ESS 5855 Surface Engineering for Microelectromechanical Systems Fall 2010 MicroElectroMechanicalechanical Systems Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications Physical World MEMS Sensors Actuators Microelectronics Texas Instruments, Digital Micromirror Device Digital Light Processor (DLP)
Introduction Scaling Swimming Introduction Walking on water is possible but swimming is not fun
Outline Introduction (3) Capillarity (6) Thermodynamics (3) Electrical Double Layers (3) Electrokinetic Phenomena (3) van der Waals Forces (3) Colloids and Colloidal Stability (3)
Outline Surfactants and Interfacial Phenomena (3) Characterization (3) MEMS Reliability (3) BioMEMS (3) Flow and Droplet Manipulation (3) Self Assembly (3) Capillarity Surface tension Young-Laplace equation
Contact angle Capillarity Electrical Double Layers
Electrokinetic Phenomena Electrophoresis Electroosmosis van der Waals Forces Intermolecular attractive forces
Colloids Surfactants
Surfactants and Interfacial Phenomena Hydrophilic head Hydrophobic tail Lipid Bilayer Cavity Surface Treatment (a). Au on glass side+ SAMs θ=110.7 Hydrophobic SAMs* θ=56.7 Hydrophilic SAMs (-COOH) (b) Au on micro posts θ=109.9 dia: 60μm pitch:40μm θ=73.8 dia:80μm Pitch: 180μm (c) Au on micro posts +SAMs θ=143.6 Hydrophobic SAMs* dia: 60μm pitch:40μm θ=12.4 Hydrophilic SAMs (-COOH) dia:80μm Pitch: 180μm
Controlled Interfaces AFM It consists of a sensor that responds to a force and a detector that measures the sensor s response
BioMEMS MicroElectroMechanicalechanical Systems Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications Physical World MEMS Sensors Actuators Microelectronics Texas Instruments, Digital Micromirror Device Digital Light Processor (DLP)
Liquid Manipulation Massively parallel manipulation of single cells and microparticles using optical images
Self Assembly
Current Status of Surface Related MEMS Research MEMS 2010 885 Abstracts 298 Accepted 75 Oral presentations
MEMS 2009 856 Abstracts 279 Accepted 47 Oral presentations MEMS 2008 778 Abstracts 267 Accepted 43 Oral presentations
MEMS 2007 610 Abstracts 221 Accepted 43 Oral presentations MEMS 2006 789 Abstracts 236 Accepted 42 Oral presentations
Transducers 09 1300 Abstracts 600 Accepted 220 Oral presentations Transducers 05 1035 Abstracts 514 Accepted 199 Oral presentations
MicroTAS 08 1100 Abstracts 660 Accepted 65 Oral presentations MicroTAS 06 881 Abstracts (980) 539 Accepted (580) 66 Oral presentations
Classification Design, Simulation, and Theoretical Concepts with Experimental Verification Materials and Device Characterization Fabrication and Packaging Technologies Biomedical/Chemical Micro Sensors and Systems Mechanical Sensors and Systems Micro-Actuators Micro-Fluidic Components and Systems Physical MEMS (Optical, Thermal, Magneto) RF MEMS Nanoelectromechanical Devices and Systems Power MEMS & Energy Harvesting Most Popular Keywords RF MEMS 10-13 - 11-5 Optical MEMS - 9-1 Resonator(s) 7-9 - 8-8 CMOS MEMS 6-7, Microswitch 7 Actuator 10-5 - 10 DNA 6, Gyroscope 7-6 Microfluidic(s) 4-9 16-14 Drug delivery 6, Carbon Nanotube - 6
Surface Related Keywords Surface tension - 3-4 Stiction - 3-1 Self-assembly - 4-8 - 9 Electro-phoresis/-osmosis - 2-6 Electrowetting - 4-6 - 3 Dielectrophoresis - 4 4-3 Droplet -8-3 Particles - 7 3 Parylene - 8, PDMS - 6 Self Assembly and Packaging
TOWARDS OPTIMAL DESIGNS FOR SELF- ALIGNMENT IN SURFACE TENSION DRIVEN MIRCO-ASSEMBLY
SEQUENTIAL SELF-ASSEMBLY BY CONTROLLING INTERACTIVE FORCES BETWEEN MICROPARTICLES
NON-ROBOTIC FABRICATION OF PACKAGED MICROSYSTEMS BY SHAPE-AND-SOLDER- DIRECTED SELF-ASSEMBLY
SELF-ASSEMBLY OF MEMS COMPONENTS IN AIR ASSISTED BY DIAPHRAGM AGITATION FROM MICRO-PATTERNS TO NANO- STRUCTURES BY CONTROLLABLE COLLOIDAL AGGREGATION AT AIR-WATER INTERFACE
A 3D BIOLOGICAL FILTRATION MATRIX USING SELF-ASSEMBLED MICROSPHERES INSIDEMICROCHANNELS AND GELATIN SACRIFICIAL LAYER
Cell and Particle Handling A MICROFLUIDIC DEVICE FOR ELECTROFUSION OF BIOLOGICAL MEMBRANES
LIPID BILAYER MICROCHAMBERS: AN OPTICAL DETECTION SYSTEM FOR MEMBRANE TRANSPORT A CONTINUOUS CELL SEPARATION CHIP USING HYDRODYNAMIC DIELECTROPHORESIS PROCESS
MICROVISON-ACTIVATED AUTOMATIC OPTICAL MANIPULATOR FOR MICROSCOPIC PARTICLES
Optical MEMS LIQUID LENS TECHNOLOGY: PRINCIPLE OF ELECTROWETTING BASED LENSES AND APPLICATIONS TO IMAGING
Electrowetting-Based Displays: Bringing Microfluidics Alive On-Screen TUNABLE MICRODOUBLET LENS ARRAY
BioMedical Devices
PARYLENE FLEXIBLE NEURAL PROBE WITH MICRO FLUIDIC CHANNEL COMPACT, SEAMLESS INTEGRATION OF ACTIVE DOSING AND ACTUATION WITH MICRONEEDLES FOR TRANSDERMAL DRUG DELIVERY
DETACHABLE SILICON MICRONEEDLE STAMPS FOR ALLERGY SKIN PRICK TESTING NANOMECHANICAL PROTEIN DETECTORS USING ELECTROTHERMAL NANO-GAP ACTUATORS
Actuators ENHANCED ELECTRO-OSMOTIC PUMPING WITH LIQUID BRIDGE AND FIELD EFFECT FLOW RECTIFICATION
NOVEL STRUCTURE FOR PASSIVE CO2 DEGASSING IN DMFC
Micropumping by Directional Growth and Hydrophobic Venting of Bubbles ENGINEERING SURFACE ROUGHNESS TO MANIPULATE DROPLETS IN MICROFLUIDIC SYSTEMS
Physical Sensors RF Devices and Resonators Force & Stress Sensors
Stiction Vapor Phase Anti-Stiction Coatings for MEMS
A Lateral, Self-cleaning, Direct Contact MEMS Switch