Keysight 7500 AFM. Data Sheet

Similar documents
Keysight Technologies Oxygen-Free High-Resolution Electrochemical SPM. Application Note

Keysight Technologies In situ Electrochemical Measurement Using 9500 AFM. Application Note

Keysight Technologies Young s Modulus of Dielectric Low-k Materials. Application Note

Keysight Technologies Carbon Nanotube Tips for MAC Mode AFM Measurements in Liquids. Application Note

Keysight Technologies Measuring Substrate-Independent Young s Modulus of Low-k Films by Instrumented Indentation. Application Note

Keysight Technologies Instrumented Indentation Testing with the Keysight Nano Indenter G200. Application Note

Keysight Technologies Introduction to SECM and Combined AFM-SECM. Application Note

The most versatile AFM platform for your nanoscale microscopy needs

Performance and Control of the Agilent Nano Indenter DCM

Keysight Technologies Measurement Uncertainty of VNA Based TDR/TDT Measurement. Application Note

Thermo Scientific ELEMENT GD PLUS Glow Discharge Mass Spectrometer. Defining quality standards for the analysis of solid samples

Introduction to Fourier Transform Infrared Spectroscopy

NIS: what can it be used for?

Instrumentation and Operation

Introduction to Fourier Transform Infrared Spectroscopy

Module 26: Atomic Force Microscopy. Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM

Scanning Probe Microscopy. Amanda MacMillan, Emmy Gebremichael, & John Shamblin Chem 243: Instrumental Analysis Dr. Robert Corn March 10, 2010

Clark Atlanta University Center for Surface Chemistry and Catalysis Instrument Capabilities

for XPS surface analysis

Dielectric Analysis of Solid Insulations

Today s SPM in Nanotechnology

Basic Laboratory. Materials Science and Engineering. Atomic Force Microscopy (AFM)

Defining quality standards for the analysis of solid samples

Dielectric Analysis of Insulation Liquids

NTEGRA for EC PRESENTATION

Keysight Technologies Differentiating Surface Mechanical Properties with Dynamic Lateral Force Microscopy. Application Note

Lecture 4 Scanning Probe Microscopy (SPM)

IN QUALITATIVE ANALYSIS,

FORENSIC TOXICOLOGY SCREENING APPLICATION SOLUTION

General concept and defining characteristics of AFM. Dina Kudasheva Advisor: Prof. Mary K. Cowman

Consulting Service measurements Project collaboration Training & Education. Swiss Scanning Probe Microscopy User Laboratory

Complementary Use of Raman and FT-IR Imaging for the Analysis of Multi-Layer Polymer Composites

High-resolution Characterization of Organic Ultrathin Films Using Atomic Force Microscopy

Atomic and molecular interactions. Scanning probe microscopy.

High-Pressure Electrolytic Carbonate Eluent Generation Devices and Their Applications in Ion Chromatography Systems

of mass spectrometry

SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]

Atomic Force Microscopy imaging and beyond

The Raman Spectroscopy of Graphene and the Determination of Layer Thickness

STM: Scanning Tunneling Microscope

Agilent Cary 630 FTIR sample interfaces combining high performance and versatility

Insights Into the Nanoworld Analysis of Nanoparticles with ICP-MS

Measure mass, thickness and structural properties of molecular layers Automated and fully integrated turn-key system

Scanning Probe Microscopy (SPM)

Thermo Scientific K-Alpha + XPS Spectrometer. Fast, powerful and accessible chemical analysis for surface and thin film characterization

AFM Imaging In Liquids. W. Travis Johnson PhD Agilent Technologies Nanomeasurements Division

Keysight Technologies In Situ Studies of a Fungal Polysaccharide Using MAC Mode AFM. Application Note

novaa 800 D Atomic Absorption Spectrometer

Program Operacyjny Kapitał Ludzki SCANNING PROBE TECHNIQUES - INTRODUCTION

AN2970 Application note

Everyday NMR. Innovation with Integrity. Why infer when you can be sure? NMR

Low Temperature Physics Measurement Systems

CNPEM Laboratório de Ciência de Superfícies

Keysight Technologies Measuring Polarization Dependent Loss of Passive Optical Components

XBC300 Gen2. Fully-automated debonder and Cleaner

Requirements to perform accurate dielectric material analysis

Agilent Technologies. Scanning Microwave Microscopy (SMM)

Beetle UHV VT AFM / STM

Agilent EEsof EDA.

