Springer Series in Materials Science 139 Laser Processing of Materials Fundamentals, Applications and Developments Bearbeitet von Peter Schaaf 1st Edition. 2010. Buch. XIV, 234 S. Hardcover ISBN 978 3 642 13280 3 Format (B x L): 15,5 x 23,5 cm Gewicht: 583 g Weitere Fachgebiete > Technik > Produktionstechnik > Fertigungstechnik Zu Leseprobe schnell und portofrei erhältlich bei Die Online-Fachbuchhandlung beck-shop.de ist spezialisiert auf Fachbücher, insbesondere Recht, Steuern und Wirtschaft. Im Sortiment finden Sie alle Medien (Bücher, Zeitschriften, CDs, ebooks, etc.) aller Verlage. Ergänzt wird das Programm durch Services wie Neuerscheinungsdienst oder Zusammenstellungen von Büchern zu Sonderpreisen. Der Shop führt mehr als 8 Millionen Produkte.
Contents 1 Introduction... 1 Peter Schaaf References... 3 2 Basics of Lasers and Laser Optics... 5 Michelle Shinn 2.1 Introduction... 5 2.2 Optical Processes... 5 2.3 Time Dependence... 8 2.3.1 Q-Switching... 8 2.3.2 Mode-Locking... 9 2.3.3 Ultrashort Pulse Generation... 9 2.3.4 Harmonic Generation... 9 2.4 Free-Electron Lasers... 10 2.5 Laser Optics... 12 2.5.1 Optical Propagation... 13 2.5.2 Sizing Optical Elements and Other Tricks of the Trade... 14 2.5.3 Fiber Optics... 14 2.5.4 Managing Diffraction... 15 2.5.5 The Aspheric Lens Beamshaper... 15 2.5.6 Holographic Optical Elements... 16 2.5.7 Laser Damage... 17 2.5.8 Optical Modeling Software... 19 2.6 Conclusions... 19 References... 19 3 Fundamentals of Laser-Material Interactions... 21 Ettore Carpene, Daniel Höche, and Peter Schaaf 3.1 Basic Considerations... 21 3.2 Laser... 22 3.3 Heat in Solids: Electronic and Lattice Dynamics... 23 vii
viii Contents 3.4 Laser-Material Interactions... 27 3.4.1 Single Photon and Multi-Photon Processes... 27 3.4.2 Laser Reflection and Absorption... 28 3.4.3 Temperature Profiles... 31 3.5 Phenomena Occurring on the Target Surface... 35 3.5.1 Vaporization... 35 3.5.2 Recondensation... 36 3.5.3 Plasma Formation... 37 3.5.4 Laser Supported Absorption Waves... 39 3.6 Material Transport Phenomena... 42 3.7 Conclusions... 44 References... 44 4 Laser Plasma Interactions... 49 Ion N. Mihailescu and Jörg Hermann 4.1 Introduction... 49 4.2 Fundamentals of Laser Plasma Interaction... 50 4.3 Processes in Nanosecond Laser Plasma Interactions... 55 4.3.1 Laser-Induced Gas Breakdown... 55 4.3.2 Plasma Shielding During Laser Material Processing... 59 4.3.3 Laser-Supported Absorption Waves... 63 4.3.4 Plasma Shutter for Optical Limitation... 66 4.4 Plasma Interactions with Femtosecond Laser Pulses... 69 4.4.1 Laser Beam Filamentation... 69 4.4.2 Generation of XUV Radiation by Laser Plasma... 75 4.4.3 Plasma Mirror... 80 4.5 Conclusion... 83 References... 84 5 Laser Ablation and Thin Film Deposition... 89 Christof W. Schneider and Thomas Lippert 5.1 Pulsed Laser Ablation... 89 5.2 Lasers Used for Laser Ablation... 91 5.3 Initial Ablation Processes and Plume Formation... 92 5.3.1 Femtosecond Laser Irradiation... 93 5.3.2 Nanosecond Laser Irradiation... 93 5.4 Plume Expansion... 94 5.4.1 Plume Expansion in Vacuum... 94 5.4.2 Plume Expansion into a Background Gas... 94 5.4.3 Imaging... 95 5.4.4 Kinetic Energy of Plume Species... 97 5.4.5 Thin Film Growth... 98
