Improving the accuracy of Atomic Force Microscope based nanomechanical measurements. Bede Pittenger Bruker Nano Surfaces, Santa Barbara, CA, USA

Similar documents
Application Note #149 Improving the Accuracy of Nanomechanical Measurements with Force-Curve-Based AFM Techniques

Application Note #148 Quantitative Measurements of Elastic and Viscoelastic Properties with FASTForce Volume CR

Lorentz Contact Resonance for viscoelastic measurements of polymer blends

Lorentz Contact Resonance for viscoelastic measurements of polymer blends

Quantitative Mechanical Property Mapping at the Nanoscale with PeakForce QNM

Atomic Force Microscopy imaging and beyond

Empowering today s nanoscale research with Peak Force Tapping

Quantitative Nanomechanical Measurements in HybriD TM Mode Atomic Force Microscopy

Module 26: Atomic Force Microscopy. Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM

Characterization of MEMS Devices

Probing of Polymer Surfaces in the Viscoelastic Regime

NIS: what can it be used for?

RP 2.7. SEG/Houston 2005 Annual Meeting 1525

The Powerful Diversity of the AFM Probe

BioAFM spectroscopy for mapping of Young s modulus of living cells

Scanning Force Microscopy II

Scanning Nanoelectrochemistry and Nanoelectrical Liquid Imaging with Nanoelectrode Probe

Dynamic Mechanical Analysis (DMA) of Polymers by Oscillatory Indentation

Material Anisotropy Revealed by Phase Contrast in Intermittent Contact Atomic Force Microscopy

Characterisation Programme Polymer Multi-scale Properties Industrial Advisory Group 22 nd April 2008

Basic Laboratory. Materials Science and Engineering. Atomic Force Microscopy (AFM)

Lecture 12: Biomaterials Characterization in Aqueous Environments

Lecture Note October 1, 2009 Nanostructure characterization techniques

Instrumentation and Operation

Outline Scanning Probe Microscope (SPM)

Performance and Control of the Agilent Nano Indenter DCM

MECHANICAL PROPERTIES OF HYDROGEL USING NANOINDENTATION

Accurate thickness measurement of graphene

3.052 Nanomechanics of Materials and Biomaterials Thursday 02/15/07 Prof. C. Ortiz, MIT-DMSE I LECTURE 4: FORCE-DISTANCE CURVES

3.052 Nanomechanics of Materials and Biomaterials Thursday 02/22/07 Prof. C. Ortiz, MIT-DMSE

Mapping Elastic Properties of Heterogeneous Materials in Liquid with Angstrom-Scale Resolution

FEM-SIMULATIONS OF VIBRATIONS AND RESONANCES OF STIFF AFM CANTILEVERS

3.052 Nanomechanics of Materials and Biomaterials Thursday 02/22/07 Prof. C. Ortiz, MIT-DMSE

Mapping the mechanical stiffness of live cells with the scanning ion conductance microscope

Supplementary Information: Nanoscale heterogeneity promotes energy dissipation in bone

3.052 Nanomechanics of Materials and Biomaterials Thursday 02/08/06 Prof. C. Ortiz, MIT-DMSE I LECTURE 2 : THE FORCE TRANSDUCER

DETERMINATION OF THE ADHESION PROPERTIES OF MICA VIA ATOMIC FORCE SPECTROSCOPY

Lecture 4 Scanning Probe Microscopy (SPM)

Supporting Information. for. A robust AFM-based method for locally measuring the elasticity of. samples

Nanomechanics Measurements and Standards at NIST

Scanning Tunneling Microscopy

ADVANCED DYNAMIC MECHANICAL ANALYSIS OF A TIRE SAMPLE BY NANOINDENTATION

Supporting information

Features of static and dynamic friction profiles in one and two dimensions on polymer and atomically flat surfaces using atomic force microscopy

Supporting Information

Surface Chemical Analysis Using Scanning Probe Microscopy

Introductory guide to measuring the mechanical properties of nanoobjects/particles

Investigation of the Local Mechanical Properties of the SAC Solder Joint with AFM Judit Kámán a *, Attila Bonyár b

Keysight Technologies Instrumented Indentation Testing with the Keysight Nano Indenter G200. Application Note

And Manipulation by Scanning Probe Microscope

AFM Imaging In Liquids. W. Travis Johnson PhD Agilent Technologies Nanomeasurements Division

Nonlinear Finite Element Modeling of Nano- Indentation Group Members: Shuaifang Zhang, Kangning Su. ME 563: Nonlinear Finite Element Analysis.

