Application Note. The Optimization of Injection Molding Processes Using Design of Experiments

Similar documents
Unsupervised Learning Methods

Detecting Dark Matter Halos using Principal Component Analysis

Application of mathematical, statistical, graphical or symbolic methods to maximize chemical information.

Uncertainty Quantification in Performance Evaluation of Manufacturing Processes

Design of Experiments Part 3

FERMENTATION BATCH PROCESS MONITORING BY STEP-BY-STEP ADAPTIVE MPCA. Ning He, Lei Xie, Shu-qing Wang, Jian-ming Zhang

Principal Component Analysis, A Powerful Scoring Technique

Robustness of Principal Components

Sizing Mixture (RSM) Designs for Adequate Precision via Fraction of Design Space (FDS)

-Principal components analysis is by far the oldest multivariate technique, dating back to the early 1900's; ecologists have used PCA since the

Statistical Tools for Multivariate Six Sigma. Dr. Neil W. Polhemus CTO & Director of Development StatPoint, Inc.

Basics of Multivariate Modelling and Data Analysis

Basics of Multivariate Modelling and Data Analysis

Linear Model Selection and Regularization

An Introduction to Multivariate Statistical Analysis

Continuous Manufacturing of Pharmaceuticals: Scale-up of a Hot Melt Extrusion Process

TEMPERATURE INVESTIGATION IN REAL HOT RUNNER SYSTEM USING A TRUE 3D NUMERICAL METHOD

2 D wavelet analysis , 487

UPSET AND SENSOR FAILURE DETECTION IN MULTIVARIATE PROCESSES

A User's Guide To Principal Components

Finite Population Sampling and Inference

V003 How Reliable Is Statistical Wavelet Estimation?

Explaining Correlations by Plotting Orthogonal Contrasts

Comparison of statistical process monitoring methods: application to the Eastman challenge problem

Simulation study on using moment functions for sufficient dimension reduction

CHAPTER 5 NON-LINEAR SURROGATE MODEL

Scale-up verification using Multivariate Analysis Christian Airiau, PhD.

MicroCell User manual

Understanding PLS path modeling parameters estimates: a study based on Monte Carlo simulation and customer satisfaction surveys

A Goodness-of-Fit Measure for the Mokken Double Monotonicity Model that Takes into Account the Size of Deviations

FIMMTECH, Inc. Frontier Injection Molding and Material Technologies, Inc. (760)

Study of the effect of machining parameters on material removal rate and electrode wear during Electric Discharge Machining of mild steel

Lack-of-fit Tests to Indicate Material Model Improvement or Experimental Data Noise Reduction

Response Surface Methodology:

Principle Components Analysis (PCA) Relationship Between a Linear Combination of Variables and Axes Rotation for PCA

Using Mplus individual residual plots for. diagnostics and model evaluation in SEM

CUSUM(t) D data. Supplementary Figure 1: Examples of changes in linear trend and CUSUM. (a) The existence of

Penalized varimax. Abstract

Moldflow Report Beaumont Logo. Performed by: Beaumont Technologies Requested by: Customer

MYT decomposition and its invariant attribute

Whole Tablet Measurements Using the Frontier Tablet Autosampler System

A Power Analysis of Variable Deletion Within the MEWMA Control Chart Statistic

Whole Tablet Measurements Using the Spectrum One NTS Tablet Autosampler System

ABSTRACT INTRODUCTION

ESTIMATION METHODS FOR MISSING DATA IN UN-REPLICATED 2 FACTORIAL AND 2 FRACTIONAL FACTORIAL DESIGNS

A ROBUST METHOD OF ESTIMATING COVARIANCE MATRIX IN MULTIVARIATE DATA ANALYSIS G.M. OYEYEMI *, R.A. IPINYOMI **

THE VINE COPULA METHOD FOR REPRESENTING HIGH DIMENSIONAL DEPENDENT DISTRIBUTIONS: APPLICATION TO CONTINUOUS BELIEF NETS

DYNAMIC AND COMPROMISE FACTOR ANALYSIS

2010 Stat-Ease, Inc. Dual Response Surface Methods (RSM) to Make Processes More Robust* Presented by Mark J. Anderson (

The Role of a Center of Excellence in Developing PAT Applications

CHAPTER 6 FAULT DIAGNOSIS OF UNBALANCED CNC MACHINE SPINDLE USING VIBRATION SIGNATURES-A CASE STUDY

Independent Component (IC) Models: New Extensions of the Multinormal Model

General structural model Part 1: Covariance structure and identification. Psychology 588: Covariance structure and factor models

C HA R AC T E RIZ AT IO N O F INK J E T P RINT E R C A RT RIDG E INK S USING A CHEMOMETRIC APPROACH

Safety-factor Calibration for Wind Turbine Extreme Loads

Response Surface Methodology

Confidence Intervals for One-Way Repeated Measures Contrasts

Chemometrics. 1. Find an important subset of the original variables.

