No More Differentiator in : Development of Nonlinear Lead for Preciion Mechatronic Arun Palanikumar, Niranjan Saikumar, S. Haan HoeinNia arxiv:5.973v [c.sy] May Abtract Indutrial conit of three element: Lag (integrator), Lead (Differentiator) and Low Pa Filter (LPF). being a linear control method i inherently bounded by the waterbed effect due to which there exit a trade-off between preciion & tracking, provided by Lag and LPF on one ide and tability & robutne, provided by Lead on the other ide. Nonlinear reet trategie applied in Lag and LPF element have been very effective in reducing thi trade-off. However, there i lack of tudy in developing a reet Lead element. In thi paper, we develop a novel lead element which provide higher preciion and tability compared to the linear lead filter and can be ued a a replacement for the ame. The concept i preented and validated on a Lorentz-actuated nanometer preciion tage. Improvement in preciion, tracking and bandwidth are hown through two eparate deign. Performance i validated in both time and frequency domain to enure that phae margin achieved on the practical etup matche deign theorie. I. INTRODUCTION The high tech indutry i at the forefront of puhing the limitation and barrier in motion control technology. Demand for achieving higher preciion and peed are ever increaing. The wafer canner indutry, which i involved in manufacturing integrated circuit, i a prime example where (ub) nanometer preciion poitioning i required, while at the ame time meeting challenging throughput demand. For accurate and fat ervo-poitioning of mechanical actuator in real life engineering ytem, high quality motion control i required. and related linear controller (include ue of other linear filter) have been the tandard for indutrial motion control for many year owing to variou factor uch a it wide applicability and eae of implementation. doe not require a precie model or thorough knowledge of the ytem and can intead be tuned uing tandard guideline. With multiple advancement in feedforward control technique, it ha become poible to achieve high bandwidth and preciion uing. However, when extreme demand have to be met, the fundamental limitation of linear control, to which i not exempt, become more evident. Such inherent limitation caue different performance criteria to be conflicting in nature, making it impoible to improve one criterion without negatively influencing another. Thi phenomenon i known in linear control theory a waterbed effect. For a more detailed explanation of the water bed effect, [] and [] can be referred. The author are with Department of Preciion and Microytem Engineering, Delft Univerity of Technology, Delft, The Netherland A.Palanikumar@tudent.tudelft.nl, N.Saikumar@tudelft.nl, S.H.HoeinNiaKani@tudelft.nl Requirement for preciion motion control have been dicued in detail in [3] and []. Loop haping, one of the popular method for deigning controller in the high tech indutry, i a technique in which the controller i deigned in uch a way that the frequency repone of the open loop tranfer function ha the deired hape in gain and phae. For good tracking, high gain at frequencie upto the bandwidth i required. In, the integrator play the role of increaing gain at low frequencie. Simultaneouly, gain at high frequencie need to be low to effectively attenuate noie in the ytem and hence provide good preciion. Thi i commonly achieved through the ue of low pa filter. In the frequency region around the bandwidth, phae behavior determine the tability and robutne of the ytem. Phae addition in i achieved by the tamed differentiator or lead component. The contraint in the relation between gain and phae behavior in linear ytem i explained by Bode gain-phae relationhip [5]. Hence attempt to change gain behaviour to improve preciion and/or tracking negatively affect phae and hence tability and vice-vera. Alo attempt to improve bandwidth reult in decreae in phae margin and deterioration in preciion performance. Thee limitation are fundamental to linear controller including advanced optimal linear control and can only be overcome with the ue of nonlinear control. control i one uch promiing technique which can be ued for thi purpoe. control wa firt introduced by J.C. Clegg in 95, in the form of an integrator whoe tate i reet whenever the input error ignal croe zero []. Approximation of the behavior of Clegg integrator (CI) through decribing function analyi how that the CI ha a phae lag of about 3, which i 5 higher than that of a linear integrator, for imilar gain behavior. Since then, a lot of work ha been done on reet control theory and the benefit of uing reet controller in variou practical application have been invetigated. For example, reet control ha been ued to achieve improved performance in hard-dik-drive ytem, [7], [] and mechatronic ytem [9], []. In [], it i hown that reet can be ued to reduce overhoot and improve ettling time in PZT poitioning tage. Depite the promie hown, it i oberved that much of the reearch in reet control wa focued on the integrator. Some effort have been made in invetigating other reet element a well. For example, in [], a generalized fractional order reet element i introduced. In [3], a reet lead-lag filter ha been ued to improve mid-frequency diturbance rejection. And in [], a econd order reet element ha been introduced to be ued in tage control deign. However apart from reet integrator,
