Lecture 11 Surface Characterization of Biomaterials in Vacuum

Similar documents
IV. Surface analysis for chemical state, chemical composition

Secondary Ion Mass Spectrometry (SIMS)

Secondaryionmassspectrometry

Lecture 5. X-ray Photoemission Spectroscopy (XPS)

Secondary Ion Mass Spectroscopy (SIMS)

Secondary Ion Mass Spectrometry (SIMS) Thomas Sky

ToF-SIMS or XPS? Xinqi Chen Keck-II

X-Ray Photoelectron Spectroscopy (XPS) Prof. Paul K. Chu

Secondary ion mass spectrometry (SIMS)

Lecture 22 Ion Beam Techniques

Introduction to X-ray Photoelectron Spectroscopy (XPS) XPS which makes use of the photoelectric effect, was developed in the mid-1960

Secondary ion mass spectrometry (SIMS)

Methods of surface analysis

( 1+ A) 2 cos2 θ Incident Ion Techniques for Surface Composition Analysis Ion Scattering Spectroscopy (ISS)

Energy Spectroscopy. Excitation by means of a probe

Application of Surface Analysis for Root Cause Failure Analysis

5) Surface photoelectron spectroscopy. For MChem, Spring, Dr. Qiao Chen (room 3R506) University of Sussex.

Auger Electron Spectroscopy

Birck Nanotechnology Center XPS: X-ray Photoelectron Spectroscopy ESCA: Electron Spectrometer for Chemical Analysis

QUESTIONS AND ANSWERS

Advanced Lab Course. X-Ray Photoelectron Spectroscopy 1 INTRODUCTION 1 2 BASICS 1 3 EXPERIMENT Qualitative analysis Chemical Shifts 7

Surface and Interface Characterization of Polymer Films

Electron Spectroscopy

Auger Electron Spectroscopy (AES) Prof. Paul K. Chu

IONTOF. Latest Developments in 2D and 3D TOF-SIMS Analysis. Surface Analysis Innovations and Solutions for Industry 2017 Coventry

Surface Chemistry and Reaction Dynamics of Electron Beam Induced Deposition Processes

MSE 321 Structural Characterization

X-ray Photoelectron Spectroscopy (XPS)

X-Ray Photoelectron Spectroscopy (XPS) Auger Electron Spectroscopy (AES)

X-Ray Photoelectron Spectroscopy (XPS)-2

Introduction to SIMS Basic principles Components Techniques Drawbacks Figures of Merit Variations Resources

Photon Interaction. Spectroscopy

X-Ray Photoelectron Spectroscopy (XPS)-2

MS482 Materials Characterization ( 재료분석 ) Lecture Note 5: RBS

5.8 Auger Electron Spectroscopy (AES)

Surface Analysis - The Principal Techniques

Energy Spectroscopy. Ex.: Fe/MgO

Electron Spettroscopies

Secondary-Ion Mass Spectrometry

An Introduction to Auger Electron Spectroscopy

Photoelectron spectroscopy Instrumentation. Nanomaterials characterization 2

PHOTOELECTRON SPECTROSCOPY (PES)

Photoelectron Peak Intensities in Solids

ION BEAM TECHNIQUES. Ion beam characterization techniques are illustrated in Fig

The Use of Synchrotron Radiation in Modern Research

MS482 Materials Characterization ( 재료분석 ) Lecture Note 4: XRF

Practical Surface Analysis

XPS & Scanning Auger Principles & Examples

MSE 321 Structural Characterization

Reduced preferential sputtering of TiO 2 (and Ta 2 O 5 ) thin films through argon cluster ion bombardment.

Lecture 8: Mass Spectrometry

Chemistry Instrumental Analysis Lecture 35. Chem 4631

Auger Electron Spectroscopy *

Lecture 8: Mass Spectrometry

Auger Electron Spectrometry. EMSE-515 F. Ernst

Material Properties & Characterization - Surfaces

X-Ray Photoelectron Spectroscopy (XPS)

X-ray photoelectron spectroscopy - An introduction

X-ray Photoelectron Spectroscopy/ Electron spectroscopy for chemical analysis (ESCA), By Francis Chindeka

Mass Spectrometry. What is Mass Spectrometry?