Agilent Oil Analyzer: customizing analysis methods

6348 Final, Fall 14. Closed book, closed notes, no electronic devices. Points (out of 200) in parentheses.

2015 Stat-Ease, Inc. Practical Strategies for Model Verification

Application Note # AN112 Failure analysis of packaging materials

Quantitative Trendspotting. Rex Yuxing Du and Wagner A. Kamakura. Web Appendix A Inferring and Projecting the Latent Dynamic Factors

Investigation into the use of confidence indicators with calibration

Principal component analysis

School of Business. Blank Page

Reliability of Acceptance Criteria in Nonlinear Response History Analysis of Tall Buildings

Logistic Regression Analysis

ON THE CALCULATION OF A ROBUST S-ESTIMATOR OF A COVARIANCE MATRIX

A New Demerit Control Chart for Monitoring the Quality of Multivariate Poisson Processes. By Jeh-Nan Pan Chung-I Li Min-Hung Huang

Unconstrained Ordination

Factor analysis. George Balabanis

Using Principal Component Analysis Modeling to Monitor Temperature Sensors in a Nuclear Research Reactor

Gorge Area Demand Forecast. Prepared for: Green Mountain Power Corporation 163 Acorn Lane Colchester, Vermont Prepared by:

Disegno Sperimentale (DoE) come strumento per QbD

SMP625 Product Specifications

CHAPTER 5. Outlier Detection in Multivariate Data

Moderation 調節 = 交互作用

STRUCTURAL EQUATION MODELING. Khaled Bedair Statistics Department Virginia Tech LISA, Summer 2013

TWO METHODS FOR ESTIMATING OVERCOMPLETE INDEPENDENT COMPONENT BASES. Mika Inki and Aapo Hyvärinen

Principal Components Analysis (PCA)

Preface Introduction to Statistics and Data Analysis Overview: Statistical Inference, Samples, Populations, and Experimental Design The Role of

Module 7-2 Decomposition Approach

Quality Control & Statistical Process Control (SPC)

Response surface methodology: advantages and challenges

THE DETECTION OF SHIFTS IN AUTOCORRELATED PROCESSES WITH MR AND EWMA CHARTS

Linear Models 1. Isfahan University of Technology Fall Semester, 2014

Modeling and Control Technologies for Improving Product on Efficiency and Quality

Independent Component Analysis

Shrinkage regression

On the Distribution of Hotelling s T 2 Statistic Based on the Successive Differences Covariance Matrix Estimator

CONTROL charts are widely used in production processes

Verification of Pharmaceutical Raw Materials Using the Spectrum Two N FT-NIR Spectrometer

The Simplex Method: An Example

Canonical Correlation & Principle Components Analysis

STATISTICAL ANALYSIS WITH MISSING DATA

One-Way Repeated Measures Contrasts

Structural Equation Modeling and Confirmatory Factor Analysis. Types of Variables

Statistics Toolbox 6. Apply statistical algorithms and probability models

Multivariate Versus Multinomial Probit: When are Binary Decisions Made Separately also Jointly Optimal?