r - FF Σ RC e u r u Σr Σnr Fig. : Block diagram of feedback loop with a reet controller Σ RC, and plant Σ p. Feedforward term FF i calculated a given in [5]. the ue of reet element within the framework of for improved performance ha not been well invetigated. The motivation for thi reearch arie from the poibility of reducing the everity of the waterbed effect limitation in uing reet control. In thi paper, reet ha been implemented in the taming pole of the lead component in, and a controller ha been developed uing common loop haping technique. The main contribution of thi work i the concept of reet to overcome fundamental limitation of linear control along with two cae of reet controller deign with firt deign ued to improve tracking and preciion for ame bandwidth and econd deign for increae in bandwidth and tracking for ame preciion. In ection II, neceary background information about reet control i provided. The concept of reet i provided in ection III. The experimental etup ued for validation of the developed controller i decribed in ection IV. In ection V, experimental reult from implementation of the two controller are given, and compared with the performance of linear controller, followed by concluion. II. PRELIMINARIES A. Definition of Control A general reet controller can be defined a follow, uing the notation ued in []: ẋ r (t) = A R x r (t) B R e(t) if e(t), Σ RC := x r (t ) = A ρ x r (t) if e(t) = () u(t) = C R x r (t) D R e(t) where matrice A R,B R,C R,D R are the bae linear tate-pace matrice of the control ytem. A ρ i the reet matrix, which determine the after reet value of the tate. u(t) i the control input and the error ignal e(t) i the difference between reference r(t) and output y(t). x r (t) denote the controller tate. A typical control tructure uing reet control i hown in Fig.. The reet controller Σ RC i eparated into two component : a nonlinear part Σ r whoe tate are reet, and a linear part Σ nr whoe tate are not reet. The two component are connected in erie, with the output u r (t) from reet part given a input to the non reet part. B. Decribing Function Analyi Frequency repone of reet element can be approximated uing decribing function analyi. Thi method make the Σp y aumption that non linear ytem behavior ha a quai-linear amplitude dependent relation between inuoidal excitation input and the teady tate repone at the fundamental excitation frequency. The higher harmonic are neglected under the aumption that they are ufficiently filtered out by the low pa characteritic of the ytem. Decribing function thu help extend the ue of loop haping technique to reet control. For a more detailed explanation of decribing function, [] can be referred. The general decribing function of a reet ytem a defined in [7] i given by: with G DF ( jω) = C R ( jωi A R ) B R (I jθ D (ω)) D R () Θ D (ω) = ω π (ω)[γ D(ω) Λ (ω)] (3) where the following equation have been ued: Λ(ω) = ω I A R (ω) = I e ω π A R D (ω) = I A ρ e ω π A R C. Controlling nonlinearity with γ The reet matrix A ρ in () provide a degree of freedom in tuning the ytem and i defined a follow: [ ] γinr A ρ = () I nnr where n r and n nr are the number of tate in Σ r and Σ nr repectively. If the reetting parameter γ =, the reet element reduce to it bae linear ytem a no reet occur and γ = denote extreme reet. A γ increae, the nonlinearity in the ytem increae becaue the magnitude of jump in tate value increae. Increae in nonlinearity i not deired due to the aociated higher order dynamic. The variation of phae lag with change in γ i hown in Fig., and it can be een that the more nonlinear the ytem i, greater i the phae benefit. Phae lag - - -3 - -5 - -7 - -9 - -. -. -. -..... ting parameter Fig. : Variation of phae lag with change in γ. Decribing function of the generalized firt order reet element (GFORE) developed in [7], i compared with a linear lag filter in Fig. 3. It can be een that for the cae of γ =,
