Graphene transistor. Seminar I a. Mentor: doc. dr. Tomaž Rejec. April Abstract

Similar documents
Carbon based Nanoscale Electronics

3-month progress Report

GRAPHENE the first 2D crystal lattice

ECE 340 Lecture 39 : MOS Capacitor II

ELECTRONIC ENERGY DISPERSION AND STRUCTURAL PROPERTIES ON GRAPHENE AND CARBON NANOTUBES

Graphene and Carbon Nanotubes

Black phosphorus: A new bandgap tuning knob

GaN based transistors

Classification of Solids

Surfaces, Interfaces, and Layered Devices

Lecture 12: MOS Capacitors, transistors. Context

Graphite, graphene and relativistic electrons

ESE 570: Digital Integrated Circuits and VLSI Fundamentals

EECS130 Integrated Circuit Devices

MSE 310/ECE 340: Electrical Properties of Materials Fall 2014 Department of Materials Science and Engineering Boise State University

Lecture 5: CMOS Transistor Theory

Graphene A One-Atom-Thick Material for Microwave Devices

MOS CAPACITOR AND MOSFET

ESE 570: Digital Integrated Circuits and VLSI Fundamentals

Chapter 1 Overview of Semiconductor Materials and Physics

Graphene based FETs. Raghav Gupta ( )

MOSFET: Introduction

Quantum Confinement in Graphene

1 Name: Student number: DEPARTMENT OF PHYSICS AND PHYSICAL OCEANOGRAPHY MEMORIAL UNIVERSITY OF NEWFOUNDLAND. Fall :00-11:00

Calculating Band Structure

Graphene and Planar Dirac Equation

Surfaces, Interfaces, and Layered Devices

TRANSVERSE SPIN TRANSPORT IN GRAPHENE

Graphene and Quantum Hall (2+1)D Physics

(a) (b) Supplementary Figure 1. (a) (b) (a) Supplementary Figure 2. (a) (b) (c) (d) (e)

Lecture 04 Review of MOSFET

Part 5: Quantum Effects in MOS Devices

Solid State Device Fundamentals

! CMOS Process Enhancements. ! Semiconductor Physics. " Band gaps. " Field Effects. ! MOS Physics. " Cut-off. " Depletion.

ESE 570: Digital Integrated Circuits and VLSI Fundamentals

Electronic properties of graphene. Jean-Noël Fuchs Laboratoire de Physique des Solides Université Paris-Sud (Orsay)

MOS Transistor I-V Characteristics and Parasitics

Lecture 0: Introduction

Section 12: Intro to Devices

Physical Properties of Mono-layer of

! CMOS Process Enhancements. ! Semiconductor Physics. " Band gaps. " Field Effects. ! MOS Physics. " Cut-off. " Depletion.

Physics of Semiconductors (Problems for report)

EE130: Integrated Circuit Devices

GRAPHENE NANORIBBONS Nahid Shayesteh,

Initial Stages of Growth of Organic Semiconductors on Graphene

Electrostatics of Nanowire Transistors

Chapter 4: Bonding in Solids and Electronic Properties. Free electron theory

Supplementary Figures

Semiconductor Physics fall 2012 problems

Graphene, the two-dimensional allotrope of carbon,

Understanding the effect of n-type and p-type doping in the channel of graphene nanoribbon transistor

EE143 Fall 2016 Microfabrication Technologies. Evolution of Devices

Lecture 6: 2D FET Electrostatics

Lecture 11: MOS Transistor

Nanoelectronics. Topics

Graphene - most two-dimensional system imaginable

Graphene Novel Material for Nanoelectronics

Advantages / Disadvantages of semiconductor detectors

Fundamentals of the Metal Oxide Semiconductor Field-Effect Transistor

Lecture Outline. ESE 570: Digital Integrated Circuits and VLSI Fundamentals. Review: MOSFET N-Type, P-Type. Semiconductor Physics.

