S. Eswar Prasad, Adjunct Professor, Department of Mechanical & Industrial Engineering, Chairman, Piemades Inc, Piemades, Inc.

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Lecture 1: Introduction to Smart Materials and Systems Lecture 2: Sensor technologies for smart systems and their evaluation criteria. Lecture 3: Actuator technologies for smart systems and their evaluation criteria. Lecture 4: Piezoelectric Materials and their Applications. Lecture 5: Control System Technologies. Lecture 6: Smart System Applications. S. Eswar Prasad, Adjunct Professor, Department of Mechanical & Industrial Engineering, Chairman, Piemades Inc, Piemades, Inc. 1

Precision sensors for measurement of strain, displacement and acceleration S. Eswar Prasad, Adjunct Professor, Department of Mechanical & Industrial Engineering, Chairman, Piemades Inc, Piemades, Inc. 2

Sensors for Smart Systems Sensors? Physical Principles - How they work? Selection of sensors and evaluation criteria Examples 3

Need for Sensors Sensors are pervasive. They are embedded in our bodies, automobiles, airplanes, cellular telephones, radios, chemical plants, industrial plants and countless other applications. Without the use of sensors, there would be no automation! 4

Sensors for Smart Systems Need for sensors determine the load on the structure forces acting on the body nature of vibrational excitations magnitude of displacements to be controlled 5

Sensors - Definition American National Standards Institute A device which provides a usable output in response to a specified measurand. Sensors are devices that produce an output signal for the purpose of sensing a physical phenomenon. Sensors are also referred to as transducers. A transducer is a device that converts a signal from one physical form to a corresponding signal that has a different form. Quantities at the input level are different from the output level. Generally the output is in the form of an electrical signal. Sensors are used for measuring and recording a quantity. The measured quantity can be just recorded or further processed for controlling a system. 6

Types of Sensors : Analog, Digital, Active, Passive Analog: Output is continuous, output is a function of input. Requires ADC for interfacing. Digital: The output is in the form of a digital signal. Can be directly connected to a computer. PWM, serial, parallel, etc. Active Sensors:Need separate power source to obtain the output. Passive Sensors: These are self generating in the sense that they produce (electrical) signals when subjected to the sensed quantity. Piezoelectric, thermoelectric, radioactive,... Sensor output is generally in the form of resistance change or voltage change or capacitance change or current change when input quantity is changed. Appropriate circuit is required to measure the above changes. 7

Sensors - Basic Characteristics Sensitivity: It is the ability of the measuring instrument to respond to changes in a measured quantity. It is the ratio of change of the output to change of the input. The sensitivity K is defined as the rate of change of the output (O) with respect to the input (I). I Transducer O Energy Source I - input, quantity to be sensed. O - output, signal which can be recorded. Sensitivity = O/ I For a linear sensor: O/ I = k = constant For a non-linear sensor: O/ I = K a1i + a2i 2 + a3i 3 +... 8

Sensor Characteristics Quality Error & Non-linearity Static and Dynamic Characteristics Types 9

Quality of a sensor Resolution: It is defined as the smallest increment in the measured value that can be detected. Resolution is defined as the largest change in I that can occur without a corresponding change in O.! Accuracy: It is a measure of the difference between the measured value and the actual value. Generally, it is defined as percentage of actual value. Precision: Precision is the ability of an instrument to reproduce a certain set of readings within a given deviation. Repeatability: It is the ability to reproduce the output signal exactly when the same measured quantity is applied repeatedly under the same environmental conditions. Bull s Eye Target Plate a. High precision with poor accuracy b. Good average accuracy with poor precision c. High accuracy with high precision d. Poor accuracy with poor precision 10

Quality of a Sensor Resolution: It is defined as the smallest increment in the measured value that can be detected. Resolution is defined as the largest change in input (I) that can occur without a corresponding change in output (O).! O IR I 11

Quality of a Sensor Range & span: The range of input physical signals which may be converted to electrical signals by the sensor. Signals outside of this range are expected to cause unacceptably large inaccuracy.! Span is maximum value minus the minimum value of the input. Stability (drift)-it is the ability to give the same output when a constant input is measured over a period of time. Drift is expressed as a percentage of full range output. Dead band: It is the range of input values for which there is no output. Backlash: It is defined as the maximum distance or angle through which any part of a mechanical system can be moved in one direction without causing any motion of the attached part. Hysteresis: Different outputs corresponding to a single value of the input. 12

Error and Non-Linearity Error: The discrepancy between the instrument reading and the true value is called error. Absolute error = measured value - actual value Relative error = absolute error / true value For many transducers a linear relationship between the input and output is assumed over the working range. Few transducers, however, have a truly linear relationship and thus errors often occur as a result of the assumption of linearity. Various methods are used for the numerical expression of the non- linearity error - End-range values - Best straight line for all values - Best straight line through zero point 13

14

Non-linearity N(I) = O(I) - OIdeal(I) = O(I) - (KI + a) Maximum Non-linearity Text NMAX% = NMAX x 100 (OMAX - OMIN) 15

Error Bands It is often impractical to separate and determine nonlinearity, resolution and other such effects in these cases, non ideal performance is classified by one broad term: the error band Accuracy Generally defined as the largest expected error between actual and ideal output signals. h O(I) = Oideal ± h 16

Sensor Characteristics Static characteristics are the values given when steady state conditions occur. Input is not varying and output is constant. Output changes only due to drift. Dynamic characteristics refer to time varying signal with corresponding time varying output. Response time: time which elapses after a step input, when the sensor reaches the output corresponding to some specified percentage of its steady state value e.g. 95%. Time constant: This is 63.2 % of the response time. Rise time: Time taken for the output to rise to some specified percentage of the steady state output. From 10% to 90%. Settling time: This is the time taken for the output to settle to within some percentage e.g. 2% of steady state value. 17

Sensors for Smart Systems Smart System response can fall into five categories - mechanical, electrical, magnetic, thermal or chemical. Electrical response is the easiest to monitor and analyze. Discuss types of sensors - that measure mechanical response and temperature. Scope is limited to a few types of sensors for each type. 18

