Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures olo Chiggito & Berthold Jeiger 06-16/06/017 CER Aelertor Shool 017 1
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Why reostrutig? - Visul: Alyser resolutio oise offset d rtefts e iluded - RGA re OT idel istrumets: High uertities i gs the speifi sesitivities d frgmettio. Reostrutio y ssimiltio to mesured spetrum is ltertive to solvig (y deovolutio) for prtil pressures. - Simultio llows triig of persol o my ses without eed for mesuremets. - Chek for suspeted otmits y ddig frgmettio ptter of suspeted ompoet to lirry - Coviig if residul gs ompositio is well idetified. Disussios o epte e more speifi. 06-16/06/017 CER Aelertor Shool 017
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Some defiitios used here Sesitivity io guge: e roportiolity ftor of the mesured hde i olletor urret s retio to hge i the prtil pressure of gs speies divided y the eletro emissio urret e. Sesitivity residul gs lyser RGA: M roportiolity ftor of the mesured detetor urret t mss M s retio to hge i the prtil pressure of gs speies. f M is ot idited it refers ot mss with mximum itesity i frgmettio ptter. ormlised or reltive sesitivity: Sesitivity of o guge to gs speies with respet to the sesitivity for itroge (here) Sesitivity of RGA to gs speies with respet to the sesitivity for itroge (here) 06-16/06/017 CER Aelertor Shool 017 3
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Mss spetrum: Mesuremet of o detetor urret s futi of m/ o (detetor) urrets t mss m [ A ] Cotriutio of ompoet to io urret sigl t mss m Sesitivity of lyser to referee pek [ A / mr ] rtil pressure [ mr ] m m m m... m C 8 = 1 C 8 CO = 0.1 C 8 CH4 = 0 CO CH 4 m/ 14 0.14 8 1.00 9 0.01 m/ 1 0.09 16 0.10 0.0 8 0.10 9 0.00 44 1.00 45 0.01 46 0.00 m/ 1 0.04 13 0.11 14 0.0 15 0.89 16 1.00 17 0.0 06-16/06/017 CER Aelertor Shool 017 4
1 1...... 3 3 3 3 3...... Compositio of gses Mss spetrum Frgmettio ptter Reltive height to referee pek Sesitivity to referee pek rtil pressure Equtios for ll msses 1... Reostrutio of mss spetr o the sis of prtil pressures Tutoril: Residul Gs Alysis 06-16/06/017 CER Aelertor Shool 017 5
1 0 0 0 0 0 0 1 Frgmettio ptter mtrix C Sesitivity mtrix α rtil pressur vetor o urret vetor Ԧ C Whole spetrum expressed i simple mthemtil form usig mtries d vetors. Equtio for spetr simultio with C s frgmettio ptter lirry d prtil pressures i vuum system. Reostrutio of mss spetr o the sis of prtil pressures Tutoril: Residul Gs Alysis 06-16/06/017 CER Aelertor Shool 017 6
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Br grph spetrum Alogue spetrum o urret rtil pressures Gs speifi sesitivities Referee spetr lirry (frgmettio ptters) FWMH = 0.5 Assimiltio of mesured logue spetrum with reostruted simulted oe d ross-hek sum of prtil pressures with io guge redig 06-16/06/017 CER Aelertor Shool 017 7
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Cross-hek: Compriso with ioitio guge Colletor urret is sum of the otriutio of ll prtil pressures multiplied y their respetive sesitivity e e 1... -equivlet pressure iditio... 1 eq. 1... tot 1... _ RGA Cross-hek RGA e rtil pressure of speies BA-guge olletor urret BA-guge emissio urret Sesitivity of BA guge to speies [mr -1 ] Reltive sesitivity of BA guge to with respet to 06-16/06/017 CER Aelertor Shool 017 8
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Rel. sesitivity to 4 3.5 3.5 1.5 1 0.5 0 QMS for UHV pplitios QMA15 (QMG4) QMA15 (HiqhQud) rism VGQ Hide H He CH4 Ar Kr ormlised sesitivity for differet qudrupole mss spetrometers (QMS) t ftory settigs -> High dispersio t low msses Oly iditive Comprig reltive sesitivities with mss Opposite to io guges oistio ross-setio + extrtio + trsmissio proility RGA: Sesitivity to referee peks of frgmettio ptters o guges ollets ll frgmets Whe omprig with io guges sum up ll frgmets of residul gs ompoet o guges Gs f He 0.18 e 0.3 Ar 1.9 Kr 1.94 Xe.87 H 0.46 1 O 1.01 Air 1 CO 1.05 H O 1.1 CO 1.4 CH 4 1.4 C H 6.6 C 3 H 8 4. Uertity < 0 % Rtio mily determied y ioistio ross-setio 06-16/06/017 CER Aelertor Shool 017 9
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Exmple of reostrutio of mesured with simulted spetrum F-Cotmitio with CHF3 (Fluoroform) Cofirmed ESD peks O d F 06-16/06/017 CER Aelertor Shool 017 10
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures terprettio of the mss spetrum 06-16/06/017 CER Aelertor Shool 017 11
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures Mesured / reostruted mss spetrum F-Cotmitio ESD peks O d F. Remiig tres of Fe d Cr just fter degssig d depositio o hot filmet. Cr d Fe dispperd fter severl hours of opertio. Doule-ioistio COF 47 -> 3.5 (ot simulted) sotope 13 COF (ot simulted) (B. Jeiger CER TE-VSC) SEM_Multipl. 10000 Sesitivity Ar (FAR) [A/mr] 1.00E-04 Bkgroud dist 4.00E-14 FWHM 0.5 Bkgroud offs 1.0E-13 i Gs S [A/mr] [mr] Hydroge H 1.00E+00 6.00E-11 Helium He 1.00E+00.00E-13 Methe CH4 1.00E+00 1.00E-1 Wter HO 1.00E+00 6.00E-1 Cromooxide CO 1.00E+00 1.00E-11 Ethe CH6 1.00E+00 6.00E-13 Crodioxide CO 1.00E+00.00E-1 HydrogeFluoride HF 1.00E+00.00E-1 Ferrum Fe 1.00E+00 4.00E-13 Chromium Cr 1.00E+00.00E-13 Oxyge (tomi) O 1.00E+00 3.00E-1 Fluorie(tomi) F 1.00E+00 3.00E-11 TrifluoroAhydridAetiAid C4O3F6 1.00E+00 7.00E-13 Croi Difluoride COF 1.00E+00 8.00E-1 erfluororope C3F6 1.00E+00 3.00E-1 _tot = 1.7E-10 Spetrum e fully explied with presee of Fluorie + kow ompositio i hot io soure (C O H Fe Cr) 06-16/06/017 CER Aelertor Shool 017 1
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures SO 1491: Vuum guges Defiitios d speifitios for qudrupole mss spetrometers SO/ TS 0175 (i preprtio): Vuum tehology -- Vuum guges - Clirtio of qudrupole mss spetrometers for prtil pressure mesuremet SO/ TS 0177 (i preprtio): Vuum tehology - Vuum guges -- roedures to mesure d report outgssig rtes. 06-16/06/017 CER Aelertor Shool 017 13
Tutoril: Residul Gs Alysis Reostrutio of mss spetr o the sis of prtil pressures OW Exerise: Reostrutig mesured mss spetrum 06-16/06/017 CER Aelertor Shool 017 14