Supplementary Information Our InGaN/GaN multiple quantum wells (MQWs) based one-dimensional (1D) grating structures

Similar documents
Supplementary Figure 1 Detailed illustration on the fabrication process of templatestripped

Fabrication of Efficient Blue Light-Emitting Diodes with InGaN/GaN Triangular Multiple Quantum Wells. Abstract

UNIT 3. By: Ajay Kumar Gautam Asst. Prof. Dev Bhoomi Institute of Technology & Engineering, Dehradun

Multi-color broadband visible light source via GaN hexagonal. annular structure

A Novel Approach to the Layer Number-Controlled and Grain Size- Controlled Growth of High Quality Graphene for Nanoelectronics

Etching Capabilities at Harvard CNS. March 2008

CURRENT STATUS OF NANOIMPRINT LITHOGRAPHY DEVELOPMENT IN CNMM

Abnormal PL spectrum in InGaN MQW surface emitting cavity

LECTURE 5 SUMMARY OF KEY IDEAS

Large Scale Direct Synthesis of Graphene on Sapphire and Transfer-free Device Fabrication

Chapter 2 FABRICATION PROCEDURE AND TESTING SETUP. Our group has been working on the III-V epitaxy light emitting materials which could be

SUPPLEMENTARY FIGURES

Introduction to Photolithography

Supplementary Information. Light Manipulation for Organic Optoelectronics Using Bio-inspired Moth's Eye. Nanostructures

Supplementary Figure 1 XRD pattern of a defective TiO 2 thin film deposited on an FTO/glass substrate, along with an XRD pattern of bare FTO/glass

TRANSVERSE SPIN TRANSPORT IN GRAPHENE

Resonator Fabrication for Cavity Enhanced, Tunable Si/Ge Quantum Cascade Detectors

UNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences. Fall Exam 1

Supporting Information for

Supporting Information

Supplementary Information. Rapid Stencil Mask Fabrication Enabled One-Step. Polymer-Free Graphene Patterning and Direct

MSN551 LITHOGRAPHY II

Photolithography 光刻 Part II: Photoresists

Supplementary Information. Back-Contacted Hybrid Organic-Inorganic Perovskite Solar Cells

Supplementary Information

A Photonic Crystal Laser from Solution Based. Organo-Lead Iodide Perovskite Thin Films

Etching: Basic Terminology

IC Fabrication Technology

ETCHING Chapter 10. Mask. Photoresist

Photolithography II ( Part 1 )

Supplementary Figure 1: Micromechanical cleavage of graphene on oxygen plasma treated Si/SiO2. Supplementary Figure 2: Comparison of hbn yield.

4FNJDPOEVDUPS 'BCSJDBUJPO &UDI

Thin Wafer Handling Challenges and Emerging Solutions

Electronic Supplementary Information

Carrier Transport by Diffusion

Fabrication Technology, Part I

Quantum Technology: Supplying the Picks and Shovels

Supporting Information

Cl 2 -Based Dry Etching of GaN and InGaN Using Inductively Coupled Plasma

High-Performance Semiconducting Polythiophenes for Organic Thin Film. Transistors by Beng S. Ong,* Yiliang Wu, Ping Liu and Sandra Gardner

Supplementary Materials

and their Maneuverable Application in Water Treatment

MP5: Soft Matter: Physics of Liquid Crystals

SUPPLEMENTARY INFORMATION

Wet and Dry Etching. Theory

Optical Proximity Correction

Top down and bottom up fabrication

Supplementary Information

Ultrafast single photon emitting quantum photonic structures. based on a nano-obelisk

SUPPLEMENTARY NOTES Supplementary Note 1: Fabrication of Scanning Thermal Microscopy Probes

Midterm I - Solutions

Overview of the main nano-lithography techniques

Lecture 11. Etching Techniques Reading: Chapter 11. ECE Dr. Alan Doolittle

Lithography and Etching

Introduction. Photoresist : Type: Structure:

Supporting Information

Advances in Back-side Via Etching of SiC for GaN Device Applications

Supplementary Information for

A HYDROGEN SENSITIVE Pd/GaN SCHOTTKY DIODE SENSOR

Reactive Ion Etching (RIE)

