cross section (10-16 cm 2 ) electron energy (ev) Ferch J, Raith W and Schroeder K, J. Phys. B: At. Mol.Phys (1980)

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Cross section data are available for electron-impact elastic scattering collisions in the case of D 2 and HD at low electron energies only. The elastic momentum transfer cross sections for the two molecules where no measurements have been reported. However, cross sections for some inelastic processes for these molecules are available in the literature cross section ( -16 cm 2 ) 15 5 0 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 Absolute elastic scattering cross sections have been measured by Ferch for H 2, D 2, and HD molecules in the energy range 0.02 2 ev. The measurements were made with an electron TOF spectrometer and the isotopes H 2, D 2 and HD were found to have identical cross sections within the uncertainty of ±2% for H 2 and D 2 and ±2.5% for HD. Ferch J, Raith W and Schroeder K, J. Phys. B: At. Mol.Phys. 13 1481 (1980)

total cross section ( -16 cm 2 ) (a) 16 14 D 2 H 2 12 8 6 0 2 4 6 8 12 14 total cross section ( -16 cm 2 ) (b) 16 14 12 8 6 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 D 2 H 2 16 The elastic electron scattering cross sections for H 2 and D 2 have also been measured by Golden et al, as a function of electron-impact energy from 0.25 to 15 ev with an estimated uncertainty of ±3%. Within the experimental uncertainty, the H 2 and D 2 cross sections were found to be identical. Golden D E, Bandel H W and Salerno J A 1966 Phys. Rev. 146 40 Buckman S J, Brunger M J and Elford M T, 2003, Photon and Electron Interactions with Atoms, Molecules, and Ions (Landolt-Boernstein New Series Group I, vol17,part C) ed. Y Itikawa (New York: Springer)

20 20 cross section ( -16 cm 2 ) 18 16 14 12 8 cross section ( -16 cm 2 ) 15 5 6 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 0 1E-3 0.01 0.1 1 0 Momentum transfer cross section for H 2 and D 2 from near 0 to 2 ev electron energy ( by Engelhardt and Phelps(Frost and Phelps) ) The cross sections for the two molecules were found to be identical within the stipulated experimental uncertainty. The well-validated momentum transfer cross sections for H 2 by Elford at electron energy from 0.01 to 0 ev have been adopted for HD and D 2 molecules Engelhardt A G and Phelps A V 1963 Phys. Rev. 131 2115, Frost L S and Phelps A V 1962 Phys. Rev. 127 1621 Elford M T, Buckman S J and Brunger M J 2003 Photon and Electron Interactions with Atoms, Molecules, and Ions (Landolt-Bo rnstein New Series Group I, vol 17, part C) ed Y Itikawa (New York: Springer)

Rotational,D vibrational and electronic excitation cross section ( m ) -22 2 cross section ( m ) 0 2 J=1 3 H Rep. Prog. Phys. 73 (20)2116401 J=0 2 2 0 D2 J=1 3 H2 J=0 2-22 J-S Yoon et al 1 0.01 0.1 v=0 2 v=0 1 v=0 1 1 v=0 2 Figure 6. The rotational and vibrational excitation cross sections for H2 and D2 as compiled by Buckman and Phelps [78]. (Reprinted with1permission from [78]. Copyright 1985 American Institute of 0.01 0.1 1 Physics.) The rotational excitation cross sections for J=0 to J=2 and J=1 to J=3 and vibrational excitation cross sections for the v=0 to v=1 and v=0 to v=2 transitions for H2 and D2 have been compiled by Buckman and Phelps Buckman S J and Phelps A V 1 985 J. Chem. Phys. 82 4999 (1985) cross section ( cm ) -16 2 cross section ( cm ) Figure 1.0 6. The rotational and vibrational excitation cross sections for H2 and D2 as compiled by Buckman and Phelps [78]. (Reprinted + 3 with permission from [78]. Copyright 1985 American Institute 0.8 b u of Physics.) + 3 a u -16 2 0.6 1.0 0.4 0.8 + 3 + Figure 8. (a) Electron-impact excitation cross sections of Lyman J-S, Song S-H, Chang andyoon Werner bands of D2.M-Y, Solid Han curve:j-m, LymanHwang bands; dots: Werner 1 + Lee(b) B Log log J and Itikawa Y sections of B!u (solid) and bands. plot for cross C 12008 "u (dots) in the threshold energy J. Phys. Chem. Ref.region Data[53]. 37 913 a u 0.2 0.6 0.0 0.4 0 3 b u 20 40 60 80 The electronic excitation cross sections are the same for H2 and its isotopomers The electronic excitation cross sections for b3σu+ and a3σg+ states of H2 have been compiled by Yoon 0 0.2 7. The electronic excitation cross sections for b 3! + and Figure u 3 + a!g states of H2 as given by Yoon et al [36]. These cross sections 7. Emission cross sections Figure 8. (a) Electron-impact excitation cross sections of Lyman and bands of Demission bands; TheWerner electron-impact crosslyman sections for dots: both Werner D2 and 2. Solid curve: 1 + bands. (b) Log log plot for cross sections of B! (solid) and HD molecules are discussed below, separatelyu for molecular 1 C "u (dots) in the threshold energy region [53]. W-S,

