Cleanroom Precision Positioning Table TC Ball screw TC EB Slide table inear Way Side cover Stainless sheet Motor bracket inear Coupling cover Pipe threads for suction connector Points ight weight, low profile and compact clean table Positioning table of a structure with enhanced sealing property inside the table, based on light weight, low profile and compact Precision Positioning Table TE. Thanks to optimal design of linear motion rolling guide and ball screws, low cross sectional height as low as for TCEB, for and 7 for is realized. Since the sensor is designed to be directly mounted into the mounting groove, it contributes to space saving. High corrosion resistance excellent corrosion resistance. Anodized high-tension aluminum alloy and stainless steel (stainless sheet) are used in main components to ensure Compatible with cleanliness class Page -7 Press the stainless sheet against the side cover using the resin roller within the slide table, securely absorb it with a strong magnet sheet and seal the drive parts and slide table guiding parts. Dust-generation in proximity is prevented by sucking air from an enclosed space and class cleanliness rating based on measurement method is realized. ow dust-generation grease CG for clean environment is contained in slide table guiding parts and ball screws to suppress dust-generation. Resin roller Stainless steel sheet Slide table Side cover Side cover Packing Packing Magnet sheet Ball screw Sealed structure Bed Variation End bracket Shape Bed width 0 Pipe threads for suction connector Major product specifications Accuracy Driving method Precision ball screw Positioning repeatability ±0.00 inear motion rolling guide inear Way ball type Positioning accuracy 0.0 0.0 Built-in lubrication part ubrication part "C-ube" is built-in ost motion Material of table and bed High-strength aluminum alloy Parallelism in table motion A Sensor Select by identification number Parallelism in table motion B 0.00 0.0 Attitude accuracy Straightness Backlash 0.00 N=0.kgf=0.lbs. =0.097inch
Cleanroom Precision Positioning Table TC About measurement of cleanliness Actual measurement data of cleanliness Cleanliness refers to classified air cleanliness levels based on size (particle ) and quantity of suspended particulates per unit volume. measures cleanliness by following the procedures. Measuring condition Item Measuring equipment Air flow velocity of measurement part Measured air quantity Measurement time Outline of test device Content counter.m/s. cf h min/measurement, measurement/h Measurement environment Clean bench in cleanroom clean air withdrawing in acrylic cover Air flow velocity of measurement part.m/s Acrylic cover To suction pump To particle counter Appearance of test device Clean air Example of measurement data [Upper concentration limit chart for each cleanliness class] TCEB Ball screw lead: concentration number of particles/m 0 Ball screw lead: concentration number of particles/m 0 000 000 0 0. m or more 0. m or more 0. m or more 0. m or more 0 Ball screw lead: 0 000 concentration number of particles/m 0 000 000 0 000 0 Upper limit of class Upper limit of class Stroke: Speed: /s Suction amount: /min Upper limit of class Upper limit of class Upper limit of class Stroke: Speed: 0/s Suction amount: /min Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class 0. m or more 0. m or more 0. m or more 0. m or more TCEB0 Ball screw lead: Upper limit of class Upper limit of class 0. m or more 0. m or more 0. m or more 0. m or more 0. m or more 0. m or more 0. m or more 0. m or more Stroke: 0 Speed: /s Suction amount: 70/min concentration number of particles/m 00 Ball screw lead: concentration number of particles/m 0 000 000 0 0. m or more 0. m or more 0. m or more 0. m or more 90 Ball screw lead: 0 000 concentration number of particles/m 0 000 000 0 000 0 Stroke: Speed: 00/s Suction amount: /min Stroke: 0 Speed: 0/s Suction