Effect of AFM Cantilever Geometry on the DPL Nanomachining process

State Feedback Control for Adjusting the Dynamic Behavior of a

Nanoindentation of Polymers: An Overview

Scanning Probe Microscopy. Amanda MacMillan, Emmy Gebremichael, & John Shamblin Chem 243: Instrumental Analysis Dr. Robert Corn March 10, 2010

Point mass approximation. Rigid beam mechanics. spring constant k N effective mass m e. Simple Harmonic Motion.. m e z = - k N z

D Y N A M I C M E C H A N I C A L A N A L Y S I S A N D I T S A D V A N T A G E S O V E R D E F L E C T I O N T E M P E R A T U R E U N D E R L O A D

Investigation of Dynamical and Static Operation Modes of Atomic Force Microscope

SUPPLEMENTARY INFORMATION

Intensity (a.u.) Intensity (a.u.) Raman Shift (cm -1 ) Oxygen plasma. 6 cm. 9 cm. 1mm. Single-layer graphene sheet. 10mm. 14 cm

Session 11: Complex Modulus of Viscoelastic Polymers

Synthesis, Characterization and Tribological Evaluation of SDS stabilized. Antiwear Lubricant Additives

MECHANICAL TESTS ON EPOXY RESIN NANOSCALE MODULUS MEASUREMENT AND LONG TERM CREEP BEHAVIOR

Please allow us to demonstrate our capabilities and test us testing your samples!

Supplementary Figures

Intermittent-Contact Mode Force Microscopy & Electrostatic Force Microscopy (EFM)

Nanoindentation of the a and c domains in a tetragonal BaTiO 3 single crystal

Mat. Res. Soc. Symp. Proc. Vol Materials Research Society

Supporting Information

NIST ELECTROSTATIC FORCE BALANCE EXPERIMENT

AFM Studies of Pristine PCBM Changes Under Light Exposure. Erin Chambers

Size dependence of the mechanical properties of ZnO nanobelts

Pacs numbers ( v, Fc, d, Uv, p)

Nanoscale visualization and multiscale mechanical implications of bound rubber interphases in rubber carbon black nanocomposites

Nanoscale IR spectroscopy of organic contaminants

Micro-Rheology Measurements with the NanoTracker

AFM-IR: Technology and applications in nanoscale infrared spectroscopy and chemical imaging

Dynamic Mechanical Analysis of Solid Polymers and Polymer Melts

AFM for Measuring Surface Topography and Forces

International Journal of Biotechnology and Bioengineering

Acoustics and atomic force microscopy for the mechanical characterization of thin films

Appendix (Supplementary Material)

Supplementary Information for. Effect of Ag nanoparticle concentration on the electrical and

Vibration Studying of AFM Piezoelectric Microcantilever Subjected to Tip-Nanoparticle Interaction

Measuring Young s modulus of 20LP10L20-LLA40 Microspheres and Gelatin-Methacrylamide (GelMA) Hydrogel using nanoindentation

Chapter 2 Correlation Force Spectroscopy

General concept and defining characteristics of AFM. Dina Kudasheva Advisor: Prof. Mary K. Cowman

MS482 Materials Characterization ( 재료분석 ) Lecture Note 11: Scanning Probe Microscopy. Byungha Shin Dept. of MSE, KAIST

Scanning Force Microscopy

Atomic Force Microscopy (AFM) Part I

ELECTROMAGNETIC-RESONANCE-ULTRASOUND MICROSCOPY (ERUM) FOR QUANTITATIVE EVALUATION OF LOCALIZED ELASTIC CONSTANTS OF SOLIDS

Measurement of hardness, surface potential, and charge distribution with dynamic contact mode electrostatic force microscope

CHARACTERIZATION OF VISCOELASTIC PROPERTIES OF POLYMERIC MATERIALS THROUGH NANOINDENTATION

Atomic and molecular interactions. Scanning probe microscopy.

