A High-precision Measurement Technique of Flat Mirror Profile Comprising Interferometers and Autocollimator

Transcription

1 JOURNAL OF MECHANICAL ENGINEERING Vol.49 No.17 Sep. 01 DOI10.901/JME * ( ) N 100 mm ±0 nm Zygo TH741 A High-precision Mesurement Technique of Flt Mirror Profile Comprising Interferometers nd Autocollimtor YANG Ping 1 ZHU Rui 1 GUO Yinbio 1 TAKAMASU Kiyoshi (1. School of Physics nd Mechnicl & Electricl Engineering, Ximen University, Ximen 61005;. Deprtment of Precision Engineering, The University of Tokyo, Tokyo , Jpn) AbstrctAn opticl scnning technique comprising three lser interferometers nd one utocollimtor to mesure lrge flt mirror profile with high ccurcy is described. The flt mirror profile nd its mesurement uncertinty re reconstructed by n ppliction of simultneous liner equtions nd lest-squres method. The whole mesurement process is numericlly modeled by the computer simultion. Mesurement uncertinties of the flt br mirror profile re evluted for different smpling numbers of the flt br mirror. Moreover, prototype of opticl mesurement system bsed on micro coordinte mesuring mchine pltform is built. The experiment shows tht the mesurement technique successfully chieves the profile mesurement of 100 mm flt mirror nd repetbility of mesurement ccurcy within the rnge of ±0 nm. Compring with the results mesured by Zygo whitelight interferometer, this technique cn chieve profile mesurement in nnometer ccurcy. Key wordslser interferometer Autocollimtor Lrge flt mirror profile Scnning mesurement 0 * () * (510754) (ps01-015) / [1-4] [5]

2 [6-7] WHITEHOUSE [8] 1976 [9-10] [1, 11] [1] [1-14] [, 15-16] [17-19] XY 1 X e1 es u1 b0 e ey u cj uj u1 Dju n1,,, Ns j, (1) e 1 e es ey u 1 u u u b 0 D 1 D m1 f( xn ) e1 m f( xn D1) e1 De 1 c () m f( xn D) e1 De c m e n1,,, Ns m 1 m m m f ( x ) N Ns N d d D s s Y AX () Y A Y X X n

3 54 X f ( x ),, f( x ), e (1),, e ( N ), 1 N 1 1 s e (1),, e ( N ), c, c (4) X () A (P) A (Q) N s D s A A (Q) d 1 d 1(GCD(d 1, d ) = 1)D 1 D s 1.. Y S S T s (5) 1 ()(5) 1 T 1 T 1 X A S A A S Y (6) 1. (6) S X (7)S X r nn 1 N r11 r1 n T 1 1 SX A S A (7) rn 1 r nn n1,,, N n rnn n1,,, N N N i1 j1 N N i1 j1 N 1 in jns i, j N N 1iN 1 js i, j X X (8) (8) N (8) A N A x N l s N.1 N () f ( xn ) e 1 e D 1 D GCD 10 mm 1 mm s 1 mm N 5 l 1.5 nm 0. μrd ( 10705A- Elcomt000) 5 N s /mm l /mm N (8)

4 σ nm 5 10 nm mm 6 mm D 1 = 10 mmd = 1 mm s=1 mm 100 mm λ( 5) N=100(l=100 mm) 9.77 nm.1 (Micro coordinte mesuring mchine, M-CMM) 4 M-CMM ( 5) 5 l=100 mm. M-CMM 5 min 1 8 nm 0.4 μrd XY 6 M-CMM

5 (95 ) nm 0.4 μrd (±σ) ±0 nm 8.4 Zygo 7 Zygo ( 9) ±0 nm 9 Zygo 7 10 Zygo

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