Smart Bolometer: Toward Monolithic Bolometer with Smart Functions

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Smart Bolometer: Toward Monolithic Bolometer with Smart Functions Matthieu Denoual, Gilles Allègre, Patrick Attia, Olivier De Sagazan To cite this version: Matthieu Denoual, Gilles Allègre, Patrick Attia, Olivier De Sagazan. Smart Bolometer: Toward Monolithic Bolometer with Smart Functions. Perera, A.G Unil. Bolometers, Intech Publisher, pp.171-196, 2012. <hal-00807200> HAL Id: hal-00807200 https://hal.archives-ouvertes.fr/hal-00807200 Submitted on 3 Apr 2013 HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 8 1. Introduction

172 Bolometers

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 173

174 Bolometers 2. Bolometer with smart functions

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 175 2.1 Investigated smart functions

176 Bolometers 2.2 Requirements

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 177

178 Bolometers 3. Actual work

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 179

180 Bolometers 3.1 Top-simulation and modeling ÆÆ Æ Æ

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 181 3.1.1 Modeling technique

182 Bolometers

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 183 3.1.2 Top-simulation results Æ

184 Bolometers

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 185

186 Bolometers 3.2 Macro-scale and discrete components experiments 3.2.1 Description of the macro-scale set-up Ω

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 187 3.2.2 Macro-scale and discrete components experimental results

188 Bolometers

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 189

190 Bolometers 3.3 Experimental results section conclusion

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 191 4. Monolithic 3D smart bolometer

192 Bolometers

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 193 5. Conclusion

194 Bolometers 6. Acknowledgment 7. References

Smart Bolometer: Toward Monolithic Bolometer with Smart Functions 195

196 Bolometers

Bolometers Edited by Prof. Unil Perera ISBN 978-953-51-0235-9 Hard cover, 196 pages Publisher InTech Published online 09, March, 2012 Published in print edition March, 2012 Infrared Detectors and technologies are very important for a wide range of applications, not only for Military but also for various civilian applications. Comparatively fast bolometers can provide large quantities of low cost devices opening up a new era in infrared technologies. This book deals with various aspects of bolometer developments. It covers bolometer material aspects, different types of bolometers, performance limitations, applications and future trends. The chapters in this book will be useful for senior researchers as well as beginning graduate students. How to reference In order to correctly reference this scholarly work, feel free to copy and paste the following: Denoual Matthieu, de Sagazan Olivier, Attia Patrick and Allègre Gilles (2012). Smart Bolometer: Toward Monolithic Bolometer with Smart Functions, Bolometers, Prof. Unil Perera (Ed.), ISBN: 978-953-51-0235-9, InTech, Available from: http:///books/bolometers/smart-bolometers-toward-monolithicbolometer-with-smart-functions InTech Europe University Campus STeP Ri Slavka Krautzeka 83/A 51000 Rijeka, Croatia Phone: +385 (51) 770 447 Fax: +385 (51) 686 166 InTech China Unit 405, Office Block, Hotel Equatorial Shanghai No.65, Yan An Road (West), Shanghai, 200040, China Phone: +86-21-62489820 Fax: +86-21-62489821