Transcription:

The Optimization of Injection Molding Processes Using Design of Experiments Problem Manufacturers have three primary goals: 1) produce goods that meet customer specifications; 2) improve process efficiency in cycle times, labor cost and energy consumption; 3) increase process robustness by reducing sensitivity to small changes in process or material parameters. To meet these goals, manufacturers often employ one-variable-at-a-time investigations to construct models relating independent process parameters to product quality. The models are used to devise iterative process modifications that lead to a process having a reasonable trade-off between process efficiency and product quality. Unfortunately, this method of process development does not explicitly test the robustness of the process. Background A manufacturing process must exhibit an adequate breadth of operating conditions, sometimes referred to as the process window [1]. Figure 1 shows the process window for an injection molding process in terms of the injection velocity and pack pressure. The size and shape of the process window is determined by certain constraining boundaries. Boundaries 1, 2 and 5 are defined by the machine s injection velocity and pack pressure limits; 3 defines the combined upper limits of injection velocity and pack pressure beyond which unacceptable levels of flash are produced; and 4 determines the lower limits of pack pressure and injection velocity beyond which undesirable short shots and sink marks occur. Viable production processes lie within the process window determined by these boundaries. Process set-points that might be chosen by a plastics manufacturer are shown as circles within the process window. While the robustness of the process can be tested by changing one process variable, depending on the initial settings, such investigations can lead to different process limits. Such studies also ignore the possibility of interactions between the process variables which are common, and ignoring them can result in selecting process conditions too close to a process window boundary (denoted by *, Figure 1). While such investigations may lead to operable processes, they do not necessarily lead to robust processes nor do they provide reliable, quantitative models of the process that can be used for yield prediction, process optimization and quality control [2, 3]. Figure 1 - Process window definition The identification of robust process settings is best accomplished with Design of Experiments (DOE) approaches. DOE is a structured, efficient method that simultaneously investigates multiple process factors using a minimal number of experiments [4-6]. Consider: To treat n = 10 independent variables at m = 2 levels requires 2 10 or 1024 experiments for a full high/low evaluation. The prospect of performing such a high number of experiments is daunting, especially in a manufacturing setting. The use of DOE drastically reduces the size of experimental matrices while retaining a balance in the points tested in parameter space. This balance permits valid statistical analyses of the results and determination of the main effects of process parameters. A very useful DOE approach, D-optimal designs, can be generated using a numerical optimization technique that maximizes the volume of the investigated process parameter space (as measured by the determinant of the design matrix multiplied with its transpose) [6]: D = det(x' X) (1) This application note will use injection molding production data to show how DOE can be used to determine process robustness and how it can be effective in identifying process window boundaries and their relation to process settings.

Page 2 SOLUTION Evaluating DOEs for Minimum Runs In the DOE approach, a set of conditions for a stable injection molding process that produces acceptable molded parts with repeatable part weights and thicknesses is first determined. Then ranges are defined around these process settings to encompass the expected long term variation for, in this example, 10 important process factors (Table 1). These factors are the independent variables in the process model. The combination of minima and maxima of these different factors (coded -1 and +1) are used to set up the experimental designs. # Factor Min Max 1 Pack Time (s) 2 4 2 Material Blend (%) 0 40 3 Barrel Temperature (c) 195 205 4 Coolant Temperature (c) 25 35 5 Injection Velocity (mm/s) 60 80 6 Pack Pressure (MPa) 60 80 7 Shot Size (mm) 20.75 20.75 8 Back Pressure (MPa) 20 26 9 Cooling Time (s) 6 10 10 Screw Speed (RPM) 100 150 Table 1 Tables 2.1 2.4 show the four design approaches evaluated in this study. Note that the 6-run design in Table 2.4 is not normally used as all factors are confounded and such designs do not normally produce reasonable models. Occasionally, however, such designs can perform well, as is discussed below. MKS SenseLink QM was used for data acquisition, analysis, and quality control. The results of regression analysis are shown in Figure 2. The dark line in each graph is the best estimate of the main effects derived using an aggregation of all DOEs. Figure 2 shows that regression models for the fractional factorial design and the D-optimal design closely match the best estimate while those of the 6- and 8-run DOEs fail. This is because the 6- and 8-run DOEs suffer from confounded parameters, (pack time with pack pressure; material blend with shot size; back pressure with cooling time and screw RPM in the 6-run DOE). The Run 1 2 3 4 5 6 7 8 9 10 1-1 -1-1 -1-1 -1-1 -1 1 1 2-1 -1-1 1-1 1 1 1-1 1 3-1 -1 1-1 1 1 1-1 -1 1 4-1 -1 1 1 1-1 -1 1 1 1 5-1 1-1 -1 1 1-1 1-1 -1 6-1 1-1 1 1-1 1-1 1-1 7-1 1 1-1 -1-1 1 1 1-1 8-1 1 1 1-1 1-1 -1-1 -1 9 1-1 -1-1 1-1 1 1-1 -1 10 1-1 -1 1 1 1-1 -1 1-1 11 1-1 1-1 -1 1-1 1 1-1 12 1-1 1 1-1 1-1 -1-1 -1 13 1 1-1 -1-1 1 1-1 1 1 14 1 1-1 1-1 -1-1 1-1 1 15 1 1 1-1 1-1 -1-1 -1 1 16 1 1 1 1 1 1 1 1 1 1 Table 2.1-16 run, 2 10-6 matrix Run 1 2 3 4 5 6 7 8 9 10 1 1-1 1 1 1 1 1-1 1 1 2-1 1 1 1-1 1-1 -1-1 -1 3-1 -1-1 -1 1 1 1-1 -1 1 4 1 1-1 -1-1 1-1 -1 1-1 5 1-1 -1 1 1-1 -1 1-1 -1 6-1 1-1 1 1 1 1 1 1-1 7-1 -1 1-1 -1-1 -1 1 1-1 8-1 -1-1 1-1 1-1 1 1 1 9 1 1-1 1-1 -1 1-1 -1 1 10 1 1 1-1 1 1-1 1-1 1 11 1-1 1-1 -1 1 1 1-1 -1 Table 2.2-11 run, D-optimal matrix Run 1 2 3 4 5 6 7 8 9 10 1-1 -1-1 -1-1 -1-1 -1 1 1 2-1 -1-1 1-1 1 1 1-1 1 3-1 -1 1-1 1 1 1-1 -1 1 4-1 -1 1 1 1-1 -1 1 1 1 5-1 1-1 -1 1 1 1 1 1 1 6 1 1 1 1 1 1-1 1-1 -1 7-1 1 1-1 -1-1 1 1 1-1 8-1 1 1 1-1 1-1 -1-1 -1 Table 2.3-8 run, 2 7-4 DOE