TA Instruments NEW AR-G2 INTRODUCING THE WORLD S FIRST MAGNETIC BEARING RHEOMETER! The World Leader in Thermal Analysis and Rheology Systems

Contents. What is AFM? History Basic principles and devices Operating modes Application areas Advantages and disadvantages

Chapter 10. Nanometrology. Oxford University Press All rights reserved.

RamanStation 400: a Versatile Platform for SERS Analysis

Product Data. Brüel & Kjær B. Sound Intensity Calibrator Type 3541

protein interaction analysis bulletin 6300

Lecture 12: Biomaterials Characterization in Aqueous Environments

Keysight Technologies Contact Deformation of LiNbO3 Single Crystal: Dislocations, Twins and Ferroelectric Domains.

Scanning Tunneling Microscopy

[ Care and Use Manual ]

Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design

In-situ Imaging electrochemistry reaction with atomic force microscope and 3D desktop manufacturing in developing electrochemistry cells

Fast, Effective XPS Point Analysis of Metal Components

Intermittent-Contact Mode Force Microscopy & Electrostatic Force Microscopy (EFM)

Keysight Technologies Nanomechanical Mapping of Graphene Quantum Dot-Epoxy Composites Used in Biomedical Applications

Thermal Analysis Premium

MS482 Materials Characterization ( 재료분석 ) Lecture Note 11: Scanning Probe Microscopy. Byungha Shin Dept. of MSE, KAIST

Introduction to Scanning Probe Microscopy Zhe Fei

The solution for all of your

Reducing dimension. Crystalline structures

Thermo Scientific ConFlo IV Universal Interface. Continuous Flow Interface. Isotope Ratio MS

XPS Surface Characterization of Disposable Laboratory Gloves and the Transfer of Glove Components to Other Surfaces

TE 75R RESEARCH RUBBER FRICTION TEST MACHINE

[ OSTRO PASS-THROUGH SAMPLE PREPARATION PRODUCT ] The Simpler Way to Cleaner Samples

Supplementary Figure 1 a) Scheme of microfluidic device fabrication by photo and soft lithography,

SurPASS. Electrokinetic Analyzer for Solid Samples. ::: Innovation in Materials Science

A DIVISION OF ULVAC-PHI. Quantera II. Scanning XPS Microprobe

INTRODUCTION TO SCA\ \I\G TUNNELING MICROSCOPY

Scanning Force Microscopy

HOW ADVANCED PYROMETERS INCREASE THERMAL PROCESS REPEATABILITY AND PRODUCT QUALITY

Thermal correction - workpiece expansion. Thermal correction - workpiece expansion AP306. Problem

473-SHX Dew Point Mirror

Institute for Electron Microscopy and Nanoanalysis Graz Centre for Electron Microscopy

Characterization of MEMS Devices

Low Vibration Cryogenic Equipment

Multi Core-Drill. Laboratory Asphalt Core-Drill

High-resolution Magnetic Force Microscope

Keysight Technologies Measuring Stress-Strain Curves for Shale Rock by Dynamic Instrumented Indentation. Application Note

L7800AB/AC SERIES PRECISION 1A REGULATORS

Nanostructure. Materials Growth Characterization Fabrication. More see Waser, chapter 2

Finnigan LCQ Advantage MAX

Transcription:

Keysight 7500 AFM Data Sheet

System Overview The Keysight 7500 AFM establishes new performance, functionality, and ease-of-use benchmarks for nanoscale measurement, characterization, and manipulation. This next-generation system extends the forefront of atomic force microscopy, offering a large, closed-loop AFM scanner with atomic resolution, industry-leading environmental control, ultra-high-precision temperature control, an unrivaled range of electrochemistry capabilities, and much more. The clever, compact design of the 7500 gives researchers quick, convenient access to their samples. A half-dozen of the most used AFM imaging modes are supported by the system s standard nose cone, which can easily be interchanged with specialized nose cones as needed, extending the 7500 s capabilities effortlessly. Furthermore, a newly introduced 7500 STM scanner now provides guaranteed atomic-resolution imaging of various conducting surfaces, and a new inverted light microscope (ILM) system combines the power of the high-resolution 7500 atomic force microscope with the direct optical viewing capability of an inverted optical microscope. Whether serving academia or industry, the Keysight 7500 is the new gold standard for advanced AFM applications in the fields of electrochemistry, life science, materials science, polymer science, electrical characterization, and nanolithography. Features and Benefits Atomic-resolution imaging with closed-loop 90μm AFM scanner Exceptional environmental and temperature control Standard nose cone supports expanded set of imaging modes Superior scanning in fluids, gases, and ambient conditions Single-pass nanoscale electrical characterization Unprecedented electrochemistry (EC) capabilities New STM scanner for studies of conducting materials New ILM system for simultaneous AFM/optical imaging Additional Capabilities Materials science Life science Polymer science Electrochemistry Electrical characterization Nanolithography