The total electron-impact dissociation cross sections have been calculated by Trevisan and Tennyson(PlasmaPhys.Control. Fusion 44 1263 2002), and Celiberto, for D 2 (Chem. Phys. 133 355, 1988, At. Data Nucl. Data Tables 77 161, 2001) by Trevisan and Tennyson for HD molecule.(plasma Phys.Control. Fusion 44 2217, 2002) 1.2 cross section ( -16 cm 2 ) 1.0 0.8 0.6 0.4 0.2 H 2 HD D 2 0.0 7 8 9 11 12 At higher electron energies, the dissociation cross sections computed by Celiberto, for H 2 and D 2 (Chem. Phys. 133 355, 1988, At. Data Nucl. Data Tables 77 161, 20 01) are the only ones available in the literature. In the absence of any other data, it is dificult to recommended the cross section values at these electron energies.

The total electron-impact ionization cross sections for HD have not been reported in the literature so far, only D 2 Experiment - Rapp D, Englander-Golden P and Briglia D D J. Chem. Phys. 42 4081 (1965) - Schram B L, de Heer F J, van der Wiel M J and Kistemaker J Physica 31 94 - Rapp D and Englander-Golden P 1965 J. Chem. Phys. 43 1464 (1965) - Cowling I R and Fletcher J J. Phys. B: At. Mol. Phys. 6 665 (1973) - Buckman S J and Phelps A V Joint Institute for Laboratory Astrophysics Information Center Report 27 p 1 (1985) Theory - Celiberto R, Janev R K, Laricchiuta A, Capitelli M, Wadehra J M and Atems D E At. Data Nucl. Data Tables 77 161 (2001) cross section ( -16 cm 2 ) 1 0.1 The electron-impact ionization cross sections for D 2 as reported by Rapp and Englander-Golden. 0.01 0 00

e +H 2, D 2 (v, J ) = (H 2, D 2 ) = H, D +H, D, e + HD(v, J ) = (HD) = H+D = D+H. Schematically, the dissociative electron attachment process for H 2, D 2, and HD target molecule written as a two-step process There are three main dissociative electron attachment processes occurring at low electronimpact energies 1 Known as 4 ev process has a threshold at 3.73±0.07 and proceeds through the attractive potential of lowest X 2 Σ u + resonant H 2-, D 2-, HD - state. 2 Proceeds between 5 and 13 ev electron-impact energy through the repulsive state ( 2 Σ g+ ) of the respective negative ions 3 Known as 14 ev process with the threshold around 13.9 ev proceeds through another attractive resonant state of 2 Σ g + symmetry The electron-impact dissociative attachment cross sections for negative ion formation in H 2, D 2, and HD in the 8-18 ev energy range region after subtracting background More detail information is given Rep. Prog. Phys. 73, 116401 (20) cross section ( -16 cm 2 ) 1.5 1.0 0.5 H 2 HD D 2 0.0 6 8 12 14 16 18

All efforts have been made to compile almost all(?) data whatever available in the literature and subsequently evaluate and validate the same. Therefore, the present work should serve as a complete update for e + D 2 and e + HD collisions at different electron-impact energies. But unfortunately there is a paucity of data for both HD and D 2 molecules, more particularly for HD. As a result, the electron-impact cross sections for some of the different processes for these molecules could not be reviewed in this paper. This has left us with a partially inco mplete picture of the subject. 1 2 3 4 5 6 Total and elastic scattering and momentum transfer cross sections Rotational, vibrational and electronical excitation Emission cross section Dissociation Ionization Dissociative electron attachment

To obtain a real comprehensive picture, the following few problems have to be addressed in the near future: 1 Total electron-impact scattering cross sections (elastic + inelastic) have not been measured so far for both HD and D 2 molecules. Such measurements using the latest technology are required at all electron energies from 0 to 00 ev. 2 The rotational and vibrational excitation cross sections for D 2 reported in the literature are the old sets of measured values. Also, such cross sections are not available for HD molecules at all. These cross sections need to be measured again using a new technique. 3 No measurements for the appearance energies of HD +, H + /HD and D + /HD are available. Also, total electron-impact ionization cross sections for HD molecules have not been reported in the literature. 4 The absolute dissociative electron attachment cross sections for HD and D 2 molecules at 300 K and at higher temperatures in the case of the 4 ev process have been measured earlier but have been found in uncertainty estimation. So, these need to be measured again. Also, no effort has been made to measure these cross sections at higher temperatures for the 8 and 14 ev processes.