Page 3 Run 1 2 3 4 5 6 7 8 9 10 1 1-1 -1 1-1 1-1 -1 1-1 2 1 1-1 -1-1 1 1-1 -1-1 3-1 1-1 1-1 -1 1-1 1-1 4-1 -1 1-1 1-1 -1 1-1 1 5 1 1 1 1-1 1 1 1 1-1 6 1 1-1 1 1 1 1-1 1 1 Table 2.3-6 run, oversaturated DOE 8-run DOE provides a better estimation of the main effects, however, the effect of pack time, cool time, and screw pack time is not investigated and cool time and screw RPM are confounded with other factors. These results demonstrate the need for extensive experimental designs for the estimation of main effects when using multiple regression techniques. Multivariate analyses (MVA), on the other hand, can determine main effects from limited data. Principal Components Analysis (PCA) and Projection to Latent Structures (PLS) methods evaluate process behavior using Distance to the Model (DModX) and Hotelling t-squared (T2) scores [8]. Figures 3.1 to 3.4 show the loadings scatter plots derived using the DOEs in Table 2. Each loadings plot shows the amount of the observed process behavior modeled by the first two principal components due to each process state. Process states further from the origin have greater influence on the process behavior. The plot also indicates the correlation of each process state with respect to other process states. For example, the upper right quadrant of Figure 3.1 includes the weight, thickness, and other process states calculated from the machine process traces (i.e. M10, M11, M15, M17, and M40 correspond to screw velocity during packing, average pack pressure, injection energy, and integral of pressure during packing, respectively). Figure 2 - DOE regression models

Page 4 Figure 3:1-16-run DOE Figure 3:2 - D-optimized DOE Figure 3:3-8-run DOE Inspection of the loadings plots shows that the 11-run DOE (Figure 3.2) to be similar to the best estimate 16-run DOE (Figure 3.1) even though less data was used (thickness, weight, M2, M18, M15, and other states are similarly placed). The two models should therefore provide similar predictions. The loadings plot for the 8-run DOE (Figure 3.3) and the 6 run DOE (Figure 3.4) vary significantly from the best estimate. Specifically, the loadings plot for the 8 run DOE places M2, a process state for pack time, very close to the origin, and also clusters many other process states together. The 8-run DOE fails because the effect of pack time was not investigated. Figure 3:4-6-run DOE Evaluating DOEs for Robustness An 8 run, 3 factor full factorial design (Table 3) was used to investigate process robustness. Melt temperature, T, injection velocity, v, and pack pressure, P were chosen to test short shot behavior. Run number 8 in Table 3 is the standard process with all settings at their high value. Low values were chosen so short shots would occur when any two of the process factors were jointly operated at their lower settings. Several common process faults were imposed on the process in the validation DOE of Table 3. Figure 4 shows the distance from the process data to the models generated from the four experimental designs and a model generated from the aggregate data. Higher values of DModX indicate process deviation from the reference model. The results show that the 5 most critical faults were detected by the models for the 41-run aggregate dataset, the 16-run DOE, 11-run DOE, and 6-run DOE. The model for the 8-run DOE failed since: 1) all of the DModX values are