Secondary Ion-Mass Spectroscopy (SIMS)

MS482 Materials Characterization ( 재료분석 ) Lecture Note 5: RBS. Byungha Shin Dept. of MSE, KAIST

Ion sputtering yield coefficients from In thin films bombarded by different energy Ar + ions

ICPMS Doherty Lecture 1

Rutherford Backscattering Spectrometry

ECE Semiconductor Device and Material Characterization

PHI 5000 Versaprobe-II Focus X-ray Photo-electron Spectroscopy

Table 1: Residence time (τ) in seconds for adsorbed molecules

EDS User School. Principles of Electron Beam Microanalysis

Review. Surfaces of Biomaterials. Characterization. Surface sensitivity

Auger Electron Spectroscopy (AES)

Secondary Ion Mass Spectrometry (SIMS) for Surface Analysis

CEE 772 Lecture #27 12/10/2014. CEE 772: Instrumental Methods in Environmental Analysis

CEE 772: Instrumental Methods in Environmental Analysis

Secondary Ion Mass Spectrometry (SIMS) for Surface Analysis

Courtesy of ESS and TheRGA web pages part of a series of application and theory notes for public use which are provided free of charge by ESS.

Lecture 8 Chemical/Electronic Structure of Glass

Lecture 7 Chemical/Electronic Structure of Glass

SIMS XVIII SIMS Course Depth Profiling

Mass Analyzers. Principles of the three most common types magnetic sector, quadrupole and time of flight - will be discussed herein.

Probing Matter: Diffraction, Spectroscopy and Photoemission

Ionization Techniques Part IV

An Introduction to Diffraction and Scattering. School of Chemistry The University of Sydney

An introduction to X- ray photoelectron spectroscopy

Surface analysis techniques

Harris: Quantitative Chemical Analysis, Eight Edition

Atomic Physics. Chapter 6 X ray. Jinniu Hu 24/12/ /20/13

1 Introduction COPYRIGHTED MATERIAL. 1.1 HowdoweDefinetheSurface?

EEE4106Z Radiation Interactions & Detection

Characterization of Secondary Emission Materials for Micro-Channel Plates. S. Jokela, I. Veryovkin, A. Zinovev

Introduction to GC/MS

raw materials C V Mn Mg S Al Ca Ti Cr Si G H Nb Na Zn Ni K Co A B C D E F

Plasma Deposition (Overview) Lecture 1

X-Ray Photoelectron Spectroscopy (XPS)

Applications of XPS, AES, and TOF-SIMS

Emphasis on what happens to emitted particle (if no nuclear reaction and MEDIUM (i.e., atomic effects)

Electron probe microanalysis - Electron microprobe analysis EPMA (EMPA) What s EPMA all about? What can you learn?

Photoemission Spectroscopy

TECHNIC A L WORK ING GROUP ITWG GUIDELINE ON SECONDARY ION MASS SPECTROMETRY (SIMS)

Lecture 10. Transition probabilities and photoelectric cross sections

Transcription:

1 Lecture 11 Surface Characterization of Biomaterials in Vacuum The structure and chemistry of a biomaterial surface greatly dictates the degree of biocompatibility of an implant. Surface characterization is thus a central aspect of biomaterials research. Surface chemistry can be investigated directly using high vacuum methods: Electron spectroscopy for Chemical Analysis (ESCA)/X-ray Photoelectron Spectroscopy (XPS) Auger Electron Spectroscopy (AES) Secondary Ion Mass Spectroscopy (SIMS) 1. XPS/ESCA Theoretical Basis: Secondary electrons ejected by x-ray bombardment from the sample near surface (0.5-10 nm) with characteristic energies Analysis of the photoelectron energies yields a quantitative measure of the surface composition

Electron energy analyzer (variable retardation voltage) 2 X-ray source (Ε = hν) Lens e θ P 10-10 Torr Detector e e E kin E vac E F Photoelectron binding energy is characteristic of the element and bonding environment E B L III L II L I Chemical analysis! K Binding energy = incident x-ray energy photoelectron kinetic energy E B = hν - E kin