VEDA - Virtual Environment for Dynamic Atomic Force Microscopy

Influence of Ionic Strength on Elasticity of Bacterial Cell Surface Appendages as Characterized by Quantitative Nanomechanical Atomic Force Microscopy

RHK Technology Brief

Software Verification

Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design

Transcription:

Improving the accuracy of Atomic Force Microscope based nanomechanical measurements Bede Pittenger Bruker Nano Surfaces, Santa Barbara, CA, USA

How can we improve accuracy in our nanomechanical measurements? 1. Choose the right tool for the job 2. Understand and minimize error sources 3. Improve modeling of contact mechanics and cantilever dynamics 2

AFM mode time and modulus ranges Force Volume and PeakForce Tapping 3

PeakForce QNM and Force Volume Non-resonant mechanical property mapping modes ~1994: Force Volume (FV) ~2010: PeakForce Tapping Z motion Deflection Linear ramping: abrupt turn-around at high speed -> ringing, overshoot Discrete force triggers at each ramp: attempts to turn around at trigger. At high speeds, it can t reverse fast enough, so it overshoots. Ramping rate is limited (~.1kHz) Sinusoidal ramping (not linear): no piezo resonance, no overshoot Real feedback loop force control: benefits from prior curves Fast ramping (~khz): faster images, even with more pixels Low force, high stability PeakForce QNM & FV both collect the complete force curve from every interaction between tip and sample, directly calculating and mapping sample properties 4

Resolution & Force Control at high ramp rate with PeakForce Tapping 2000Hz 5

Improved Force Volume & Ramping High Speed, Wide Ramp Range & Quantitative Data High Speed, Quantitative Force Maps From <1Hz to >200Hz linear ramping Overlaps PeakForce Tapping rates 156Hz 1Hz High Resolution Force Maps in X, Y, Z >512x512 pixel images practical Multiple property maps calculated Multiple ramp data channels acquired Collect up to 12 data cubes at once Improved offline analysis allowing direct comparison with PFC data sets Surface hold functionality 6

Load F (nn) Deflection (nm) Analyzing Force Curves From Deflection and Z to modulus Deflection (V) Z Position (V) time time 1. Eliminate time 2. Apply Deflection sensitivity 3. Apply Z sensitivity Load vs. Displacement F = 4 3 E Rd 3/2 Indentation d (nm) Elastic Unloading curve 4. Calculate indentation 5. Apply Spring constant 6. Fit data with contact mechanics model Force Curve Z Position (nm) 7

Force Volume Error Analysis Consider Hertzian (DMT) contact model Force F = 4 3 E Rd 3/2 = K c D If Z is piezo extension, d ~ Z Z 0 D Where D and d are deflection and indentation relative to pull-off. Deflection D = S D V where V is the deflection voltage d Potential sources of error include: tip radius (R), spring constant (Kc), Z position, deflection voltage (V), and deflection sensitivity (Sd) Variance formula allows estimation of error in E = 3K c δe E 2 = 1 4 δr R 2 + δkc Kc 2 + 9 4 1 + D d 2 δz Z Substitute indentation Ratio : d D = K c F and E* if desired 2 + 1 + 3D 3 4E RF 2d 2 δs D S D 4 R D d 1.5 2 + δv V 2 3 to put in terms of 8 2

Estimated error in modulus for force volume dr~15%, dkc~6-16%, dsd~5%, dv~1%, dz~1% Constant Force Constant Force: low modulus limit is dominated by error in R and Kc Not always practical to go to very low modulus with stiff probes since deformation gets huge (may need nonlinear elasticity, plastic deformation) High modulus limit dominated by error in Z and Deflection Sensitivity Constant deformation: error increases for soft samples due to baseline deflection noise For PeakForce Tapping, Z error will be higher: typically adds ~5% to FV error 9

How to improve accuracy in FV & PFT New probes for cells LDV calibrated spring constants Controlled tip radius=65nm New probes for materials LDV calibrated spring constants Controlled tip radius =33nm Selection of spring constants to cover range of moduli 0.25, 5, 40, 200 N/m Guided calibration software Better contact modeling 10