Page 5 Run Table 3 Barrel Temp (C) Injection Velocity (mm/s) Pack Pressure (MPa) 1 172.5 15 15 2 172.5 15 70 3 172.5 70 15 4 172.5 70 70 5 200 15 15 6 200 15 70 7 200 70 15 8 200 70 70 very high, and 2) the DModX only captured 3 of the 8 defects. The 6-run DOE performed surprisingly well, given that each of the ten process factors were confounded with one other process factor; the performance far surpassed that of the 8-run DOE despite fewer runs. The multivariate analysis was thus able to model the principal components effectively. The factorial DOE developed to evaluate the robustness of multivariate models generated 80 observations for the part weight. These data were imported into a multivariate analysis program (SIMCA P+ v. 11, Umetrics) and the main effects of the process settings on the part weight were calculated (Figure 5). The results showed that pack pressure, P, injection velocity, v, and melt temperature, T, were all significant. However, the correlation coefficient for the model, R 2, was only 0.81, implying that 81% of the process behavior was accounted for by the model. This could be significantly improved. The model was therefore expanded to include interaction terms. The analysis yielded the main and interaction effects shown in Figure 6, and the R 2 value for the model was 0.99. Thus this model is a much better estimate than the purely linear model. It should be noted that the addition of interaction terms significantly alters the model behavior. Specifically, the effect of injection velocity, which was strong in the purely linear model, becomes insignificant. Instead, the part weight is greatly reduced only when the injection velocity and melt temperature are changed in combination. Other interaction terms were also found to be significant. The impact of this change can be fully appreciated when one considers its implications for the definition of the acceptable process window. Figure 4 - Process fault diagnostics Acceptable process windows were defined using multivariate analysis to build the model with interaction terms (Umetrics MODDE v.7). The model predicted the product weight as two of the factors were varied over a specified range while holding the third factor constant (Figures 7.1-7.3). The calculated product weights greater than 0.21 grams were found not to produce a short shot. These were deemed to be within the acceptable process window. No upper limit was specified. The behavior of the predicted product weights as the process strays from the set point (the lines emanating from the grey circles in Figure 7) is instructive. The predicted magnitude of displacement for a single process variable that shifts the process out of the acceptable window is significantly greater than the shift predicted for the simultaneous displacement of two variables. This implies that it is more likely that defects will occur through small changes in multiple process factors than through large changes in a single process factor. This likelihood can be quantified. If we define process limits as the number of standard deviations (s) from set point before reaching the boundary of the defined process window: (2)