03 Keysight Keysight 7500 AFM Data Sheet New Design Advantages: AFM and STM The 7500 offers stable AFM imaging combined with exceptionally flat, easily reproducible displacement over the entire scan range to deliver high resolution and very low distortion. Keysight s patented top-down tip scanner technology is ideal for imaging in fluids and in air as well as under controlled temperature and environmental conditions. The AFM scanner s standard nose cone enables the use of contact mode, AAC mode, current-sensing AFM (CS-AFM), EFM, KFM, MFM, and MAC Mode in fluids and in air. Easy-to-load nose cones for additional AFM techniques, such as Top MAC Mode and DLFM, can be interchanged quickly and conveniently. Agilent nose cones are made from PEEK polymers, have low chemical reactivity, and can be used in a wide range of solvents. A stainless steel nose cone is available for fluorescence work. The system s video optics include a color camera and can resolve details to less than 1.7μm. Open access to the scanner and easy alignment of the optics help simplify use of the 7500. The user-friendly scanner has a built-in detector, no cables to plug-in, and is easy to calibrate. A new STM scanner is also now available for use with the 7500 AFM platform. Scanning tunneling microscopy is a technique that takes advantage of the extreme distance sensitivity of the tunneling current between two conducting electrodes to measure tunnel-current variations as a probe is scanned over a sample s surface. Figure 1. Topography image (top) of polished duplex stainless steel. MFM image (bottom) showing ferrite and Austenite domains of the duplex stainless steel. Scan size: 10μm. The 7500 STM scanner delivers outstanding results on a variety of conducting materials in ambient, controlled gas, and fluid environments. Preamplifier modules extend its effective range; the low-current and ultra-low-current STM scanner provides stable imaging at pico-ampere and sub-pico-ampere currents to resolve individual atoms and molecules. The 7500 scanner. Figure 2. High resolution closed-loop MAC mode image of bacteriorhodopsin, revealing the donut-like structure of bacteriorhodopsin trimers, and the connecting fibrous arms in between. Scan size: 120nm.

04 Keysight Keysight 7500 AFM Data Sheet Environmental and Temperature Control The 7500 AFM system includes a built-in environmental chamber engineered to meet the many requirements of intricate, demanding nanoscience applications. The chamber provides an easily accessible, sealed sample compartment that is completely isolated from the rest of the system. Six inlet/outlet ports permit the flow of different gases into or out of the sample area. The system s scanner resides outside the environmental chamber, so it is protected from contamination, harsh gases, solvents, caustic liquids, and other potentially damaging environments. Humidity levels are monitored by sensors built into the chamber. Oxygen and reactive gases can be introduced into and purged from the sample chamber. Figure 3. Closed-loop contact mode, topography image of atoms on mica. Scan size: 10 nm. Robust, easy-to-handle sample plates designed specifically for use with the 7500 are offered to facilitate studies in air, in fluids, or with electrochemistry. The system s standard sample plate can be utilized for many imaging modes and is configurable with a fluid cell. Special heating and cooling plates offer a total range of -40 C up to 250 C. Sample plates for Top MAC Mode are also available Keysight s temperature control system employs a patented thermal insulation and compensation design to deliver the industry s most precise temperature control. This highly versatile option allows imaging during temperature changes and is fully compatible with all imaging modes, including those utilized in fluids. The temperature controller s unique design isolates the sample plate from the rest of the system, improving stability and performance. Temperatures can be controlled from -40 C up to 250 C, with suitable resolution and control to match any experimental requirements. Figure 4. Closed-loop topography image of C 36 H 74. Scan size: 162 nm. MAC Mode Keysight s patented MAC Mode is a gentle, nondestructive AFM imaging technique that employs a magnetic field to drive a paramagnetically coated cantilever, yielding precise control over oscillation amplitude (thus providing excellent force regulation). Since only the tip is driven, the signal-to-noise ratio is greatly enhanced, yielding a significant improvement while imaging in fluids. MAC Mode has allowed researchers to resolve sub-molecular structures that could not be resolved with any other AFM technique. It is particularly useful for imaging delicate samples in application areas that require high resolution and force sensitivity, such as life science, polymer science, and surface science. AAC mode is included with MAC Mode. The MAC Mode III controller is optimized for single-pass Kelvin force microscopy (KFM) and electrostatic force microscopy (EFM), a technique that enables simultaneous collection of topography and surface potential data by using a servo-on-height cantilever approach that is insensitive to scanner drift. These modes are especially useful for measuring dielectric films, metal surfaces, piezoelectric materials, and conductor-insulator transitions. In addition to KFM/EFM and piezo force microscopy Figure 5. KFM topography (top) and surface potential (bottom) images of fluoroalkane F 14 H 20 self-assembly on Si. Scan size: 4μm.