amount: /min Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class Upper limit of class 0. m or more 0. m or more 0. m or more 0. m or more Stroke: 00 Speed: 0/s Suction amount: 0/min Upper concentration limit of each cleanliness class (JIS B 99 :, ISO -: 999) unit: number of particles/m Cleanliness 0. m or larger 0. m or larger 0. m or larger 0. m or larger Class Class Class (Federal Standard 9D Class ) Class (Federal Standard 9D Class ) Class (Federal Standard 9D Class 0) Class (Federal Standard 9D Class 00) 0 000 0 000 000 7 70 700 7 000 0 000 7 Measurement result of cleanliness TCEB 0 0 00 0 0 0 90 Ball screw lead 0 0 0 0 00 Remark: Cleanliness varies depending on operating environment and operating conditions. Speed /s 00 0 0 0 0 0 Suction amount /min 0 70 0 N=0.kgf=0.lbs. =0.097inch Cleanliness class JIS B 99:, ISO -: 999 Class Class Class Class Class Class Class Class Class Class
Identification Number Identification Number and Specification Example of an Identification Number : Cleanroom precision positioning table TC TC EB / AT Size Size indicates bed width. Select a size from the list of Table. Select a bed length from the list of Table. Page -70 Table Sizes, bed widths, and bed lengths Bed width stroke length Size Page -70 TCEB 0 0 0 0 0 00 0 0 00 00 0 0 0 0 0 00 0 0 70 00 0 700 90 00 Page -70 Designation of motor attachment AT0: Without motor attachment To specify the motor attachment, select it from the list of Table. Designation of motor attachment Ball screw lead Page -70 Page -70 Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. If motor attachment is specified, a coupling shown in Table is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. For a product without motor attachment (AT0), no coupling is attached. Specification of sensor Page -70 Ball screw lead : (applied to TCEB) : (applied to ) : (applied to TCEB) : (applied to and ) : (applied to ) Specification of sensor 0: Without sensor : Two units of sensor mounted (limit) : Three units of sensor mounted (limit, pre-origin) : Four units of sensor mounted (limit, pre-origin, origin) : Two sensors attached (limit) : Three sensors attached (limit and pre-origin) 7: Four sensors attached (limit, pre-origin, origin) If sensor mounting (symbol,, or ) is specified, the sensor is mounted into the mounting groove on the side cover, and two detecting plates are attached onto the slide table. If sensor attachment (symbol,, or 7) is specified, mounting screws and nuts for sensor are provided in addition to the specified number of sensors, and two detecting plates are attached onto the slide table. 9 N=0.kgf=0.lbs. =0.097inch 70
Identification Number and Specification Table Application of motor attachment s of motor to be used Motor attachment Type Manufacturer Series Rated output Flange size W TCEB SGMJV-A AT AT SGMAV-A AT AT YASKAWA 0 SGMJV-0 AT EECTRIC - 0 SGMAV-0 AT CORPORATION SGMJV-0 AT 0 SGMAV-0 AT HF-MP0 AT AT HF-KP0 AT AT Mitsubishi 0 AC servo HF-MP AT Electric J 0 motor HF-KP AT Corporation HF-MP AT 0 HF-KP AT MSMDA AT AT MSMEA AT AT Panasonic MSMD0 AT MINAS A 0 Corporation MSME0 AT MSMD0 AT 0 MSME0 AT AR AT7 AR 0 AT AR9 0 AT ORIENTA step Stepper AS AT9 MOTOR motor AS 0 AT AT Co., td. AS9 0 AT AT RK CRK Note Applicable to the outer of motor output shaft. Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. Table Coupling models Motor attachment Coupling models RK CRK AT9 RK CRK 0 AT AT Manufacturer Coupling inertia J C - kg m AT XGS-9C- Nabeya Bi-tech Kaisha 0.0 AT XGS-9C- Nabeya Bi-tech Kaisha 0.0 AT XGS-C- Nabeya Bi-tech Kaisha 0. AT XGS-9C- Nabeya Bi-tech Kaisha 0.0 AT XGS-9C- Nabeya Bi-tech Kaisha 0.0 AT XGS-C- Nabeya Bi-tech Kaisha 0. AT7 XGS-9C- Nabeya Bi-tech Kaisha 0.0 AT XGS-C- Nabeya Bi-tech Kaisha 0. AT9 XGS-9C- Nabeya Bi-tech Kaisha 0.0 AT XGS-9C- Nabeya Bi-tech Kaisha 0.0 AT XGS-C- Nabeya Bi-tech Kaisha 0. Remark: For detailed coupling specifications, please