IS THERE ANY KLEIN PARADOX? LOOK AT GRAPHENE! D. Dragoman Univ. Bucharest, Physics Dept., P.O. Box MG-11, Bucharest,

Final Examination EE 130 December 16, 1997 Time allotted: 180 minutes

UNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences. EECS 130 Professor Ali Javey Fall 2006

Semiconductor Physics Problems 2015

ELEMENTARY BAND THEORY

Chapter 3 Properties of Nanostructures

Information processing in nanoscale systems

an introduction to Semiconductor Devices

Current mechanisms Exam January 27, 2012

An Extended Hückel Theory based Atomistic Model for Graphene Nanoelectronics

Heterostructures and sub-bands

VLSI Design The MOS Transistor

ESE370: Circuit-Level Modeling, Design, and Optimization for Digital Systems

EN2912C: Future Directions in Computing Lecture 08: Overview of Near-Term Emerging Computing Technologies

Quantum Phenomena & Nanotechnology (4B5)

Supplementary Figure S1. AFM images of GraNRs grown with standard growth process. Each of these pictures show GraNRs prepared independently,

& Dirac Fermion confinement Zahra Khatibi

CHAPTER 6 CHIRALITY AND SIZE EFFECT IN SINGLE WALLED CARBON NANOTUBES

Section 12: Intro to Devices

FREQUENTLY ASKED QUESTIONS February 21, 2017

Device Performance Analysis of Graphene Nanoribbon Field-Effect Transistor with Rare- Earth Oxide (La 2 O 3 ) Based High-k Gate Dielectric

The many forms of carbon

3.1 Introduction to Semiconductors. Y. Baghzouz ECE Department UNLV

Digital Electronics Part II - Circuits

Chapter 12: Electrical Properties. RA l

Keywords: Graphene; Electronic properties; Field effect transistor; Contact resistance; Metal/graphene interface.

Tunneling transport. Courtesy Prof. S. Sawyer, RPI Also Davies Ch. 5

Stretching the Barriers An analysis of MOSFET Scaling. Presenters (in order) Zeinab Mousavi Stephanie Teich-McGoldrick Aseem Jain Jaspreet Wadhwa

Lecture 3: CMOS Transistor Theory

Electronic properties of Graphene and 2-D materials

Appendix 1: List of symbols

Figure 3.1 (p. 141) Figure 3.2 (p. 142)

4.2 Molecular orbitals and atomic orbitals Consider a linear chain of four identical atoms representing a hypothetical molecule.

CMPEN 411 VLSI Digital Circuits. Lecture 03: MOS Transistor

1. Nanotechnology & nanomaterials -- Functional nanomaterials enabled by nanotechnologies.

ELEC311( 물리전자, Physical Electronics) Course Outlines:

Nanoscience quantum transport

Achieving a higher performance in bilayer graphene FET Strain Engineering

A final review session will be offered on Thursday, May 10 from 10AM to 12noon in 521 Cory (the Hogan Room).

Semiconductors. SEM and EDAX images of an integrated circuit. SEM EDAX: Si EDAX: Al. Institut für Werkstoffe der ElektrotechnikIWE

Transcription:

Graphene transistor Seminar I a Jan Srpčič Mentor: doc. dr. Tomaž Rejec April 2015 Abstract The topic of this seminar is graphene and its possible applications in the field of electronics, most notably as a candidate material for the transistor. The metal-oxide-semiconductor field-effect transistor (MOSFET) is one of the most used active components of integrated chips, but being silicon based it faces a problem, because silicon may in the near future not meet the requirements of the electronics industry any longer. Yet still in its infancy, graphene might present a viable alternative.

Contents 1 Introduction 3 2 The MOSFET 3 2.1 Structure and operation.......................... 3 2.2 Characteristics and application...................... 5 3 Graphene 5 3.1 Dispersion relation............................. 6 3.2 The Klein paradox............................. 8 4 Modern graphene transistors 11 5 Conclusion 12 2