05 Keysight Keysight 7500 AFM Data Sheet (PFM), MAC Mode III allows the use of higher resonance modes of the cantilever. Higher resonance modes can be utilized to collect additional information about mechanical properties of the sample surface. In addition, a newly available Keysight ILM system lets researchers fully leverage many key 7500 AFM capabilities, including MAC Mode, for life science studies whose results depend on the simultaneous acquisition of atomic force and optical (or fluorescence) microscopy data. The patented mounting design of the ILM system incorporates a rigid structure that provides the low noise floor needed to obtain sub-nanometer resolution. The advanced design also allows the AFM to sit on top of an inverted microscope and under the illumination pillar, resulting in better optical contrast. The ILM system is compatible with many popular inverted microscope and camera models. Electrochemistry The Keysight 7500 can be equipped with electrochemistry accessories that include a fluid cell, a salt bridge, improved software, and a built-in, low-noise potentiostat/ galvanostat for in situ EC-AFM studies. When combined with precise temperature control, it is possible to obtain information about electrochemical processes that would otherwise be inaccessible. Furthermore, the 7500 AFM system s environmental control allows imaging with no dissolved oxygen in either aqueous or non-aqueous solutions. The optional EC glove box features a smaller chamber that allows the glove box and AFM to be placed inside the Pico IC isolation chamber for uncompromising results. The 7500 can also be utilized with SECM mode, a seamlessly integrated technology package that enables scanning electrochemical microscopy (SECM) on conductive and insulating samples. This new Agilent mode of AFM operation has been designed to provide ultimate performance as well as supreme ease of use. SECM can be performed quickly and reliably with nanoscale resolution. It is very useful for myriad applications, including the investigation of homogeneous and heterogeneous electron transfer reactions, the imaging of biologically active processes, surface modification, analysis of thin films, screening of catalytic materials, and corrosion process studies. Figure 6. Contact mode, topography image (top) of a cell were made to characterize cell morphology including nucleus lower right. Scan size 50 μm. Elasticity map (bottom) of a fixed cell. An array of force distance curves were measured at the same position as shown in the top figure. A map of elasticity modulus was constructed by analyzing the individual force distance curves. -0.4V Cu/Au Voltage 0.4 V -0.1 V -0.2 V -0.3 V -0.4 V -0.2V -0.3V Thickness (nm) 0 10.4 53.0 77.2 84.2 Roughness (nm) 2.78 3.29 3.81 5.79 10.3 Figure 7. (top) Averaged topography line profile from the AFM image. (bottom) The estimated thickness and surface roughness of the Cu films deposited at different overpotentials. -0.1V Figure 8. Three-dimensional EC-AFM topography image of Cu films deposited at different overpotentials.

06 Keysight Keysight 7500 AFM Data Sheet PicoTREC Keysight s exclusive PicoTREC molecular recognition toolkit is designed for use with MAC Mode. With PicoTREC, researchers can quickly distinguish between species that are engaged in molecular binding events and those that are not binding events, thus eliminating the need to perform slow and tedious force-volume spectroscopy experiments to get the same results. Scientists can use PicoTREC with the 7500 AFM to explore dynamic properties of biological systems (antibody-antigen, ligand-receptor, drug-receptor, DNA-protein, DNA-DNA, and so forth) by imaging patterns of molecular binding and adhesion on surfaces. Software The 7500 AFM system utilizes Keysight s PicoView, an imaging and analysis software package that allows complete control of all scanning parameters and provides the flexibility required for more complex experiments. Improved electrochemistry capabilities, such as cyclic voltammetry (CV) using either the AFM tip or the sample, enable the software to deliver superior control for EC-AFM and EC-STM experiments. PicoView also affords researchers new, customizable math plug-ins that return values to facilitate quantitative mapping of sample properties at the nanoscale. The new version of PicoView fully supports Keysight s unique PicoScript (automation/ customization) and PicoLITH (lithography/nanomanipulation) options as well. Figure 10. Topography (top) and capacitance gradient dc/dz (bottom) images of a conducting polymer on an Au substrate. Scan size: 3µm. For additional interactive post-processing capabilities, Keysight s easy-to-use Pico Image imaging and analysis software package provides all of the features and functions required to build a surface analysis report on multi-layer measurement data. Figure 9. Topography images in closed loop of graphene oxide (GO) on mica. Scan size: left 5µm and 1.5µm right. Figure 11. 3-D CS-AFM images of a positive biased sample W/Ti alloy. Topography (top) and current image overlaid on topography image (bottom). Scan size: 2µm.