Commonly Detectable Phenomena Temperature Mechanical motion(displacement, velocity, acceleration, etc.) Optical Electrical Chemical Electromagnetic Biological Radioactivity 19

Examples of Physical Principles Used Amperes s Law A current carrying conductor in a magnetic field experiences a force (e.g. galvanometer) Curie-Weiss Law There is a transition temperature at which ferromagnetic materials exhibit paramagnetic behaviour Faraday s Law of Induction A coil resist a change in magnetic field by generating an opposing voltage/current (e.g. transformer) Photoconductive Effect When light strikes certain semiconductor materials, the resistance of the material decreases (e.g. photoresistor) 20

Sensor Principles Parameter Sensor Principle Displacement Potentiometer LVDT Capacitance Change of Resistance Electromagnetic Induction Variation of Capacitance Strain Strain Gage Piezoelectric Fibre Optics Change of Resistance Generator of Voltage Interferometers 21

Sensor Principles Parameter Sensor Principle Force and Acceleration Load Cells Piezoelectric Change of Resistance Generation of Voltage Temperature Thermistors Thermocouples Fibre Optics Change of Resistance Generator of Voltage Interferometers 22

Sensors for Smart Systems Displacement (proximity) Strain Force and Acceleration Temperature (Flowmeters not discussed in this lecture) 23

Displacement Sensors Resistive Potentiometers Inductive: Linear Variable Differential Transformer Proximity Sensors Non-contact Encoders Capacitive Sensors 24

Displacement (Proximity) Sensors - Potentiometers Potentiometers are variable resistance sensors. A wiper contact is linked to a mechanical shaft. Linear or rotational movement. Output is proportional to resistance and thence the position. 25

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Displacement (Proximity) Sensors - Potentiometers 27

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Displacement (Proximity) Sensors - Potentiometers Celesco 31

Displacement (Proximity) Sensors - Linear Variable Differential Transformer Popularly known as LVDT No mechanical wear Very accurate Linear output Expensive compared to potentiometers 32

Displacement (Proximity) Sensors - Linear Variable Differential Transformer 33

Primary excitation Secondary 1 Secondary 2 Secondary 1 - Secondary 2 http://www.rdpe.com/ex/hiw-lvdt.htm 34

Displacement (Proximity) Sensors - Linear Variable Differential Transformer Schaevitz 35

Non-contact Sensors - Inductive (Proximity) Sensors Detection of metallic objects in front of the sensors without physical contact. Useful in wet and dirty environments. Small range. Used in traffic signals, bicycle computers, exercise machines etc. 36

Non-contact Sensors - Inductive (Proximity) Sensors 37

Non-contact Sensors - Rotary Encoders Generates square pulses using photo or infra red cell arrangement. Convert mechanical movement into electrical signal. High resolution. Used in computer hard drives, CD/DVD etc. 38

Non-contact Sensors - Rotary Encoders Output! = 360/n where n is the number of segments on coded disc. 39

Non-contact Sensors - Capacitive Sensors Measure the change in capacitance. Convert mechanical movement into electrical signal. High precision. Metrology, multi-axis measurements, out of plane measurements. 40

ext 41

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Non-contact Sensors - Capacitive Sensors Capacitance Area x Dielectric Constant Distance 44

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Sensors for Smart Systems Displacement (proximity) Strain Force and Acceleration Temperature 48

Strain Sensors Silicon Strain Gauges Piezoelectric Strain Gauges. Fibre-optic Strain gauges. 49

Strain Sensors Basic definitions 50

Strain Sensors Strain gages convert mechanical motion into electrical signal. A change in resistance, inductance or capacitance is proportional to the strain induced. Strain can be bending, torsional or poisson. 51

Measurements Using Strain Gauge Elements Stress Force (by measuring the strain of a flexural element) Position Pressure (by measuring strain in a flexible diaphragm) Temperature (by measuring thermal expansion of a material) The strain Gage has a finite size and thus a measurement reflects an average of strain over a small area. 52

Strain Sensors The metallic foil-type strain gage consists of a grid of wire filament bonded directly to the strained surface by a thin layer of epoxy resin. When a load is applied to the surface, the electrical resistance of the foil wire varies linearly with strain. The adhesive also serves as an electrical insulator between the foil grid and the surface. 53

Strain Gages 54

55

Strain Gages are generally mounted on cantilevers and diaphragms and measure the direction of these. More than one strain gage is generally used and the readout generally employs a bridge circuit. 56

Strain Sensors Bending Strain (also known as moment strain) is based on bending produced by the applied force. Shear Strain is based on the angular distortion produced. Torsional strain is the ratio of torsional stress to the torsional modulus of elasticity. Poisson strain is defined as the negative ratio of the strain in the transverse direction to the strain in the longitudinal direction. 57

Basic Principle of Measurement The resistance of the foil changes when deformed. The connected metal foil grid lines in the active portion of the gage can be approximated by a single rectangular conductor. A is the cross sectional area; A = W x h ρ is the foil metal resistivity Total resistance R is given by R= ρ. L / A [1] 58

Basic Principle of Measurement The gage end loops and the solder tabs have a much larger cross-section tan the foil lines and thus have a smaller effect on the gage resistance. [1] ln R = ln ρ + ln L - ln A [2] Taking the differential dr = dρ + dl - da [3]! R ρ L A but A = W. h da = W dh + h DW A w h da = dh + A h dw W 59

Principle of Measurement - continued. Poisson s Ratio ν = -ε transverse ε axial and for most materials ν! 0.3 ε axial = dl/l ε 1 transverse = dh/h ε 2 transverse = dw/w dh/h = ν dl/l [5] dw/w = - ν dl/l [6] [4] da/a = -2 ν dl/l = -2 ν ε axial [7] 60