3 Quantitative Elemental Analysis Low-resolution spectrum Intensity O 1s C 1s N 1s 500 300 Binding energy (ev) Area under peak I i number of electrons ejected (& atoms present) Only electrons in the near surface region escape without losing energy by inelastic collision Sensitivity: depends on element. Elements present in concentrations >0.1 atom% are generally detectable (H & He undetected) Quantification of atomic fraction C i (of elements detected) C i = I i / S i I j / S j j sum over detected elements S i is the sensitivity factor: - f(instrument & atomic parameters) - can be calculated

4 Intensity C 1s High-resolution spectrum PMMA 290 285 Binding energy (ev) Ratio of peak areas gives a ratio of photoelectrons ejected from atoms in a particular bonding configuration (S i = constant) 5 carbons in total Ex. PMMA H CH 3 H CH 3 C C 3 C C (a) Lowest E B C 1s H C=O H C E B 285.0 ev O CH 3 1 O CH 3 (b) Intermediate E B C 1s E B 286.8 ev 1 C=O O (c) Highest E B C 1s E B 289.0 ev Why does core electron E B vary with valence shell configuration?

5 Electronegative oxygen robs valence electrons from carbon (electron density higher toward O atoms) Carbon core electrons held tighter to the + nucleus (less screening of + charge) Slight shift to higher C binding energy 1s Similarly, different oxidation states of metals can be distinguished. Ex. Fe FeO Fe 3 O 4 Fe 2 O 3 Fe 2p binding energy XPS signal comes from first ~10 nm of sample surface. What if the sample has a concentration gradient within this depth? Surface-segregating species Adsorbed species 10nm Multivalent oxide layer

6 Depth-Resolved ESCA/XPS The probability of a photoelectron escaping the sample without undergoing inelastic collision is inversely related to its depth t within the sample: t Pt () ~ exp λ e where λ e (typically ~ 5-30 Å) is the electron inelastic mean-free path, which depends on the electron kinetic energy and the material. (Physically, λ e = avg. distance traveled between inelastic collisions.) For t = 3 λ e P(t) = 0.05 95% of signal from t 3 λ e e θ =90 By varying the take-off angle (θ), the sampling depth can be decreased, increasing surface sensitivity e θ e θ t = 3λ e sin θ

7 C i 5 90 θ (degrees) Variation of composition with angle may indicate: - Preferential orientation at surface - Surface segregation - Adsorbed species (e.g., hydrocarbons) - etc. Quantifying composition as a function of depth The area under the jth peak of element i is the integral of attenuated contributions from all sample depths z: z I ij = C inst T ( E kin )L ij σ ij n (z)exp i dz λ e sinθ C inst = instrument constant T(E kin ) = analyzer transmission function Lij = angular asymmetry factor for orbital j of element i σij is the photoionization cross-section n i (z) is the atomic concen. of i at a depth z (atoms/vol)

8 For a semi-infinite sample of homogeneous composition: z I ij = I ij,o n i λe sinθ exp λ sinθ e 0 = I ij, o n i λ e sinθ = S i n i = I ij, where I ij o = C inst T ( E kin )L ij σ ij, Relative concentrations of elements (or atoms with a particular bond configuration) are obtained from ratios of I ij (peak area): L ij depends on electronic shell (ex. 1s or 2p); obtained from tables; cancels if taking a peak ratio from same orbitals, ex. I C1s / I O1s C inst and T(E kin ) are known for most instruments; cancel if taking a peak ratio with E kin constant, ex. I C1s (C C O) / I C1s (C CH 3 ) σ ij obtained from tables; cancels if taking a peak ratio from same atom in different bonding config., ex. I C1s (C C O ) / I C1s (C CH 3 ) λ e values can be measured or estimated from empirically-derived expressions 1 2 0.5 e kin For polymers: λ (nm) = ρ (49E + 0.11E kin ) For elements: λ (nm) = a e 538E + 0.41(E kin kin a ) 2 0.5 For inorganic compounds (ex. oxides): λ (nm) = a 2170E + 0.72 (E kin a ) 2 0.5 e kin

9 where: a = monolayer thickness (nm) MW 1/ 3 a = 10 7 ρ N Av MW = molar mass (g/mol) ρ = density (g/cm 3 ) E kin = electron kinetic energy (ev) Ex: λ e for C 1s using a Mg K α x-ray source: E B = hν - E kin For Mg K α x-rays: hν = 1254 ev For C 1s : E B = 284 ev E kin = 970 ev 1 2 0.5 λ (nm) = ρ ( 49E + 0.11E kin ) Assume ρ = 1.1 g/cm 3 e kin λ e = 3.1 nm