1 Introduction Graphene is an exciting material that has been in the spotlight of condensed-matter physics ever since the Manchester group (Novoselov, Geim et al [1]) published their ground-breaking paper in 2004. Its interesting electrical and mechanical properties suggest a huge potential for application in many different fields, but especially in electronics. Although graphene is a single sheet of carbon atoms in a honeycomb lattice it is easily produced using ordinary sticky tape and some graphite. By applying and removing the tape to the graphite the graphene sheets are exfoliated onto the tape. This was done by the Manchester group which spearheaded the work for which they received the Nobel prize in 2010. 2 The MOSFET 2.1 Structure and operation A transistor is a semiconductor device used in electrical circuits for logical operations and signal amplification. Its widespread use in modern electronics along with the highly automated and low-cost semiconductor device fabrication makes it one of the key active components of the integrated chip, and perhaps one of the most far-reaching inventions of the twentieth century. There are many different types of transistors, but by far the most popular is the MOSFET or metal-oxidesemiconductor field-effect transistor. Figure 1: The MOSFET transistor, called PMOS if the body is a p-type semiconductor (or NMOS conversely). [2] It is a 4-terminal device, with the terminals being the source and drain electrodes, separated by the channel region, the gate electrode whereby the channel conductivity is controlled, and the body made from a doped semiconductor (Figure 1). The body is most commonly connected to the source (effectively making the transistor a 3-terminal device), but is otherwise used to control the strength of the inversion layer because the gate-to-body bias positions the conduction band energy levels, while the source-to-body bias positions the electron Fermi level. The MOSFET owes its name in part to the configuration of an oxide insulator (e.g. SiO 2 ) sandwiched between the metal gate and the semiconductor body (though in modern MOSFETs other materials can be used, such as highly doped silicon for the gate). This is the part of the transistor that is used to control the conductivity of the channel region and is 3

called the MOS capacitor. The MOSFET is a field-effect transistor, which means the conductivity of the channel is controlled with an electric field and it doesn t rely upon the contact of different semiconductors for operation. In order to understand the electronic properties of the MOS capacitor, let us consider the band diagrams shown in Figure 2. At a junction of two conducting materials with different work functions (and different Fermi levels) a current will flow until the Fermi levels are equal throughout the junction at thermodynamic equilibrium. Shown in Figure 2 is energy band bending at the metal-semiconductor junction, where the metal work function is higher than the semiconductor work function (φ m > φ s ). Consequently if an electron travels from the semiconductor to the metal, the energy of the system, along with the difference between the Fermi levels φ m and φ s, decreases. The result of this process is a surface charge at the junction. When one of the materials forming the junction is a semiconductor the result is a depletion or accumulation zone, depending on the type of majority charge carriers in the substrate, and the relative values of the Fermi levels of either material. This means we can influence the surface charge by manipulating the Fermi levels with the gate voltage. If we apply positive voltage V g to the metal gate from the example in Figure 2: The energy band diagram. φ m,s are metal/semiconductor work functions, E F,m and E F,s their Fermi levels, E V the top of the valence band, E C the bottom of the conduction band, χ s electron affinity, φ SB the surface potential and V BB the degree of bending (V BB = φ m φ s ). [3] Figure 2, the Fermi level in the metal E F,m will lower by q V g which will in turn cause a higher degree of band bending and a larger depletion layer in the semiconductor. If we raise the voltage further we eventually reach the threshold voltage V th where the surface charge concentration is equal to the body doping concentration. [4] This means φ SB = E F,s E V. If the gate voltage is higher than the threshold voltage, the 4

majority carriers in the body are unable to screen the electric field, so the minority carriers are attracted to the junction, forming an inversion layer. These carriers are conductive parallel to the surface of the junction, effectively forming a channel. For the MOSFET two terminals made of the opposite type of semiconductor than the body are placed on either side of the capacitor, called the source and drain electrodes, through which the current flows. 2.2 Characteristics and application If a material is to succeed silicon in MOS- FET production, it has to showcase two important properties. Firstly, a trend in the semiconductor industry is that the transistor channel length (L in Figure 1) halves every 18 months (Moore s law). This has been the case since the 1970s when mass production first started with with transistor channel lengths of 10 µm until now when they are some three orders of magnitude smaller (5th gen. Intel). This is desired as more MOSFETs can be fitted in a single chip, making integrated circuits more and more complex. In that light, scaling alone has provided the needed performance improvements in the industry. But it appears silicon-based devices are approaching their limits [5], as short-channel effects such as drain-induced barrier lowering are hindering MOSFET functionality, so an alternative is to be found. The electronic properties of candidate materials must be robust against short-channel effects. Secondly an important MOSFET structure in integrated circuits is the complementary metal-oxidesemiconductor (CMOS) which consists of an n-type and a p-type MOSFET (denoting the body semiconductor type). During operation one of the MOSFETs is always off, which makes for a very low static power consumption, low waste heat and high density of logic functions in a chip. This means switching is a very desirable property of the MOSFET, so the presence of a band gap in candidate materials would be a priority. 3 Graphene Graphene is a two-dimensional lattice of carbon atoms arranged in a hexagonal (honeycomb) pattern (Figure 3). The understanding of its electronic properties pertains to other carbon allotropes and is important as such. For example, graphene can be thought of as composed from benzene rings stripped from their hidrogen atoms, or, wrapped up, as nanotubes or fullerenes. [6] The sp 2 -hybridization leads to the carbon atoms forming three bonds each at an angle of 120 to one another, of the length 1.46 Å. The third (nonhybridized) p-orbital is perpendicular to the three bonds and is half-filled. The hexag- 5