Contents ix 5.5 Laser Ablation of Polymers...104 5.5.1 Ablation Mechanism...105 5.5.2 Polymer Film Ablation...106 5.5.3 Film Pattern Transfer...107 5.6 Conclusions...109 References...109 6 Processing with Ultrashort Laser Pulses...113 Jürgen Reif 6.1 Introduction and General Considerations...113 6.2 Laser-Material Coupling...114 6.2.1 Nonlinear Absorption...115 6.2.2 Hot Electron Generation...116 6.2.3 Incubation...116 6.2.4 Resolution Below the Diffraction Limit...117 6.3 Dissipation Dynamics...118 6.3.1 Dissipation Channels...118 6.3.2 Transient Material Modification...118 6.4 Desorption/Ablation...120 6.4.1 Concept...120 6.4.2 Applications...120 6.5 3-D Bulk Modifications, Waveguide Writing...122 6.5.1 Bulk Structuring, Waveguide Writing...123 6.5.2 Multiphoton Polymerization...123 6.6 Phase Transformation, Laser Annealing...124 6.7 Medical Applications...124 6.8 Nanostructures and Nanoparticles...124 6.9 Conclusions...126 References...126 7 Creating Nanostructures with Lasers...131 Paolo M. Ossi and Maria Dinescu 7.1 Introduction...132 7.2 Fundamentals...133 7.2.1 Plasma Gas Interaction at Increasing Gas Pressure in ns PLD: Experimentsand Modeling...133 7.2.2 Nanoparticle Synthesis...140 7.2.3 Controlled Deposition of 2D Nanoparticle Arrays: Self-Organization, Surface Topography, and Optical Properties...143 7.3 NP Formation in Femtosecond PLD: Experimental Results andmechanisms...146 7.4 Applications...151 7.4.1 Direct Writing...152 7.4.2 Laser LIGA...152
x Contents 7.4.3 Laser Etching...153 7.4.4 Pulsed Laser Deposition...154 7.4.5 Matrix-Assisted Pulsed Laser Evaporation (MAPLE)...160 7.4.6 Laser-Assisted Chemical Vapor Deposition (LA-CVD)...161 7.4.7 Lasers for MEMS (Micro-Electro-Mechanical Systems)...163 7.5 Concluding Remarks...163 References...165 8 Laser Micromachining...169 Jürgen Ihlemann 8.1 Basic Considerations...169 8.2 Processing Limits...169 8.3 Materials and Processes...171 8.3.1 Polymers...171 8.3.2 Glass...173 8.3.3 Ceramics...173 8.3.4 Metals...174 8.3.5 Layer Ablation...175 8.3.6 Indirect Ablation...176 8.4 Hole Drilling...178 8.5 Patterning of Thin Films...179 8.5.1 Dielectric Masks...179 8.5.2 Diffractive Optical Elements...180 8.6 Fabrication of Micro Optics and Micro Fluidics...181 8.6.1 Gratings...181 8.6.2 Micro Lenses...182 8.6.3 Micro Fluidics...183 8.7 Conclusions...184 References...185 9 Laser Processing Architecture for Improved Material Processing...189 Frank E. Livingston and Henry Helvajian 9.1 Laser Machining and Materials Processing...190 9.1.1 Introduction...190 9.1.2 Materials, Thermodynamic Properties, and Light/MatterInteraction...192 9.1.3 Photolytic Control: Conventional Approaches and Future Trends...193 9.1.4 Process Control...194 9.2 Laser Genotype Pulse Modulation Technique...196 9.2.1 Concept...196 9.2.2 Experimental Setup and Design...198 9.2.3 Performance Tests and Diagnostics...204
Contents xi 9.3 Selected Applications...211 9.3.1 Photosensitive Glass Ceramics: A Candidate Protean Material Class...211 9.3.2 Nanostructured Perovskite Thin-Films...215 9.4 Summary and Perspective...219 9.4.1 Laser Genotype Process Integration...219 9.4.2 Pulse Script Database: A Public Domain Catalog for Materials Processing...221 References...222 Index...225