10 For non-uniform samples, signal intensity must be deconvoluted to obtain a quantitative analysis of concentration vs. depth. Case Example: a sample comprising two layers (layer 2 semi-infinite): 1 d 2 I ij = C ins T ( z kin )L ij σ ij n i (z)exp dz λ e sinθ (1) I ij = I ij,o n i,1 λe sinθ exp z λ e sinθ d (2) I ij, o n i,2 λe sinθ exp z λ e sinθ 0 d I ij = I (1) ij, on i,1 λ e,1 sinθ 1 exp d ij,o i,2 e,2 λ λ e,1 sinθ + I (2) n λ sinθ exp d e,1 sinθ (1) d (2) d or I = I ij ij, 1 exp λ e,1 sinθ + I exp ij, λ e,1 sinθ Why λ e,1? Electrons originating in semi-infinite layer 2 are attenuated by overlayer 1 () i where I ij, = measured peak area from a uniform, semi-infinite sample of material i.

11 Methods to solve for d Scenario 1: n i,2 =0 (ex., C 1s peak of a polymer adsorbed on an oxide): d 1 (1) I ij = I ij, 1 exp λ sinθ e,1 2 d (1) measure a bulk sample of the upper layer material I ij, I ij d ln 1 (1) I = ij, λ e,1 sinθ obtain slope of ln 1 Iij (1) vs. cscθ d/λ e,1 I ij, for a fixed θ: I ij d = λ e,1 sinθ ln 1 (1) I ij, substitute a calculated or measured λ e,1 to obtain d

12 Scenario 2: n i,1 =0 (ex., M 2p peak from underlying metal oxide (MO x ): (2) d 1 I ij = I ij, exp λ e,1 sinθ 2 d measure I ij for same peak at different take-off angles (θ 1, θ 2 ) (2) d Iij, o n i,2 λ e,2 sinθ 1 exp I ij,θ λ e,1 sinθ 1 1 = I ij,θ d 2 (2) Iij, o n i,2 λ e,2 sinθ 2 exp λ e,1 sinθ 2 I ij,θ d 1 = sinθ 1 exp (cscθ cscθ 2 ) I ij,θ sinθ 2 λ 1 2 e,1 1 I ij,θ sinθ 2 1 d = λ (cscθ cscθ ) ln I ij,θ sinθ e,1 2 1 2 1 substitute a calculated or measured λ e,1 to obtain d

13 Scenario 3: element present in distinguishable bonding configurations in layers 1 & 2 (ex., O 1s peak from -C-O-C- and MO x ): (1) I ij = I ij, 1 exp d (2) d λ e,1 sinθ + I ij, exp λ sinθ e,1 (2) d I n i,2 λ e,2 sinθ exp (2) ij, o 1 d I ij λ e,1 sinθ = (1) I ij d (1) 2 I n i,1 λ e,1 sinθ 1 exp λ e,1 sinθ ij, o (1) (2) measure element peak areas I ij and I ij (1) (2) for same element and orbital: I ij, o = I ij, o n i,2 C i,2 = for same element and orbital: ni,1 C i,1 d C (2) i,2 λ e,2 exp I ij λ e,1 sinθ = (1) I ij d C i,1 λ e,1 1 exp λ e,1 sinθ solve numerically for d, substituting calculated values of λ e,2 & λ e,1

14 if d << λ e,1 sinθ : ax exp( ax) 1 ax + ( 2 ) 2... d C (2) i,2 λ e,2 I 1 λ sinθ ij e,1 = (1) I ij d C i,1 λ e,1 λ sinθ e,1 (2) 1 ij (1) ij d = λ e,1 sinθ I C i,1λ e,1 +1 I C i,2 λ e,2

15 Ion Etching Depth profiling for depths > 10 nm (100 nm 1 µm) Ar +, Xe + or He + ions etch surface layer XPS spectra re-recorded Signal Intensity P 2p Ti 2p Hydroxyapatite (Ca 10 (PO 4 ) 6 (OH) 2 ) coating on Ti implant sputter time Calibration of sputter rates: time depth

