Piezoelectric Materials and Devices

Transcription

1 Piezoelectric Materials and Devices Applications in Engineering and Medical Sciences M. S. VIJAYA CRC Press Taylor & Francis Croup Boca Raton London NewYork CRC Press is an imprint of the Taylor & Francis Croup, an informa business

2 Contents Preface xi 1 Introduction Classification of Dielectric Materials Important Dielectric Parameters Electric Dipole Moment p Polar and Nonpolar Dielectric Materials Electric Polarization P Dielectric Displacement or Flux Density D, Dielectric Constant e and Electric Susceptibilty x Spontaneous Polarization Ps Electrostrictive Effect Piezoelectric Effect Pyroelectric Effect Ferroelectric Materials Ferroelectric Domains Ferroelectric Hysteresis Ferroelectric Transition Temperature Poling Applications of Ferroelectric Materials 12 2 Piezoelectric Characteristics Introduction Piezoelectric Coefficients Tensor Form of Piezoelectric Equations Piezoelectric Coefficient d Mechanical Parameters: Elastic Compliance Constant and Elastic Stiffness Constant Dielectric Parameter: Permittivity Independent Components of Piezoelectric, Elastic, and Dielectric Matrices Interpretation of Piezoelectric Coefficients d33, d3v andd Generator and Motor Actions of Piezoelectric Materials Generator Action Motor Action Strain versus Electric Field in Piezoelectric Materials Piezoelectric Coupling Coefficient k Dynamic Behaviour of a Piezoelectric Material 35 vii

3 viii Contents 3 Piezoelectric Materials Introduction Quartz Lead Zirconate Titanate (PZT) Composition and Structure of PZT Phase Transitions in PZT Lanthanum-Doped PZT (PLZT) Fabrication of PZT Fabrication of PZT in Powder Form Solid-State Solution Technique Coprecipitation from Solution Sol-Gel Technique Shape Forming Techniques from PZT Powder PZT Discs, Cylinders, Plates, etc PZT Thick Films Tape Casting Technique 46 3A3 Fabrication of PZT Thin Films RF Sputtering Deposition Technique Spin Coating Technique Chemical Vapour Deposition Technique Polymer Piezoelectric Materials Polyvinylidene Fluoride (PVDF) Other Piezoelectric Materials Barium Titanate Zinc Oxide Thin Films Composite Piezoelectric Materials PZT-Polymer Composites PZT-Polymer Composites PZT-Polymer Composite 54 References 54 4 Engineering Applications of Piezoelectric Materials Introduction Gas Lighter Pressure Sensor Accelerometer Principle of Piezoelectric Accelerometer Operating Frequency Range Types of Piezoelectric Accelerometers Piezoelectric Gyroscope-Angular Rate Sensors Piezoelectric Beam Gyroscope Piezoelectric Tuning Fork Gyroscope Piezoelectric Cylindrical Gyroscope Operation of the Steel Cylinder Gyroscope Piezoelectric Microphone 71

4 Contents ix 4.7 Piezoelectric Ultrasonic Transducers for Sound Navigation and Ranging (SONAR) Tonpilz Transducer High-Frequency Underwater Transducers Piezoelectric Hydrophone Specifications Piezoelectric Projector Specifications Piezoelectric Tactile Sensor Energy Harvesting Piezoelectric Electronic Buzzer and Tweeter Piezoelectric Actuators Piezoelectric Stack Actuator Piezoelectric Bender Actuator Bimorph and Unimorph Piezoelectric Bimorph Piezoelectric Unimorph Piezoelectric Cymbal Actuator Piezoelectric Motor Linear Piezoelectric Motors Piezoelectric Ultrasonic Rotary Motor Piezoelectric Micro Pump Piezoelectric Ultrasonic Drill Ultrasonic Cleaner Quartz Crystal Oscillator Quartz Crystal Balance Quartz Tuning Fork in Atomic Force Microscope Piezoelectric Transformer Rosen Piezoelectric Transformer Longitudinal Vibration Piezoelectric Transformer Radial Vibration Piezoelectric Transformer Nondestructive Testing (NDT) of Materials Using Ultrasonics Noise and Vibration Control Structural Health Monitoring Piezoelectric Sensors and Actuators in Smart Systems and Robots 105 References Medical Applications of Piezoelectric Materials Introduction Blood Pressure Monitor Piezoelectric Heartbeat Monitor Ill 5.4 Piezoelectric Tactile Sensor Endoscopic Grasper and Minimal Invasive Surgical Instrument Ill 5.5 Piezoelectric Accelerometer Monitoring Patient Activity and Detecting Tremors Piezoelectric Pump Drug Delivery and Biomedical Analyses Ultrasonic Imaging 113

5 X Contents Array Transducer Blood Flow and Tissue Motion Imaging Bone Density Measurement Using Ultrasound Ablation of Tumour Cells Using High-Intensity Focused Ultrasound (HIFU) Ultrasound for Drug Delivery Ultrasonic-Induced Transdermal Drug Delivery 121 5; 12 Phaco Emulsification Cataract Surgery Therapeutic Ultrasound Treatment of Injury, Muscular Pain, and Bone Fracture 122 References Modelling and Virtual Prototyping of Piezoelectric Devices Using Finite Element Software Tools Introduction Finite Element Method Theory of Coupled Field Finite Element Analysis for Piezoelectric Structure Finite Element Method Introduction to FE Analysis of Piezoelectric Devices Using a Software Tool Preprocessing Solving Postprocessing Examples of FE Analyses of Piezoelectric Devices Piezoelectric Bimorph Preprocessing Solving Postprocessing Piezoelectric Drill Preprocessing Solving Postprocessing Piezoelectric Gyroscope Preprocessing Solving Postprocessing Finite Element Analysis of Structures in Water Acoustic FE Elements Vibrating Rigid Circular Piston in Water Cymbal Transducer 155 References 162 Bibliography 163 Index 165