upto the corner frequency at Hz, the behavior of GFORE i imilar to that of the lag filter. At higher frequencie, the phae lag in GFORE i only 3 (for A ρ = ), a compared to 9 in lag filter, while gain behavior are almot imilar. Decribing function have alo been plotted for γ =.5 and γ =.5 to depict the variation in frequency repone with changing γ. A cl i the cloed loop matrix A-matrix [ ] A C = r B r C nrp B nrp C r A nrp in which (A r,b r,c r,d r ) are the tate pace matrice of Σ r and (A nrp,b nrp,c nrp,d nrp ) are the tate pace matrice of Σ nr and Σ p in erie. () Fig. 3: Frequency repone of FORE compared with that of a linear lag filter. It can be een that the cutoff frequency of GFORE alo varie with change in γ []. The ratio of cutoff frequency of GFORE to that of lag filter (β) i plotted in Fig. for different value of γ. Chooing γ value between - and can help attain the deired trade-off between phae lag, cutoff frequency and non linearity. β 5.5 3.5 3.5.5 -. -. -. -..... ting parameter Fig. : Variation of ratio β with change in γ. D. Stability Analyi The tability condition given in [] i ued for checking the tability of the ytem. The following condition wa provided for enuring aymptotic tability of a reet control ytem : Theorem [] There exit a contant β R n r and P ρ R n r n r,p ρ > where n r i the number of reet tate, uch that the retricted Lyapunov equation P >, A T cl P PA cl < (5) G G G B T P = C () ha a olution for P, where C and B are defined by C = [ ] βc nrp nr n nr P ρ, B = nnrp n r nr n r I nr Aρ Aρ Aρ (7) Thi condition ha been ued to tet tability of all developed controller. III. RESET Tranfer function of linear in erie form i given by: ( ) ( G = K p ω ) ( ) i ω d ( ) }{{ } ωt (9) ω l Lag component }{{}}{{} LPF Lead component where ω i i the frequency at which integral action i topped, and ω l i the cut off frequency of the LPF. K p i the proportional gain. Differentiating action i tarted at ω d and terminated at ω t, and therefore ω t > ω d. A dicued in ection I, differentiator or lead component of the add eential phae to the ytem in bandwidth region to achieve tability and robutne. Phae at the croover frequency alo affect the maximum overhoot of the ytem. Differentiator i tamed by placing a pole at ω t becaue having large gain at higher frequencie i not deirable for noie attenuation and preciion. The maximum phae lead that can be achieved from the differentiator in the abence of thi taming pole would be 9. However, the pole reduce the maximum phae lead to a value which depend on frequency interval between the zero and the pole. By ymmetrically placing the zero and pole around the croover frequency ω c, it i enured that the maximum phae from lead i achieved at bandwidth. Fig. 5a how the frequency repone of a typical differentiator ued in. ω d ωc ω t 5-5 9 ratio = ratio = 3 ratio = ω c Fig. 5: Bode plot of a differentiator. Bode plot howing increae in maximum phae and alo high freqeuncy gain with increaing ratio of ω t to ω d Higher and lower phae margin can be achieved by increaing or decreaing the frequency range between ω d
and ω t repectively. The problem with thi approach i that it reult in a trade-off between tracking and preciion performance on one ide and tability and robutne on the other. Thi can be oberved in Fig. 5b. A the poitive phae obtained increae with increae in the ratio of ω t to ω d, the gain at higher frequencie i alo increaed, which affect the preciion of the ytem. A a reult, with the linear deign, it i not poible to improve preciion while having the ame degree of robutne. Alo, with increaing phae, there i a decreae in low frequency gain thereby affecting tracking behavior. can be introduced in thi tamed differentiator to improve performance uch that thi fundamental limitation i overcome. i introduced uch that only the taming pole i reet reulting in the reet and non-reet part given by: ( ) Σ nr = ω ; Σ d r = ( ) ω t () Although the non-reetting part a given in () i not a proper function, thi in combination with integrator and LPF will be proper. In the cae that thi i not true, an LPF can be added at a frequency where it doe not affect phae at bandwidth, purely to make the function proper. The frequency repone obtained through decribing function analyi i compared with that of a linear tamed differentiator in Fig. a. It can be een that for a imilar gain behavior, phae at frequencie higher than ω t i not zero in the cae of reet. If γ = i ued, the poitive phae achieved would be 5 degree (a hown in ection II). Although the reetting action add very little phae around bandwidth compared to it linear counterpart, it create phae lead at higher frequencie. Thi phae lead created can be moved toward the bandwidth region by hifting ω t cloer to ω d. If ω t = ω d, then complete phae lead generated will be through reetting action eliminating the linear lead filter and thu creating a db gain line with a poitive phae, a hown in Fig.. To compenate for change in cutoff frequency due to reet (a hown in Fig. ), a factor α i ued. The reet element can be reformulated a given in (). γ i choen uch that ame phae margin i achieved. Σ r = ( ) () αω d It can be oberved that the gain at high frequency i lower than, while the low frequency gain i increaed, without affecting the phae margin. It can be concluded that theoretically, better tracking and better preciion ha been achieved while maintaining