Principle of Measurement - continued. when the conductor is elongated, ε axial > 0 and T=thus based on [7] da/a < 0 and R increases. [3] dr/r = dρ/ρ + ε axial (1 =2 ν) dr/r = (1 + 2ν)ε axial + d ρ/ρ dr/r = 1+ 2ν + dl/l ε [8] axial ε axial The last term is the effect of strain on resistivity of material (piezoresistive efffect) and is typically constant over operating range of typical strain gage metal foils 61

Principle of Measurement - continued. Gage Factor G = (1 + 2ν) + dl/l εaxial So dr/r = G εaxial relates to change in resistance to strain. [9] The strain is determined on the surface of the loaded component in the Z direction of the gage long axis. G is typically 2 for metal wires or foil. It can be much larger for semiconductor wires. So in order to measure strain, the resistance change needs to be measured and is based on knowing R and G in advance,. The changes in resistance are measured using a Wheatstone Bridge. 62

Principle of Measurement - continued. There are two modes of operation of a Wheatstone Bridge. 1. Static Balanced Mode (used initially to balance the bridge) 2. Dynamic unbalanced mode(used to measure changes in resistance) Vi is the input voltage to the bridge and VAB Voltmeter with high input impedance R1: Strain gage (measure the change in resistance) R3: Precision potentiometer R2 and R4 are precision resistors i3 i2 i4 63

Principle of Measurement - continued. i2 i2 i3 i4 i4 Step1: Balance the bridge by changing R3 until the Voltage VAB is zero. Step 2: When the bridge is in balanced state, i1r1 = i3r3 [10] Assuming the current going through the voltmeter is essentially zero, then, i1 = i2 = Vi/(R1+R2) [11] i3 = i4 = Vi/(R3+R4) [12] 64

Static Balanced Mode - continued [10] Vin. R1 = R1+R2 Vin R3+R4. R3! R1 = R1+R2! R3 R3+R4! R1(R3+R4) = R3(R1+R2)! R1R4 = R3R2! R1 = R2R3/R4 [13] So R1 can be determined based on the known values of R2, R3 and R4 such that the bridge is balanced. 65

Static Balanced Mode - continued It is important to note that R1 is independent of input voltage Vin. The static balanced mode of operation can be used to measure an unknown resistance but usually balancing is used only as a preliminary step to measure changes in resistance. Changes in resistance are measured using the dynamic deflection operation mode. 66

Dynamic Deflection Operation Amplifier must be high input impedance type (e.g. instrumentation amplifier with a gain of 1) R 1 represents the strain gage R 4 - potentiometer V 0 = (V in - R 2 i 2 ) - (V in - R 1 i 1 ) [14] Vin = (R 2 + R 3 ) i 2 = (R 1 + R 4 ) i 1 [15] [14] V 0 = - R 2 V in + R 1 V in R 2 +R 3 R 1 +R 4 V 0 = V in ( R 1 - R 2 ) [16] R 1 +R 4 R 2 +R 4 Note that when the bridge is balanced, R 1 = R 2 R 4 /R 3 or R 1 (R 2 +R 3 ) = R 2 (R 1 +R 4 ) So when the bridge is balance, V 0 = 0 and R 1 has a known value. 67

Dynamic Deflection Operation When R1 changes value, the bridge is not balanced and the earlier equation cannot be used to relate changes in output voltage ( V0) to the change in resistance ( R1). 0 [16]!! V0 + V0 = Vin ( R1 + R1 - R2 )!!!! [17]!!! R1 + R1 + R4 R2 + R3 V0 = 0 since this is a deviation from the balanced mode. [17]!! V0 = R1 + R1 - R2!! Vin R1 + R1 + R4 R2 + R3!! ( V0 + R2 ) ( R1 + R1 + R4 ) = R1 + R1!! Vin R2 + R3!! R1 ( V0 + R2-1) = R1 - (R1 + R4 ) ( V0 + R2 )!!! Vin R2 + R3!!!! Vin R2 + R3! 68

Dynamic Deflection Operation! R1 = 1 - ( 1 + R4/R1) { ( V0/Vin) + (R2/R2+R3)} R1! V0/Vin + (R2/R2+R3) -1! R1 = {1 - ( V0/Vin) - (R2/R2+R3) } - ( R4/R1) { ( V0/Vin) + (R2/R2+R3)} R1! V0/Vin + (R2/R2+R3) -1! R1 = (R4/R1) { ( V0/Vin )+ (R2/R2+R3) } - 1" " " " [18] R1" 1- V0/Vin - (R2/R2+R3) By measuring the V0, we can estimate R, and therefore, get an estimate of the axial strain axial = ( R1/R)/G 69

R R+ R Strain gage R R - R For balanced mode V0 = (Vin - R i2) - (Vin - (R+ R) i1) V0 = R i1 - R i2 + R i1 Vin = 2 R i2 = (R+ R) i1 + (R- R) i1 = 2 R i1 V0 = R i1 = Vin. R!!! 2 R If we use four active gages placed such that R- R R+ R It can be shown that V0 Vin. ( R/R) which leads to improved sensitivity of the bridge. R+ RR R - R R 70

An example of a displacement sensor strain gage cantilever-type load transducer Voltage from balanced position is given by V0 = Vin ( R+ R1 - R2 )! R+ R1+R4 R2+R3 Neutral Axis If R1 = R2 = R3 = R4 = R R1 = R and R << R from balanced mode V0 = Vin ( R+ R - R )! 2R+ R1 2R R2 R1+ R1 V0 = Vin. R + 2 R - (R + R)! 2(2R+ R ) R3 R R4 V0 = Vin R = Vin. R 2 2R+ R 4 R Gage1 Suppose now the bridge involves two active gages, then the gages are subject to equal but opposite strain. Neutral Axis Gage2 71

The Strain Gage Load Cell When the cylinder is compressed - 2 strain gages are in compression - 2 strain gages are subject to tensile loading This produces a signal enhancement factor of 2 ( 1+ν) where ν is the Poisson s ratio. 72

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Strain Sensors Text Omega Engineering Strain gage installation methods 74