onal lattice is essentially a triangular lattice with a basis of two atoms per unit cell, therefore the reciprocal lattice is also a triangular lattice and the first Brillouin zone is a hexagon. Due to the lattice symmetry only two of the six vertices (known as Dirac points) are non-equivalent. (b σ,i ) create or annihilate states with spin σ at A (B) sites. Since the Hamiltonian is of a quadratic form it can be diagonalized with an appropriate Bogoliubov transformation. Figure 3: The hexagonal lattice with two primitive vectors a 1 and a 2 and the lattice constant a. Sites that differ for a primitive vector are equivalent (either A or B). 3.1 Dispersion relation Using the tight-binding approximation the Hamiltonian can be written as H = t (a σ,i b σ,j + h.c.) t i,j,σ i,j,σ (a σ,i a σ,j + b σ,i b σ,j + h.c.), (1) where t 2.8 ev is the nearest-neighbor electron hopping energy and t the nextnearest-neighbor electron hopping energy (0.02 t t 0.2 t). The creationannihilation operators a σ,i (b σ,i ) and a σ,i Figure 4: a) Dispersion relation with parameters t = 2.8 ev and t = 0.4 ev. b) Energy bands at the plane k y = 0. The non-zero next-nearest-neighbor hopping energy t breaks the electron-hole symmetry of the bands. The derived energy dispersion (Figure 4) is of the form E = ±t 3 + f(k) + t f(k), (2) 6

where f(k) = 2 cos (k x a) k = (k x, k y ), a 1 + 4 cos ( 1 2 k xa) cos ( 3 2 k ya), = a ( 1/2, 3/2 ) and a 2 = a ( 1/2, 3/2 ). Since the carbon p- orbitals that contain the free electron are half-filled, the Fermi level passes through the Dirac points. By expanding the dispersion relation close to the K point (k = K + q, q K ), equation (2) can be written in a simplified form as E(q) = ±v F q + O[(q/K) 2 ]. (3) The quantity v F is the Fermi velocity and is of the order of 10 6 m/s which is similar to the Fermi velocity in metals like lithium (1.29 10 6 m/s) or sodium (1.07 10 6 m/s). Equation (3) is a linear dispersion relation which means electrons with energies near the Fermi level behave as massless fermions. With the electron effective mass m approaching zero, the electrical conductivity σ e, defined in the Fermi gas model as σ e = ne2 τ m, (4) where n is the number density of electrons, e electron charge and τ the average electron scattering time, approaches infinity. High conductivity is of course a desirable characteristic of any material that is to be used for a conducting channel in electronic devices, but presents a fundamental problem for transistor applications as a consequence of linear energy dispersion (linear energy dispersion is gapless, but an energy gap is required). Table 1: Band gaps (E g ) and electron mobilities (µ) of some semiconductors and graphene. [7] µ Material E g [ev] [cm 2 /Vs] Ge 0.66 3900 Si 1.12 1400 GaAs 1.42 8500 InN 1.97 3200 Graphene 0 15000 If a solution is to be found, a compromise must be struck, sacrificing one for the other. There are several proposed methods of creating an energy gap in graphene, such as bilayer graphene, graphene nanoribbons (GNRs) and uniaxial strain. The dispersion relation in bilayer graphene is different to single-layer graphene due to additional non-negligible hopping energies between atoms in different layers and has an energy gap under the right conditions (if an electric field is applied perpendicular to the bilayer). Ideal GNRs are ribbons of graphene which have a finite width and a well-defined edge. The band gap is opened due to the confinement of electrons in the direction perpendicular to the GNR length. Finally, strain induced in epitaxial graphene (due to interactions with the 7