Page 6 Tables 3.1 to 3.3 show values for n in the injection molding process in which the standard deviation values for the barrel temperature, injection velocity, and pack pressure were assumed to be 5 C, 20 mm/s, and 10 MPa, respectively. The probability of a short shot occurring can be estimated for the univariate analysis as: Prob =1 normsdist (n) (3) where normsdist is the standard normal cumulative distribution function. barrel temperature and pack pressure; ~5.8% for combinations of lower injection velocity and pack pressure. If the constraints were tighter or the process variation was higher, then the likelihood of short shots would be significantly greater. The use of multivariate analyses shows that the process is far less robust than is indicated by the univariate analyses. The multivariate approach is therefore well suited as a means of measuring the robustness of a process within a defined process window. For the multivariate analysis, the number of standard deviations for each of the two process states, n 1 and n 2, were first calculated from the process settings along the bold arrows in Figures 7.1-7.3. Assuming mutual independence of the process factors, the joint probability of the short shot occurring in the multivariate analysis is then given by: Prob =1 normsdist (n 1 ) normsdist (n 2 ) (4) Barrel Temp (C) Inj Velocity (mm/s) Limit # Std Dev Limit # Std Dev Probability Univariate 200 0 10 3 0.135% Univariate 170 6 70 0 0.000% Multivariate 187 2.6 28 2.1 2.244% Table 4.1 Temperature and Velocity Limits at P=70 MPa Barrel Temp (C) Pack Pressure (MPa) Limit # Std Dev Limit # Std Dev Probability Univariate 200 0 18 5.2 0.000% Univariate 170 6 70 0 0.000% Multivariate 186 2.8 23 4.7 0.256% Table 4.2 Temperature and Pressure Limits at V=70 mm/s Figure 5 - The (scaled) main effects of the process settings on the part weight in the estimation of robustness Inj Velocity (mm/s) Pack Pressure (MPa) Limit # Std Dev Limit # Std Dev Probability Univariate 10 3 70 0 0.135% Univariate 70 0 22 4.8 0.000% Multivariate 38 1.6 43 2.7 5.808% Table 4.3 Velocity and Pressure Limits at T=200 C The results in Tables 4.1-4.3 indicate a significant discrepancy between the predictions of univariate analysis compared to those of multivariate analyses. The univariate analyses indicate only one very small probability of producing short shots (0.135% for velocity violations of the process window boundary Figs. 7.1 and 7.3); no short shots were predicted for any values of melt temperature or pack pressure. By comparison, the multivariate analyses predict a much higher probability of short shots: ~2.2% for combinations of lower Figure 6 - The main and interactive effects of the process settings on the part weight in the estimation of robustness

Page 7 Figure 7:1 - Temperature-velocity window; P=70 MPa Figure 7:2 - Temperature-pressure window; V=70 mm/sec Figure 7:3 - Pressure-velocity window; T=200 C Conclusion The number of characterization experiments needed to develop reliable model-based process and quality control is a serious impediment to implementation in plastics manufacturing. This note shows how the effective use of Design of Experiments can facilitate the development of models through the use of robust approaches such as multivariate analyses. Principal Components Analysis and Projection to Latent Structure methods can employ data from oversaturated DOEs to effectively predict process faults and to characterize the variational effect of many process factors simultaneously. While such DOEs are inadequate for effective multivariate regression analysis, PCA models provide reasonable fidelity to setup the process and evaluate its robustness. The case study for plastics injection molding in this report shows how neglecting the interaction affects results in poor identification of the process boundaries and gross over estimations of the process robustness.

Page 8 REFERENCES 1. D. Kazmer, Plastics Manufacturing Systems Engineering, Hanser Verlag, p. 352-288 (2009). 2. D. Kazmer and C. Roser, "Evaluation of Product and Process Design Robustness," Research in Engineering Design, 11, 20, (1999). 3. D. O. Kazmer, S. Westerdale, and D. Hazen, "A Comparison of Statistical Process Control (SPC) and On-Line Multivariate Analyses (MVA) for Injection Molding," International Polymer Processing, 23, 447, (2008). 4. G. E. P. Box and N. R. Draper, Empirical Model Building and Response Surfaces, (1986). 5. R. H. Myers and D. C. Montgomery, "Response Surface Methodology: Process and Product Optimization Using Designed Experiments," in Wiley Series in Probability and Statistics: Wiley Interscience, p. 248 (1995). 6. R. H. Myers, D. C. Montgomery, G. Geoffrey Vining, C. M. Borror, and S. M. Kowalski, "Response Surface Methodology: A Retrospective and Literature Survey," Journal of Quality Technology, 36, 53, (2004). 7. J. S. Jung and B. J. Yum, "Construction of Exact D-optimal Designs by Tabu Search," Computational Statistics & Data Analysis, 21, 181, (1996). 8. S. Wold and M. Josefson, "Multivariate Calibration of Analytical Data," Encyclopedia of Analytical Chemistry (Meyers RA, ed). Chichester, UK: John Wiley & Sons, pp. 9710 9736, 2000. For further information, call your local MKS Sales Engineer or contact the MKS Applications Engineering Group at 800-227-8766. SIMCA and MODDE are registered trademarks of MKS Instruments, Inc., Andover, MA. App. Note 06/12-7/12 2012 MKS Instruments, Inc. All rights reserved. MKS Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 978.645.5500 800.227.8766 (within USA) www.mksinst.com