see the manufacturer's catalog. Specifications Table Accuracy and size TCEB Table Maximum speed Motor type AC servo motor Stepper motor Positioning repeatability Positioning accuracy Parallelism in table motion B Backlash 0.0 0.00 0.00 0.00 0.00 0 0.0 0.00 0 0.00 0.00 0.00 00 0.0 0 0.0 00 0.0 0 0.00 0.00 0 0.0 0.0 0 0.0 0 0.00 0.00 0.0 70 0.0 0 0.0 0.0 90 0.0 Maximum speed /s TCEB 00 0 0 or less 0 70 0 0 00 00 90 0 TCEB 0 0 0 or less 0 00 90 0 00 Remark: To measure the practical maximum speed, it is required to consider operation patterns based on the motor to be used and load conditions. Table Allowable moment Allowable moment N m TCEB.0.0.0 Remark: Applied in all directions. Table 7 Maximum carrying mass TCEB Ball screw lead Horizontal Maximum carrying mass kg Vertical 7 7 7 9 7 N=0.kgf=0.lbs. =0.097inch 7
Specifications Table oad rating of linear motion rolling guide Table 9. Specifications of ball screw TCEB Table 9. Specifications of ball screw Shaft dia. Basic dynamic load rating C N Basic static load rating C 0 N 90 7 7 7 7 0 0 9 Shaft dia. Overall length TCEB Basic dynamic load rating C N Basic static load rating C 0 N Static moment rating N m T 0 T X T Y TCEB 90 0 99. 99. 00 7 0 00 900 7 7 T 0 T X T Y 9.. 9. 0. 9 0 00 0 00 0 9 0 9 0 9 0 9 70 79 0 9 90 99 Table Table inertia and starting torque and size TCEB Table Sensor timing chart Table inertia J T - kg m 0.0 0.09 0.07 0. 0.090 0. 0 0. 0. 0. 0. 0. 0.7 0 0.7 0. 00 0. 0. 0 0. 0. 00 0.9 0. 0 0.7. 0 0.9. 0.0. 0.. 70..9 0.. 90.. Sensor Specification CW Starting torque T S N m 0.0 0.0 B 0.0 0.0 0.0 0. CCW C ON OFF A Origin Pre-origin Table Moment of inertia of sectional area of bed Y-axis OFF CCW limit OFF CW limit D E Mechanical stopper e X-axis and size Ball screw lead A B C D E 7 Moment of inertia of sectional area I X I Y Center of gravity e TCEB....7...0..0 TCEB 7. 7 7 7. Remarks. Mounting a sensor is specified using the corresponding identification number.. For the specifications of respective sensors, please see the section of sensor specification in General Explanation. N=0.kgf=0.lbs. =0.097inch 7
Dimensions of Motor Attachment TCEB TCEB Cleanroom Precision Positioning Table TC AT0 (without attachment) -. Through 0.0 0.0.. -M Depth AT0 (without attachment) 0.0 0.0 -M Through 7 9 0 9 0 -. Through. Counterbore depth. AT 0.0 0.0 -. Through. Counterbore depth. AT 0.0 0.0 -M Through PCD, Evenly distributed at 90 -M Depth -M Through PCD, Evenly distributed at 90 9 0 -. Through. Counterbore depth. S/ S/ AT AT7 AT9 9 0.0 0.0 0.0 0.0 0 -. Through. Counterbore depth. -M Through PCD, Evenly distributed at 90 -. Through. Counterbore depth AT AT 0.0 0.0 0.0 0.0 -M Through PCD, Evenly distributed at 90 0 -. Through. Counterbore depth.. n-m Depth Never insert a bolt of depth exceeding a specified value. A n- A. 7.. Rc/ Also on the other side -M Through.. 7.. AT0 (without -M Depth -Rc/ With sensor attachment) 0.0 7 0.0 7. AT 0. 0.0 0.0 -. Through Counterbore depth Overall length S Mounting holes of bed A n Mass Ref. kg 0.9 7 0.0. -M Through PCD70, Evenly distributed at 90 0 7.. 0 7. AT 0.0 0.0 -. Through Counterbore depth -M Through PCD70, Evenly distributed at 90 0 -M Through -. Through Counterbore depth 7 AT AT 0.0 0.0 7 N=0.kgf=0.lbs. =0.097inch 7
Cleanroom Precision Positioning Table TC -M Depth S/ S/ 0. n-m Depth 7 Never insert a bolt of depth exceeding a specified value. A. 7 -M Depth S/ S/ A n- 90. n-m Depth 9 Never insert a bolt of depth exceeding a specified value. n- 0. 7 Rc/ Also on the other side 70 Rc/ Also on the other side.9. 9. 9. 9... 7... -Rc/ 0 7. With sensor -Rc/ 9. With sensor Overall length S Mounting holes of bed A n Mass Ref. kg. 7 0. 0 7.7 00 7 0.0 0 7 00. 00 7 0 7.7 Remark: Motor attachment for stepper motor is lower than the bottom of the bed. Overall length S Mounting holes of bed n Mass Ref. kg 0. 0 0. 0 00. 0 7 0 7. 70 00.0 0 9 700 9. 90 0 00 7. 77 N=0.kgf=0.lbs. =0.097inch 7