substrate, or conversely by stretching the substrate itself) can produce a band gap, but is still subject to debate. All three methods are, however, currently not applicable for practical purposes as they either present an engineering problem (it is difficult to produce GNRs of uniform width and global uniaxial strain of upwards of 20% is required to open a band gap in single-layer graphene, which is difficult to achieve), or by inducing an energy gap lower the mobility below that of silicon (bilayer graphene). Table 1 shows the band gaps and mobilities of some of the most widely used semiconductors. Such high values as 10000-15000 cm 2 /Vs are routinely measured in graphene, but drop drastically when a band gap is opened (Figure 5). This is because the electron mobility is inversely proportional to the effective electron mass, which is in turn proportional to the energy band gap. [8] 3.2 The Klein paradox The Klein paradox describes the peculiar scattering behaviour of relativistic particles at potential barriers of sufficient height. In non-relativistic quantum tunneling the case is that electrons can pass through high potential barriers even if it is forbidden classically. With the increasing barrier height (in the classical limit), the transmission coefficient approaches zero exponentially. Relativistic particles, however, can pass through high barriers with a high transmission probability. Moreover, even absolute transparency can be achieved for electrons at specific angles of incidence. Graphene provides a unique medium where quantum electrodynamics phenomena can be tested experimentally, because Dirac electrons can be described using the Dirac equation due to the similarities to relativistic fermions. Figure 5: III-V compounds from left to right are InSb, InAs, In 0.53 Ga 0.47 As, InP, GaAs, In 0.49 Ga 0.51 P and GaN. Also shown are simulation results for carbon nanotubes (CNTs) and GNRs. The higher graphene value is a simulation result and the lower an experimental measurement (see [5] for original sources). The Klein paradox has never been observed outside of graphene because the electric fields required to produce a potential increase of mc 2 over the Compton length /mc are of the order of 10 16 V cm 1. [9] But because the energy dispersion relation in graphene is linear at the Fermi level, low-energy excitations have negligible effective mass and so the barrier 8

heights needed to for the Klein paradox to be observable are much lower. The formulation of the problem is as follows. Let the barrier V(x) be defined as V 0, 0 < x < D, V (x) = 0, otherwise, obtained through applying the condition that the wavefunctions be continuous over the barrier. The result is angle-dependent and shown in Figure 6 (for the explicit expression see ref. 7, equation 3). and the effective hamiltonian as H = i v F σ, (5) where σ = (σ x, σ y ) are the Pauli matrices (note the Hamiltonian is equivalent to that in the massless Dirac equation). The wave function ansatz (ψ 1 and ψ 2 for electrons and holes respectively) has the form (e ikxx + re ikxx )e ikyy, x < 0, ψ 1 = (ae iqxx + be iqxx )e ikyy, 0 < x < D, te ikxx+ikyy, x > D, and s(e ikxx+iφ + re ikxx qφ )e ikyy, x < 0, s (ae iqxx+iθ + be iqxx iθ )e ikyy, ψ 2 = 0 < x < D, where k F ste ikxx+ikyy+iφ, x > D, = 2π/λ is the Fermi wavevector, k x = k F cos φ and k y = k F sin φ the wavevector components outside the barrier, q x = (E V 0 ) 2 / 2 vf 2 k2 y, the refraction angle θ = arctan q y /q x, and finally s = sgn(e) and s = sgn(e V 0 ). The refraction and transmission coefficients are Figure 6: Transmission probability through a 100-nm wide potential barrier as a function of incident angle φ for barrier height V 0 = 200 mev (red) and V 0 = 285 mev (blue). [9] Now consider the energy spectrum of a potential well. In the same way the potential well has bound electron states, a potential barrier has bound positron (hole) states. If the positron energy inside the spectrum aligns with the energy continuum outside, this leads to high-probability tunneling. [9] Since electrons and holes are described 9

