Laser and pinching discharge plasmas spectral characteristics in water window region

Similar documents
Laser Plasma Monochromatic Soft X-ray Source Using Nitrogen Gas Puff Target

The wavelength reconstruction from toroidal spectrometer image data

Visualization of Xe and Sn Atoms Generated from Laser-Produced Plasma for EUV Light Source

Laser heating of noble gas droplet sprays: EUV source efficiency considerations

EUV Reflectivity measurements on Acktar Sample Magic Black

LASER-COMPTON SCATTERING AS A POTENTIAL BRIGHT X-RAY SOURCE

188 L. Jakubowski and M.J. Sadowski temperature. Some examples of the registered X-ray images are shown in Fig.1. Figure 1. X-ray pinhole images from

Development of Polarization Interferometer Based on Fourier Transform Spectroscopy for Thomson Scattering Diagnostics

Interactive system for the interpretation of atomic spectra

Laser-produced extreme ultraviolet (EUV) light source plasma for the next generation lithography application

Fundamental investigation on CO 2 laser-produced Sn plasma for an EUVL source

GI Collectors for EUV/BEUV Sources and Metrology Ladislav Pina Rigaku Innovative Technologies Europe, Prague 4, Czech Republic

Padraig Dunne, UCD School of Physics Dublin, Ireland.

SUPPLEMENTARY INFORMATION

Energy Transformations in Z-Pinches

EXTREME ULTRAVIOLET AND SOFT X-RAY LASERS

High Brightness Electrodeless Z-Pinch TM EUV Source for Mask Inspection Tools

EUV ablation. C. Liberatore1,2, A. Bartnik5, K. Mann4, M. Müller4, L. Pina2, L. Juha3, J. J. Rocca6, A. Endo1, T. Mocek1

Influence of gas conditions on electron temperature inside a pinch column of plasma-focus discharge

SEMATECH 157nm Technical Review

Laser-driven intense X-rays : Studies at RRCAT

Set-up for ultrafast time-resolved x-ray diffraction using a femtosecond laser-plasma kev x-ray-source

X-ray photoelectron spectroscopy with a laser-plasma source

EUV Source Developments on Laser-Produced Plasmas using Lithium New Scheme Target

EUV-Technology with Discharge EUV-Lamp"

EUV lithography and Source Technology

PHY410 Optics Exam #3

Wavelength Frequency Measurements

Laser-driven undulator source

Cesium Dynamics and H - Density in the Extended Boundary Layer of Negative Hydrogen Ion Sources for Fusion

Development of Soft X-rayX using Laser Compton Scattering

Supplemental material for Bound electron nonlinearity beyond the ionization threshold

object objective lens eyepiece lens

Resonantly Pumped Er:YAG and Er:YAP Lasers

SUPPLEMENTARY INFORMATION

Investigations on warm dense plasma with PHELIX facility

Measurements of rotational transform due to noninductive toroidal current using motional Stark effect spectroscopy in the Large Helical Device

X-Rays From Laser Plasmas

Damage to Molecular Solids Irradiated by X-ray Laser Beam

SUPPLEMENTARY INFORMATION

Where are the Fringes? (in a real system) Div. of Amplitude - Wedged Plates. Fringe Localisation Double Slit. Fringe Localisation Grating

Measurement of the laser cut front geometry

Experimental study of nonlinear laser-beam Thomson scattering

Wavefront metrology and beam characterization in the EUV/soft X-ray spectral range

Influence of an intensive UV preionization on evolution and EUV-emission of the laser plasma with Xe gas target (S12)

Transition probabilities of several transitions intheariiiandarivspectra

Spectroscopic Studies of Soft X-Ray Emission from Gadolinium Plasmas

PHYS 4400, Principles and Varieties of Solar Energy Instructor: Randy J. Ellingson The University of Toledo

FUNDAMENTAL PARAMETER METHOD FOR THE LOW ENERGY REGION INCLUDING CASCADE EFFECT AND PHOTOELECTRON EXCITATION

Astronomy 203 practice final examination

Development of portable neutron generators based on pinch and plasma focus discharges 1

Medical Applications of Compact Laser-Compton Light Source

PRINCIPLES OF PHYSICAL OPTICS

Optimization of laser-produced plasma light sources for EUV lithography

University of Cyprus. Reflectance and Diffuse Spectroscopy

Higher Physics. Particles and Waves

Magnetic fields applied to laser-generated plasma to enhance the ion yield acceleration

Plasma Spectroscopy in ISTTOK

PIC simulations of laser interactions with solid targets

Impurity accumulation in the main plasma and radiation processes in the divetor plasma of JT-60U

NUCLEAR EMISSIONS FROM TITANIUM HYDRIDE/DEUTERIDE INDUCED BY POWERFUL PICOSECOND LASER BEAM

Dense plasma formation on the surface of a ferroelectric cathode

CHEM*3440. Photon Energy Units. Spectrum of Electromagnetic Radiation. Chemical Instrumentation. Spectroscopic Experimental Concept.