the ame robutne, which wa impoible to do with linear control. The reet element, when combined with an integrator and 5 ω d ωc ω t ω c = ω cr Fig. : Decribing function analyi how poitive phae added by reet at frequencie above ω t when compared to a linear lead component. can be ued to achieve the ame phae lead with favourable gain behavior. low pa filter, form controller A, given a Σ RC = ( αω }{{ d } Σ r ) ( K p ω ) ( I ) ( ) ω d ω }{{ l } Σ nr () Although the reulting controller i termed, the traditional differentiator ha been replaced by reet element which provide the required beneficial phae lead without the unneceary gain increae. K p i choen uch that the open loop gain calculated from decribing function analyi equal unity at ω c. -9 - ω c -9 - ω c Fig. 7: Comparion of decribing function of controller A with a controller having the ame bandwidth and phae margin. Comparion of decribing function of controller B with a controller having the ame preciion and phae margin. By increaing the controller gain uch that the gain at high frequencie equal that of, an increae in bandwidth can be achieved for the ame phae margin and preciion a hown in Fig. 7b. It can be een that bandwidth ha increaed from ω c to ω cr. Thi controller, which provide improved tracking and bandwidth for the ame phae margin ω cr
Controller and preciion, will be referred to a Controller B. Gain for Controller B at low frequencie i higher than that of Controller A, thereby indicating a further improvement in tracking performance. compared to. Thi can be explained by the higher low frequency gain of Controller A. The reduction for Controller B i even higher, at around %. Thi alo i a expected, ince by increaing bandwidth, the gain of Controller B at lower frequencie i greater than that of controller A. Meaured FRF Identified ytem The developed reet controller wa implemented in the Lorrentz-actuated preciion poitioning tage hown in Fig. a. The coil of the Lorentz actuator i attached to the tator and permanent magnet are mounted on the mover. Parallel leaf flexure are ued for the linear guiding of the tage. The poition of the tage i meaured uing a Renihaw RLE laer interferometer with a reolution of nm. Controller are developed uing MATLAB/Simulink environment and are run real time in a dspace DS3 control ytem, which act a the interface between the computer and the plant. A ampling rate of khz i ued for all controller. - - - - - - - - -5 - - 3 Fig. : Picture of the Lorentz tage (right) with the laer encoder on the left. Frequency repone of the ytem and the identified ytem model The frequency repone i hown in Fig. b along with the identified ytem, which ha the behavior of a econd order ma-pring-damper ytem. V. EXPERIMENTAL VALIDATION A. Controller Tuning Thi paper deal with the propoal and validation of reet and hence optimal tuning for performance i not preented. Intead controller are heuritically deigned to meet the required phae margin pecification. Controller A and B are tuned for the preciion tage, to have a bandwidth of 5 Hz and Hz repectively, with a phae margin of 5. ωi i choen to be ωc /, ωd to be ωc /5 and ωl = ωc 7. α i taken a.7. K p i 9. 5 for Controller A and.7 for Controller B. B. Time Domain Experiment Fig. 9: Cae -Tracking error for controller A v. Cae - Tracking error for controller B v. ) Steady State Preciion: In teady tate, with only enor noie preent in the ytem, the achieved preciion wa nm for all the three controller, which i equal to the reolution of the interferometer ued. Therefore, to tudy the improvement in preciion, white noie of amplitude 5 nm wa added a meaurement noie n and the error ignal wa meaured. The obtained teady tate error are compared with that of the in Fig., and the maximum error are tabulated in Table I. A expected, Controller A howed reduction in teady tate error while Controller B wa tuned to have the ame preciion and hence there wa no improvement. - - - - - - ) Reference tracking: Fourth-order trajectory planning a formulated in [5] i ued to create a triangular wave reference ignal with an amplitude of nm. Alo, the econd-order feedforward propoed in [5] i implemented. Maximum allowed velocity, acceleration, jerk and nap of thi reference ignal are limited. The tracking error obtained from the reet controller are compared with the error from in Fig. 9. RMS value of tracking error are tabulated in Table I. The RMS error for Controller A ha reduced by 3 % Time () - -3 - Time () - RMS Tracking Error(nm). 3. 5.73 TABLE I: Comparion of maximum teady tate error and RMS tracking error for the developed controller. IV. EXPERIMENTAL SETUP Controller A Controller B Max. Steady State Error(nm) Time () Time () Fig. : Cae - Steady error for controller A v. Cae - Steady error for controller B v. C. Frequency Domain Experiment In order to validate the controller in frequency domain, a cloed loop identification technique wa ued to compute the