by elements of the same spinor function in the Dirac equation (charge-conjugation symmetry), it follows naturally that the hole in the barrier moves in the opposite direction to the electron, conserving momentum. Essentially an incident electron transforms into a hole within the barrier which transforms back into an electron on the other side. Another interpretation of the paradox is through pseudospin. In one dimension the energy dispersion for energies near the Fermi level is two intersecting linear functions (E ±k), each attributed to their respective lattice sites A or B. An electron with energy E propagating right in Figure 7 is on the same line as a hole with energy -E, moving in the opposite direction. Thus electrons and holes from the same branch have the same pseudospin σ, pointing parallel to the electron or antiparallel to the hole velocity. In a normal conductor the electron transport and transmission probability is highly dependant upon the distribution of all possible scatterers which affect electrons by some potential (Figure 8). This is not true, however, for Dirac electrons, because if the pseudospin is to be conserved the electrons (changing into holes and back) have to travel through these potential barriers unaffected. Figure 8: The transmission probability through a diffusive conductor depends heavily on the distribution of scatterers. [9] Figure 7: Three Dirac cones superimposed over the barrier potential (V 0 ). Two branches of the energy dispersion (red and green) are highlighted. The Klein paradox is of course an unwanted property of a transistor material as the transistor cannot be pinched off due to the transparency of a gate-influenced barrier to incoming electrons. The solution lies in modifying the energy dispersion relation (by doping, for instance), rendering the electrons effectively massive and therefore describable again by the Schrödinger and not the Dirac equation. 10

conducting channel, below it is a SiO 2 dielectic, insulating it from the doped silicon, which serves as a bottom gate. The transistor provided a proof of concept, but not much else as the bottom gate made for unwanted transistor capacitance. In 2007 the first top-gate graphene MOSFET was produced with much more acceptable characteristics, and became a stepping stone for further advancements. Drain current characteristics for a graphene MOSFET are shown in Figure 10. Note the hight leakage current (Dirac point) due to the negligible energy band gap. Figure 9: Back-gated MOSFET (top), top-gated MOSFET with exfoliated graphene or graphene grown on metal and transferred to a SiO 2 -covered Si wafer (middle), top-gated MOSFET with epitaxial graphene (bottom). [5] 4 Modern graphene transistors The configuration of the first graphene MOSFET produced in 2004 is shown in Figure 9 (top). The graphene between the source and drain electrodes provides a a Figure 10: Drain current characteristics for two MOSFETs with channel lengths 2.5 µm (red) and 10 µm (blue). [5] Unlike Si-based transistors graphene MOSFETS conduct both at negative and positive top-gate voltages. The majority carriers are influenced highly by the topgate voltage. At high positive voltages the carriers are electrons and at negative voltages, holes. Between the extremes is the Dirac point, or the off state of the transistor. The on-off ratios for large-area- 11

graphene MOSFETS are currently below 20, which is not yet sufficient for application in logical circuits (especially comparred to the orders-of-magnitude higher on-off ratios in contemporary MOSFETs). 5 Conclusion Graphene as a material has several properties that suggest it is the prime candidate for the future of electronics. It is one atomic layer thick, and is as such inherently robust against short-channel effects. The electron mobility of zero-gap graphene far surpasses its semiconductor counterparts, which makes it ideal for high-frequency applications. But it still has many drawbacks, such as zero band gap, lower mobilities if a band gap is induced, difficulties with fabrication (in the case of GNRs) and so on. Further research is needed. References [1] K. S. Novoselov, A. K. Geim et al, Electric Field Effect in Atomically Thin Carbon Films. Science 306, 666-669, 2004. [2] http: //upload.wikimedia.org/wikipedia/commons/7/79/lateral mosfet.svg (1. 11. 2015) [3] Zhen Zhang, John T. Yates, Jr., Band Bending in Semiconductors: Chemical and Physical Consequences at Surfaces and Interfaces. Chem. Rev., 112 (10), pp 5520-5551, 2012. [4] Chenming Calvin Hu, Modern Semiconductor Devices for Integrated Circuits, p 162, Berkeley, 2010. [5] Frank Schwierz, Graphene Transistors, Nature, Vol. 5, 2010. [6] Castro Neto et al., The Electronic Properties of Graphene, Rev. Mod. Phys., Vol. 81, pp 109-162, 2009. [7] http: //www.ioffe.ru/sva/nsm/semicond/index.html (1. 11. 2015) [8] Jinying Wang et al., Inverse Realtionship Between Carrier Mobility and Bandgap in Graphene, J. Chem. Phys. 138, 08470 (2013). [9] M. I. Katsnelson, K. S. Novoselov, A. K. Geim, Chiral Tunneling and the Klein Paradox in Graphene, Nature, Vol. 2, 2006. 12