Chapter 37 Early Quantum Theory and Models of the Atom

Supporting Information

CONCEPTUAL STUDY OF A SELF-SEEDING SCHEME AT FLASH2

Quantitative Analysis of Carbon Content in Bituminous Coal by Laser-Induced Breakdown Spectroscopy Using UV Laser Radiation

Modern optics Lasers

Wave Nature of Matter

SRF GUN CHARACTERIZATION - PHASE SPACE AND DARK CURRENT MEASUREMENTS AT ELBE*

Review of the doctoral dissertation of Ismail Saber titled: Spectral investigation of extreme ultraviolet induced plasmas

Supplementary Figure 1 Comparison of single quantum emitters on two type of substrates:

Boron-Proton Nuclear-Fusion Enhancement Induced in Boron-Doped Silicon Targets by Low-Contrast Pulsed Laser

Volume Production of D - Negative Ions in Low-Pressure D 2 Plasmas - Negative Ion Densities versus Plasma Parameters -

Preview from Notesale.co.uk Page 1 of 38

AS 101: Day Lab #2 Summer Spectroscopy

Femtosecond laser microfabrication in. Prof. Dr. Cleber R. Mendonca

Measured Stark shifts of Kr I line profiles in the 5s 5p and 5s 5p transitions

Diffraction Gratings, Atomic Spectra. Prof. Shawhan (substituting for Prof. Hall) November 14, 2016

Chemistry (

Internal magnetic field measurement in tokamak plasmas using a Zeeman polarimeter

Lab 5: Spectroscopy & the Hydrogen Atom Phy248 Spring 2009

The details of point source helicity injection as a noninductive startup technique must be characterized:

Abstract. PEGASUS Toroidal Experiment University of Wisconsin-Madison

A beam of coherent monochromatic light from a distant galaxy is used in an optics experiment on Earth.

C S N f - 7 7Ob / 5'+RADIATION TEMPERATURE MEASUREMENTS

The scanning microbeam PIXE analysis facility at NIRS

Assessment of Threshold for Nonlinear Effects in Ibsen Transmission Gratings

Evaluation at the intermediate focus for EUV Light Source

Flow dynamics and plasma heating of spheromaks in SSX

Richard Miles and Arthur Dogariu. Mechanical and Aerospace Engineering Princeton University, Princeton, NJ 08540, USA

Lasers and Electro-optics

All about sparks in EDM

Assessment of the Azimuthal Homogeneity of the Neutral Gas in a Hall Effect Thruster using Electron Beam Fluorescence

X-Ray Radiation Channeling through Micro-Channel Plates: spectroscopy with a Synchrotron Radiation Beam

Energetic neutral and negative ion beams accelerated from spray target irradiated with ultra-short, intense laser pulses

Calibration of the IXPE Instrument

Density Collapse in Improved Confinement Mode on Tohoku University Heliac

Pulsed-power based bright EUV light source for metrology

Course Details. Analytical Techniques Based on Optical Spectroscopy. Course Details. Textbook. SCCH 211: Analytical Chemistry I

Transcription:

Laser and pinching discharge plasmas spectral characteristics in water window region P Kolar 1, M Vrbova 1, M Nevrkla 2, P Vrba 2, 3 and A Jancarek 2 1 Czech Technical University in Prague, Faculty of Biomedical Engineering, Czech Republic 2 Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical Engineering, Czech Republic 3 Institute of Plasma Physics, Academy of Sciences, Czech Republic E-mail: petr.kolar@linet.cz Abstract Water window emission spectra of two laboratory nitrogen plasma sources were examined with a free standing grating spectrometer (FSGS). The highest line intensities at the wavelength 2.88 nm achievable with the sources were compared. Pulse energies for this line were judged as 0.02 mj srad -1 and 0.16 mj srad -1 with laser produced plasma system and pinching discharge plasma, respectively. The spectral resolution was found about 0.01 nm at 3rd order of spectral lines around wavelength 2.5 nm. 1. Introduction Nitrogen plasma may be a suitable source of intensive line radiation in the water window spectral region (2.4 4.4 nm), if the plasma electron temperature is several tens of electronvolts. This intensive line radiation corresponding to the 1s 2 1s2p quantum transition of helium like nitrogen ions may be useful namely for imaging of small biological objects in water environment. There are several published papers related to radiation sources based on nitrogen plasma, designed to operate in water window region. Namely, laser produced nitrogen plasma systems: Fiedorowitz et al reached 6.2 10 11 photons srad -1 by laser produced plasma system [1] and Wachulak et al 4.5 10 12 photons srad -1 by laser system with double nozzle at wavelength 2.88 nm [2]. Peth reports in his dissertation [3] the value 5.0 10 11 photons srad -1 reached by laser produced plasma system. Emitted energies 4.5 10 12 photons srad -1 with capillary discharge nitrogen plasma are presented by Bergmann et al when pseudosparklike system was used [4]. Professsional electrodeless z-pinch device EQ-10M of company Energetiq is able to generate about 1.6 10 12 photons srad -1 with repetition rate up to 1 khz [5]. We have examined both types of nitrogen laboratory plasma sources, created either by neodymium YAG laser radiation focused to nitrogen gas jet or by pinching discharge in nitrogen filled capillary. Our spectral diagnostics was focused on the water window spectral range with predominating wavelength of 2.88 nm, corresponding to the 1s 2 1s2p quantum transition of helium like nitrogen. The laser plasma laboratory radiation source was made by Laser- Laboratorium Göttingen (LLG) in Germany. In this system 500 mj Nd:YAG laser pulse of 5 ns duration was focused by lens with the focal length 10 cm [3]. The system of pinching capillary discharge was developed at our University by Faculty of Nuclear Sciences and Physical Engineering in Prague (FNSPE) [6]. Alumina capillary of 3.2 mm diameter and 20 cm length is filled with nitrogen of tuned initial pressure 40-80 Pa. The 300 ns current pulse with amplitude 13,5 ka is created by discharging 25 nf capacitors initially charged to 70-80 kv. 2. Experimental setup In our spectrometer we have used free-standing silicon nitride grating with period d = 100 nm and the ratio of the width of free space a and the grating period d estimated to 0.5. This value was stated according to the record from scanning electron microscope. The thickness of grating is approximately 200 nm. The bar profiles are more trapezoidal than rectangular. There is also a transversal support structure with period about 1.5 µm.

P Kolar et al Diagnostics of both sources has been performed with the same spectrometer construction. Proportions of the spectrometer are in both cases L 1 = 0.98 m (source grating), L 2 = 0.17 m (grating CCD), D = 1.15 m (total distance). CCD back iluminated XUV camera Rigaku X Vision M25 was used. The field diffracted by the grating is recorded by CCD camera coupled with the metalic bellows, which enables side moving in direction of dispersion. The grating is placed in the axis of the arm rotation. Fig. 1 shows the scheme of the experimental setup of LLG system. LLG laser plasma shape is elongated in laser beam direction which lies in horizontal plane on axis of spectrometer. Hence, to maximize a spectral resolution the arm of spectrometer revolves in a vertical plane (Fig.1). A slit of width 30 µm was placed in front of the grating under the microscope to increase the spectral resolution. The arrangement of measurements with the FNSPE capillary system was almost identical except aperture 2 (Fig. 2) selecting the central part of the output beam, because the plasma column is much wider then in the previous case. Spectra were integrated over 120 shots with LLG system and 30 shots with FNSPE capillary sytem. The repetition rate used was 2 Hz for both measurements. The maximum available repetition rate of LLG source is 2 Hz, whereas the capillary source could achieve the repetition up to ten Hertz. Fig. 1 Experimental setup of LLG system spectral diagnostics measurement 1-Set of filters on the moving arm, 2-Free-standing diffraction grating Fig. 2 Experimental setup of FNSPE system spectral diagnostics measurement 1-Rogowski coil, 2-Aperture, 3-Set of filters on the moving arm, 4-Free-standing diffraction grating

Spectral characteristics of nitrogen plasma radiation 3. Results and discussions Record of the diffraction pattern obtained with LLG system is shown in Fig. 3, where the most faraway very intensive lines belong to 1 st order of 2.88 nm wavelength. There are also subsequent diffraction orders in the extension of this spectrum, where it is possible to reach resolution down to 0.01 nm due to higher dispersion. In the 3 rd order of spectral lines 2,48 nm and 2,49 nm we can resolve transitions NVII 1s-2p, NVI 1s2-1s.3p respectively [7]. Although the free-standing grating seems to have ratio a/d = 0.5 which should eliminate even diffraction orders, there are evident lines of 2.88 nm radiation up to 6th order (Fig. 4 and 5). This occurs due to shape and transmission of silicon nitride grating bars. Titanium filter transmission characteristics [8] (as seen from Fig. 4 - green dashed line) allows us to isolate quasi-monochromatic radiation of referenced sources. We present measured characteristics in wavelenth region of Ti filter maximum transmission (Fig. 4 and 5). Generaly LLG system with Ti filter produces radiation with good monochromaticity of wavelength 2.88 nm (Fig 4). Fig. 5 shows measured spectrum of FNSPE capillary source. One can see other weak lines beside 2.88 nm line in Ti filter transmission region. These components belong to hydrogenlike and helium-like carbon ion transitions. Carbon ions originate probably from insulator oil surrounding the capillary capacitor bank. [6] There are found also a few peaks of radiation in the region about 2.5 nm in both cases. Fig. 3 Record of LLG spectrum 0th order surrounding with most excentric line 2.88 nm, without filter, 120 pulses Fig. 4 Recorded spectrum of LLG source (full black line), recorded spectrum with titanium filter (full blue line) and titanium filter transmission (green dashed line)