Dynamic Deflection Operations (Effect of wire leads) R1 is the strain gage. Bridge is balanced: V0 = 0 R1 = R2 R1+R4 R2+R3 R1 changes (R1 + R1) : R4 ( V0 + R2 ) - 1 R1 Vin R2+R3 R1 = R1 1 - V0 - R2 Vin R2+R3 εaxial = R1/R1 G 75

2-wire connection Two wire connection makes bridge sensitive to variations in load resistance RL. This circuit is not expected to work well. V0 represents changes in R1 and the 2 RLs. 76

3-wire connection R R2 R1 R R3 R4 V0 = Vin ( R1 - R2 ) R = 0 R1+R4 R2+R3 V0 = Vin ( R1+R / - R2 ) (R1+ R / ) + (R4+R / ) R2+R3 R1 = R1+R / R1+R4 (R1+ R / ) + (R4+R / ) R4 = R1 V0 = Vin ( 1 - R2 )!!!!! 2 R2+R3 When R1 is a constant and R1 = R4, the addition of the three wire connection has no effect on the bridge. 77

What is the effect of the addition of R / on the bridge if R1 varies and becomes R1 + R1? 0 V0 + V0 = V0 = Vin ( R1 + R1+R / - R2 ) (R1+ R1+R4+2R / ) R2+R3 V0 = R1 + R1+R / - R2 Vin (R1+ R1+R4+2R / ) R2+R3 ( V0 + R2 ) = R1 + R1+R / Vin R2+R3 (R1+ R1+R4+2R / ) (R1+R4+2R / ) ( V0 + R2 ) - ( R1 +R / ) = R1 ( 1 - V0 - R2 ) R1 = When R1 = R4 R1 = Vin R2+R3 Vin R2+R3 (R1+R4+2R / ) ( V0 + R2 ) - ( R1 +R / ) Vin R2+R3 ( 1 - V0 - R2 ) Vin R2+R3 (R1+R / ) [ 2( V0 + R2 ) - 1 ] Vin R2+R3 ( 1 - V0 - R2 ) Vin R2+R3 So even for R1 = R4, R / remains in the R1 expression. Therefore R / effects the bridge measurements. R1 is selected so that it does not exceed 0.1% of the nominal gage resistance. 78

Effect of Temperature Temperature changes in the actual strain gage can cause large changes in resistance which would lead to errors in the measurements. To be bonded Vin To overcome this, a half-bridge circuit is used where two of the four bridge legs contain identical strain gages. The dummy gage is made of unstressed material of the same composition and at the same temperature and is identical to the active gage. The resistance changes in the two gages due to temperature will cancel since they are adjacent branches of the bridge circuit. The bridge will generate an unbalanced voltage only in response to a strain in the active gage. 79

Sensors for Smart Systems Displacement (proximity) Strain Force and Acceleration Temperature 80

Force and Acceleration Sensors The operating principles force and acceleration are very similar and most often the specifics of configuration determine the output. 81

Force and Acceleration Sensors What is an accelerometer? A sensor that measures acceleration based on Newton s second law of motion The acceleration of an object as produced by a net force is directly proportional to the magnitude of the net force, in the same direction as the net force, and inversely proportional to the mass of the object. or, mathematically, F = m a 82

Force and Acceleration Sensors Trossen Robotics 83

Force and Acceleration Sensors 84

Force and Acceleration Sensors - Piezoelectrics Piezoelectric elements are bi-directional transducers capable of converting stress into an electric potential and vice versa. They consist of metallized quartz or ceramic materials. One important factor to remember is that this is a dynamic effect, providing an output only when the input is changing. This means that these sensors can be used only for varying pressures 85

Omega Force and Acceleration Sensors - Piezoelectrics 86

Sensors for Smart Systems Displacement (proximity) Strain Force and Acceleration Temperature 87

Temperature Measurement Bimetallic Strips Fluid Expansion Devices Change-of-State Temperature Measurement Thermocouples (TCs) Resistance Temperature Devices (RTDs) Infrared Devices 88

Temperature Measurement - Bimetallic Strips Two sheets of metals, usually brass and steel or their alloys, with different coefficients of thermal expansion are bonded together. The resulting bimetallic strip bends when heated. This phenomenon has many applications, including thermal switches and thermometers. 89

Temperature Measurement - Bimetallic Strips 90

Temperature Measurement - Bimetallic Strips 91

Temperature Measurement - Fluid Expansion Devices Fluid-expansion devices, typified by the household thermometer, generally come in two main classifications: the mercury type and the organic-liquid type. Other types may also contain gas instead of liquid. Fluid-expansion sensors do not require electric power, do not pose explosion hazards, and are stable after repeated cycling. They do not generate data that are easily recorded or transmitted, and they cannot make spot or point measurements. 92

Temperature Measurement - Change-of-State Measurement Devices Change-of-state temperature sensors form a broad category of sensors consisting of labels, pellets, crayons, lacquers or liquid crystals. The appearance of the surface of these devices changes once a certain temperature is reached. Typical applications are traps - when a trap exceeds a certain temperature, a white dot on a sensor label attached to the trap will turn black. 93

Temperature Measurement - Change-of-State Measurement Devices Response time typically takes minutes, so these devices often do not respond to transient temperature changes. Accuracy is lower than with other types of sensors. The change in state is irreversible in most cases. Change-of-state sensors can be handy when one needs confirmation that the temperature of a piece of equipment or a material has not exceeded a certain level, for instance for technical or legal reasons during product shipment. 94

Temperature Measurement - Thermocouples A thermocouple is a sensor for measuring temperature. It consists of two dissimilar metals, joined together at one end. When the junction of the two metals is heated or cooled a voltage is produced that can be correlated back to the temperature. The thermocouple alloys are commonly available as wire. 95

Temperature Measurement - Thermocouples The thermoelectric voltage is known as the Seebeck voltage, named after Thomas Seebeck, who discovered it in 1821. The voltage is nonlinear with respect to temperature (but for small changes in temperature it is approximately linear) The voltage is given by V S T!(1) where V is the change in voltage, S is the Seebeck coefficient, and T is the change in temperature. 96

