Title Single Row Nano-Tribological Printing: A novel additive manufacturing method for nanostructures

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Title Single Row Nano-Tribological Printing: A novel additive manufacturing method for nanostructures

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Nano-Tribological Printing: A novel additive manufacturing method for nanostructures H.S. Khare, N.N. Gosvami, I. Lahouij, R.W. Carpick 1 Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA carpick.seas.upenn.edu

Additive Manufacturing at the Macroscale 2 Additive Manufacturing (AM) has enabled rapid prototyping and manufacture of components with highly complex shapes Though initially restricted to soft polymers, more recent AM techniques are capable of manufacturing metallic and ceramic components Images: Penn AddLab, GE

State of the Art in Nanoscale Lithography 3 Traditional nanoscale patterning techniques include electron-beam lithography, nano-imprint lithography and molecular assembly Most nanolithography techniques involve multi-step processes Scanning Probe Lithography (SPL) is a direct-write technique and relies on conventional Scanning Probe Microscopes o-spl: Material addition t-spl: Material removal R. Garcia et al., Nat. Nanotech. (2014)

Additive Nanomanufacturing : Nano-Tribological Printing 4 In Nano-Tribological Printing, patterning occurs due to in-situ confinement and stressinduced coagulation of ink material AFM probe Carrier fluid with ink material Substrate Tribological stresses induce patterning Variations in tip motion can be used for writing complex patterns

Complex Patterns Through Programmed Motion 5 Programmed AFM-tip motion can be used for creating complex patterns

SPM-Based Printing With Various Ink-Materials 6 Fluid-cell Atomic Force Microscopy Nanoparticle patterning performed with steel colloids on different substrates (steel results reported here) in an AFM fluid cell. Nanoparticle patterns were created at room temperature Zirconia printing at room temperature Nanoparticles as patterning ink Zinc Dialkyldithiophosphates (ZDDP) at high temperature Molecular species as patterning ink

Patterns are Dense and Mechanically Robust 7 Tribological stress results in strong bonding between nanocrystals and a highly dense microstructure Samples E (GPa) H (GPa) Bulk zirconia (1) 215-266 9.2 Nanoscale pattern 151.7 ± 5 7.3 ±0.7 Measured mechanical properties of zirconia patterns approach values reported for bulk zirconia [1] J.F. Shackelford et al., Ceramic and Glass Materials: Structure, Properties and Processing, 2008

Chemical patterning with ZDDP 8 Pattern width changes with scan angle due to probe asymmetry Pattern thickness varies with contact pressure Patterning rate and pattern thickness can also be accelerated with temperature 1 ZDDP growth rate increases exponentially with temperature [1] N.N. Gosvami et al., Science (2015)

Layered Heterostructures with NTP 9 Using multiple ink materials, layered nanostructures can also be generated

Applications of Nanotribological Printing 10 Photonics 1 Micro-SOFC 2 Nano-antenna array metasurfaces Nanoscale Surface Texturing 3 Electrolytic YSZ layers in micro-sofc Nano circuit printing and biological sensors 4 [1] A.V. Kildishev et al., Science (2013) [2] J.H. Shim et al., Chem. Mater. (2007) [3] R. Erck et al., Proc. ASME/STLE IJTC (2012) [4] M.S. Mannoor et al., Nat. Comm. (2012)

Closing Remarks 11 Nano-Tribological Printing is a versatile method for printing complex patterns with varying pattern height and shape It provides a novel additive printing technique capable of creating robust patterns without the need for chemical or thermal stimulus In-situ imaging during patterning provides real-time assessment of pattern quality Printed patters show highly dense microstructure and mechanical properties nearly similar to corresponding bulk material values Nano-Tribological Printing can be scaled up with SPM arrays (e.g. IBM millipede) Acknowledgements Financial support from the Department of Energy SBIR-II (DE-FOA-0000715) is gratefully acknowledged. Use of University of Pennsylvania Nano/Bio Interface Center instrumentation and Nanoscale Characterization Facility is also acknowledged. Prof. Kevin Turner (Penn) and Prof. Feng Gang (Villanova) for instrumentation Prof. I-Wei Chen (Penn) for useful discussions Members of the Carpick Research Group for discussions and feedback