Supplementary Information

Nova 600 NanoLab Dual beam Focused Ion Beam IITKanpur

Supplementary Materials for

Nanoimprint Lithography

Supplementary Figures

Supplementary Information

DEPOSITION OF THIN TiO 2 FILMS BY DC MAGNETRON SPUTTERING METHOD

Hydrodynamics of Diamond-Shaped Gradient Nanopillar Arrays for Effective. DNA Translocation into Nanochannels. (Supplementary information)

Supplementary Figure S1. AFM images of GraNRs grown with standard growth process. Each of these pictures show GraNRs prepared independently,

Gold nanothorns macroporous silicon hybrid structure: a simple and ultrasensitive platform for SERS

EE 527 MICROFABRICATION. Lecture 25 Tai-Chang Chen University of Washington

Electronic Supplementary Information. Crystallographic Orientation Propagation in Metal Halide Perovskite Thin Films

Section 3: Etching. Jaeger Chapter 2 Reader

maximal photofluorescence decay time of 6 hours (purchased from Shenzhen HuiDuoSheng

Traps in MOCVD n-gan Studied by Deep Level Transient Spectroscopy and Minority Carrier Transient Spectroscopy

Nanostructures Fabrication Methods

An Optimal Substrate Design for SERS: Dual-Scale Diamond-Shaped Gold Nano-Structures Fabricated via Interference Lithography

Normally-Off GaN Field Effect Power Transistors: Device Design and Process Technology Development

3D Micropatterned Surface Inspired by Salvinia

Department of Chemistry, NanoCarbon Center, Houston, Texas 77005, United States, University of Central Florida, Research Parkway,

Chapter 3 : ULSI Manufacturing Technology - (c) Photolithography

Graphene: Plane and Simple Electrical Metrology?

EE115C Winter 2017 Digital Electronic Circuits. Lecture 3: MOS RC Model, CMOS Manufacturing

Supporting information. Unidirectional Doubly Enhanced MoS 2 Emission via

Plasma Deposition (Overview) Lecture 1

Cho Fai Jonathan Lau, Xiaofan Deng, Qingshan Ma, Jianghui Zheng, Jae S. Yun, Martin A.

Fabrication and Domain Imaging of Iron Magnetic Nanowire Arrays

Characteristics of Neutral Beam Generated by a Low Angle Reflection and Its Etch Characteristics by Halogen-Based Gases


Efficient light emission from LEDs, OLEDs, and nanolasers via surface-plasmon resonance

Low-temperature-processed inorganic perovskite solar cells via solvent engineering with enhanced mass transport

A One-Step Low Temperature Processing Route for Organolead Halide Perovskite Solar Cells

Periodic microstructures fabricated by multiplex interfering femtosecond laser beams on graphene sheet

Competitive Advantages of Ontos7 Atmospheric Plasma

Supplementary Information. Formation of porous SnS nanoplate networks from solution and their application in hybrid solar cells

Supplementary Information

Lecture 3: Heterostructures, Quasielectric Fields, and Quantum Structures

SUPPLEMENTARY INFORMATION

Case Study of Electronic Materials Packaging with Poor Metal Adhesion and the Process for Performing Root Cause Failure Analysis

Etching Issues - Anisotropy. Dry Etching. Dry Etching Overview. Etching Issues - Selectivity

Transcription:

Polarized white light from hybrid organic/iii-nitrides grating structures M. Athanasiou, R. M. Smith, S. Ghataora and T. Wang* Department of Electronic and Electrical Engineering, University of Sheffield, United Kingdom * Corresponding author: t.wang@sheffield.ac.uk Supplementary Information Our InGaN/GaN multiple quantum wells (MQWs) based one-dimensional (1D) grating structures were fabricated with a WiTEC confocal microscope using the direct laser writing technique. The procedure is schematically depicted in Fig. S1: (a) InGaN / GaN MQWs grown on a double side polished sapphire substrate; (b) A 250 nm thick SiO2 layer deposited directly on top of the sample by standard plasma enhanced chemical vapour deposition (PECVD); (c) Photoresist was deposited by spin coating at 6000 rpm for 30 seconds, giving a layer thickness of approximately 600 nm, followed by a UV light exposure and development; (d) Grating patterns were written by confocal microscope laser exposure using a 375 nm laser diode followed by an oxygen plasma cleaning process to remove the residue from the trenches; (e) Reactive ion etching (RIE) was then employed to etch the grating pattern into the secondary SiO2 mask, which acts as hard mask for further etching; (f) Inductively coupled plasma (ICP) etching was then used to further etch the gratings into the InGaN / GaN MQWs. The depth of the gratings is approximately 400 nm into the GaN through the InGaN MQWs. 1