Temperature Measurement - Thermocouples Several standard types that are given designations according to the materials used. These thermocouples use a variety of different materials. The ones used in the thermocouples mentioned above are all forms of metal alloys: Alumel! Nickel 96%, manganese 2%, aluminum 2% Chromel Nickel 90%, chrome 10% Constantan! Copper 55%, nickel 45% Nicrosil! Nickel chrome silicon Nisil! Nickel silicon 97

Temperature Measurement - Thermocouples 98

Temperature Measurement - Thermocouples 99

Temperature Measurement - Thermocouples Cold-Junction Compensation in Thermocouples Thermocouples require some form of temperature reference to compensate for room temperature. The term cold junction comes from the traditional practice of holding this reference junction at 0 C in an ice bath. The National Institute of Standards and Technology (NIST) thermocouple reference tables are created with this in view. David Potter, National instruments 100

Temperature Measurement - Thermocouple Colour Codes 101

Temperature Measurement - Resistance Temperature Detectors (RTDs) A resistance-temperature detector (RTD) is a temperature sensing device whose resistance increases with temperature. An RTD consists of a wire coil or deposited film of pure metal. RTDs can be made of different metals and have different resistances, but the most popular RTD is platinum and has a nominal resistance of 100 Ω at 0 C. 102

Temperature Measurement - Resistance Temperature Detectors (RTDs) Why RTDs? RTDs are known for their excellent accuracy over a wide temperature range. RTDs have accuracies as high as 0.01 Ω (0.026 C) at 0 C. RTDs are also extremely stable devices. Common industrial RTDs drift less than 0.1 C/year, and some models are stable to within 0.0025 C/year. 103

Temperature Measurement - Resistance Temperature Detectors (RTDs) R t = R 0 * (1 + A* t + B*t 2 + C*(t-100)* t 3 ) Where: R t is the resistance at temperature t, R 0 is the resistance at 0 C, and A= 3.9083 E-3 o C -1 B = -5.775 E-7 o C -2 C = -4.183 E -12 0 C -4 (below 0 C), or C = 0 (above 0 C) 104

Temperature Measurement - Non-contact Measurement Fibre optic thermometers have proven invaluable in non-contact measurement of temperatures, particularly in harsh conditions, such as high temperatures, large electric and magnetic fields etc. Typical applications are: Basic metals and glass production and initial hot forming processes for such materials. Boiler burner flames and tube temperatures Critical turbine areas in power generation operations Rolling lines in steel and other fabricated metal plants Automated welding, brazing and annealing equipment Fusion, sputtering, and crystal growth processes in the semiconductor industry. 105

Temperature Measurement - Non-contact Measurement Fibre-optic sensors can be used to detect heat or stress. Two types of fibre-optic sensors are used, intrinsic and extrinsic types. In the extrinsic type, fibre acts as a medium of transmission. The light exits and interacts with the environment to be analyzed and then re-enters the fibre. This is a low cost method and can use photodiodes for the operation. In the intrinsic type, one or more field parameters become modulated with the field which propagates in the fibre to allow the measurement of environmental effects. Generally these techniques involve interferometric methods and can detect both strain and temperature fluctuations. 106

Temperature Measurement - Non-contact Measurement Text The Mach Zehnder interferometer is a device used to determine the relative phase shift between two collimated beams from a coherent light source. It splits an optical signal into two components and directs them down two separate paths, then recombines them. By inducing a phase delay between the two optical signals, the resulting interference can cause intensity changes. 107

Temperature Measurement - Non-contact Measurement The Fabry Pérot interferometer makes use of multiple reflections between two closely spaced partially silvered surfaces. Part of the light is transmitted each time the light reaches the second surface, resulting in multiple offset beams which can interfere with each other. The large number of interfering rays produces an interferometer with extremely high resolution, somewhat like the multiple slits of a diffraction grating increase its resolution. 108

Sensor Evaluation Criteria Sensor Characteristics Environmental Factors Economic Factors Sensitivity Range Precision Resolution Accuracy Offset Linearity Hysteresis Response Time Dynamic Linearity Size Power Consumption Ruggedness Temperature Range Corrosion Sensitivity to humidity Over range Protection Self Test / Self-calibrate Immunity to EM Interference Cost Availability Service Life Joseph Carr, John Brown, Introduction to Biomedical Equipment Technology, 2010. National instruments Sookram Sobhan, Introduction to Sensors, 2005. 109

Selection of Displacement Sensors Performance Parameter Potentiometer LVDT Sensitivity N/A 110 mv/mm Range 25 mm 0.125 mm Resolution 0.1 mm N/A 110

Selection of Strain Sensors Performance Parameter Strain Gage Piezoelectric Fibre Optics Sensitivity High Moderate Moderate Resolution Moderate Moderate High Range Moderate High High 111

Selection of Acceleration Sensors Performance Parameter Load Cell Accelerometer Sensitivity N/A 110 mv/mm Range 50 g ± 50 g Resolution 0.2 fsd 0.001 g pk 112

Selection of Temperature Sensors Performance Parameter Thermocouple J-type K-type RTD Sensitivity 61 mv/ 0 C 40 mv/ 0 C ±0.20C Range -210 0 C to +1200 0 C -270 0 C to +1372 0 C -70 0 C to +600 0 C Response Time <5 s <5 s 0.5 s 113

Intelligent Sensor Systems Compensation Self-diagnostics, self-calibration, adaptation Computation Signal conditioning, data reduction, detection of trigger events Communications Network protocol standardization Integration Coupling of sensing and computation at the chip level n! Micro electromechanical systems (MEMS) Others Multi-modal, multi-dimensional, multi-layer n!active, autonomous sensing 114