In the Second RCM, Vienna, 03-05 July 2013, 6.3. Cross,section,data, 7. Electron,attachment,to,excited,molecules, 7.1. Electron,attachment,to,vibrationally,excited,molecules, 7.1.1. Theoretical,considerations, 7.1.1.1. Dissociative,electron,attachment, 7.1.1.2. Non4dissociative,electron,attachment, 7.2. Electron,attachment,to,electronically,excited,molecules,,,,,,,,7.2.1.,Cross,section,calculations, 7.3.,,,,,Experimental,techniques,,,,,,,,7.3.1.,Diagnostic,tools,for,negative,ions, 7.4.,Cross,section,data, 8.,Applications,of,cross,section,data,for,excited,molecules,in,science,and,,,,, industry, 9.,Concluding,remarks,.,References, ( ( Proposal,,,,,,,,,,,,,,,,,The,electron,impact,studies,of,ground,state,molecules,have,been, extensively,carried,out,,both,experimentally,and,theoretically,,since,the,last, few,decades.,however,,work,on,excited,states,has,been,initiated,in,the, relatively,recent,past.,also,,there,is,paucity,of,experimental,data,in,this,field,in, spite,of,the,recent,technological,developments,achieved,at,various,stages,of, electron4collision,experiments.,interest,in,the,subject,has,also,grown, tremendously,because,of,its,applications,in,many,scientific,disciplines,and, semiconductor,and,other,related,industry.,the,main,reason,for,experimental, data,being,scarce,in,this,field,is,the,difficulty,of,producing,sufficiently,large, number,of,molecules,in,excited,states,under,controlled,conditions.,also,,in, many,situations,,it,is,required,to,produce,excited,molecules,in,large,numbers, in,well4characterized,and,precisely,defined,states.,this,was,not,possible, previously,as,the,vibrational/rotational,levels,in,the,same,electronic,state,are, closely,spaced.,over,and,above,,dissociation,and,pre4dissociation,,especially,in, the,case,of,polyatomic,molecules,,create,additional,problems,like,depletion,of, excited,state,populations.,but,fortunately,,with,the,advent,and,availability,of, high4powered,tuneable,pulsed,lasers,,the,situation,has,considerably,improved.,

Contents 1. Introduction... 200 2. Basics of electron impact collisions with excited molecules... 201 2.1. Elastic scattering... 201 2.2. Rotational, vibrational and electronic excitations... 201 2.3. Electron impact dissociation... 202 2.4. Electron impact ionization... 203 2.5. Electron attachment... 203 2.5.1. Free electron attachment to molecules... 203 3. Excited molecules... 206 3.1. Generation of excited molecules in the laboratory... 207 3.1.1. Preparation of vibrationally excited molecules... 207 3.1.2. Preparation of electronically excited molecules... 2 3.1.3. Generation of molecules in super-excited states... 211 3.2. Detection of excited molecules... 212 3.2.1. Optical detection techniques... 213 3.2.2. Thermal detectors... 214 4. Electron scattering of excited molecules... 215 4.1. Molecular hydrogen... 216 4.2. Molecular oxygen... 217 4.3. Molecular nitrogen... 221 4.3.1. Vibrationally excited molecules... 221 4.3.2. Electronically excited molecules... 221 4.4. Carbon dioxide... 222 5. Electron impact dissociation cross sections... 227 5.1. Molecular hydrogen and its isotopomers... 227 6. Electron impact ionization cross section... 227 6.1. Molecular nitrogen... 229 6.2. Molecular oxygen... 231 7. Electron attachment cross sections... 232 7.1. Hydrogen and deuterium molecules... 232 7.2. Molecular nitrogen... 236 7.2.1. Vibrationally excited ground state nitrogen molecules... 236 7.3. Molecular oxygen... 236 7.3.1. Temperature dependence of DEA to molecular oxygen... 236 7.3.2. DEA to metastable singlet oxygen, a 1 g... 237 7.4. Carbon dioxide... 239 7.4.1. Temperature dependence of DEA to carbon dioxide... 239 7.4.2. Double e-beam technique for collision studies of vibrationally excited CO 2... 239 8. Conclusion... 240 Acknowledgment... 241 References... 241

After the publication of JPCRD90, a few comprehensive experimental measurements of the excitation cross section of H 2 have been reported. Considering the results of those measurements, the evaluation of the cross section s made data to revise was made the cross to revise sections the reported cross sections in JPCRD90 reported in JPCRD90 for b 3 + u, a 3 + g, c 3 u, B 1 + u, C 1 u, E,F 1 + g, and e 3 + u. For other states, no no substantially new new information is avail- is available. (JPCRD90) H. Tawara, Y. Itikawa, H. Nishimura, and M. Yoshino, J. Phys. Chem. Ref. Data 19, 617 1990. (JPCRD08) J. S. Yoon and et. al., J. Phys. Chem. Ref. Data 37, 913 2008.