- C() P() Fig. : Block diagram of the control loop with ignal y(t) and n(t) ued for cloed loop identification. enitivity function S( jω) and the complementary enitivity function T ( jω). Both T ( jω) and S( jω) were identified by applying a frequency weep at the meaurement noie poition n in Fig.. T ( jω) wa identified a the tranfer from n to y, wherea S( jω) wa identified a the tranfer from n to y n. The identified enitivity function for controller A and B are compared with enitivity function etimated from decribing function analyi in Fig.. Similarly, the complementary enitivity function are compared in Fig. 3. It can be een that the meaured repone match well with the etimated repone. From Fig. 3b, it can be een that the bandwidth ha been increaed from 5Hz to around Hz by Controller B, which i an improvement of 33%. The enitivity peak in the identified repone are lightly higher than with decribing function, which how that reet ha added marginally leer phae than anticipated from decribing function. However, decribing function method ha been hown to be a good approximation of phae addition by reet in reet controller. - - - Meaured Etimated 3 - - - n 3 y Meaured Etimated Fig. : Comparion of etimated and meaured enitivity function for Controller A Comparion of etimated and meaured complementary function for Controller B - Meaured Etimated - 3 - - -3 Meaured Etimated Fig. 3: Comparion of etimated and meaured complementary enitivity function for Controller A Comparion of etimated and meaured complementary enitivity function for Controller B 3 VI. CONCLUSIONS In thi work a novel reet control method ha been propoed in which reet i implemented within the framework of to eliminate the need for differentiating action, thu overcoming waterbed effect and achieving better performance. Two reet controller deign have been provided. The developed controller were implemented in a high preciion poitioning etup. Controller A ha been hown to provide better tracking and preciion than, for the ame bandwidth. Controller B, a expected from it higher low frequency gain, howed even better tracking and a 33% improvement in bandwidth for the ame preciion. Frequency repone approximation made uing decribing function analyi are validated by identifying enitivity and complementary enitivity behaviour from the etup. It i hown that the identified repone match well. The fundamental trade-off between bandwidth and preciion in ha been relaxed uing the novel deign, and the everity of water bed effect ha been reduced uing reet control. REFERENCES [] A. Baño and A. Barreiro, control ytem. Springer Science & Buine Media,. [] S. Skogetad and I. Potlethwaite, Multivariable feedback control: analyi and deign. Wiley New York, 7, vol.. [3] R. M. Schmidt, G. Schitter, and A. Ranker, The Deign of High Performance Mechatronic-: High-Tech Functionality by Multidiciplinary Sytem Integration. IOS Pre,. [] K. K. Tan, T. H. Lee, and S. Huang, Preciion motion control: deign and implementation. Springer Science & Buine Media, 7. [5] K. J. Åtröm, Limitation on control ytem performance, European Journal of Control, vol., no., pp.,. [] J. Clegg, A nonlinear integrator for ervomechanim, Tranaction of the American Intitute of Electrical Engineer, Part II: Application and Indutry, vol. 77, no., pp., 95. [7] Y. Guo, Y. Wang, and L. Xie, Frequency-domain propertie of reet ytem with application in hard-dik-drive ytem, IEEE Tranaction on Control Sytem Technology, vol. 7, no., pp. 53, 9. [] H. Li, C. Du, Y. Wang, and Y. Guo, Dicrete-time optimal reet control for the improvement of hdd ervo control tranient performance, in American Control Conference, 9. ACC 9. IEEE, 9, pp. 53 5. [9] S. H. HoeinNia, I. Tejado, and B. M. Vinagre, Fractional-order reet control: Application to a ervomotor, Mechatronic, vol. 3, no. 7, pp. 7 7, 3. [] S. H. HoeinNia, I. Tejado, D. Torre, B. M. Vinagre, and V. Feliu, A general form for reet control including fractional order dynamic, IFAC Proceeding Volume, vol. 7, no. 3, pp. 33,. [] J. Zheng, Y. Guo, M. Fu, Y. Wang, and L. Xie, Improved reet control deign for a pzt poitioning tage, in Control Application, 7. CCA 7. IEEE International Conference on. IEEE, 7, pp. 7 77. [] N. Saikumar and H. HoeinNia, Generalized fractional order reet element (gfrore). [3] Y. Li, G. Guo, and Y. Wang, control for midfrequency narrowband diturbance rejection with an application in hard dik drive, IEEE Tranaction on Control Sytem Technology, vol. 9, no., pp. 339 3,. [] L. Hazeleger, M. Heertje, and H. Nijmeijer, Second-order reet element for tage control deign, in American Control Conference (ACC),. IEEE,, pp. 3. [5] P. Lambrecht, M. Boerlage, and M. Steinbuch, Trajectory planning and feedforward deign for electromechanical motion ytem, Control Engineering Practice, vol. 3, no., pp. 5 57, 5. [] W. E. Vander Velde, Multiple-input decribing function and nonlinear ytem deign. McGraw-Hill, New York, 9.