Revised Thermocouple Reference Tables TYPE J Reference Tables N.I.S.T. Monograph 175 Revised to ITS-90 Extension Grade + Iron vs. Copper-Nickel Thermocouple Grade + MAXIMUM TEMPERATURE RANGE Thermocouple Grade 32 to 1382 F 0 to 750 C Extension Grade 32 to 392 F 0 to 200 C LIMITS OF ERROR (whichever is greater) Standard: 2.2 C or 0.75% Special: 1.1 C or 0.4% COMMENTS, BARE WIRE ENVIRONMENT: Reducing, Vacuum, Inert; Limited Use in Oxidizing at High Temperatures; Not Recommended for Low Temperatures TEMPERATURE IN DEGREES C REFERENCE JUNCTION AT 0 C C -10-9 -8-7 -6-5 -4-3 -2-1 0 C C 0 1 2 3 4 5 6 7 8 9 10 C -200-8.095-8.076-8.057-8.037-8.017-7.996-7.976-7.955-7.934-7.912-7.890-200 -190-7.890-7.868-7.846-7.824-7.801-7.778-7.755-7.731-7.707-7.683-7.659-190 -180-7.659-7.634-7.610-7.585-7.559-7.534-7.508-7.482-7.456-7.429-7.403-180 -170-7.403-7.376-7.348-7.321-7.293-7.265-7.237-7.209-7.181-7.152-7.123-170 -160-7.123-7.094-7.064-7.035-7.005-6.975-6.944-6.914-6.883-6.853-6.821-160 -150-6.821-6.790-6.759-6.727-6.695-6.663-6.631-6.598-6.566-6.533-6.500-150 -140-6.500-6.467-6.433-6.400-6.366-6.332-6.298-6.263-6.229-6.194-6.159-140 -130-6.159-6.124-6.089-6.054-6.018-5.982-5.946-5.910-5.874-5.838-5.801-130 -120-5.801-5.764-5.727-5.690-5.653-5.616-5.578-5.541-5.503-5.465-5.426-120 -110-5.426-5.388-5.350-5.311-5.272-5.233-5.194-5.155-5.116-5.076-5.037-110 -100-5.037-4.997-4.957-4.917-4.877-4.836-4.796-4.755-4.714-4.674-4.633-100 -90-4.633-4.591-4.550-4.509-4.467-4.425-4.384-4.342-4.300-4.257-4.215-90 -80-4.215-4.173-4.130-4.088-4.045-4.002-3.959-3.916-3.872-3.829-3.786-80 -70-3.786-3.742-3.698-3.654-3.610-3.566-3.522-3.478-3.434-3.389-3.344-70 -60-3.344-3.300-3.255-3.210-3.165-3.120-3.075-3.029-2.984-2.938-2.893-60 -50-2.893-2.847-2.801-2.755-2.709-2.663-2.617-2.571-2.524-2.478-2.431-50 -40-2.431-2.385-2.338-2.291-2.244-2.197-2.150-2.103-2.055-2.008-1.961-40 -30-1.961-1.913-1.865-1.818-1.770-1.722-1.674-1.626-1.578-1.530-1.482-30 -20-1.482-1.433-1.385-1.336-1.288-1.239-1.190-1.142-1.093-1.044-0.995-20 -10-0.995-0.946-0.896-0.847-0.798-0.749-0.699-0.650-0.600-0.550-0.501-10 0-0.501-0.451-0.401-0.351-0.301-0.251-0.201-0.151-0.101-0.050 0.000 0 0 0.000 0.050 0.101 0.151 0.202 0.253 0.303 0.354 0.405 0.456 0.507 0 10 0.507 0.558 0.609 0.660 0.711 0.762 0.814 0.865 0.916 0.968 1.019 10 20 1.019 1.071 1.122 1.174 1.226 1.277 1.329 1.381 1.433 1.485 1.537 20 30 1.537 1.589 1.641 1.693 1.745 1.797 1.849 1.902 1.954 2.006 2.059 30 40 2.059 2.111 2.164 2.216 2.269 2.322 2.374 2.427 2.480 2.532 2.585 40 50 2.585 2.638 2.691 2.744 2.797 2.850 2.903 2.956 3.009 3.062 3.116 50 60 3.116 3.169 3.222 3.275 3.329 3.382 3.436 3.489 3.543 3.596 3.650 60 70 3.650 3.703 3.757 3.810 3.864 3.918 3.971 4.025 4.079 4.133 4.187 70 80 4.187 4.240 4.294 4.348 4.402 4.456 4.510 4.564 4.618 4.672 4.726 80 90 4.726 4.781 4.835 4.889 4.943 4.997 5.052 5.106 5.160 5.215 5.269 90 100 5.269 5.323 5.378 5.432 5.487 5.541 5.595 5.650 5.705 5.759 5.814 100 110 5.814 5.868 5.923 5.977 6.032 6.087 6.141 6.196 6.251 6.306 6.360 110 120 6.360 6.415 6.470 6.525 6.579 6.634 6.689 6.744 6.799 6.854 6.909 120 130 6.909 6.964 7.019 7.074 7.129 7.184 7.239 7.294 7.349 7.404 7.459 130 140 7.459 7.514 7.569 7.624 7.679 7.734 7.789 7.844 7.900 7.955 8.010 140 150 8.010 8.065 8.120 8.175 8.231 8.286 8.341 8.396 8.452 8.507 8.562 150 160 8.562 8.618 8.673 8.728 8.783 8.839 8.894 8.949 9.005 9.060 9.115 160 170 9.115 9.171 9.226 9.282 9.337 9.392 9.448 9.503 9.559 9.614 9.669 170 180 9.669 9.725 9.780 9.836 9.891 9.947 10.002 10.057 10.113 10.168 10.224 180 190 10.224 10.279 10.335 10.390 10.446 10.501 10.557 10.612 10.668 10.723 10.779 190 200 10.779 10.834 10.890 10.945 11.001 11.056 11.112 11.167 11.223 11.278 11.334 200 210 11.334 11.389 11.445 11.501 11.556 11.612 11.667 11.723 11.778 11.834 11.889 210 220 11.889 11.945 12.000 12.056 12.111 12.167 12.222 12.278 12.334 12.389 12.445 220 230 12.445 12.500 12.556 12.611 12.667 12.722 12.778 12.833 12.889 12.944 13.000 230 240 13.000 13.056 13.111 13.167 13.222 13.278 13.333 13.389 13.444 13.500 13.555 240 250 13.555 13.611 13.666 13.722 