16 2. Auger Electron Spectroscopy Theoretical Basis: Auger electrons created by electron bombardment of sample are ejected from near surface (1-3 nm) with characteristic energies Analysis of the Auger electron energies yields a quantitative measure of the surface composition ejected core electron E K E M = E N + E kin E kin = E K E M E N Exyz (E CVV or E CCV ) ejection from x shell electronic transition y x release of z-level Auger with E kin E vac Auger electron N M L III L II LI K INFORMATION: E xyz is characteristic to element & bonding AES vs. XPS Advantages - focused e-beam gives high x,y spatial resolution (5 nm vs. ~1 µm) Disadvantages - charging effects on nonconductive samples (unsuitable) - larger bonding effects - degradation of organics

17 3. Secondary Ion Mass Spectroscopy (SIMS) Experimental Approach: Energetic ions (1-15 kev) bombard sample surface Secondary ions/charged fragments are ejected from surface and detected ion gun energy filter mass filter ion detector sample Ion Guns types Nobel gas: Ar +, Xe + liquid metal ion: Ga +, Cs + (~1nm beam size x,y mapping) pulsed LMI (time-of-flight source) low currents used: 10-8 -10-11 A/cm 2 Ion beam current (A/cm 2 ) 1 Amp = 6.2 10 18 ions/sec 10-5 16 10-7 1600 10-9 1.6 10 5 10-11 1.6 10 7 surface monolayer lifetime (s)

18 Detectors sensitive to the ratio of mass/charge (m/z) resolution defined as m/ m (larger = better!) Quadrupole (RF-DC): resol. m/ m ~ 2000; detects m < 10 3 amu Oscillating RF field destabilizes ions: only ions with specified m/z can pass Magnetic sector: m > 10 4 amu; m/ m ~ 10,000 R Applied B-field results in circular trajectory (radius=r) of charged particles 1 2mV 1/ 2 R = B z accelerating voltage Time-of-flight (TOF): m ~ 10 3-10 4 amu; m/ m ~ 10,000 m 1/ 2 time = 2zV L flight tube length Pulsed primary beam generates secondary ion pulses detected at distance L

19 Modes of Operation Static SIMS low energy ions: 1-2 kev; penetration ~5-10 Å low ion doses: < 10 13 ions/cm 2 sec 1 cm 2 10 15 atoms Information: 95% of signal from 1 st atomic layer! surface composition surface bonding chemistry (sputtered fragments) Example: SIMS of silica powder Negative spectrum Intensity (arb. units) O OH SiO 2 SiO 3 H SiO 3 SiO 2 H (SiO 2 ) 2 OH 16 17 60 61 76 77 137 m/z OH HO OH Si Which structure is suggested from SIMS? Si O O O O O

20 Positive spectrum CH 3 + Intensity (arb. units) O + OH + H 2 O + SIMS suggests presence of adsorbed methanol 15 16 17 18 m/z SIMS vs. XPS/AES Advantages Disadvantages - high sensitivity (ppm ppb) - not quantitative - more sensitive to top surface - applicable to any solid Dynamic SIMS 1-20 kev primary beam rastered beam sputters a crater in sample secondary ions gives depth profiling

primary beam path 21 10-100 µm 10-100 µm N ion-implanted Ti (for wear resistance) Signal Intensity N sputter time References J.C. Vickerman, Ed., Surface Analysis The Principle Techniques, J. Wiley & Sons: New York, NY, 1997, Chapters 3, 4 & 5. D. Briggs, Surface Analysis of Polymers by XPS and Static SIMS, Cambridge University Press: United Kingdom, 1998. C.-M. Chan, Polymer Surface Modification and Characterization, Hanson: Cincinnati, OH: 1994, Chapters 3 & 4. P.J. Cumpson, Angle-resolved XPS and AES: depth-resolution limits and a general comparison of properties of depth-profile reconstruction methods, J. Electron Spectroscopy 73 (1995) 25 52. B. Elsener and A. Rossi, XPS investigation of passive films on amorphous Fe-Cr alloys, Electrochimica Acta 37 (1992) 2269-2276. A.M. Belu, D.J. Graham and D.G. Castner, Time-of-flight secondary ion mass spectroscopy: techniques and applications for the characterization of biomaterial surfaces, Biomaterials 24, (2003) 3635-3653.