Supporting Information: Poly(dimethylsiloxane) Stamp Coated with a. Low-Surface-Energy, Diffusion-Blocking,

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Supporting Information: Poly(dimethylsiloxane) Stamp Coated with a Low-Surface-Energy, Diffusion-Blocking, Covalently Bonded Perfluoropolyether Layer and Its Application to the Fabrication of Organic Electronic Devices by Layer Transfer Sukgyun Cha and Changsoon Kim Graduate School of Convergence Science and Technology and Inter-University Semiconductor Research Center, Seoul National University, Seoul 8826, Republic of Korea E-mail: changsoon@snu.ac.kr S-1

PL intensity (a.u.) 3 2 Glass / Alq 3 Glass / NPB 1 4 45 5 55 6 Wavelengths (nm) Figure S1: Photoluminescence spectra of an Alq 3 layer and an NPB layer, both 5 nm in thickness, deposited on a glass substrate by thermal evaporation in vacuum. The excitation wavelength is 35 nm. S-2

Removed thickness (nm) 1 8 6 4 2 PDMS stamp at 23 C PDMS stamp at 6 C PFPE-coated PDMS stamp at 6 C 1 2 3 4 Contact time (min) Figure S2: Thickness of an NPB layer on an ITO-coated glass substrate diffused into a PFPEcoated or uncoated PDMS stamp after being in contact with the stamp under a pressure of 2 MPa for a different duration from 5 to 4 min. The measurement was performed following the experiment described in Ref. 4 of the main manuscript as follows: (i) a 1-nm-thick NPB layer was deposited onto an ITO-coated glass substrate by thermal evaporation; (ii) a PFPE-coated or PDMS stamp was brought into contact with the NPB layer, followed by storing the samples at 23 C or 6 C under a pressure of 2 MPa for a varying contact time; (iii) the stamp was carefully peeled off from the substrate; (iv) a step height of the NPB layer was measured near the boundary of the contacted region. When the uncoated stamp was used, the number of molecules diffused from the substrate into the stamp, which increased with contact time, significantly increased with temperature. When the PFPE-coated stamp was used, in contrast, the thickness of the NPB layer on the substrate remained unchanged even after 4 min at 6 C. S-3

Height (nm) 2 nm 1 nm 4 5 4 3 2 1 1 2 3 4 5 Off-center distance (μm) 2 2 5 nm 5 nm 6 4 2 2 4 6 5 4 3 2 1 1 2 3 4 5 Off-center distance (μm) Figure S3: Atomic force microscopy height images of the ITO-coated glass substrate coated with the NPB layer in a region that was in direct contact with a PDMS stamp and a PFPE-coated PDMS stamp (in a region not covered with the Alq 3 patterns) during the transfer process. Scale bars: 2 µm. The profiles shown below were measured along the white dotted lines in the height images. S-4

Current density (ma cm 2 ) Quantum efficiency (%) 1 3 1 1 PFPE-coated PDMS stamp PDMS stamp Control 2 1.5 1 1 1 3 1 5 1 7 1 1 1 1 1 Voltage (V) 1.5 PFPE-coated PDMS stamp Control 5 1 15 Current density (ma cm 2 ) Figure S4: Current density voltage (J V ) and external quantum efficiency current density (η ext J) characteristics of organic light-emitting devices fabricated by transferring Alq 3 layers using uncoated (blue lines, OLED PDMS ) and PFPE-coated PDMS stamps (red lines, OLED PFPE ), compared with those of control devices where all layers were vacuumdeposited (black lines, OLED CTRL ). For each type of OLEDs, 3 devices (6 devices per substrate) were fabricated. All 3 devices were operational in the cases of OLED CTRL and OLED PFPE, whereas only 19 devices were not short-circuited for OLED. The much higher yield of OLED PFPE than that of OLED PDMS is attributed to the capability of the PFPE layer to block diffusion of small molecules into the stamp and of the PDMS oligomers onto the target substrate. S-5

5 nm 5 nm (c) (d) Figure S5: (a,b) Scanning electron microscopy and (c,d) atomic force microscopy images of a graphene monolayer transferred from (a,c) an uncoated PDMS stamp and (b,d) a PFPEcoated PDMS stamp. Scale bars in (a,b) and (c,d) are 25 and 2 µm, respectively. S-6

Intensity (CPS) Intensity (CPS) Intensity (CPS) 83 78 I3d I3d 13 12 I3d I3d 73 11 1 68 64 63 62 61 Binding energy (ev) 64 63 62 61 Binding energy (ev) 85 (c) 75 65 695 69 685 68 Binding energy (ev) Figure S6: XPS spectra of the I3d peaks at 629.9 ev and 618.4 ev for a graphene monolayer on a PET film transferred from a PFPE-coated PDMS stamp and an uncoated PDMS stamp. (c) XPS spectrum of a graphene monolayer on a PET film transferred from a PFPEcoated PDMS stamp in a binding-energy range including 686 ev corresponding to the F1s electron. S-7

Current density (ma cm 2 ) 1 6 1 4 1 2 1 1 2 1 4 1 6 1 8 1 1 PDMS stamp PFPE-coated PDMS stamp 1 1 1 Voltage (V) Figure S7: Current density voltage (J V ) characteristics of NPB hole-only devices whose graphene bottom electrodes were formed by using a PDMS stamp (blue) and a PFPE-coated PDMS stamp (red). J was not allowed to exceed 3 1 4 ma cm 2 by the instrument setting. Figure S8: Optical microscopy images of the top surfaces of NPB hole-only devices whose graphene bottom electrodes were formed by using a PDMS stamp and a PFPE-coated PDMS stamp. Scale bar: 4 µm. S-8