13.777 13.833 13.888 13.944 13.999 14.055 14.110 250 260 14.110 14.166 14.221 14.277 14.332 14.388 14.443 14.499 14.554 14.609 14.665 260 270 14.665 14.720 14.776 14.831 14.887 14.942 14.998 15.053 15.109 15.164 15.219 270 280 15.219 15.275 15.330 15.386 15.441 15.496 15.552 15.607 15.663 15.718 15.773 280 290 15.773 15.829 15.884 15.940 15.995 16.050 16.106 16.161 16.216 16.272 16.327 290 300 16.327 16.383 16.438 16.493 16.549 16.604 16.659 16.715 16.770 16.825 16.881 300 310 16.881 16.936 16.991 17.046 17.102 17.157 17.212 17.268 17.323 17.378 17.434 310 320 17.434 17.489 17.544 17.599 17.655 17.710 17.765 17.820 17.876 17.931 17.986 320 330 17.986 18.041 18.097 18.152 18.207 18.262 18.318 18.373 18.428 18.483 18.538 330 340 18.538 18.594 18.649 18.704 18.759 18.814 18.870 18.925 18.980 19.035 19.090 340 350 19.090 19.146 19.201 19.256 19.311 19.366 19.422 19.477 19.532 19.587 19.642 350 360 19.642 19.697 19.753 19.808 19.863 19.918 19.973 20.028 20.083 20.139 20.194 360 370 20.194 20.249 20.304 20.359 20.414 20.469 20.525 20.580 20.635 20.690 20.745 370 380 20.745 20.800 20.855 20.911 20.966 21.021 21.076 21.131 21.186 21.241 21.297 380 390 21.297 21.352 21.407 21.462 21.517 21.572 21.627 21.683 21.738 21.793 21.848 390 400 21.848 21.903 21.958 22.014 22.069 22.124 22.179 22.234 22.289 22.345 22.400 400 410 22.400 22.455 22.510 22.565 22.620 22.676 22.731 22.786 22.841 22.896 22.952 410 420 22.952 23.007 23.062 23.117 23.172 23.228 23.283 23.338 23.393 23.449 23.504 420 430 23.504 23.559 23.614 23.670 23.725 23.780 23.835 23.891 23.946 24.001 24.057 430 440 24.057 24.112 24.167 24.223 24.278 24.333 24.389 24.444 24.499 24.555 24.610 440 Thermoelectric Voltage in Millivolts 450 24.610 24.665 24.721 24.776 24.832 24.887 24.943 24.998 25.053 25.109 25.164 450 1150 66.679 66.737 66.794 66.852 66.910 66.967 67.025 67.082 67.140 67.198 67.255 1150 460 25.164 25.220 25.275 25.331 25.386 25.442 25.497 25.553 25.608 25.664 25.720 460 1160 67.255 67.313 67.370 67.428 67.486 67.543 67.601 67.658 67.716 67.773 67.831 1160 470 25.720 25.775 25.831 25.886 25.942 25.998 26.053 26.109 26.165 26.220 26.276 470 1170 67.831 67.888 67.946 68.003 68.061 68.119 68.176 68.234 68.291 68.348 68.406 1170 480 26.276 26.332 26.387 26.443 26.499 26.555 26.610 26.666 26.722 26.778 26.834 480 1180 68.406 68.463 68.521 68.578 68.636 68.693 68.751 68.808 68.865 68.923 68.980 1180 490 26.834 26.889 26.945 27.001 27.057 27.113 27.169 27.225 27.281 27.337 27.393 490 1190 68.980 69.037 69.095 69.152 69.209 69.267 69.324 69.381 69.439 69.496 69.553 1190 C 0 1 2 3 4 5 6 7 8 9 10 C C 0 1 2 3 4 5 6 7 8 9 10 C Z-203 500 27.393 27.449 27.505 27.561 27.617 27.673 27.729 27.785 27.841 27.897 27.953 500 510 27.953 28.010 28.066 28.122 28.178 28.234 28.291 28.347 28.403 28.460 28.516 510 520 28.516 28.572 28.629 28.685 28.741 28.798 28.854 28.911 28.967 29.024 29.080 520 530 29.080 29.137 29.194 29.250 29.307 29.363 29.420 29.477 29.534 29.590 29.647 530 540 29.647 29.704 29.761 29.818 29.874 29.931 29.988 30.045 30.102 30.159 30.216 540 550 30.216 30.273 30.330 30.387 30.444 30.502 30.559 30.616 30.673 30.730 30.788 550 560 30.788 30.845 30.902 30.960 31.017 31.074 31.132 31.189 31.247 31.304 31.362 560 570 31.362 31.419 31.477 31.535 31.592 31.650 31.708 31.766 31.823 31.881 31.939 570 580 31.939 31.997 32.055 32.113 32.171 32.229 32.287 32.345 32.403 32.461 32.519 580 590 32.519 32.577 32.636 32.694 32.752 32.810 32.869 32.927 32.985 33.044 33.102 590 600 33.102 33.161 33.219 33.278 33.337 33.395 33.454 33.513 33.571 33.630 33.689 600 610 33.689 33.748 33.807 33.866 33.925 33.984 34.043 34.102 34.161 34.220 34.279 610 620 34.279 34.338 34.397 34.457 34.516 34.575 34.635 34.694 34.754 34.813 34.873 620 630 34.873 34.932 34.992 35.051 35.111 35.171 35.230 35.290 35.350 35.410 35.470 630 640 35.470 35.530 35.590 35.650 35.710 35.770 35.830 35.890 35.950 36.010 36.071 640 650 36.071 36.131 36.191 36.252 36.312 36.373 36.433 36.494 36.554 36.615 36.675 650 660 36.675 36.736 36.797 36.858 36.918 36.979 37.040 37.101 37.162 37.223 37.284 660 670 37.284 37.345 37.406 