Figure S1 Schematic illustration of the fabrication procedure for the 1D grating structures in InGaN / GaN MQWs using confocal laser lithography technique. Each step of fabrication has been monitored in order to ensure the high quality of fabrication as shown in Fig. S2: (a) Optical microscope image of the gratings written directly on photoresist; (b) SEM image of the SiO2 hard mask gratings after the RIE etching; (c) High magnification SEM image of the gratings with 510 nm centre to centre separation revealing the straight sidewall edges; (d) Low magnification SEM image showing the a 70 x 70 μm square grating patterns. 2

Figure S2 Optical and SEM images of the grating structures taken at each step of the fabrication procedure to ensure a high quality of fabrication. For the fabrication of the hybrid grating structures a schematic illustration of each step is shown in Fig. S3: (a) F8BT was first dissolved in toluene at a concentration of 5 mg / ml and spin coated on top of the gratings at a speed of 4000 rpm for 30 seconds to fill in the gaps. The whole process, including the solution preparation and deposition of the F8BT has been carried out in a glovebox, in an oxygen free environment to protect the polymer from oxidation; (b) The sample was then sandwiched between two metal plates which were bolted together in order to apply a high pressure. At the same time, the sample was heated up to 160 for 1 hour, which is above the glass transition temperature (T g ~ 90 ), in order to allow the F8BT polymer to transition to its liquid crystal phase and force it to align with the underlying gratings; (c) The sample was then slowly cooled down to 70, thus allowing the F8BT chains to freeze, forcing them to remain aligned with the grating structures. The pressure was then released and the samples were transferred to a vacuum chamber for optical characterisation under vacuum to avoid photooxidation of the polymer. 3

Figure S3 Schematic illustration of the F8BT chain alignment process for the polarised hybrid grating structures. Absorption and PL emission spectra of F8BT along with the InGaN MQW PL spectrum are plotted in Fig. S4. A great overlap can be seen between the absorption spectrum of the acceptor dipole (F8BT) and the emission spectrum of the donor dipole (InGaN MQWs), thus helping to maximise the NRET rate between the two dipoles. Figure S4 Absorption and emission spectra of the F8BT and InGaN MQWs. 4

Fig. S5 Shows the μ-pl spectra of the unpatterned sample and all of the grating samples measured at both orthogonal polarisations when the polariser is set to parallel and perpendicular with the grating structures. Figure S5 μ-pl spectra of InGaN MQWs for the unpatterned and grating structures taken with the polariser set at the two orthogonal positions; parallel and perpendicular to the gratings. 5

Figure S6 Polar plots of the integrated PL intensity and the peak position of the InGaN MQWs for the unpatterned and the grating structures. 6

Fig. S6 Polar plots of the integrated PL intensities of the InGaN / GaN MQWs plotted as a function of the polariser angle for unpatterned and grating samples; (b) Peak positions of the unpatterned and grating samples plotted in polar plots against the polariser angle. Fig. S7 Shows the μ-pl spectra of the unpatterned and all of the hybrid grating samples measured at both orthogonal polarisations when the polariser is set to parallel and perpendicular with the gratings structures Figure S7 μ-pl spectra of the hybrid InGaN MQWs / F8BT samples subjected to the F8BT alignment process described earlier in Fig. S3. The spectra of the unpatterned and grating structures were taken with the polariser set at the two orthogonal positions; parallel and perpendicular to the gratings structures. Fig. S8 Shows the μ-pl spectra of the unpatterned and all of the reference hybrid grating samples without pressure and heat applied measured at the both orthogonal polarisations when the polariser is set to parallel and perpendicular with the grating structures. No polarisation of the F8BT can be detected due to the random alignment of the F8BT chains in macroscopic domains. 7

Figure S8 show μ-pl spectra of the hybrid InGaN MQWs / F8BT samples without being subjected to the F8BT to the alignment process. The spectra of the unpatterned and grating structures were taken with the polariser set at the two orthogonal positions; parallel and perpendicular to the grating structures. 8