07 Keysight Keysight 7500 AFM Data Sheet 7500 System Specifications Scanner Scan range: 90µm in XY, 12µm in Z X/Y positioning noise (CL): < 0.15nm typical XY linearity: < 0.5% Noise level: < 0.3nm in Z Out of plane travel: < 0.1% Full range Laser: 670nm System Controller PC Video Microscope Top down video microscope Manual focus and zoom 2M pixel color USB camera 1.7µm resolution Sample Size Manual X/Y stage: Motorized Z stage: Max sample diameter: Max sample height: Quad core Xeon, 8G ram, 1TB disk, Win7 x 74 2ea 23 FPD, 1920 x 1080 pix resolution ~ 10mm travel ~ 10mm travel ~ 25mm ~ 8mm Standard Modes Contact, LFM, AAC, Phase, CS-AFM, MFM, EFM, KFM, Liftmode, F-d Spectroscopy, F-V Spectroscopy, Force Plugins, Force Modulation (FMM), Q-Control, LV PFM Optional Modes MAC, STM, PicoTREC, DLFM, Nanolithography, Electrochemistry, Heating/Cooling, Thermal K, PicoScript Microscope Dimensions L x W x H: Weight: Potentiostat (Option) Scan rate: Current range: Current sensitivity: Max. sample rate: 191 x 191 x 201mm 7.5 Kg 0.1mV/s 10V/s 5pA 100mA 0.01, 0.1, 1, 100, 10,000uA/V 16bit@25kHz Figure 12. Closed-loop topographic image of polymer isotactic polypropylene. Scan size: 2μm. Figure 13. Humidity-dependent anodic oxidation of a silicon surface. Side-by-side AFM topographic images of the resulting surface after the tip-directed oxidation under a RH of 20% (top) and a RH of 90% (bottom), respectively. Scan size: 6 µm.

08 Keysight Keysight 7500 AFM Data Sheet AFM Instrumentation from Keysight Technologies Keysight Technologies offers high precision, modular AFM solutions for research, industry, and education. Exceptional worldwide support is provided by experienced application scientists and technical service personnel. Keysight s leading-edge R&D laboratories are dedicated to the timely introduction and optimization of innovative, easy-to-use AFM technologies. www.keysight.com/find/afm For more information on Keysight Technologies products, applications or services, please contact your local Keysight office. The complete list is available at: www.keysight.com/find/contactus Americas Canada (877) 894 4414 Brazil 55 11 3351 7010 Mexico 001 800 254 2440 United States (800) 829 4444 Asia Pacific Australia 1 800 629 485 China 800 810 0189 Hong Kong 800 938 693 India 1 800 112 929 Japan 0120 (421) 345 Korea 080 769 0800 Malaysia 1 800 888 848 Singapore 1 800 375 8100 Taiwan 0800 047 866 Other AP Countries (65) 6375 8100 Europe & Middle East Austria 0800 001122 Belgium 0800 58580 Finland 0800 523252 France 0805 980333 Germany 0800 6270999 Ireland 1800 832700 Israel 1 809 343051 Italy 800 599100 Luxembourg +32 800 58580 Netherlands 0800 0233200 Russia 8800 5009286 Spain 0800 000154 Sweden 0200 882255 Switzerland 0800 805353 Opt. 1 (DE) Opt. 2 (FR) Opt. 3 (IT) United Kingdom 0800 0260637 For other unlisted countries: www.keysight.com/find/contactus This information is subject to change without notice. Keysight Technologies, 2014 Published in USA, August 26, 2014 5991-3639EN www.keysight.com