37.467 37.528 37.590 37.651 37.712 37.773 37.835 37.896 670 680 37.896 37.958 38.019 38.081 38.142 38.204 38.265 38.327 38.389 38.450 38.512 680 690 38.512 38.574 38.636 38.698 38.760 38.822 38.884 38.946 39.008 39.070 39.132 690 700 39.132 39.194 39.256 39.318 39.381 39.443 39.505 39.568 39.630 39.693 39.755 700 710 39.755 39.818 39.880 39.943 40.005 40.068 40.131 40.193 40.256 40.319 40.382 710 720 40.382 40.445 40.508 40.570 40.633 40.696 40.759 40.822 40.886 40.949 41.012 720 730 41.012 41.075 41.138 41.201 41.265 41.328 41.391 41.455 41.518 41.581 41.645 730 740 41.645 41.708 41.772 41.835 41.899 41.962 42.026 42.090 42.153 42.217 42.281 740 750 42.281 42.344 42.408 42.472 42.536 42.599 42.663 42.727 42.791 42.855 42.919 750 760 42.919 42.983 43.047 43.111 43.175 43.239 43.303 43.367 43.431 43.495 43.559 760 770 43.559 43.624 43.688 43.752 43.817 43.881 43.945 44.010 44.074 44.139 44.203 770 780 44.203 44.267 44.332 44.396 44.461 44.525 44.590 44.655 44.719 44.784 44.848 780 790 44.848 44.913 44.977 45.042 45.107 45.171 45.236 45.301 45.365 45.430 45.494 790 800 45.494 45.559 45.624 45.688 45.753 45.818 45.882 45.947 46.011 46.076 46.141 800 810 46.141 46.205 46.270 46.334 46.399 46.464 46.528 46.593 46.657 46.722 46.786 810 820 46.786 46.851 46.915 46.980 47.044 47.109 47.173 47.238 47.302 47.367 47.431 820 830 47.431 47.495 47.560 47.624 47.688 47.753 47.817 47.881 47.946 48.010 48.074 830 840 48.074 48.138 48.202 48.267 48.331 48.395 48.459 48.523 48.587 48.651 48.715 840 850 48.715 48.779 48.843 48.907 48.971 49.034 49.098 49.162 49.226 49.290 49.353 850 860 49.353 49.417 49.481 49.544 49.608 49.672 49.735 49.799 49.862 49.926 49.989 860 870 49.989 50.052 50.116 50.179 50.243 50.306 50.369 50.432 50.495 50.559 50.622 870 880 50.622 50.685 50.748 50.811 50.874 50.937 51.000 51.063 51.126 51.188 51.251 880 890 51.251 51.314 51.377 51.439 51.502 51.565 51.627 51.690 51.752 51.815 51.877 890 900 51.877 51.940 52.002 52.064 52.127 52.189 52.251 52.314 52.376 52.438 52.500 900 910 52.500 52.562 52.624 52.686 52.748 52.810 52.872 52.934 52.996 53.057 53.119 910 920 53.119 53.181 53.243 53.304 53.366 53.427 53.489 53.550 53.612 53.673 53.735 920 930 53.735 53.796 53.857 53.919 53.980 54.041 54.102 54.164 54.225 54.286 54.347 930 940 54.347 54.408 54.469 54.530 54.591 54.652 54.713 54.773 54.834 54.895 54.956 940 950 54.956 55.016 55.077 55.138 55.198 55.259 55.319 55.380 55.440 55.501 55.561 950 960 55.561 55.622 55.682 55.742 55.803 55.863 55.923 55.983 56.043 56.104 56.164 960 970 56.164 56.224 56.284 56.344 56.404 56.464 56.524 56.584 56.643 56.703 56.763 970 980 56.763 56.823 56.883 56.942 57.002 57.062 57.121 57.181 57.240 57.300 57.360 980 990 57.360 57.419 57.479 57.538 57.597 57.657 57.716 57.776 57.835 57.894 57.953 990 1000 57.953 58.013 58.072 58.131 58.190 58.249 58.309 58.368 58.427 58.486 58.545 1000 1010 58.545 58.604 58.663 58.722 58.781 58.840 58.899 58.957 59.016 59.075 59.134 1010 1020 59.134 59.193 59.252 59.310 59.369 59.428 59.487 59.545 59.604 59.663 59.721 1020 1030 59.721 59.780 59.838 59.897 59.956 60.014 60.073 60.131 60.190 60.248 60.307 1030 1040 60.307 60.365 60.423 60.482 60.540 60.599 60.657 60.715 60.774 60.832 60.890 1040 1050 60.890 60.949 61.007 61.065 61.123 61.182 61.240 61.298 61.356 61.415 61.473 1050 1060 61.473 61.531 61.589 61.647 61.705 61.763 61.822 61.880 61.938 61.996 62.054 1060 1070 62.054 62.112 62.170 62.228 62.286 62.344 62.402 62.460 62.518 62.576 62.634 1070 1080 62.634 62.692 62.750 62.808 62.866 62.924 62.982 63.040 63.098 63.156 63.214 1080 1090 63.214 63.271 63.329 63.387 63.445 63.503 63.561 63.619 63.677 63.734 63.792 1090 1100 63.792 63.850 63.908 63.966 64.024 64.081 64.139 64.197 64.255 64.313 64.370 1100 1110 64.370 64.428 64.486 64.544 64.602 64.659 64.717 64.775 64.833 64.890 64.948 1110 1120 64.948 65.006 65.064 65.121 65.179 65.237 65.295 65.352 65.410 65.468 65.525 1120 1130 65.525 65.583 65.641 65.699 65.756 65.814 65.872 65.929 65.987 66.045 66.102 1130 1140 66.102 66.160 66.218 66.275 66.333 66.391 66.448 66.506 66.564 66.621 66.679 1140 115 115