6.4. B 1 u + and C 1 u Three different EELS measurements have been reported for the excitation of the B 1 + u state. The experiment by Srivastava and Jensen 43 is too old and the result of Khakoo and Trajmar 23 is superseded by a new measurement of the same group. 40 Liu et al. 44 derived Q exc from their measurement of the B-X emission. They took much care about possible cascade effects and normalized their cross sections with the optical oscillator strength at the high-energy limit. The resultant Q exc of Liu et al. agrees very well with the corresponding cross section obtained from the EELS measurement by Wrkich et al. Fig. 11. We take the result of Liu et al. as the recommended values for the excitation shown in Table 8. They estimated the errors of their cross sections to be 15 25 % for 20 500 ev of electron energy, 7 15 % for the energies above that, and 30% for the energies below 20 ev. We have the same situation for the excitation of the C 1 u state as for the B 1 + u state Fig. 12. That is, we take the result of Liu et al. 44 for the recommended cross sections for the C 1 u state shown in Table 8. FIG. 11. Cross sections for the excitation of the B 1 u + electronic state of H 2. The result of an EELS measurement by Wrkich et al. 40 is compared with that of an emission measurement of Liu et al. 44 FIG. 12. Cross sections for the excitation of the C 1 u electronic state of H 2. The result of an EELS measurement by Wrkich et al. 40 is compared with that of an emission measurement of Liu et al. 44

1 total scattering cross section 2 elastic scattering cross section 3 momentum transfer cross section 4 rotational cross section for the transition J=0à2 5 Vibrational cross section for the transition v=0à1 6 A few representative cross sections for the excitation of electronic states (i.e., the excitations of b 3 Σ u+, B 1 Σ u+, E, F 1 Σ g + states) 7 Dissociation cross sections 8 Total ionization cross sections 9 Ionization cross section for the production of H +

Electronically excited states (except for metastable one) of hydrogen molecules rapidly decay to the lower states by emission of radiation. For an application of detailed collisional-radiative model, however, information on the rate of collisional transition between those excited states is needed. All the experimental cross sections are summarized. On the other hand, extensive effort has been spent on obtaining theoretical cross sections for the vibrationally or electronically excited targets. Since no corresponding experimental results are available, it is very difficult to evaluate the accuracy of those theoretical cross sections. For this reason, we do not make any recommendation on the cross section for the hydrogen molecules in their excited states. Instead we simply give here a list of those theoretical papers reporting cross sections for excited targets. Electron-impact dissociative attachment of H 2 has a peculiarity. Cross sections for the process strongly depend o n the vibrational state of the target. Very extensive theoretical studies have been made for the process. The following list does not include the papers concerning the dissociative attachment process. 12.1. Collisions with vibrationally excited H 2 in its ground electronic state Papers on the dissociative attachment are not included; see Sec.. i ii H 2 X,v H * 2 n H+H n=b 1 + u, C 1 u, B 1 + u, D 1 u, B 1 + u, D 1 u, b 3 + u Ref. 63 n=b 3 + u superseded by Ref. 65 Ref. 64 n=b 3 + u Ref. 65 H 2 X,v H * 2 n n=b 1 + u, C 1 u, B 1 + u, D 1 u, B 1 + u, D 1 u Ref. 63 iii H 2 X,v H + 2 n H+H + n=x 2 + g Ref. 63 iv H 2 X,v H * 2 n H 2 X,v +h n=b 1 + u, C 1 u Ref. 63 n=b 1 + u, C 1 u, B 1 + u, D 1 u Ref. 66 n=b 1 + u, D 1 u Ref. 67 v H 2 X,v H * 2 n H+H+h n=b 1 + u, C 1 u Ref. 63 vi H 2 X,v H 2 X 2 + u H 2 X,v Ref. 68 12.2. Collisions with electronically excited H 2 i H * 2 B 1 + u,v H * 2 n H+H n=i 1 g Ref. 63 ii H * 2 B 1 + u,v H * 2 n n=i 1 g Ref. 63 iii H * 2 a 3 + g,v H * 2 n H+H n=d 3 u Ref. 69 iv H * 2 a 3 + g,v H * 2 n n=d 3 u Ref. 69 v H * 2 c 3 u,v H * 2 n H+H n=g 3 + g, h 3 + g Ref. 69 vi H * 2 c 3 u,v H * 2 n n=g 3 + g, h 3 + g Ref. 69 vii H * 2 c 3 u H * 2 n n=a 3 + g, b 3 + u, c 3 u, X 1 + g Ref. 70 viii H * 2 a 3 + g H * 2 n n=a 3 + g, b 3 + u, c 3 u, X 1 + g Ref. 71