*Specifications subject to change without notice.

The Power of STEM *Specifications subject to change without notice. No. 1301G040C 1101E010C Printed in Japan, Kp

Atomic Resolution Analytical Microscope Serving Advanced Technology

Atomic Resolution Analytical Microscope

The Power of STEM C-The Nanoworld:where individual atoms that constitute substances are directly observed.- A TEM equipped with Cold-FEG (cold field emission gun) realizes this dream. Cold- FEG, a superb high-quality electron beam is produced that achieves a narrower energy spread and forms a shaper probe with higher brightness than a conventional Schottky FEG. A new evacuation system maintains ultra-high vacuum (10 9 Pa) near the electron source, thus providing high stability of the electron probe current. Furthermore, a newly designed power supply achieves high electrical stability on the order of 10 7, thus maintaining the very narrow energy spread of the electron probe. JEOL offers Ultra-high resolution with this next-generation Improved Cold-FEG.

High enerr g y - r e s o lutt ion an n a l y s i s of chemii c a l b o ndii n g s t a t e s A Cold-FEG is superior to a Schottky FEG in the following ways: The smaller electron source size leads to higher resolution. -type TiO2 EELS spectrum obtained from Ti site ADF signal RGB overlay Sr-M map Ti-L map Lattice constant (a=b=0.4539nm,c=0.2959nm) Higher brightness and a smaller source size produce a smaller (sharper) electron probe even when the electron source is not greatly demagnified. This feature makes it possible to generate a dramatically larger probe current than that of the Schottky FEG when the probe diameter is the same for both FEGs. O The narrower energy spread of the electrons emitted from the Cold-FEG enables higher energy resolution EELS analysis and a chromatic aberration reduced electron Ti beam. O-K map Improvem m e n t of high h -rr e s o l utt i o n ST T E M imaging A cold-feg can produce a brighter, shaper electron probe than that of a Schottky FEG. In addition, the higher energy resolution of Cold-FEG enables acquisition of EELS spectra that contain atomic resolution information on chemical bonding states. The EELS spectra and maps on this page are obtained from SrTiO 3 in only a few minutes. In this data, there exist sites with and without, which results in changes of spectral shape. In a comparison between the obtained spectra and corresponding standard spectra, it is Atomic Resolution Analytical Microscope C ld l found that the valences of the sites with electron beam are decreased. This valence Intensity profile from rectangle area decrease is estimated to result from the ejection of oxygen in the specimen due to electron The figure above shows an HAADF image of Si (112), showing that the dumbbell structure corresponding beam. to an atomic spacing of 78 pm is clearly resolved. In an FFT pattern of this image (Figure below), the (173) spot corresponding to a spacing of 70 pm is observed, demonstrating a superb capability for higher resolution information. FFT analysis -type TiO2 Lattice constant (a=b=0.3785nm,c=0.9514nm) out The use of a Cold-FEG dramatically improves EELS energy resolution. In particular, ELNES (energy-loss near-edge struc- ture) exhibits a characteristic shape depending on the chemical Schottky FEG bonding states in a substance. The figures above are examples of FWHM:0.8eV analysis of rutile and anatase type crystals. EELS spectra, which show ELNES obtained from the Cold-FEG and the Ti-L edge, reveal clear differences in chemical bonding FWHM:0.3eV states (indicated by arrows). The higher energy resolution of a Cold-FEG enables clear observation of these differences. (Highest energy resolution: about 0.3 ev for Cold-FEG, about 0.7 to 0.8 ev for Schottky FEG) out The Power of STEM

High enerr g y - r e s o lutt ion an n a l y s i s of chemii c a l b o ndii n g s t a t e s A Cold-FEG is superior to a Schottky FEG in the following ways: The smaller electron source size leads to higher resolution. -type TiO2 EELS spectrum obtained from Ti site ADF signal RGB overlay Sr-M map Ti-L map Lattice constant (a=b=0.4539nm,c=0.2959nm) Higher brightness and a smaller source size produce a smaller (sharper) electron probe even when the electron source is not greatly demagnified. This feature makes it possible to generate a dramatically larger probe current than that of the Schottky FEG when the probe diameter is the same for both FEGs. O The narrower energy spread of the electrons emitted from the Cold-FEG enables higher energy resolution EELS analysis and a chromatic aberration reduced electron Ti beam. O-K map Improvem m e n t of high h -rr e s o l utt i o n ST T E M imaging A cold-feg can produce a brighter, shaper electron probe than that of a Schottky FEG. In addition, the higher energy resolution of Cold-FEG enables acquisition of EELS spectra that contain atomic resolution information on chemical bonding states. The EELS spectra and maps on this page are obtained from SrTiO 3 in only a few minutes. In this data, there exist sites with and without, which results in changes of spectral shape. In a comparison between the obtained spectra and corresponding standard spectra, it is Atomic Resolution Analytical Microscope C ld l found that the valences of the sites with electron beam are decreased. This valence Intensity profile from rectangle area decrease is estimated to result from the ejection of oxygen in the specimen due to electron The figure above shows an HAADF image of Si (112), showing that the dumbbell structure corresponding beam. to an atomic spacing of 78 pm is clearly resolved. In an FFT pattern of this image (Figure below), the (173) spot corresponding to a spacing of 70 pm is observed, demonstrating a superb capability for higher resolution information. FFT analysis -type TiO2 Lattice constant (a=b=0.3785nm,c=0.9514nm) out The use of a Cold-FEG dramatically improves EELS energy resolution. In particular, ELNES (energy-loss near-edge struc- ture) exhibits a characteristic shape depending on the chemical Schottky FEG bonding states in a substance. The figures above are examples of FWHM:0.8eV analysis of rutile and anatase type crystals. EELS spectra, which show ELNES obtained from the Cold-FEG and the Ti-L edge, reveal clear differences in chemical bonding FWHM:0.3eV states (indicated by arrows). The higher energy resolution of a Cold-FEG enables clear observation of these differences. (Highest energy resolution: about 0.3 ev for Cold-FEG, about 0.7 to 0.8 ev for Schottky FEG) out The Power of STEM