P Kolar et al Fig. 5 Recorded spectrum of FNSPE source (full black line), recorded spectrum with titanium filter (full red line) and titanium filter transmission (green dashed line) To estimate pulse energy of LLG radiation source two methods were used. The energy of the most intensive line transmitted trough a small aperture and a titanium filter was guessed from the CCD record. An aperture of 1 mm diameter covered with Ti filter supported by 5 µm nickel mesh was placed 0.2 m in front of a CCD camera. The distance between the source and the CCD was 1 m. Transmission of the 0.8 µm thick titanium filter about 30% was taken into account. Projection of the aperture was integrated over 20 pulses (Fig. 6) and then the mean value of signal intensity was evaluated. Energy of LLG system radiation per pulse was estimated as 0.01 mj, which corresponds to 1.5 10 11 photons srad -1. Energy judged from 1st diffraction order of radiation component 2.88 nm with using diffraction grating was 0.02 mj srad -1 and 2.8 10 11 photons srad -1. which gives 2.3 10 12 photons srad -1 and 0.16 mj srad -1. The plasma temperature was estimated from the ratio of line intensities of transitions of the same line series presuming Boltzmann distribution of the corresponding energy level populations. Table 1 shows relative intensities of selected spectral lines. Transition 1s 2 1s4p was not recognized in case of FNSPE source. Resulting plasma temperatures are estimated roughly 50-100 ev for both sources. Table 1. The intensities of selected spectral lines System Transition Intensity [a.u.] LLG 1s 2 1s2p 10 4 1s 2 1s4p 10 3 1s 2 1s5p 8 10 2 FNSPE 1s 2 1s2p 4.5 10 4 1s 2 1s5p 5 10 3 Fig. 6 Projection of 1 mm dia. aperture covered with Ti foil supported by 5 µm nickel mesh Energy of FNSPE capillary source radiation per pulse was examined only with the grating method, Bandwidth due to Doppler broadening was calculated for the highest temperature of the interval and allows us to estimate ratio λ/ λ 5 10 3. This value is expected as sufficient for microscope techniqe using Fresnel zone plates which, requires bandwith at least λ/ λ > 300. 5. Conclusion

Spectral characteristics of nitrogen plasma radiation We have presented emission characteristics of two laboratory plasma sources in the water window spectral region. Both sources have strong lines in this region. In combination with the titanium filter they provide an almost monochromatic radiation with the wavelengts 2,88 nm and they are suitable for imaging experiments with biological samples containing water. The LLG laser plasma system emits approximately 2-3 10 11 photons srad -1 per pulse The radiation intensity of the FNSPE source is 2.3 10 12 photons srad -1 e.i. nearly one order higher than that of the LLG system. The achievable repetition rate of FNSSPE system is also one order higher. The bandwidth due to Doppler broadening was evaluated for plasma temperature to λ/ λ 5 10 3. As the FNSPE radiation source in the water window contains components of carbon ion transitions, the LLG system produces more monochromatic radiation. Acknowledgments The research has been supported by the Ministry of Education Youth and Sports under the Development project C 42 - CTU 2010 and in the frame of INGO program on project No. LA08024. References [1] Fiedorowicz H et al 1999 Investigation of soft X-ray emission from a gas puff target irradiated with a Nd:YAG laser Opt. Commun. 163 103 114 [2] Wachulak P W et al 2010 Water window compact, table-top laser plasma soft X-ray sources based on a gas puff Nucl. Instr. and Meth. Phys. Res. B 268 1692 1700 [3] Peth C 2008 XUV-Laserplasmaquellen für die Absorptions-Spektroskopie und zeitaufgelöste Röntgenbeugung, Georg- August-Universität Göttingen Diss. 53 [4] Bergmann K Küpper F and Benk M 2008 Soft x-ray emission from a pulsed gas discharge in a pseudosparklike electrode geometry J. Appl. Phys. 103 123304 [5] Energetiq EQ-10SX SXR Source datasheet http://www.energetiq.com/datasheets/ds 004_EQ-10M_Data_Sheet_SXR.pdf [6] Vrba P et al 2010 Pinching capillary discharge as a water window radiation source, J. El. Spectr. Rel. Phenom., In Press [7] NIST Atomic Spectra Database http://physics.nist.gov/physrefdata/asd/ index.html [8] Filter Transmission http://henke.lbl.gov/optical_constants/filte r2.html