Accuracy of PF-QNM (vs. DMA) Ternary polymer blend DMT Modulus PE PP PS PP PE PS PE:PP PS:PP DMA 2.19 1.95 2.92 0.89 1.33 avg AFM 1.98 1.24 2.63 0.62 1.32 stdev 0.16 0.22 0.35 0.08 0.10 stdev/avg 8% 18% 13% 12% 8% DMA-AFM 10% 45% 10% 36% 1% 11

Practical issues with nanomechanical measurements Special modeling Time-dependent deformation: include viscoelasticity Non-ideal sample geometry: sample not homogeneous! Tip contamination Must detect and clean or replace tip Elastic limit Avoid exceeding elastic limit: results in increased contamination & needs inelastic modeling Surface layer? Compare properties at different deformation depths (and ideally with Hysitron nanoindenter) [1] M. Chyasnavichyus, S. L. Young, and V. V Tsukruk, Langmuir, 2014. [2] Y. M. Efremov, W.-H. Wang, S. D. Hardy, R. L. Geahlen, and A. Raman, Sci. Rep., 2017. 12

AFM mode time and modulus ranges Contact Resonance 13

Contact Resonance for stiff materials (also E, E, loss tangent) Challenges: Preserving the tip (repeatability) Modeling tip-sample behavior (CR freq & Q -> moduli) Calibrating all of the parameters (accuracy) 14

Bruker Contact Resonance Key Features Bruker CR is based on FASTForce Volume Provides standard force curve for comparison for each pixel in map Approach Hold Force and sweep frequency Retract More repeatable: lateral force on tip is minimized, reducing tip wear More information: allows measurement of Adhesion force for each pixel better contact mechanics modeling Whole sweep is saved, allowing detection of artifact peaks and multiple modes 15

Real-time Contact Resonance Sweeping Force Volume for mapping, Ramp for single points Single point Ramp with sweep Real-time Force Volume maps Height frequency Q Amplitude Real-time Force Volume mapping: f, Q, A, k*/kc, E, E, loss tangent, etc. 16

Consistent measurement of modulus Minimal tip wear over many engages Al Si Cr 327,680 curves, 80 frames, 40 hours later Si: 165±11 GPa Al: 123±27 GPa Cr: 203±22 GPa Si: 165±8 GPa Al: 141±24 GPa Cr: 209±25 GPa 17

Consistent measurement of modulus Stiff materials over a range of loads 200nN 500nN 1000nN Al Si Cr 18

Measuring Loss Modulus E in addition to storage modulus E Loss tangent or loss modulus can be calculated from CR f & Q Research into the best way to calculate the loss modulus is ongoing, so we implemented three popular algorithms YHT 2008 and Rabe 2006 require a reference sample with known loss modulus, while PKAS 2016 does not tan δ = E E P. A. Yuya, D. C. Hurley, and J. A. Turner, J. Appl. Phys., 2008. U. Rabe, Atomic Force Acoustic Microscopy, in Applied Scanning Probe Methods II, Springer-Verlag, 2006. M. Kalyan Phani, A. Kumar, W. Arnold, and K. Samwer, J. Alloys Compd., 2016. PS-PMMA topography with false coloring by loss modulus 19

Modulus maps from 2 nd and 3 rd modes Choose mode for optimal sensitivity Second mode E E PS PCL Third mode E E Data acquired in collaboration with Philippe Leclere, U. Mons 20

Storage and loss modulus mapping FFV-CR on a ternary polymer blend PE PP PS PE PP PS 21

Summary Combined, non-resonant and resonant AFM modes cover a huge range of properties FV force curves for soft samples at low frequencies CR for stiff samples at higher frequencies CR provides direct access to viscoelastic parameters Understanding the various error sources allows us to prioritize improvements to address them Spring constant and tip shape are key for all methods FV can be fairly accurate even without a reference sample PFT is not as accurate, better for resolution and speed Contact resonance has a lot of parameters to calibrate, making relative measurements (with a reference material) more practical Room for improvement still exists Better modeling and operator guidance, etc. 22

Copyright Bruker Corporation. All rights reserved. www.bruker.com