High enerr g y - r e s o lutt ion an n a l y s i s of chemii c a l b o ndii n g s t a t e s A Cold-FEG is superior to a Schottky FEG in the following ways: The smaller electron source size leads to higher resolution. -type TiO2 EELS spectrum obtained from Ti site ADF signal RGB overlay Sr-M map Ti-L map Lattice constant (a=b=0.4539nm,c=0.2959nm) Higher brightness and a smaller source size produce a smaller (sharper) electron probe even when the electron source is not greatly demagnified. This feature makes it possible to generate a dramatically larger probe current than that of the Schottky FEG when the probe diameter is the same for both FEGs. O The narrower energy spread of the electrons emitted from the Cold-FEG enables higher energy resolution EELS analysis and a chromatic aberration reduced electron Ti beam. O-K map Improvem m e n t of high h -rr e s o l utt i o n ST T E M imaging A cold-feg can produce a brighter, shaper electron probe than that of a Schottky FEG. In addition, the higher energy resolution of Cold-FEG enables acquisition of EELS spectra that contain atomic resolution information on chemical bonding states. The EELS spectra and maps on this page are obtained from SrTiO 3 in only a few minutes. In this data, there exist sites with and without, which results in changes of spectral shape. In a comparison between the obtained spectra and corresponding standard spectra, it is Atomic Resolution Analytical Microscope C ld l found that the valences of the sites with electron beam are decreased. This valence Intensity profile from rectangle area decrease is estimated to result from the ejection of oxygen in the specimen due to electron The figure above shows an HAADF image of Si (112), showing that the dumbbell structure corresponding beam. to an atomic spacing of 78 pm is clearly resolved. In an FFT pattern of this image (Figure below), the (173) spot corresponding to a spacing of 70 pm is observed, demonstrating a superb capability for higher resolution information. FFT analysis -type TiO2 Lattice constant (a=b=0.3785nm,c=0.9514nm) out The use of a Cold-FEG dramatically improves EELS energy resolution. In particular, ELNES (energy-loss near-edge struc- ture) exhibits a characteristic shape depending on the chemical Schottky FEG bonding states in a substance. The figures above are examples of FWHM:0.8eV analysis of rutile and anatase type crystals. EELS spectra, which show ELNES obtained from the Cold-FEG and the Ti-L edge, reveal clear differences in chemical bonding FWHM:0.3eV states (indicated by arrows). The higher energy resolution of a Cold-FEG enables clear observation of these differences. (Highest energy resolution: about 0.3 ev for Cold-FEG, about 0.7 to 0.8 ev for Schottky FEG) out The Power of STEM

High enerr g y - r e s o lutt ion an n a l y s i s of chemii c a l b o ndii n g s t a t e s A Cold-FEG is superior to a Schottky FEG in the following ways: The smaller electron source size leads to higher resolution. -type TiO2 EELS spectrum obtained from Ti site ADF signal RGB overlay Sr-M map Ti-L map Lattice constant (a=b=0.4539nm,c=0.2959nm) Higher brightness and a smaller source size produce a smaller (sharper) electron probe even when the electron source is not greatly demagnified. This feature makes it possible to generate a dramatically larger probe current than that of the Schottky FEG when the probe diameter is the same for both FEGs. O The narrower energy spread of the electrons emitted from the Cold-FEG enables higher energy resolution EELS analysis and a chromatic aberration reduced electron Ti beam. O-K map Improvem m e n t of high h -rr e s o l utt i o n ST T E M imaging A cold-feg can produce a brighter, shaper electron probe than that of a Schottky FEG. In addition, the higher energy resolution of Cold-FEG enables acquisition of EELS spectra that contain atomic resolution information on chemical bonding states. The EELS spectra and maps on this page are obtained from SrTiO 3 in only a few minutes. In this data, there exist sites with and without, which results in changes of spectral shape. In a comparison between the obtained spectra and corresponding standard spectra, it is Atomic Resolution Analytical Microscope C ld l found that the valences of the sites with electron beam are decreased. This valence Intensity profile from rectangle area decrease is estimated to result from the ejection of oxygen in the specimen due to electron The figure above shows an HAADF image of Si (112), showing that the dumbbell structure corresponding beam. to an atomic spacing of 78 pm is clearly resolved. In an FFT pattern of this image (Figure below), the (173) spot corresponding to a spacing of 70 pm is observed, demonstrating a superb capability for higher resolution information. FFT analysis -type TiO2 Lattice constant (a=b=0.3785nm,c=0.9514nm) out The use of a Cold-FEG dramatically improves EELS energy resolution. In particular, ELNES (energy-loss near-edge struc- ture) exhibits a characteristic shape depending on the chemical Schottky FEG bonding states in a substance. The figures above are examples of FWHM:0.8eV analysis of rutile and anatase type crystals. EELS spectra, which show ELNES obtained from the Cold-FEG and the Ti-L edge, reveal clear differences in chemical bonding FWHM:0.3eV states (indicated by arrows). The higher energy resolution of a Cold-FEG enables clear observation of these differences. (Highest energy resolution: about 0.3 ev for Cold-FEG, about 0.7 to 0.8 ev for Schottky FEG) out The Power of STEM