, Metals < 1 ppbv H2O, O2, CO, CO2 to < 100 ppt; Volatile Acids, Organics, Refractory Compounds to < 1 ppt; Volatile Bases < 5 ppt, Metals < 1 ppbv 906 CDA, O2, N2O H2O, CO, CO2, NMHC to < 1 ppb, Metals < 1 ppbv Purifier Regeneration: Available from any SAES Pure Gas Regeneration Center. CE Directive: All MicroTorr Purifiers meet CE directive requirements and come with the CE Marking Santa Fe Road, San Luis Obispo, CA, 93401, USA Phone: spg@saes-group.com Website: SAES Pure Gas is ISO9001 certified ISO 9001:2008 S _- DCN Specification subject to change
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