Advanced. piezoelectric. materials. Science and technology. Edited by. Kenji Uchino WOODHEAD PUBLISHING. Oxford Cambridge Philadelphia New Delhi

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1 Advanced piezoelectric materials Science and technology Edited by Kenji Uchino WOODHEAD PUBLISHING Oxford Cambridge Philadelphia New Delhi Woodhead Publishing Limited, 2010

2 Contents Contributor contact details xi Preface xv 1 The development of piezoelectric materials and the new perspective The history of piezoelectrics Piezoelectric materials: present status Piezoelectric devices: brief review of applications References 82 Part I Piezoelectric materials 2 Lead zirconate titanate-based piezo-ceramics 89 M. Kimura, A. Ando and Y. Sakabe, Murata Manufacturing Co., Ltd, Japan 2.1 Introduction Crystalline structure and phase relations Compositional modifications Shaping approach and application trend Low temperature sintering Summary and future trends References Relaxor ferroelectric-based ceramics Introduction Crystal structures of relaxor ferroelectrics Dielectric properties of relaxor ferroelectrics Electrostriction in relaxor ferroelectrics 125

3 vi Contents 3.5 Electrooptic effect Conclusions References Lead-free piezo-ceramics 130 T. Takenaka, Tokyo University of Science, Japan 4.1 Introduction Barium litanate (BaTi03) [BT]-based ceramics Potassium niobate (KNb03) KN]-sodium niobate (NaNb03) [NNI-lithium niobate (LiNb03) LN] system Potassium niobate (KNb03) KN -based ceramics Bismuth sodium titanate (Bii,2Na1/2)Ti03 BNT)-based ceramics Bismuth sodium titanate (Bi,/2Na,/2) Ti03 BNTl-bismuth potassium titanate (Bi1/2K1/2)Ti03 lbkt -barium titanate (BaTi03) [BT] system Bismuth sodium titanate (Bi1/2Na1/2)Ti03 [BNT -bismuth lithium titanate (Bi1/2LiU2)Ti03 BLT [-bismuth potassium titanate (Bi1/2 K,/2) Ti03 [BKT] system Bismuth potassium titanate (BiI/2 K,/2)Ti03 [BKT -based ceramics Conclusions Acknowledgements References Quartz-based piezoelectric materials 171 Y. Saigusa, River Eletec, Japan 5.1 Piezoelectricity of quartz crystal Production of artificial quartz crystal Cutting angles and their vibration mode Applications of resonator, oscillator and filter Acknowledgements References Lithium niobate and lithium tantalate-based piezoelectric materials 204 V. Ya. Shur, Ural Slate University, Russia 6.1 Introduction Piezoelectric properties of lithium niobate and lithium tantalate The advantages of single crystal ferroelectrics for piezoelectric applications 212

4 Contents vii 6.4 The influence of the periodic domain structure on piezoelectric and acoustic properties Nano- and micro-domain engineering in lithium niobate and lithium tantalate crystals Applications of domain engineered lithium niobate and lithium tantalate crystals for light frequency conversion Generation of terahertz radiation in periodically poled lithium niobate crystal Conclusions and future trends References Single crystal PZN-PT, PMN-PT, PSN-PT and PIN-PT-based piezoelectric materials 239 L. Luo, X. Zhao and H. Luo Shanghai Institute of Ceramics, China 7.1 Introduction The history of relaxor ferroelectrics PZN-PT crystal PMN-PT crystal PSN-PT crystal PIN-PT crystal Theoretical models for relaxor-based crystals Application in piezoelectric actuators and medical transducers Conclusion and future trends References Electroactive polymers as actuators 287 Y. Bar-Cohen, Jet Propulsion Lab, USA 8.1 Introduction Historical review The two electroactive polymers (EAP) groups Current and under consideration applications The armwrestling challenge as a state-of-the-art indicator Challenges, trends and potential developments Conclusions Acknowledgements References Piezoelectric composite materials Introduction 318

5 viii Contents 9.2 Connectivity Composite effects PZT:polymer composites Composite dampers and energy harvesters Magnetoelectric sensors References 345 Part II Preparation methods and applications 10 Manufacturing methods for piezoelectric ceramic materials 349 K. Uchino, The Pennsylvania State University USA 10.1 Material designing Fabrication processes of ceramics Device designing Size effect on ferroelectricity References Multilayer technologies for piezo-ceramic materials Introduction Multilayer (ML) manufacturing processes Internal electrode design Electrode materials Innovative multilayer (ML) structures Reliability/lifetime of multilayer (ML) actuators References Single crystal preparation techniques for manufacturing piezoelectric materials 412 L.-C. Lim, National University of Singapore, Singapore 12.1 Introduction Flux growth of PZN-PT single crystals (i.e. relaxor-pt crystals of low PT contents) Flux growth of PMN-PT single crystals (i.e. relaxor-pt crystals of high PT contents) Other commonly encountered phenomena Conclusions Acknowledgements References 432

6 Contents ix 13 Thin film technologies for manufacturing piezoelectric materials 441 K. Wasa, Kyoto University, Japan 13.1 Introduction: bulk and thin film materials Fundamentals of thin film deposition Deposition of PZT-based thin films Dielectric and piezoelectric properties of PZT-based thin films PZT-based thin films for micro-electromechanical systems (MEMS) PZT-based thin film micro-electromechanical systems (MEMS) Conclusions Acknowledgements References Aerosol techniques for manufacturing piezoelectric materials 493 J. Akedo, National Institute of Advanced Industrial Science and Technology, Japan 14.1 Introduction Aerosol deposition process Room temperature impact consolidation (RTIC) Deposition properties and film patterning Electrical properties of aerosol deposition (AD) films and improvements by heat treatment Piezoelectric device applications Conclusions References Manufacturing technologies for piezoelectric transducers Introduction Transducer designs Acoustic lens and horn Acoustic impedance matching Ultrasonic imaging application Sono-chemistry Acknowledgements References 557

7 X Contents Part III Application oriented materials development 16 High power piezoelectric materials Introduction General consideration of loss and hysteresis in piezoelectrics Heat generation in piezoelectrics Loss mechanisms in piezoelectrics High power piezoelectric ceramics High power piezoelectric components Summary and conclusions Acknowledgement References Photostrictive actuators using piezoelectric materials Introduction Photovoltaic effect Photostrictive effect Photostrictive device applications Conclusions References The performance of piezoelectric materials under stress 628 C. S. Lynch, University of California, Los Angeles, USA 18.1 Introduction The unit cell, ferroelectricity, and ferroelasticity Driving forces for polarization reorientation Polarization as an order parameter Groups of unit cells, defects, and domains The large field behavior of relaxor single crystals Calculation of'domain engineered'properties Field driven phase transformations The large filed behavior of ferroelectric ceramics Preisach modelling Future trends References 656 Index 660